{"version":"1.0","provider_name":"","provider_url":"https:\/\/www.accscicn.com\/en","title":"\u5fae\u7eb3\u52a0\u5de5 | \u7535\u5b50\u675f\u5149\u523b\u672f\u52a0\u5de5\u539f\u7406","type":"rich","width":600,"height":338,"html":"<blockquote class=\"wp-embedded-content\" data-secret=\"p9AEIN8pCs\"><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofab_ebl\/\">Micro and Nano Processing | Electron Beam Lithography Processing Principle<\/a><\/blockquote><iframe sandbox=\"allow-scripts\" security=\"restricted\" src=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofab_ebl\/embed\/#?secret=p9AEIN8pCs\" width=\"600\" height=\"338\" title=\"&#8220;\u5fae\u7eb3\u52a0\u5de5 |  \u7535\u5b50\u675f\u5149\u523b\u672f\u52a0\u5de5\u539f\u7406&#8221; &#8212; \" data-secret=\"p9AEIN8pCs\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\" class=\"wp-embedded-content\"><\/iframe><script>\n\/*! This file is auto-generated *\/\n!function(d,l){\"use strict\";l.querySelector&&d.addEventListener&&\"undefined\"!=typeof URL&&(d.wp=d.wp||{},d.wp.receiveEmbedMessage||(d.wp.receiveEmbedMessage=function(e){var t=e.data;if((t||t.secret||t.message||t.value)&&!\/[^a-zA-Z0-9]\/.test(t.secret)){for(var s,r,n,a=l.querySelectorAll('iframe[data-secret=\"'+t.secret+'\"]'),o=l.querySelectorAll('blockquote[data-secret=\"'+t.secret+'\"]'),c=new RegExp(\"^https?:$\",\"i\"),i=0;i<o.length;i++)o[i].style.display=\"none\";for(i=0;i<a.length;i++)s=a[i],e.source===s.contentWindow&&(s.removeAttribute(\"style\"),\"height\"===t.message?(1e3<(r=parseInt(t.value,10))?r=1e3:~~r<200&&(r=200),s.height=r):\"link\"===t.message&&(r=new URL(s.getAttribute(\"src\")),n=new URL(t.value),c.test(n.protocol))&&n.host===r.host&&l.activeElement===s&&(d.top.location.href=t.value))}},d.addEventListener(\"message\",d.wp.receiveEmbedMessage,!1),l.addEventListener(\"DOMContentLoaded\",function(){for(var e,t,s=l.querySelectorAll(\"iframe.wp-embedded-content\"),r=0;r<s.length;r++)(t=(e=s[r]).getAttribute(\"data-secret\"))||(t=Math.random().toString(36).substring(2,12),e.src+=\"#?secret=\"+t,e.setAttribute(\"data-secret\",t)),e.contentWindow.postMessage({message:\"ready\",secret:t},\"*\")},!1)))}(window,document);\n\/\/# sourceURL=https:\/\/www.accscicn.com\/wp-includes\/js\/wp-embed.min.js\n<\/script>","thumbnail_url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/07\/csm_Mastering_Headerbild_retuschiert_2_0c22561835.jpg","thumbnail_width":825,"thumbnail_height":464,"description":"\u7535\u5b50\u675f\u5149\u523b\u7cfb\u7edf\u5e7f\u6cdb\u7528\u4e8e\u5236\u9020\u5149\u523b\u63a9\u6a21\u677f\u3001\u5148\u8fdb\u7684\u539f\u7406\u6837\u673a\u548c\u7eb3\u7c73\u7ea7\u7684\u79d1\u5b66\u7814\u7a76\u53ca\u5f00\u53d1\u3002\u6700\u5148\u8fdb\u7684\u7535\u5b50\u675f\u5149\u523b\u7cfb\u7edf\u53ef\u4ee5\u4ee5\u8d85\u9ad8\u5206\u8fa8\u7387\u5b8c\u6210\u6781\u9650\u5c3a\u5bf8\u5c0f\u4e8e10nm\u7684\u56fe\u5f62\u8f6c\u5370\uff08\u901a\u8fc7\u91d1\u5c5e\u5265\u79bb\u3001\u523b\u8680\u6216\u52a0\u8272\u6280\u672f\uff09\u3002\u6b64\u5916\uff0c\u53ef\u4ee5\u5c06\u8fd9\u7c7b\u56fe\u5f62\u52a0\u5de5\u5728\u5404\u79cd\u6750\u6599\u4e0a\uff0c\u5982Si\u548cGaAs\u4e00\u7c7b\u7684\u534a\u5bfc\u4f53\u3001\u7194\u51dd\u77f3\u82f1\u3001\u975e\u6676\u91d1\u521a\u77f3\u3001SiO2\u548cSiN\u4e00\u7c7b\u7edd\u7f18\u4f53\u53ca\u5404\u79cd\u91d1\u5c5e\u3002"}