{"id":26949,"date":"2022-06-08T16:25:19","date_gmt":"2022-06-08T08:25:19","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26949"},"modified":"2022-10-20T15:43:27","modified_gmt":"2022-10-20T07:43:27","slug":"mems_fabrication_07","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_fabrication_07\/","title":{"rendered":"Micro and Nano Processing | MEMS Fine Processing (VII)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26949\" class=\"elementor elementor-26949\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-45eaea62 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"45eaea62\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-27e1d677\" data-id=\"27e1d677\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-42213d5e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"42213d5e\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1fa0b9df\" data-id=\"1fa0b9df\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2ea62320 elementor-widget elementor-widget-heading\" data-id=\"2ea62320\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Micro and Nano Processing | MEMS Fine Processing (VII)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6de3921 elementor-widget elementor-widget-text-editor\" data-id=\"6de3921\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.10 Bonding technology<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Wafer bonding is similar to soldering in that the layers of material are melted together to form a strong bond without a binder, and there are two techniques: silicon-glass bonding and silicon-silicon bonding. Silicon-glass bonding is done by applying several hundred volts of DC voltage between silicon and glass at 350\u00b0C to 500\u00b0C for a few minutes. Si-Si bonding is the direct bonding of two polished silicon surfaces together at high temperatures by atomic forces to form a single unit. The bonding technique facilitates the realization of complex micromechanical structures.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.11 Scanning Probe Microscopy (SPM) Processing Technology<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">By applying scanning probe microscope processing technology to atomic and molecular-level surface processing at the probe tip, we can reach the limits of microfabrication and perform processing in the nanometer range. The high electric field at the probe tip close to the surface of the test material is used to break the bonds between atoms and evaporate them, allowing for the removal, addition and movement of individual atoms.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.12 Micro-fine stereolithography<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">It is a new type of microfabrication technology, which belongs to light modeling technology, and can integrate laser technology, CAD\/CAM technology, material science and microfabrication technology to directly process miniature three-dimensional structures, and can be combined with micro electroforming technology to extend the scope of application to metal or non-metal. The processing device consists of a laser source, an optical control system, a three-way motion control system for the table, a micro-motion table and a polyester resin loading device. Among them, the laser source with high processing resolution is the key of this method. At present, springs with a diameter of 50 \u03bcm and an accuracy of 1 to 10 \u03bcm have been processed by this method. This method can also be used with laser etching technology to process more complex parts.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.13 Integrated mechanism manufacturing technology<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal;\">\u00a0<\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Recently, there is a new trend in micromechanics, namely, the use of large-scale integrated circuit microfabrication technology, a variety of delicate micro-mechanisms, such as: micro-actuators, micro-sensors, micro-controllers, etc. integrated in a silicon chip. It can turn the traditional passive mechanism into an active mechanism, and can be made into a complete electromechanical integration of MEMS, the size of the whole system is expected to be reduced to a few millimeters to a few hundred microns.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4c8f521e elementor-widget elementor-widget-text-editor\" data-id=\"4c8f521e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/\" target=\"_blank\" rel=\"noopener\"><b>MEMS device \/ micro and nanostructure processing design services<\/b><\/a>, Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-215e4d87 elementor-widget elementor-widget-wpforms\" data-id=\"215e4d87\" 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https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" >\n\t\t\t\tMicro-Nano Processing\u4e28Nano Imprinting (NIL) Subcontracting\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" aria-label=\"Read more about Nanofabrication\u4e28Nanoimprinting (NIL) Subcontracting\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a964c5 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"a964c5\" data-element_type=\"widget\" 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