{"id":26865,"date":"2022-06-07T17:23:36","date_gmt":"2022-06-07T09:23:36","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26865"},"modified":"2022-11-17T14:31:42","modified_gmt":"2022-11-17T06:31:42","slug":"thin_film_deposition","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/","title":{"rendered":"Micro and Nano Processing | Introduction to Thin Film Deposition"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26865\" class=\"elementor elementor-26865\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1dc53e2c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"1dc53e2c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-77faae72\" data-id=\"77faae72\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-277d3295 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"277d3295\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-161c1dbd\" data-id=\"161c1dbd\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a989da8 elementor-widget elementor-widget-heading\" data-id=\"a989da8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Micro and Nano Processing | Introduction to Thin Film Deposition Process<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b13bdf1 elementor-toc--minimized-on-tablet elementor-widget elementor-widget-table-of-contents\" data-id=\"b13bdf1\" data-element_type=\"widget\" data-settings=\"{&quot;headings_by_tags&quot;:[&quot;h4&quot;],&quot;exclude_headings_by_selector&quot;:[],&quot;marker_view&quot;:&quot;numbers&quot;,&quot;minimize_box&quot;:&quot;yes&quot;,&quot;minimized_on&quot;:&quot;tablet&quot;,&quot;hierarchical_view&quot;:&quot;yes&quot;,&quot;min_height&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"table-of-contents.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor-pro - v3.21.0 - 30-04-2024 *\/\n.elementor-widget-table-of-contents .elementor-toc__header-title{color:var(--header-color)}.elementor-widget-table-of-contents.elementor-toc--collapsed .elementor-toc__toggle-button--collapse,.elementor-widget-table-of-contents:not(.elementor-toc--collapsed) .elementor-toc__toggle-button--expand{display:none}.elementor-widget-table-of-contents .elementor-widget-container{min-height:var(--box-min-height);border:var(--box-border-width,1px) solid var(--box-border-color,#9da5ae);border-radius:var(--box-border-radius,3px);background-color:var(--box-background-color);transition:min-height .4s;overflow:hidden}.elementor-toc__header{display:flex;align-items:center;justify-content:space-between;padding:var(--box-padding,20px);background-color:var(--header-background-color);border-bottom:var(--separator-width,1px) solid var(--box-border-color,#9da5ae)}.elementor-toc__header-title{font-size:18px;margin:0;color:var(--header-color);flex-grow:1}.elementor-toc__toggle-button{cursor:pointer;display:inline-flex}.elementor-toc__toggle-button i{color:var(--toggle-button-color)}.elementor-toc__toggle-button svg{height:1em;width:1em;fill:var(--toggle-button-color)}.elementor-toc__spinner-container{text-align:center}.elementor-toc__spinner{font-size:2em}.elementor-toc__spinner.e-font-icon-svg{height:1em;width:1em}.elementor-toc__body{padding:var(--box-padding,20px);max-height:var(--toc-body-max-height);overflow-y:auto}.elementor-toc__body::-webkit-scrollbar{width:7px}.elementor-toc__body::-webkit-scrollbar-thumb{background-color:#babfc5;border-radius:10px}.elementor-toc__list-wrapper{list-style:none;padding:0}.elementor-toc__list-item{margin-bottom:.5em}.elementor-toc__list-item.elementor-item-active{font-weight:700}.elementor-toc__list-item .elementor-toc__list-wrapper{margin-top:.5em;margin-inline-start:var(--nested-list-indent,1em)}.elementor-toc__list-item-text{transition-duration:var(--item-text-transition-duration)}.elementor-toc__list-item-text:hover{color:var(--item-text-hover-color);-webkit-text-decoration:var(--item-text-hover-decoration);text-decoration:var(--item-text-hover-decoration)}.elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}.elementor-toc__list-item-text-wrapper{display:flex;align-items:center}.elementor-toc__list-item-text-wrapper:before,.elementor-toc__list-item-text-wrapper i{margin-inline-end:8px;color:var(--marker-color)}.elementor-toc__list-item-text-wrapper svg{margin-inline-end:8px;fill:var(--marker-color);height:var(--marker-size,.5em);width:var(--marker-size,.5em)}.elementor-toc__list-item-text-wrapper i{font-size:var(--marker-size,.5em)}.elementor-toc__list-item-text-wrapper:before{font-size:var(--marker-size,1em)}.elementor-toc--content-ellipsis .elementor-toc__list-item-text{white-space:nowrap;overflow:hidden;text-overflow:ellipsis}.elementor-toc__list-items--collapsible>.elementor-toc__list-wrapper>.elementor-toc__list-item>.elementor-toc__list-wrapper{display:none}.elementor-toc__heading-anchor{position:absolute}.elementor-toc__body .elementor-toc__list-item-text{color:var(--item-text-color);-webkit-text-decoration:var(--item-text-decoration);text-decoration:var(--item-text-decoration);transition-duration:var(--item-text-transition-duration)}.elementor-toc__body .elementor-toc__list-item-text:hover{color:var(--item-text-hover-color);-webkit-text-decoration:var(--item-text-hover-decoration);text-decoration:var(--item-text-hover-decoration)}.elementor-toc__body .elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}ol.elementor-toc__list-wrapper{counter-reset:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item{counter-increment:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item-text-wrapper:before{content:counters(item,\".\") \". \"}<\/style>\t\t<div class=\"elementor-toc__header\">\n\t\t\t<div class=\"elementor-toc__header-title\">\n\t\t\t\tCatalog\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--expand\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__b13bdf1\" aria-expanded=\"true\" aria-label=\"Open table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-down\"><\/i><\/div>\n\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--collapse\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__b13bdf1\" aria-expanded=\"true\" aria-label=\"Close table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-up\"><\/i><\/div>\n\t\t\t\t\t<\/div>\n\t\t<div id=\"elementor-toc__b13bdf1\" class=\"elementor-toc__body\">\n\t\t\t<div class=\"elementor-toc__spinner-container\">\n\t\t\t\t<i class=\"elementor-toc__spinner eicon-animation-spin eicon-loading\" aria-hidden=\"true\"><\/i>\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-aa715c1 elementor-widget elementor-widget-spacer\" data-id=\"aa715c1\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2eede1d elementor-widget elementor-widget-heading\" data-id=\"2eede1d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">What is thin film deposition (coating)?<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6438265b elementor-widget elementor-widget-text-editor\" data-id=\"6438265b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div><b>Thin film deposition (<span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Plating<\/span><\/b><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>) is the process of forming and depositing a thin film coating on the substrate material.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>Deposition of thin films of various materials on substrates is one of the important means of micro and nano processing.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Films have many different properties that can be used to modify or improve certain elements of a substrate's performance. For example, transparent, durable and scratch resistant; increase or decrease electrical conductivity or signal transmission, etc.<\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Thin film deposition thicknesses range from the nanometer to the micron scale.<\/span><\/div><div><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/div><div>Thin film deposition is an important manufacturing step in the production of many optoelectronic, solid-state and medical devices and products, including consumer electronics, semiconductor lasers, fiber lasers, LED displays, filters, compound semiconductors, precision optics, microscope and microanalysis sample slides and medical implants.<\/div><div>\u00a0<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6f63dc elementor-widget elementor-widget-heading\" data-id=\"a6f63dc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Comparison of thin film deposition process types and advantages and disadvantages<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f62d0 elementor-widget elementor-widget-text-editor\" data-id=\"35f62d0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div>The most common thin film deposition processes used in micro and nano processing are<strong>Physical Vapor Deposition (PVD)<\/strong>with<strong>Chemical Vapor Deposition (CVD)<\/strong>.<\/div><div>\u00a0<\/div><\/div><\/div><p><b>Physical vapor deposition (PVD) is a method of growing thin films on a substrate by heating the source material under vacuum to allow atoms or molecules to escape from the surface of the source material.<\/b>The main methods of physical vapor deposition are vacuum electron beam or resistance vapor deposition, sputtering coating, arc plasma coating, ion coating, and molecular beam epitaxy, etc. The electron beam evaporation system and sputtering system of AEMD are both physical vapor deposition.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Things<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Physical Vapor Deposition (PVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 ); font-weight: bold;\">\u00a0<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">can be divided into two main categories, thermal evaporation deposition and plasma sputtering deposition.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Thermal evaporation deposition:<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Resistance evaporation deposition<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">, ,<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Electron beam evaporation deposition<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">;.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Plasma sputtering deposition<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">: The<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">DC sputtering, RF sputtering, magnetron sputtering, ionized PVD<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">.<\/span><\/p><p><span style=\"font-size: 1rem; background-color: var( --e-global-color-astglobalcolor5 );\">\u00a0<\/span><\/p><p><b>Chemical Vapor Deposition (CVD) is a process that causes a gaseous substance to react chemically on the surface of a solid and deposit on that surface to form a stable solid film.<\/b>There are four main important stages: 1) diffusion of the reaction gas to the substrate surface; 2) adsorption of the reaction gas to the substrate surface; 3) detachment of the gas phase by-products generated on the substrate surface from the surface; and 4) formation of a cladding layer from the reactants left behind. The use of techniques such as plasma and laser assistance can significantly facilitate the chemical reactions so that deposition can take place at lower temperatures.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Chemical Vapor Deposition (CVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Including low pressure type (LPCVD), atmospheric pressure type (APCVD), atomic layer deposition (ALD), plasma enhanced type (PECVD) and metal organic compound type (MOCVD), etc.<\/span><\/p><p><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/p><p><b>Atomic Layer Deposition (ALD)<\/b>It is a type of chemical vapor deposition (CVD) method, which is a method that allows a substance to be plated on the surface of a substrate in the form of a single atomic film layer by layer. Atomic layer deposition has similarities with ordinary chemical deposition. However, during atomic layer deposition, the chemical reaction of a new layer of atomic film is directly associated with the previous layer, allowing this method to deposit only one layer of atoms per reaction.<\/p><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\u00a0<\/b><\/span><\/h6><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>Comparison of the advantages and disadvantages of various thin film deposition methods<\/b><\/span><\/h6><table><thead><tr><th><strong>Craftsmanship<\/strong><\/th><th><strong>Atomic layer deposition<br \/>(ALD)<\/strong><\/th><th><strong>Physical Vapor Deposition<br \/>(PVD)<\/strong><\/th><th><strong>Chemical Vapor Deposition<br \/>(CVD)<\/strong><\/th><th><strong>Low Pressure Chemical Vapor Deposition<br \/>(LPCVD furnace tube)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>Deposition principle<\/td><td>Chemical surface saturation<br \/>Reaction-Deposition<\/td><td>Evaporation-Consolidation<\/td><td>Gas phase reaction - deposition<\/td><td>Low Pressure Chemical Vapor Deposition<br \/>(Stove and tube type)<\/td><\/tr><tr><td>Deposition process<\/td><td>Laminar growth<\/td><td>Nucleation growth<\/td><td>Nucleation growth<\/td><td>Nucleation growth<\/td><\/tr><tr><td>Step coverage<\/td><td>Excellent<\/td><td>General<\/td><td>Good<\/td><td>Good<\/td><\/tr><tr><td>Deposition rate<\/td><td>slow<\/td><td>Quick<\/td><td>Quick<\/td><td>slower<\/td><\/tr><tr><td>Deposition temperature<\/td><td>Low(&lt;500\u2103)<\/td><td>Low<\/td><td>High<\/td><td>Higher<\/td><\/tr><tr><td>Uniformity<\/td><td>Excellent<br \/>0.07 - 0.1nm<\/td><td>General<br \/>About 5nm<\/td><td>better<br \/>0.5 - 2nm<\/td><td><p>Better<\/p><\/td><\/tr><tr><td>Thickness control<\/td><td>Number of reaction cycles<\/td><td>Deposition time<\/td><td>Deposition time<br \/>Gas phase partial pressure<\/td><td>Deposition time<br \/>Gas ratio<\/td><\/tr><tr><td>Ingredients<\/td><td>Uniformity with few impurities<\/td><td>No impurities<\/td><td>Easy to contain impurities<\/td><td>No impurities<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7196e2d elementor-widget elementor-widget-heading\" data-id=\"7196e2d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Film types and application scenarios<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5b53a73 elementor-widget elementor-widget-text-editor\" data-id=\"5b53a73\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"font-size: 16px; font-style: normal;\" width=\"978\"><tbody><tr><td width=\"98\">Film Type<\/td><td width=\"197\">Classification<\/td><td width=\"277\">Thin film deposition materials<\/td><td width=\"405\">Applications<\/td><\/tr><tr><td rowspan=\"5\" width=\"98\">Semiconductors<\/td><td width=\"197\">Polysilicon<\/td><td width=\"277\">SiH4 (silane)<\/td><td width=\"405\">Gates of MOS, high value resistors, etc.<\/td><\/tr><tr><td rowspan=\"3\" width=\"197\">Monocrystalline silicon<\/td><td width=\"277\">SiH\u2082Cl\u2082(Dichlorosilane; DCS)<\/td><td rowspan=\"3\" width=\"405\">Single crystal epitaxial layer for power devices, etc.<\/td><\/tr><tr><td width=\"277\">SiHCl3 (trichlorosilane; TCS)<\/td><\/tr><tr><td width=\"277\">SiCl4 (Silicon chloride; Siltet)<\/td><\/tr><tr><td width=\"197\">Amorphous Silicon<\/td><td width=\"277\">SiH4 (silane)<\/td><td width=\"405\">Alpha-Si solar cell, source\/drain trench area, etc.<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">Dielectric quality<\/td><td width=\"197\">Si02 (silicon dioxide)<\/td><td width=\"277\">SiH4, O2<br \/>SiH4, N20<br \/>Si(OC2H5)4 (tetraethoxysilane), O2\/O3<\/td><td width=\"405\">Most widely used dielectric films, STI, gate oxide, sidewall, PMD, IMD, barrier, hard mask, etc.<\/td><\/tr><tr><td width=\"197\">Si3N4\/SiN (Silicon Nitride)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<br \/>C8H22N2Si [ Bis(tert-butylamino)silane ]<\/td><td width=\"405\">Etch stop layer, hard mask, passivation layer, etc.<\/td><\/tr><tr><td width=\"197\">SiON (Silicon Nitride)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<\/td><td width=\"405\">Anti-reflective layer, oxide layer, hard mask, etc.<\/td><\/tr><tr><td width=\"197\">PSG\/BPSG <br \/>(Phosphorsilicate \/ Borosilicate glass)<\/td><td width=\"277\">Silane, borane, phosphorane, etc.<\/td><td width=\"405\">PMD, passivation layer, etc.<\/td><\/tr><tr><td width=\"197\">Low- K (low dielectric) materials<\/td><td width=\"277\">Polyimide (PI), etc.<\/td><td width=\"405\">Replacement of SiO2 in PMD<\/td><\/tr><tr><td width=\"197\">High-K (high dielectric) materials<\/td><td width=\"277\">Hf, O2, SiO2, etc.<\/td><td width=\"405\">Replacement of SiO2 in the grid media layer<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">Metal<br \/>Metal compounds<\/td><td width=\"197\">W (Tungsten)<\/td><td width=\"277\">WF6 (tungsten hexafluoride), SiH4, H2<\/td><td width=\"405\">Electrical films, optical films, hard films, corrosion-resistant films, contact holes, through-holes, gates, etc.<\/td><\/tr><tr><td width=\"197\">WSi2\/TiSi2<br \/>\/CoSix\/NiSi<\/td><td width=\"277\">WF6, silane, etc.<\/td><td width=\"405\">Silicide layer on source\/drain\/gate<\/td><\/tr><tr><td width=\"197\">TiN<\/td><td width=\"277\">Ti[N(CH3)2]4 [ tetrakis(dimethylamino)titanium ]<\/td><td rowspan=\"3\" width=\"405\">Barrier layer, metal grille, etc.<\/td><\/tr><tr><td width=\"197\">Ti<\/td><td width=\"277\">TiCl4 (titanium chloride)<\/td><\/tr><tr><td width=\"197\">Ta\/TaN<\/td><td width=\"277\">\u00a0<\/td><\/tr><tr><td width=\"197\">Au\/Al\/Cu<\/td><td width=\"277\">\u00a0<\/td><td width=\"405\">Metal layers, metal grids, etc.<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-33a3365 elementor-widget elementor-widget-text-editor\" data-id=\"33a3365\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><b>Extended Reading.<\/b><\/p><ul><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/anofabrication_navi\/\">Micro and Nano Processing | Overview<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_nanoimprint\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Photolithography - Nanoimprint Lithography\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_fib_lithography\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Lithography - Focus on Ion Beam FIB<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_electron-beam_lithography\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Lithography - Electron Beam Lithography\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_etching\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Photolithography - Optical Lithography\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_etching\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Etching\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_epitaxy\/\" target=\"_blank\" rel=\"noopener\">Micro- and Nanofabrication | Thin Film Preparation - Epitaxy\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_pvd\/\" target=\"_blank\" rel=\"noopener\">Micro and Nano Processing | Thin Film Preparation - PVD\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/anofabrication_cvd\/\">Micro and Nano Processing | Thin Film Preparation - CVD<\/a><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fdcf92b elementor-widget elementor-widget-text-editor\" data-id=\"fdcf92b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<b><a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-coating\/\" target=\"_blank\" rel=\"noopener\">\u00a0Thin Film Deposition \/ Micro and Nanostructure Processing Design Services<\/a>,<\/b> Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b39d0bb elementor-widget elementor-widget-wpforms\" data-id=\"b39d0bb\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/en\/wp-json\/wp\/v2\/posts\/26865\" data-token=\"d3c0c6af887c0edc604f9d820c14f06c\" data-trp-original-action=\"\/en\/wp-json\/wp\/v2\/posts\/26865\"><noscript class=\"wpforms-error-noscript\">Please enable JavaScript in your browser to complete this form.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">Email<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">Confirm Email<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">Micro and Nano Processing Requirements<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">Submit<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"Loading\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"en\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3920fa43\" data-id=\"3920fa43\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-44660a6a elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"44660a6a\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-70cee70e elementor-widget elementor-widget-heading\" data-id=\"70cee70e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Products<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e9aa5a9 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"5e9aa5a9\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27540 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-lithography\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28814\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-1024x768.jpg 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784.jpg 1280w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-lithography\/\" >\n\t\t\t\tMicro and Nano Processing - Photolithography\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-lithography\/\" aria-label=\"Read more about Micro and Nano Processing - Photolithography\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27547 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-etching\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"285\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg\" class=\"attachment-medium size-medium wp-image-26719\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3.jpg 744w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-etching\/\" >\n\t\t\t\tMicro and Nano Processing - Etching Process\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-etching\/\" aria-label=\"Read more about Micro-Nano Processing - Etching Process\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27555 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-coating\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"228\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/cadence-comparison-\u78c1\u63a7\u6e85\u5c04\u9540\u819c-1-300x228.jpg\" class=\"attachment-medium size-medium wp-image-28958\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/cadence-comparison-\u78c1\u63a7\u6e85\u5c04\u9540\u819c-1-300x228.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/cadence-comparison-\u78c1\u63a7\u6e85\u5c04\u9540\u819c-1.jpg 625w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-coating\/\" >\n\t\t\t\tMicro and Nano Processing - Coating Process\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/fabrication-coating\/\" aria-label=\"Read more about Micro-Nano Processing - Coating Process\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u5de5\u827a\u4ecb\u7ecd \u76ee\u5f55 \u4ec0<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26865","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -<\/title>\n<meta name=\"description\" content=\"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd\" \/>\n<meta property=\"og:description\" content=\"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-07T09:23:36+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-11-17T06:31:42+00:00\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"3 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd\",\"datePublished\":\"2022-06-07T09:23:36+00:00\",\"dateModified\":\"2022-11-17T06:31:42+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/\"},\"wordCount\":112,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-07T09:23:36+00:00\",\"dateModified\":\"2022-11-17T06:31:42+00:00\",\"description\":\"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/en\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -","description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/","og_locale":"en_US","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd","og_description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","og_url":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/","article_published_time":"2022-06-07T09:23:36+00:00","article_modified_time":"2022-11-17T06:31:42+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Written by":"admin","Est. reading time":"3 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd","datePublished":"2022-06-07T09:23:36+00:00","dateModified":"2022-11-17T06:31:42+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"},"wordCount":112,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"en-US"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/","name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-07T09:23:36+00:00","dateModified":"2022-11-17T06:31:42+00:00","description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/en\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26865","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/comments?post=26865"}],"version-history":[{"count":18,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26865\/revisions"}],"predecessor-version":[{"id":29175,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/26865\/revisions\/29175"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/media?parent=26865"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/categories?post=26865"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/tags?post=26865"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}