{"id":27308,"date":"2022-07-28T15:39:58","date_gmt":"2022-07-28T07:39:58","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27308"},"modified":"2022-10-26T15:50:23","modified_gmt":"2022-10-26T07:50:23","slug":"nanofab_grayscale_lithography","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofab_grayscale_lithography\/","title":{"rendered":"Micro and Nano Processing | 3D Optical Structure Grayscale Lithography"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27308\" class=\"elementor elementor-27308\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-327fe9e elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"327fe9e\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a431abd\" data-id=\"a431abd\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-ffb822d elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"ffb822d\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-c3cb333\" data-id=\"c3cb333\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ad9a6f2 elementor-widget elementor-widget-heading\" data-id=\"ad9a6f2\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>Micro and Nano Processing | 3D Optical Structure Grayscale Lithography<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-853f95d elementor-widget elementor-widget-text-editor\" data-id=\"853f95d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Grayscale processing techniques enable a variety of micro-optical elements for different applications. Both diffractive and refractive micro-optical elements can be processed using contour lithography forming methods and graphic etching transfer techniques. The more commonly processed micro-optical elements include beam-splitting diffractive optics, beam-forming diffractive elements, diffractive optics for scattering or uniform light distribution, diffractive lenses and lens arrays, refractive micro-lenses and micro-lens arrays (MLA), and other phase-modulated optical elements. The above-mentioned functional micro-optics for applications in the electromagnetic spectrum range have been fabricated on various substrate materials, and micro-optics for applications in the optical radiation spectrum range from DeepUltraviolet (DUV) with a wavelength of 157 nm to Long-WaveInfrared (LWIR) with a wavelength of 14 \u03bcm. LWIR) at a wavelength of 14 \u03bcm.<\/p><p>Grayscale lithography is achieved by fabricating a photomask such that the intensity of light radiation transmitted through the mask varies with spatial location. Several methods are available for this purpose, including photomasks with spatially varying optical density, photomasks with spatially varying light absorption, and the use of variable-size microstructured masks to modulate the light flux transmitted locally within the mask range. techniques belonging to the first category of grayscale lithography and graphic etching transfer techniques for fabricating micro-optical components were developed by Gal et al. The grayscale processing technique applies a single photolithography reaction process to etch the desired micro-optical 3D structure pattern on the photosensitive polymer.<\/p><p>The use of grayscale lithography gives designers greater freedom in solving micro-optical problems by combining positive (convex) and negative (concave) surfaces in the same optical element. Photoresists formed from grayscale can produce anamorphic objectives or \"saddle\" shaped lenses with positive or negative curvature along the orthogonal axis, and can form saddle shaped refractive surfaces to correct for image scattering wave fronts. Aspherical objectives and parabolic lenses, as well as micro-optical elements that perform multiple functions on a single optical surface, such as focusing and beam splitting, can be very easily fabricated using grayscale processing. The application of grayscale lithography has produced non-traditional optical elements, among which are phase-surface micro-optical lenses such as phase diffusers, beam integrators (or beam integrators), gratings, or spot generators.<\/p><p>Examples of some common micro-optical structures fabricated by grayscale lithography are shown in Figure 1.1, including: smooth Kaino (phase holographic) diffractive lenses, micro-optical elements with both focusing and beam splitting functions on the same optical surface, and positive and negative MLAs with high fill factors. reactive ion etching (RIE) techniques can be applied to permanently transfer the characteristic contours of lithographic patterns onto the substrate surface. Reactive etching pattern transfer methods can utilize capacitively coupled etching devices or high-density plasma devices, including Inductively Coupled Plas-ma (ICP) etchers. In the field of microelectronics, the more desirable plasma etching techniques have been modified to enable successful etching of wafers including functional micro-optical devices, and the industry standard plasma etching processes used for oxide materials, silicon and compound semiconductors have been improved to make them suitable for processing micro-optical structures for transfer onto the various substrate materials mentioned above.<\/p><p><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-27311\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/07\/\u56fe\u72474.png\" alt=\"\" width=\"563\" height=\"190\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/07\/\u56fe\u72474.png 563w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/07\/\u56fe\u72474-300x101.png 300w\" sizes=\"(max-width: 563px) 100vw, 563px\" \/><\/p><p>Figure 1.1 SEM images of typical micro-optical elements processed using the grayscale processing process (including diffractive lenses, micro-optical elements with both focusing and beam splitting functions, and convex and concave micro-lens arrays)<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e7ab639 elementor-widget elementor-widget-text-editor\" data-id=\"e7ab639\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>We offer fast<a href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/\" target=\"_blank\" rel=\"noopener\"><b>MEMS device \/ micro and nanostructure processing design services<\/b><\/a>, Feel free to leave a message to inquire.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-409c564 elementor-widget elementor-widget-wpforms\" data-id=\"409c564\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div 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micro and nano optics\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/en\/nanofabrication\/nanoimprint-lithography\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, 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data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-51cb0a0 elementor-widget elementor-widget-heading\" data-id=\"51cb0a0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Related Reading<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7aefd35 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"7aefd35\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26888 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a 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href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_nanoimprint\/\" >\n\t\t\t\tMicro and Nano Processing | Photolithography - Nanoimprint Lithography\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u5149\u523b &#8211; \u7eb3\u7c73<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/nanofabrication_nanoimprint\/\" aria-label=\"Read more about Nanofabrication | Lithography - Nanoimprint Lithography\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26874 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/dry_etching\/\" >\n\t\t\t\tMicro and Nano Processing | Introduction to Dry Etching\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u5e72\u6cd5\u523b\u8680\u5de5\u827a\u4ecb\u7ecd \u523b\u8680\u6280\u672f<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/dry_etching\/\" aria-label=\"Read more about Micro and Nano Processing | Introduction to Dry Etching\" tabindex=\"-1\" >\n\t\t\tRead More \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b785d73 elementor-widget elementor-widget-heading\" data-id=\"b785d73\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/en\/insight\/\">More Related...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u4e09\u7ef4\u5149\u5b66\u7ed3\u6784\u7070\u5ea6\u5149\u523b \u7070\u5ea6 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-27308","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | \u4e09\u7ef4\u5149\u5b66\u7ed3\u6784\u7070\u5ea6\u5149\u523b -<\/title>\n<meta name=\"description\" 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