{"id":26802,"date":"2022-06-07T14:44:23","date_gmt":"2022-06-07T06:44:23","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26802"},"modified":"2022-10-20T17:14:57","modified_gmt":"2022-10-20T09:14:57","slug":"nanofabrication_cvd","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_cvd\/","title":{"rendered":"Micro and Nano Processing | Thin Film Preparation - CVD"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26802\" class=\"elementor elementor-26802\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2a95efd5 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"2a95efd5\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2da93ea9\" data-id=\"2da93ea9\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-64d6811 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"64d6811\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-32db308d\" data-id=\"32db308d\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4dcc14ce elementor-widget elementor-widget-heading\" data-id=\"4dcc14ce\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">Thin Film Preparation - Deposition<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4736103 elementor-widget elementor-widget-text-editor\" data-id=\"4736103\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<section style=\"font-size: 14px;\"><p><span style=\"color: #051c2c; font-size: 16px; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Chemical methods can create thin films with excellent uniformity, coverage and stoichiometric ratios, but they require different gases and sometimes different chambers for each film type. The most commonly recommended chemical method is chemical vapor deposition (CVD).<\/span><\/p><p><span style=\"color: #051c2c; font-size: 16px; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">In this technique, a gas precursor is introduced into the chamber and the substrate is heated to a temperature high enough to induce a reaction and create the film of interest. Different types of CVD are available, such as low pressure CVD (LPCVD), atmospheric CVD, isotropic enhanced CVD (PECVD), and primary layer deposition (ALD).<\/span><\/p><p><span style=\"color: #051c2c; font-size: 16px; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">In CVD, the pressure must be low enough and the substrate temperature must be high enough that the reaction occurs only on the substrate surface and not in the gas phase. The gas phase reaction causes particles to form and be deposited on the surface.<\/span><\/p><p>\u00a0<\/p><\/section><section><section style=\"display: flex; flex-flow: row nowrap;\"><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">Plasma Enhanced CVD<\/span><\/strong><\/span><\/p><\/section><\/section><\/section><\/section><section style=\"margin: 15px 0%;\"><section style=\"color: #051c2c; line-height: 1.8;\"><p style=\"font-size: 14px;\"><span style=\"font-size: 16px; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">PECVD is a variation of LPCVD in which plasma is used to reduce the substrate temperature to below 300 degrees Celsius. This is required to meet the needs of the complementary MOS (CMOS) manufacturing process, which requires high quality dielectrics as insulation for the layers between the metal interconnect traces, but LPCVD temperatures are too high for ICs in their later stages of fabrication.<\/span><\/p><p style=\"font-size: 14px;\"><span style=\"font-size: 16px; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">In the PECVD reactor, the isotropic substrate is very close to the substrate and usually at very low discharge power levels, no gas phase reactions occur. The chemical composition is very similar to LPCVD except for the lower substrate temperature.<\/span><\/p><p>\u00a0<\/p><\/section><\/section><section><section style=\"display: flex; flex-flow: row nowrap;\"><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">Low pressure CVD<\/span><\/strong><\/span><\/p><\/section><\/section><\/section><\/section><section style=\"margin: 15px 0%;\"><section style=\"color: #051c2c; line-height: 1.8;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">In LPCVD, the substrate is placed in a quartz tube and heated while the precursor gas flows to maintain a constant pressure. In this case, the deposition rate is determined primarily by the pressure and temperature, rather than by the gas flow characteristics. Because it is relatively easy to maintain pressure and temperature, LPCVD films tend to be very homogeneous and very conformal. LPCVD is used to make thin films of silicon nitride, silicon dioxide, silicon carbide, and several germanium compounds. The required substrate temperature is determined by the reaction chemistry and is typically higher than 700 C.<\/span><\/p><\/section><\/section>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1be1a0a elementor-widget elementor-widget-text-editor\" data-id=\"1be1a0a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<b><a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/\" target=\"_blank\" rel=\"noopener\">MEMS device \/ micro and nanostructure processing design services<\/a>,<\/b> Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0a090e0 elementor-widget elementor-widget-wpforms\" data-id=\"0a090e0\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/en\/wp-json\/wp\/v2\/posts\/26802\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/en\/wp-json\/wp\/v2\/posts\/26802\"><noscript class=\"wpforms-error-noscript\">Please enable JavaScript in your browser to complete this form.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">Email<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">Confirm Email<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">Micro and Nano Processing Requirements<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">Submit<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"Loading\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"en\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4e7fd12e\" data-id=\"4e7fd12e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6a15d4a3 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"6a15d4a3\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7e51c69b elementor-widget elementor-widget-heading\" data-id=\"7e51c69b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Products<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4ffd65cd elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"4ffd65cd\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" >\n\t\t\t\tHigh-precision two-photon polymerization 3D printing system\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" aria-label=\"Read more about High-Precision Two-photon Polymerization 3D Printing System\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" >\n\t\t\t\tMicrolens arrays for micro and nano optics\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" aria-label=\"Read more about Microlens arrays for micro and nano optics\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" >\n\t\t\t\tMicro-Nano Processing\u4e28Nano Imprinting (NIL) Subcontracting\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" aria-label=\"Read more about Nanofabrication\u4e28Nanoimprinting (NIL) Subcontracting\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u8584\u819c\u5236\u5907-\u6c89\u79ef \u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26802","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7 -<\/title>\n<meta name=\"description\" content=\"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_cvd\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7\" \/>\n<meta property=\"og:description\" content=\"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_cvd\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-07T06:44:23+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-10-20T09:14:57+00:00\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7\",\"datePublished\":\"2022-06-07T06:44:23+00:00\",\"dateModified\":\"2022-10-20T09:14:57+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/\"},\"wordCount\":31,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7 -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-07T06:44:23+00:00\",\"dateModified\":\"2022-10-20T09:14:57+00:00\",\"description\":\"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/en\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7 -","description":"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_cvd\/","og_locale":"en_US","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7","og_description":"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002","og_url":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_cvd\/","article_published_time":"2022-06-07T06:44:23+00:00","article_modified_time":"2022-10-20T09:14:57+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Written by":"admin","Est. reading time":"2 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7","datePublished":"2022-06-07T06:44:23+00:00","dateModified":"2022-10-20T09:14:57+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/"},"wordCount":31,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"en-US"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/","name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7 -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-07T06:44:23+00:00","dateModified":"2022-10-20T09:14:57+00:00","description":"\u5316\u5b66\u65b9\u6cd5\u53ef\u4ee5\u2f63\u4ea7\u51fa\u5177\u6709\u51fa\u8272\u5747\u5300\u6027\u3001\u8986\u76d6\u7387\u548c\u5316\u5b66\u8ba1\u91cf\u6bd4\u7684\u8584\u819c\uff0c\u4f46\u5b83\u4eec\u9700\u8981\u4e0d\u540c\u7684\u6c14\u4f53\uff0c\u6709\u65f6\u6bcf\u79cd\u8584\u819c\u7c7b\u578b\u9700\u8981\u4e0d\u540c\u7684\u8154\u5ba4\u3002\u6700\u5e38\u2ec5\u7684\u5316\u5b66\u65b9\u6cd5\u662f\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD)\u3002\u5728\u8be5\u6280\u672f\u4e2d\uff0c\u5c06\u2f53\u4f53\u524d\u4f53\u5f15\u2f0a\u8154\u5ba4\u5e76\u5c06\u886c\u5e95\u52a0\u70ed\u5230\u8db3\u591f\u9ad8\u7684\u6e29\u5ea6\u4ee5\u5f15\u8d77\u53cd\u5e94\u5e76\u4ea7\u2f63\u611f\u5174\u8da3\u7684\u819c\u3002\u6709\u4e0d\u540c\u7c7b\u578b\u7684CVD\uff0c\u4f8b\u5982\u4f4e\u538bCVD\uff08LPCVD\uff09\u3001\u5e38\u538bCVD\u3001\u7b49\u79bb\u2f26\u4f53\u589e\u5f3aCVD\uff08PECVD\uff09\u548c\u539f\u2f26\u5c42\u6c89\u79ef\uff08ALD\uff09\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/nanofabrication_cvd\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u5236\u5907-CVD\u7bc7"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/en\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26802","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/comments?post=26802"}],"version-history":[{"count":15,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26802\/revisions"}],"predecessor-version":[{"id":28291,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26802\/revisions\/28291"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/media?parent=26802"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/categories?post=26802"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/tags?post=26802"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}