{"id":26906,"date":"2022-06-08T15:59:45","date_gmt":"2022-06-08T07:59:45","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26906"},"modified":"2022-10-20T16:40:22","modified_gmt":"2022-10-20T08:40:22","slug":"mems_fabrication_02","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_fabrication_02\/","title":{"rendered":"Micro and Nano Processing | MEMS Fine Processing (II)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26906\" class=\"elementor elementor-26906\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-71ef8f45 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"71ef8f45\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3d09688c\" data-id=\"3d09688c\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-81f9ed6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"81f9ed6\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-316b012a\" data-id=\"316b012a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-616bfa03 elementor-widget elementor-widget-heading\" data-id=\"616bfa03\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Micro and Nano Processing | MEMS Fine Processing (II)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-74a1998e elementor-widget elementor-widget-text-editor\" data-id=\"74a1998e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microfabrication technology is the basis for the realization of MEMS, and it is also the core technology and research hotspot of MEMS. Microfabrication technology is also widely used in the fields of microelectronics, micro-optics, microfluidic chips, protein and cell arraying, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Microfabrication refers to the fabrication of tiny devices or thin films at scales ranging from sub-millimeter to nanometer, and in units ranging from micrometer to atomic or molecular linearity. There are many types of microfabrication technologies, involving a variety of physical and chemical methods, and they are classified here mainly according to the processing method and the processing environment medium.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Microfabrication technologies can be divided into two categories based on the processing method:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1)<b>Point-by-point processing technology<\/b>Such as laser beam, electron beam and ion beam and other high-energy beam processing, scanning probe microscopy, including atomic force microscopy and scanning tunneling microscopy, scanning electrochemical microscopy, etc.. Their processing methods are all point-by-point mode. These techniques generally have a high processing resolution, but the processing efficiency is low.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2)<b>Bulk copy processing technology<\/b>The technology of integrated circuits, such as lithography, technology, micro-contact printing technology, electrochemical processing technology, electrochemical micro-manufacturing technology, constrained etchant layer technology, plasma etching, ion sputter etching, reactive ion etching, micro-fine EDM technology, etc.. Among these techniques, a batch or an array of microstructures can generally be processed.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">According to the classification of the processing environment medium, it can also be divided into two categories:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) wet etching or deposition technology whose processing is carried out in aqueous solution or electrolyte, such as conventional wet lithography, technology, constrained etchant layer technology, electrochemical microprocessing anode dissolution technology, technology, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Depending on the reaction medium, wet etching can be further divided into two types of chemical etching and electrochemical etching.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) dry etching or deposition technology whose processing is carried out in vacuum or gas phase, such as the aforementioned three-beam processing, plasma etching, ion sputtering etching, reactive ion etching, etc., dry deposition technology including vacuum sputtering, vacuum evaporation plating, magnetron sputtering, chemical vapor deposition and physical vapor deposition, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\">\u00a0<\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400; text-indent: 28px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Although there is an increasing use of dry etching techniques, which also brings great economic benefits. However, chemical and electrochemical etching still plays an important and irreplaceable role in the field of micromachining (especially MEMS), and in addition, electrochemical micromachining methods are one of the most promising technologies for realizing 3D micromachining.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b365c9 elementor-widget elementor-widget-text-editor\" data-id=\"3b365c9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<b><a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/\" target=\"_blank\" rel=\"noopener\">MEMS device \/ micro and nanostructure processing design services<\/a>,<\/b> Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3f1ea712 elementor-widget elementor-widget-wpforms\" 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https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" >\n\t\t\t\tMicro-Nano Processing\u4e28Nano Imprinting (NIL) Subcontracting\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" aria-label=\"Read more about Nanofabrication\u4e28Nanoimprinting (NIL) Subcontracting\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3912a94e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"3912a94e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-41089620 elementor-widget elementor-widget-heading\" data-id=\"41089620\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Reading<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58418a6c elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"58418a6c\" data-element_type=\"widget\" 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