{"id":27064,"date":"2022-06-14T15:26:05","date_gmt":"2022-06-14T07:26:05","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27064"},"modified":"2022-10-26T15:44:49","modified_gmt":"2022-10-26T07:44:49","slug":"mems_capability","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_capability\/","title":{"rendered":"MEMS Foundry Capabilities | Photolithography Plating Etching Coating"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27064\" class=\"elementor elementor-27064\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-23f3d625 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"23f3d625\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-577da76a\" data-id=\"577da76a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-7b198e0a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7b198e0a\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-42bed617\" data-id=\"42bed617\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3a045cd6 elementor-widget elementor-widget-heading\" data-id=\"3a045cd6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>Micro-nano structure\/MEMS foundry platform technology capability<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3569726a elementor-widget elementor-widget-text-editor\" data-id=\"3569726a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">The laboratory platform has a total of more than 200 sets of equipment, etc., of which the main equipment (more than 40 sets) includes.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Graphical devices<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam exposure, laser direct writing, desktop contact lithography, desktop lithography, etc.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Film deposition equipment<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICP-PECVD, LPCVD, magnetron sputtering, electron beam evaporation coating, PE-ALD, DLC thin film deposition, etc., electroplating (Au, Ag, Cu, Ni, Sn, etc.)<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Etching equipment<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICP-RIE, RIE, IBE, DRIE deep silicon etching, XeF2 table silicon etching machine, HF vapor phase etching and other dry etching equipment and wet etching equipment to meet the body silicon, dielectric film, metal oxide, metal, etc. and the matching CO2 supercritical release equipment<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Characterization and test equipment<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM, step meter, Raman spectroscopy, SEM, FIB, confocal microscope, white light interferometer, infrared thermal imager, FEMTO-TOOL micro and nano mechanics tester, ultra-high speed camera, 3D Doppler laser vibrometer, DC\/RF probe stage (60GHZ), network analyzer (60GHz), semiconductor analyzer, impedance analyzer and high-precision electrical original meter, etc.<\/span><\/p>\n<h3 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Device back-end packaging equipment<\/span><\/h3>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Wafer thinning, CMP polishing, wafer bonding, placement machine, scribing machine, wire bonding machine, solid state machine, laser welding machine and other processing equipment developed by the team, packaging equipment.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"> <img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-27066\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\" alt=\"\" width=\"1000\" height=\"571\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png 1000w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-300x171.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-768x439.png 768w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/span><\/p>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\">\n<section style=\"text-align: center;\">\n<section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\">\n<section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\">\n<section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\">\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">Platform Technology Capabilities<\/span><\/strong><\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><\/section>\n<\/section>\n<\/section>\n<h4>&nbsp;<\/h4>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Process integration and platform capabilities<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Conductive DLC film layer (super slip vice, conductive super hard film layer, etc.)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-AIN\/PZT thin film process (piezoelectric drive material)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Large size highly oriented carbon material growth and device processing process<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Bonding: anodic bonding, glass solder bonding, eutectic bonding (AIGe), diffusion bonding process<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Atmosphere or vacuum encapsulation, Reseal<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Grind thinning and atomic level polishing process<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Si-based all-wet micro and nano processing process - Flexible substrate micro and nano device processing<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Manufacturing and Packaging Capabilities<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Silicon through-hole (TSV) Glass through-hole (TGV)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Pressure\/Gas\/Infrared\/Humidity sensors<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Microfluidic chip processing and related testing<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">A super-slip RF \/ inertial device processing capabilities<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Die's full packaging capabilities<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-932789b elementor-hidden-mobile elementor-widget elementor-widget-text-editor\" data-id=\"932789b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 699.516px; height: 3203px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Application Category<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Equipment name<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Equipment Model<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Process Parameters<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plating<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Low Pressure Chemical Vapor Deposition (LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Can deposit SIN, TEOS, poly and other thin<br \/>Film 1-50 pieces\/oven<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermal oxidation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermal oxidation of furnace tubes<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealing<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Rapid annealing furnace RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealsys AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Maximum temperature up to 1500\u00b0C, temperature rise rate<br \/>Max. 200\u2103\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FIB processing<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Focused Ion Beam FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Scios 2 HiVac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">TEM sample preparation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM morphological observation<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Field Emission Environmental Scanning Electron Microscopy ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Quattro S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM energy spectrum analysis<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron Beam Evaporation Coating - Metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam evaporation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporation of metal film, can do lift-off process coating, 8-inch substrate downward compatible<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron Beam Evaporation Coating - Dielectric<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam evaporation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Vaporized media film can be plated 10 pieces of four-inch substrate in one furnace<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Magnetron Sputtering Coating - Metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Magnetron sputtering system<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">fse-bsls-rd-6inch<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sputtered metal film, 6\" substrate<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Atomic layer deposition<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma Enhanced Atomic Layer Deposition System<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Currently dominated by Al2O3<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">DLC coating<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Diamond-like thin film chemical deposition system<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Dry Etching<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Dry etching machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">North Huachuang<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Silicon Bosch and ultra-low temperature etching, SiO2 with quartz deep etching, below 8 in<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">IBE etching<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Ion Beam Etching System (IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Three-dimensional structure material etching, etching steepness better than 85 degrees, etching accuracy 10nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma debinding<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microwave plasma debinding machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Alpha Plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">UV lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">UV Lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Alignment accuracy: \u00b10.5um, resolution 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electroplating<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plating Machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cu plating, Au plating, Ni\/Ni alloy plating<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Critical drying<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Supercritical point dryer<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Automegasamdri-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Zoning<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cutting machine scribing machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Disco D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Wafer Bonding<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Wafer Bonding Machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Anode bonding<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM Testing<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">High-resolution atomic force microscope<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxford Cypher ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Atomic force microscopy<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Elionix ELS-F125G8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Not including the cost of glue leveling, etc., material costs are calculated separately according to the type of glue used<\/span><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-762b0ea elementor-hidden-desktop elementor-hidden-tablet elementor-widget elementor-widget-text-editor\" data-id=\"762b0ea\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 349px; height: 3077px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Application Category<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Equipment name<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Equipment Model<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Process Parameters<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plating<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Low Pressure Chemical Vapor Deposition (LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Can deposit SIN, TEOS, poly and other thin<br \/>Film 1-50 pieces\/oven<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermal oxidation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermal oxidation of furnace tubes<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealing<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Rapid annealing furnace RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealsys AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Maximum temperature up to 1500\u00b0C, temperature rise rate<br \/>Max. 200\u2103\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FIB processing<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Focused Ion Beam FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Scios 2 HiVac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">TEM sample preparation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM morphological observation<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Field Emission Environmental Scanning Electron Microscopy ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Quattro S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM energy spectrum analysis<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron Beam Evaporation Coating - Metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam evaporation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporation of metal film, can do lift-off process coating, 8-inch substrate downward compatible<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron Beam Evaporation Coating - Dielectric<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam evaporation<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Vaporized media film can be plated 10 pieces of four-inch substrate in one furnace<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Magnetron Sputtering Coating - Metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Magnetron sputtering system<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">fse-bsls-rd-6inch<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sputtered metal film, 6\" substrate<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Atomic layer deposition<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma Enhanced Atomic Layer Deposition System<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Currently dominated by Al2O3<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">DLC coating<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Diamond-like thin film chemical deposition system<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Dry Etching<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Dry etching machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">North Huachuang<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Silicon Bosch and ultra-low temperature etching, SiO2 with quartz deep etching, below 8 in<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">IBE etching<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Ion Beam Etching System (IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Three-dimensional structure material etching, etching steepness better than 85 degrees, etching accuracy 10nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma debinding<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microwave plasma debinding machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Alpha Plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">UV lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">UV Lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Alignment accuracy: \u00b10.5um, resolution 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electroplating<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plating Machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cu plating, Au plating, Ni\/Ni alloy plating<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Critical drying<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Supercritical point dryer<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Automegasamdri-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Zoning<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cutting machine scribing machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Disco D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Wafer Bonding<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Wafer Bonding Machine<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Anode bonding<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM Testing<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">High-resolution atomic force microscope<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxford Cypher ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Atomic force microscopy<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Electron beam lithography<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Elionix ELS-F125G8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Not including the cost of glue leveling, etc., material costs are calculated separately according to the type of glue used<\/span><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7772d391 elementor-widget elementor-widget-text-editor\" data-id=\"7772d391\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/\" target=\"_blank\" rel=\"noopener\"><b><u>MEMS device \/ micro and nanostructure processing design services<\/u><\/b><\/a>, Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-10ca8ab7 elementor-widget elementor-widget-wpforms\" data-id=\"10ca8ab7\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/en\/wp-json\/wp\/v2\/posts\/27064\" data-token=\"56cb1afb81d30bbb89ba3d09485d00d5\" data-trp-original-action=\"\/en\/wp-json\/wp\/v2\/posts\/27064\"><noscript class=\"wpforms-error-noscript\">Please enable JavaScript in your browser to complete this form.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">Email<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">Confirm Email<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">Micro and Nano Processing Requirements<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">Submit<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"Loading\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"en\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1146ae2b\" data-id=\"1146ae2b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4e3be01e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"4e3be01e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f054d53 elementor-widget elementor-widget-heading\" data-id=\"f054d53\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Products<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-221c4f3 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"221c4f3\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" >\n\t\t\t\tHigh-precision two-photon polymerization 3D printing system\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/product\/2pp-two-photon-polymerization\/\" aria-label=\"Read more about High-Precision Two-photon Polymerization 3D Printing System\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" >\n\t\t\t\tMicrolens arrays for micro and nano optics\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/microlens-arrays\/\" aria-label=\"Read more about Microlens arrays for micro and nano optics\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" >\n\t\t\t\tMicro-Nano Processing\u4e28Nano Imprinting (NIL) Subcontracting\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" aria-label=\"Read more about Nanofabrication\u4e28Nanoimprinting (NIL) Subcontracting\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-187e4251 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"187e4251\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b60a5e0 elementor-widget elementor-widget-heading\" data-id=\"b60a5e0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Reading<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-659b6d3a elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"659b6d3a\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29236 post type-post status-publish format-standard has-post-thumbnail hentry category-solutions category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/solutions\/what-is-electron-beam-lithography\/\" >\n\t\t\t\tMicro and Nano Processing\u4e28Electron Beam Lithography (EBL) Technology Introduction\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Micro and Nano Processing\u4e28Electron Beam Lithography (EBL) Technology Introduction <\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/what-is-electron-beam-lithography\/\" aria-label=\"Read more about Electron Beam Lithography (EBL) Technology\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26944 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_fabrication_06\/\" >\n\t\t\t\tMicro and Nano Processing | MEMS Fine Processing (VI)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5 1.6\u3000<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_fabrication_06\/\" aria-label=\"Read more about Micro-Nano Processing | MEMS Fine Processing(VI)\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26865 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/\" >\n\t\t\t\tMicro and Nano Processing | Introduction to Thin Film Deposition\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u5de5\u827a\u4ecb\u7ecd \u76ee\u5f55 \u4ec0<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/\" aria-label=\"Read more about Micro and Nano Processing | Introduction to Thin Film Deposition\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-29b2a563 elementor-widget elementor-widget-heading\" data-id=\"29b2a563\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/en\/insight\/\">More Related...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u7ed3\u6784\/MEMS\u4ee3\u5de5\u5e73\u53f0\u6280\u672f\u80fd\u529b \u5b9e\u9a8c [&hellip;]<\/p>","protected":false},"author":1,"featured_media":27066,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-27064","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -<\/title>\n<meta name=\"description\" content=\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_capability\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\" \/>\n<meta property=\"og:description\" content=\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_capability\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-14T07:26:05+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-10-26T07:44:49+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\" \/>\n\t<meta property=\"og:image:width\" content=\"1000\" \/>\n\t<meta property=\"og:image:height\" content=\"571\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"3 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\",\"datePublished\":\"2022-06-14T07:26:05+00:00\",\"dateModified\":\"2022-10-26T07:44:49+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"},\"wordCount\":200,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\",\"name\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"datePublished\":\"2022-06-14T07:26:05+00:00\",\"dateModified\":\"2022-10-26T07:44:49+00:00\",\"description\":\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICP\\\\RIE\\\\IBE\\\\\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"width\":1000,\"height\":571},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/en\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -","description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_capability\/","og_locale":"en_US","og_type":"article","og_title":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c","og_description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","og_url":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/mems_capability\/","article_published_time":"2022-06-14T07:26:05+00:00","article_modified_time":"2022-10-26T07:44:49+00:00","og_image":[{"width":1000,"height":571,"url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","type":"image\/png"}],"author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Written by":"admin","Est. reading time":"3 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c","datePublished":"2022-06-14T07:26:05+00:00","dateModified":"2022-10-26T07:44:49+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"},"wordCount":200,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"image":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"thumbnailUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"en-US"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/","name":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"image":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"thumbnailUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","datePublished":"2022-06-14T07:26:05+00:00","dateModified":"2022-10-26T07:44:49+00:00","description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICP\\RIE\\IBE\\\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","width":1000,"height":571},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/en\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/27064","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/comments?post=27064"}],"version-history":[{"count":20,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/27064\/revisions"}],"predecessor-version":[{"id":28653,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/posts\/27064\/revisions\/28653"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/media\/27066"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/media?parent=27064"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/categories?post=27064"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/en\/wp-json\/wp\/v2\/tags?post=27064"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}