{"id":29153,"date":"2022-11-28T14:40:03","date_gmt":"2022-11-28T06:40:03","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=29153"},"modified":"2022-12-05T19:00:56","modified_gmt":"2022-12-05T11:00:56","slug":"what-is-atomic-layer-deposition","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/what-is-atomic-layer-deposition\/","title":{"rendered":"Thin Film Deposition\u4e28Principles and Applications of Atomic Layer Deposition (ALD) Technology"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"29153\" class=\"elementor elementor-29153\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1c56c96 elementor-section-stretched elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1c56c96\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-0092d45\" data-id=\"0092d45\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6f475ce elementor-widget elementor-widget-heading\" data-id=\"6f475ce\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Thin Film Deposition\u4e28Atomic Layer Deposition (ALD)<br>Technology Principle and Application<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a462719 elementor-toc--minimized-on-tablet elementor-widget elementor-widget-table-of-contents\" data-id=\"a462719\" data-element_type=\"widget\" data-settings=\"{&quot;headings_by_tags&quot;:[&quot;h4&quot;],&quot;exclude_headings_by_selector&quot;:[],&quot;marker_view&quot;:&quot;numbers&quot;,&quot;minimize_box&quot;:&quot;yes&quot;,&quot;minimized_on&quot;:&quot;tablet&quot;,&quot;hierarchical_view&quot;:&quot;yes&quot;,&quot;min_height&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"table-of-contents.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor-pro - v3.21.0 - 30-04-2024 *\/\n.elementor-widget-table-of-contents .elementor-toc__header-title{color:var(--header-color)}.elementor-widget-table-of-contents.elementor-toc--collapsed .elementor-toc__toggle-button--collapse,.elementor-widget-table-of-contents:not(.elementor-toc--collapsed) .elementor-toc__toggle-button--expand{display:none}.elementor-widget-table-of-contents .elementor-widget-container{min-height:var(--box-min-height);border:var(--box-border-width,1px) solid var(--box-border-color,#9da5ae);border-radius:var(--box-border-radius,3px);background-color:var(--box-background-color);transition:min-height .4s;overflow:hidden}.elementor-toc__header{display:flex;align-items:center;justify-content:space-between;padding:var(--box-padding,20px);background-color:var(--header-background-color);border-bottom:var(--separator-width,1px) solid var(--box-border-color,#9da5ae)}.elementor-toc__header-title{font-size:18px;margin:0;color:var(--header-color);flex-grow:1}.elementor-toc__toggle-button{cursor:pointer;display:inline-flex}.elementor-toc__toggle-button i{color:var(--toggle-button-color)}.elementor-toc__toggle-button svg{height:1em;width:1em;fill:var(--toggle-button-color)}.elementor-toc__spinner-container{text-align:center}.elementor-toc__spinner{font-size:2em}.elementor-toc__spinner.e-font-icon-svg{height:1em;width:1em}.elementor-toc__body{padding:var(--box-padding,20px);max-height:var(--toc-body-max-height);overflow-y:auto}.elementor-toc__body::-webkit-scrollbar{width:7px}.elementor-toc__body::-webkit-scrollbar-thumb{background-color:#babfc5;border-radius:10px}.elementor-toc__list-wrapper{list-style:none;padding:0}.elementor-toc__list-item{margin-bottom:.5em}.elementor-toc__list-item.elementor-item-active{font-weight:700}.elementor-toc__list-item .elementor-toc__list-wrapper{margin-top:.5em;margin-inline-start:var(--nested-list-indent,1em)}.elementor-toc__list-item-text{transition-duration:var(--item-text-transition-duration)}.elementor-toc__list-item-text:hover{color:var(--item-text-hover-color);-webkit-text-decoration:var(--item-text-hover-decoration);text-decoration:var(--item-text-hover-decoration)}.elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}.elementor-toc__list-item-text-wrapper{display:flex;align-items:center}.elementor-toc__list-item-text-wrapper:before,.elementor-toc__list-item-text-wrapper i{margin-inline-end:8px;color:var(--marker-color)}.elementor-toc__list-item-text-wrapper svg{margin-inline-end:8px;fill:var(--marker-color);height:var(--marker-size,.5em);width:var(--marker-size,.5em)}.elementor-toc__list-item-text-wrapper i{font-size:var(--marker-size,.5em)}.elementor-toc__list-item-text-wrapper:before{font-size:var(--marker-size,1em)}.elementor-toc--content-ellipsis .elementor-toc__list-item-text{white-space:nowrap;overflow:hidden;text-overflow:ellipsis}.elementor-toc__list-items--collapsible>.elementor-toc__list-wrapper>.elementor-toc__list-item>.elementor-toc__list-wrapper{display:none}.elementor-toc__heading-anchor{position:absolute}.elementor-toc__body .elementor-toc__list-item-text{color:var(--item-text-color);-webkit-text-decoration:var(--item-text-decoration);text-decoration:var(--item-text-decoration);transition-duration:var(--item-text-transition-duration)}.elementor-toc__body .elementor-toc__list-item-text:hover{color:var(--item-text-hover-color);-webkit-text-decoration:var(--item-text-hover-decoration);text-decoration:var(--item-text-hover-decoration)}.elementor-toc__body .elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}ol.elementor-toc__list-wrapper{counter-reset:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item{counter-increment:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item-text-wrapper:before{content:counters(item,\".\") \". \"}<\/style>\t\t<div class=\"elementor-toc__header\">\n\t\t\t<div class=\"elementor-toc__header-title\">\n\t\t\t\tCatalog\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--expand\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__a462719\" aria-expanded=\"true\" aria-label=\"Open table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-down\"><\/i><\/div>\n\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--collapse\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__a462719\" aria-expanded=\"true\" aria-label=\"Close table of contents\"><i aria-hidden=\"true\" class=\"fas fa-chevron-up\"><\/i><\/div>\n\t\t\t\t\t<\/div>\n\t\t<div id=\"elementor-toc__a462719\" class=\"elementor-toc__body\">\n\t\t\t<div class=\"elementor-toc__spinner-container\">\n\t\t\t\t<i class=\"elementor-toc__spinner eicon-animation-spin eicon-loading\" aria-hidden=\"true\"><\/i>\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7d2c356 elementor-widget elementor-widget-heading\" data-id=\"7d2c356\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">What is Atomic Layer Deposition (ALD)?<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-73cc0d5 elementor-widget elementor-widget-text-editor\" data-id=\"73cc0d5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div class=\"ace-line ace-line old-record-id-Lc6kdCaeuouKE6xsHM7cHnU0ndf\">Atomic Layer Deposition (ALD) is a high precision chemical vapor deposition (CVD) based process. <span style=\"color: #0f64a6;\"><span style=\"color: #0d2c43;\"><span style=\"color: #4175fc;\"><a style=\"color: #4175fc;\" href=\"https:\/\/www.accscicn.com\/en\/solutions\/nanofabrication\/thin_film_deposition\/\">Thin Film Deposition <\/a><\/span>Technology<\/span><\/span>This is a technique for depositing material materials in the form of single-atom films based on chemical vapor phases layer by layer on the substrate surface. Two or more precursor chemicals, each containing a different element of the material being deposited, are introduced one at a time onto the substrate surface. Each precursor saturates the surface to form a monolayer of material.<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-96fef33 elementor-widget elementor-widget-image\" data-id=\"96fef33\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"574\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef-1.jpg\" class=\"attachment-large size-large wp-image-29164\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef-1.jpg 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef-1-300x168.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef-1-768x431.jpg 768w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b21cdb elementor-widget elementor-widget-spacer\" data-id=\"3b21cdb\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c55c78 elementor-widget elementor-widget-heading\" data-id=\"6c55c78\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Principle of atomic layer deposition<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6358506 elementor-widget elementor-widget-text-editor\" data-id=\"6358506\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"UGy9d0v5UoJAVxxcSQFcybhsnwb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div>The growth principle of ALD is similar to conventional chemical weather deposition (CVD), but in ALD, the reaction precursors are deposited alternately during the deposition process, and the chemical reaction of the new layer of atoms is directly associated with the previous layer, with only one layer of atoms deposited per reaction. Having self-limiting growth characteristics allows the film to be deposited onto the substrate conformally and without pinholes. Therefore<strong>The number of deposition cycles can be controlled to achieve precise control of film thickness.<\/strong><\/div><div><strong>\u00a0<\/strong><\/div><div><div><span style=\"font-weight: bold;\">An atomic layer deposition cycle can be divided into four steps.<\/span><\/div><\/div><\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-955dd93 elementor-widget elementor-widget-text-editor\" data-id=\"955dd93\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div class=\"ace-line ace-line old-record-id-KKIgdag0ooWcqExMb15ceuf0nZQ\"><ol><li><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\">The passage of the first precursor gas into the substrate, the<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\">Adsorption or chemical reaction with the substrate surface.<\/span><\/li><li><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\">Flushing the remaining gas with inert gas.<\/span><\/li><li><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\">The introduction of a second precursor gas.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\">Chemical reaction with the first precursor gas adsorbed on the surface of the substrate to produce the coating, or continued reaction with the products of the reaction between the first precursor and the substrate to produce the coating.<\/span><\/li><li>Flush out the excess gas with inert gas again.<\/li><\/ol><\/div><div class=\"ace-line ace-line old-record-id-KKIgdag0ooWcqExMb15ceuf0nZQ\">\u00a0<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-69ed6f3 elementor-widget elementor-widget-gallery\" 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.elementor-gallery__item-overlay-content__title{opacity:1}a.elementor-item.elementor-gallery-title{color:var(--galleries-title-color-normal)}a.elementor-item.elementor-gallery-title.elementor-item-active,a.elementor-item.elementor-gallery-title.highlighted,a.elementor-item.elementor-gallery-title:focus,a.elementor-item.elementor-gallery-title:hover{color:var(--galleries-title-color-hover)}a.elementor-item.elementor-gallery-title.elementor-item-active{color:var(--gallery-title-color-active)}.e-con-inner>.elementor-widget-gallery,.e-con>.elementor-widget-gallery{width:var(--container-widget-width);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-gallery__container\">\n\t\t\t\t\t\t\t<a class=\"e-gallery-item elementor-gallery-item elementor-animated-content\" href=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef\u5de5\u4f5c\u539f\u7406\u56fe\u89e3-1-scaled.jpg\" data-elementor-open-lightbox=\"yes\" data-elementor-lightbox-slideshow=\"69ed6f3\" data-elementor-lightbox-title=\"\u539f\u5b50\u5c42\u6c89\u79ef\u5de5\u4f5c\u539f\u7406\u56fe\u89e3\" data-e-action-hash=\"#elementor-action%3Aaction%3Dlightbox%26settings%3DeyJpZCI6MjkxNTcsInVybCI6Imh0dHBzOlwvXC93d3cuYWNjc2NpY24uY29tXC93cC1jb250ZW50XC91cGxvYWRzXC8yMDIyXC8xMVwvXHU1MzlmXHU1YjUwXHU1YzQyXHU2Yzg5XHU3OWVmXHU1ZGU1XHU0ZjVjXHU1MzlmXHU3NDA2XHU1NmZlXHU4OWUzLTEtc2NhbGVkLmpwZyIsInNsaWRlc2hvdyI6IjY5ZWQ2ZjMifQ%3D%3D\">\n\t\t\t\t\t<div class=\"e-gallery-image elementor-gallery-item__image\" data-thumbnail=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u539f\u5b50\u5c42\u6c89\u79ef\u5de5\u4f5c\u539f\u7406\u56fe\u89e3-1-scaled.jpg\" data-width=\"2560\" data-height=\"1287\" aria-label=\"\" role=\"img\" ><\/div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t<\/div>\n\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-049a63f elementor-widget elementor-widget-spacer\" data-id=\"049a63f\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b1ca1db elementor-widget elementor-widget-heading\" data-id=\"b1ca1db\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Precursor selection and classification<\/h5>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9b20585 elementor-widget elementor-widget-text-editor\" data-id=\"9b20585\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"UGy9d0v5UoJAVxxcSQFcybhsnwb\" data-docx-has-block-data=\"false\"><div data-page-id=\"UGy9d0v5UoJAVxxcSQFcybhsnwb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div style=\"white-space: pre;\"><b>\u00a0<span style=\"font-style: inherit;\">The choice of precursors plays a crucial role in the quality of the coating for ALD growth, and precursors need to meet.<\/span><\/b><\/div><div><ul><li>A sufficiently high vapor pressure at the deposition temperature to ensure that it can adequately cover the surface of the filled substrate material.<\/li><li>Good thermal and chemical stability, preventing autolysis within the limits of the maximum temperature of the reaction.<\/li><li>High reactivity. Rapid adsorption and saturation on the material surface, or rapid and effective reaction with the material surface groups<\/li><li>Non-toxic, non-corrosive, and inert by-products Avoid hindering self-limiting film growth<\/li><li>Wide range of material sources<\/li><\/ul><div><div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div class=\"ace-line ace-line old-record-id-CYOsd4Yg4ouqQCxwpsyczIN0nAb\"><b>ALD precursors can be divided into two main categories: inorganic and metal-organic<\/b>. The inorganic precursors include monomers and halides, and the metal organics include compounds such as metal alkyl, metal cyclopentadienyl, metal \u03b2-2 ketone, metal amide, and metal ether groups.<\/div><div class=\"ace-line ace-line old-record-id-CYOsd4Yg4ouqQCxwpsyczIN0nAb\">\u00a0<\/div><div class=\"ace-line ace-line old-record-id-CYOsd4Yg4ouqQCxwpsyczIN0nAb\">\u00a0<\/div><\/div><\/div><\/div><\/div><\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-95b32d7 elementor-widget elementor-widget-spacer\" data-id=\"95b32d7\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8275c51 elementor-widget elementor-widget-heading\" data-id=\"8275c51\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Atomic layer deposition technology features and advantages<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-49b438b elementor-widget elementor-widget-text-editor\" data-id=\"49b438b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div><ul><li><strong>High accuracy.<\/strong>The thickness of the substrate can be easily and precisely controlled by controlling the reaction cycle, and the thickness of the film can be as accurate as the thickness of an atom.<\/li><li><strong>Excellent three-dimensional conformability.<\/strong>ALD can produce a film with the same shape as the original substrate, i.e., the film can be deposited uniformly on a concave-like surface . Therefore<strong>Suitable for different shapes of substrates<\/strong>Uniform three-dimensional films, consistent shape and originality, and conformability are the unique advantages of ALD technology.<\/li><li><strong>High flatness.<\/strong>The pinhole-free surface, bottom-up growth mechanism determines the pinhole-free nature of the film, which is valuable for blocking and passivation applications.<\/li><li><strong>Excellent adhesion.<\/strong>Chemical adsorption of precursors to the substrate surface ensures excellent adhesion<\/li><li><strong>Low thermal budget (low precipitation temperature): <\/strong>Thin film growth at low temperatures (room to 400\u00b0C), which is attractive for temperature-constrained polymer devices and biomaterial coatings<\/li><\/ul><\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5fa1bf9 elementor-widget elementor-widget-text-editor\" data-id=\"5fa1bf9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<h4><b>Comparison of advantages and disadvantages of thin film deposition processes<\/b><\/h4><table><thead><tr><th><strong>Craftsmanship<\/strong><\/th><th><strong>Atomic layer deposition<br \/>(ALD)<\/strong><\/th><th><strong>Physical Vapor Deposition<br \/>(PVD)<\/strong><\/th><th><strong>Chemical Vapor Deposition<br \/>(CVD)<\/strong><\/th><th><strong>Low Pressure Chemical Vapor Deposition<br \/>(LPCVD furnace tube)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>Deposition principle<\/td><td>Chemical surface saturation<br \/>Reaction-Deposition<\/td><td>Evaporation-Consolidation<\/td><td>Gas phase reaction - deposition<\/td><td>Low Pressure Chemical Vapor Deposition<br \/>(Stove and tube type)<\/td><\/tr><tr><td>Deposition process<\/td><td>Laminar growth<\/td><td>Nucleation growth<\/td><td>Nucleation growth<\/td><td>Nucleation growth<\/td><\/tr><tr><td>Step coverage<\/td><td>Excellent<\/td><td>General<\/td><td>Good<\/td><td>Good<\/td><\/tr><tr><td>Deposition rate<\/td><td>slow<\/td><td>Quick<\/td><td>Quick<\/td><td>slower<\/td><\/tr><tr><td>Deposition temperature<\/td><td>Low(&lt;500\u2103)<\/td><td>Low<\/td><td>High<\/td><td>Higher<\/td><\/tr><tr><td>Uniformity<\/td><td>Excellent<br \/>0.07 - 0.1nm<\/td><td>General<br \/>About 5nm<\/td><td>better<br \/>0.5 - 2nm<\/td><td><p>Better<\/p><\/td><\/tr><tr><td>Thickness control<\/td><td>Number of reaction cycles<\/td><td>Deposition time<\/td><td>Deposition time<br \/>Gas phase partial pressure<\/td><td>Deposition time<br \/>Gas ratio<\/td><\/tr><tr><td>Ingredients<\/td><td>Uniformity with few impurities<\/td><td>No impurities<\/td><td>Easy to contain impurities<\/td><td>No impurities<\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bd6aa6e elementor-widget elementor-widget-spacer\" data-id=\"bd6aa6e\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-70ffd10 elementor-widget elementor-widget-heading\" data-id=\"70ffd10\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Atomic Layer Deposition Applications<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e12cac5 elementor-widget elementor-widget-text-editor\" data-id=\"e12cac5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"UGy9d0v5UoJAVxxcSQFcybhsnwb\" data-docx-has-block-data=\"false\"><div data-page-id=\"UGy9d0v5UoJAVxxcSQFcybhsnwb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ETlAd26NKoz3UjxE3Oucie9Yneg\" data-docx-has-block-data=\"false\"><div class=\"ace-line ace-line old-record-id-RSAqd8GQKo0EWuxqcsbcyM9gnzc\"><p>As the semiconductor industry continues to evolve, the increasingly fine size of devices makes it particularly important to find or develop more advanced thin film growth techniques that require low thermal budgets, high film thickness accuracy and excellent conformality on three-dimensional (3D) structures, however, the traditional deposition techniques, chemical vapor deposition (CVD) and physical vapor deposition (PVD) are no longer fully adapted to this trend. ALD technology has a wide potential for applications in the fields of micro and nano electronics and nanomaterials due to its high controllability of deposition parameters (thickness, composition and structure), excellent homogeneity and conformality.<\/p><ul><li>The main areas of application of this technology include the following [1]:<\/li><li><b>High K dielectric<\/b>(Al2O3, Hf O2, Zr O, Ta 2 O5, La 2 O3): for transistor gate and DRAM capacitor dielectric layer;<\/li><li><b>Metal grid electrode (<\/b>Ir, Pt, Ru, Ti N);<\/li><li><b>Metal Interconnects and Liners<\/b>(Cu, WN, Ta N, WNC, Ru, Ir): Metal diffusion barrier layer for copper interconnects, semiconductor vias for transistor grids, and memory cell applications such as DRAM capacitors, passivation layers;<\/li><li><b>Catalytic Materials<\/b>(Pt, IrCo, Ti O2, V 2 O5): for coatings inside filter membranes, catalysts (platinum membranes for automotive catalytic converters), ion exchange coatings for fuel cells;<\/li><li><b>Nanostructures (various materials)<\/b>: for conformal deposition around and inside nanostructures and MEMS;<\/li><li><b>Bio-coatings<\/b>(Ti N, Zr N, Cr N, Ti Al N, Al Ti N): Biocompatible materials for medical devices and instruments used in vivo;<\/li><li><b>ALD Metal Materials<\/b>(Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni);<\/li><li><b>Piezoelectric layer<\/b>(Zn O, Al N, Zn S);<\/li><li><b>Transparent electrical conductor<\/b>(Zn O: Al, ITO);<\/li><li><b>UV blocking layer<\/b>(Zn O, Ti O2);<\/li><li><b>OLED Passivation<\/b>(Al2O3 );<\/li><li><b>Solid lubrication layer<\/b>(WS2);<\/li><li><b>Photonic Crystals<\/b>(Zn O, Zn S: Mn, Ti O2, Ta2 N5): inner coating of porous alumina and reverse opal;<\/li><li><b>Anti-glare and optical filters<\/b>(Al2O3 , Zn S, Sn O2, Ta 2 O5): Fabry-Perot trigger filter;<\/li><li><b>Electroluminescent devices<\/b>(Sr S: Cu, Zn S: Mn, Zn S: Tb, Sr S: Ce);<\/li><li><b>Processing layer<\/b>(Al2O3, Zr O2): used for etching potential barrier layer, ion diffusion potential barrier layer, coating of electromagnetic recording heads;<\/li><li><b>Optical Applications<\/b>(Al Ti O, Sn O2, Zn O): used in nano-optical materials, solar cells, integrated optical materials, optical thin films, lasers, various dielectric film making;<\/li><li><b>Sensors<\/b>(Sn O2, Ta 2 O5): for gas sensors, pH sensors;<\/li><li>Wear and corrosion inhibiting layer (Al2O3 , Zr O2, WS2)<\/li><\/ul><\/div><div class=\"ace-line ace-line old-record-id-Y6GGdmig4oI6gwxWwVAccx7anPh\">[1] Current status of application and development prospects of atomic layer deposition technology; (2021) 10-0005-05<\/div><\/div><\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b1af884 elementor-widget elementor-widget-spacer\" data-id=\"b1af884\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div 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