{"id":26838,"date":"2022-06-07T16:02:23","date_gmt":"2022-06-07T08:02:23","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26838"},"modified":"2022-10-20T17:10:08","modified_gmt":"2022-10-20T09:10:08","slug":"nanofabrication_electron-beam_lithography","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_litografia_de_haz_electronico\/","title":{"rendered":"Procesado micro y nano | Litograf\u00eda - Litograf\u00eda por haz de electrones"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26838\" class=\"elementor elementor-26838\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6041c934 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"6041c934\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6085f384\" data-id=\"6085f384\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3860eb75 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"3860eb75\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-fd3fda9\" data-id=\"fd3fda9\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-20bf26c9 elementor-widget elementor-widget-heading\" data-id=\"20bf26c9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">Procesado micro y nano | Litograf\u00eda - Litograf\u00eda por haz de electrones<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3a2372b elementor-widget elementor-widget-text-editor\" data-id=\"3a2372b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><span style=\"color: #051c2c;\">De todos los m\u00e9todos de litograf\u00eda no \u00f3ptica, \u00e9ste es el m\u00e1s utilizado. Utiliza un haz de electrones en lugar de fotones para exponer la resistencia e inducir cambios qu\u00edmicos, lo que posteriormente provoca cambios en la solubilidad. Sin embargo, a diferencia de la fotolitograf\u00eda, no tiene m\u00e1scara y el haz no ilumina todo el sustrato.<\/span><\/p><p><span style=\"color: #051c2c;\">El haz de electrones se genera, acelera y enfoca hasta un peque\u00f1o punto y se escanea sobre el sustrato para crear la imagen. El mecanismo de barrido se realiza mediante una combinaci\u00f3n de traslaci\u00f3n mec\u00e1nica de la mesa del sustrato e inclinaci\u00f3n del haz de electrones. El patr\u00f3n se crea modulando la corriente del haz para que se encienda y apague a medida que se escanea el haz. El dispositivo es similar a un microscopio electr\u00f3nico de barrido, ya que el haz de electrones, la bobina de direcci\u00f3n y el sustrato est\u00e1n montados en una c\u00e1mara de alto vac\u00edo.<\/span><\/p><p><span style=\"color: #051c2c;\">La apertura num\u00e9rica de los sistemas de haces de electrones suele ser muy baja, del orden de 0,01. Esto tiene la ventaja de que la profundidad de enfoque es muy grande. Esto tiene la ventaja de una gran profundidad de foco. A pesar de la baja apertura num\u00e9rica, la resoluci\u00f3n esperada deber\u00eda ser del orden de 1 nm. Sin embargo, en la pr\u00e1ctica no es as\u00ed. El par\u00e1metro k1 en los sistemas de haz de electrones es mucho mayor que en los sistemas \u00f3pticos. Como hemos visto antes, el valor m\u00ednimo te\u00f3rico posible de k1 es 0,25, que para electrones de 10 keV conducir\u00eda a una resoluci\u00f3n subnanom\u00e9trica. Sin embargo, en el sistema EBL actual, el valor de k1 es aproximadamente 5. Esto se debe al desenfoque causado por las pobres aberraciones esf\u00e9ricas y crom\u00e1ticas del sistema de enfoque magn\u00e9tico y a la interacci\u00f3n del haz de electrones con el sustrato que emite electrones secundarios. Como resultado, la resoluci\u00f3n real del EBL se sit\u00faa s\u00f3lo en el intervalo de 5 nm.<\/span><\/p><p><span style=\"color: #051c2c;\">La mayor ventaja del EBL es su alta resoluci\u00f3n. Debido a la peque\u00f1a apertura num\u00e9rica, la profundidad de enfoque tambi\u00e9n es grande. Esto lo convierte en un sistema muy permisivo para la litograf\u00eda en sustratos con caracter\u00edsticas topogr\u00e1ficas y peque\u00f1a curvatura. Actualmente, la EBL se utiliza mucho en la fabricaci\u00f3n de m\u00e1scaras litogr\u00e1ficas, sobre todo cuando la resoluci\u00f3n requerida en la m\u00e1scara es superior a la que puede conseguir el esc\u00e1ner l\u00e1ser. \u00c9sta es, con diferencia, la mayor aplicaci\u00f3n comercial de la EBL. En investigaci\u00f3n y desarrollo, la EBL se utiliza siempre que la caracter\u00edstica deseada es inferior a 500 nm aproximadamente, omitiendo la m\u00e1scara y escribiendo el patr\u00f3n directamente sobre la capa de resistencia. Aunque la proyecci\u00f3n UV profunda por inmersi\u00f3n puede conseguirse f\u00e1cilmente por debajo de 100 nm, estas herramientas no suelen estar disponibles fuera de los entornos de gran producci\u00f3n. Por ello, para la investigaci\u00f3n y el desarrollo, la EBL se ha convertido en la primera herramienta de elecci\u00f3n para las paradas de litograf\u00eda de contacto. Al tratarse de un sistema de barrido, es intr\u00ednsecamente lento. Esta velocidad es inversamente proporcional a la resoluci\u00f3n, y disminuye a medida que se reduce el tama\u00f1o del punto del haz para lograr una mayor resoluci\u00f3n. Dependiendo de la densidad del patr\u00f3n y de la dosis requerida, escribir un \u00e1rea de 1 x 1 pulgadas puede llevar varias horas. Otra desventaja es el requisito de que el sustrato sea conductor de la electricidad. Al igual que en la microscop\u00eda electr\u00f3nica de barrido, la corriente del haz de electrones debe conectarse a tierra a trav\u00e9s del sustrato para mantener la neutralidad de la carga. Cualquier efecto de carga local reduce significativamente la resoluci\u00f3n. En el caso de la escritura con fotom\u00e1scara, aunque el sustrato es de vidrio, antes de aplicar la pel\u00edcula de resistencia se deposita una pel\u00edcula met\u00e1lica que se conecta el\u00e9ctricamente a tierra. Dado que el silicio es parcialmente conductor, tambi\u00e9n es posible escribir sobre una pel\u00edcula de resina en un sustrato de silicio. Otros casos de sistemas puramente aislantes requerir\u00e1n una cuidadosa consideraci\u00f3n de c\u00f3mo disipar la acumulaci\u00f3n de carga.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e16f405 elementor-widget elementor-widget-text-editor\" data-id=\"e16f405\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<b><a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\">Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/a>,<\/b> No dude en dejarnos un mensaje con su consulta.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e374a4c elementor-widget elementor-widget-wpforms\" data-id=\"e374a4c\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div 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src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" >\n\t\t\t\tMatrices de microlentes para micro\u00f3ptica y nano\u00f3ptica\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Optics\u4e28Microlens arrays (OEM)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) Subcontrataci\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-nanofabrication\u4e28Nano-Imprinting (NIL) Substitute Processing\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element 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