{"id":26865,"date":"2022-06-07T17:23:36","date_gmt":"2022-06-07T09:23:36","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26865"},"modified":"2022-11-17T14:31:42","modified_gmt":"2022-11-17T06:31:42","slug":"thin_film_deposition","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/deposicion_delgada\/","title":{"rendered":"Micro y nanoprocesamiento | Introducci\u00f3n a la deposici\u00f3n de pel\u00edculas finas"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26865\" class=\"elementor elementor-26865\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1dc53e2c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"1dc53e2c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-77faae72\" data-id=\"77faae72\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-277d3295 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"277d3295\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-161c1dbd\" data-id=\"161c1dbd\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a989da8 elementor-widget elementor-widget-heading\" data-id=\"a989da8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\">Micro y nanoprocesamiento | Introducci\u00f3n a los procesos de deposici\u00f3n de pel\u00edculas finas<\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b13bdf1 elementor-toc--minimized-on-tablet elementor-widget elementor-widget-table-of-contents\" data-id=\"b13bdf1\" data-element_type=\"widget\" data-settings=\"{&quot;headings_by_tags&quot;:[&quot;h4&quot;],&quot;exclude_headings_by_selector&quot;:[],&quot;marker_view&quot;:&quot;numbers&quot;,&quot;minimize_box&quot;:&quot;yes&quot;,&quot;minimized_on&quot;:&quot;tablet&quot;,&quot;hierarchical_view&quot;:&quot;yes&quot;,&quot;min_height&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;min_height_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"table-of-contents.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor-pro - v3.21.0 - 30-04-2024 *\/\n.elementor-widget-table-of-contents .elementor-toc__header-title{color:var(--header-color)}.elementor-widget-table-of-contents.elementor-toc--collapsed .elementor-toc__toggle-button--collapse,.elementor-widget-table-of-contents:not(.elementor-toc--collapsed) .elementor-toc__toggle-button--expand{display:none}.elementor-widget-table-of-contents .elementor-widget-container{min-height:var(--box-min-height);border:var(--box-border-width,1px) solid var(--box-border-color,#9da5ae);border-radius:var(--box-border-radius,3px);background-color:var(--box-background-color);transition:min-height .4s;overflow:hidden}.elementor-toc__header{display:flex;align-items:center;justify-content:space-between;padding:var(--box-padding,20px);background-color:var(--header-background-color);border-bottom:var(--separator-width,1px) solid var(--box-border-color,#9da5ae)}.elementor-toc__header-title{font-size:18px;margin:0;color:var(--header-color);flex-grow:1}.elementor-toc__toggle-button{cursor:pointer;display:inline-flex}.elementor-toc__toggle-button i{color:var(--toggle-button-color)}.elementor-toc__toggle-button 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.elementor-toc__list-wrapper{margin-top:.5em;margin-inline-start:var(--nested-list-indent,1em)}.elementor-toc__list-item-text{transition-duration:var(--item-text-transition-duration)}.elementor-toc__list-item-text:hover{color:var(--item-text-hover-color);-webkit-text-decoration:var(--item-text-hover-decoration);text-decoration:var(--item-text-hover-decoration)}.elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}.elementor-toc__list-item-text-wrapper{display:flex;align-items:center}.elementor-toc__list-item-text-wrapper:before,.elementor-toc__list-item-text-wrapper i{margin-inline-end:8px;color:var(--marker-color)}.elementor-toc__list-item-text-wrapper svg{margin-inline-end:8px;fill:var(--marker-color);height:var(--marker-size,.5em);width:var(--marker-size,.5em)}.elementor-toc__list-item-text-wrapper 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.elementor-toc__list-item-text.elementor-item-active{color:var(--item-text-active-color);-webkit-text-decoration:var(--item-text-active-decoration);text-decoration:var(--item-text-active-decoration)}ol.elementor-toc__list-wrapper{counter-reset:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item{counter-increment:item}ol.elementor-toc__list-wrapper .elementor-toc__list-item-text-wrapper:before{content:counters(item,\".\") \". \"}<\/style>\t\t<div class=\"elementor-toc__header\">\n\t\t\t<div class=\"elementor-toc__header-title\">\n\t\t\t\tCat\u00e1logo\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--expand\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__b13bdf1\" aria-expanded=\"true\" aria-label=\"Abrir la tabla de contenidos\"><i aria-hidden=\"true\" class=\"fas fa-chevron-down\"><\/i><\/div>\n\t\t\t\t<div class=\"elementor-toc__toggle-button elementor-toc__toggle-button--collapse\" role=\"button\" tabindex=\"0\" aria-controls=\"elementor-toc__b13bdf1\" aria-expanded=\"true\" aria-label=\"Cerrar la tabla de contenidos\"><i aria-hidden=\"true\" class=\"fas fa-chevron-up\"><\/i><\/div>\n\t\t\t\t\t<\/div>\n\t\t<div id=\"elementor-toc__b13bdf1\" class=\"elementor-toc__body\">\n\t\t\t<div class=\"elementor-toc__spinner-container\">\n\t\t\t\t<i class=\"elementor-toc__spinner eicon-animation-spin eicon-loading\" aria-hidden=\"true\"><\/i>\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-aa715c1 elementor-widget elementor-widget-spacer\" data-id=\"aa715c1\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2eede1d elementor-widget elementor-widget-heading\" data-id=\"2eede1d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\u00bfQu\u00e9 es la deposici\u00f3n de pel\u00edcula fina (recubrimiento)?<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6438265b elementor-widget elementor-widget-text-editor\" data-id=\"6438265b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div><b>Deposici\u00f3n de pel\u00edculas finas (<span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Revestimiento<\/span><\/b><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>) es el proceso de formaci\u00f3n y dep\u00f3sito de un revestimiento de pel\u00edcula fina sobre el material del sustrato.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>La deposici\u00f3n de pel\u00edculas finas de diversos materiales sobre sustratos es uno de los medios m\u00e1s importantes de micro y nanoprocesamiento.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Las pel\u00edculas tienen muchas propiedades diferentes que pueden utilizarse para modificar o mejorar determinados elementos del rendimiento del sustrato. Por ejemplo, transparentes, duraderas y resistentes al rayado; para aumentar o disminuir la conductividad el\u00e9ctrica o la transmisi\u00f3n de se\u00f1ales, etc.<\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">Los espesores de las pel\u00edculas finas oscilan entre el nan\u00f3metro y la micra.<\/span><\/div><div><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/div><div>La deposici\u00f3n de pel\u00edculas finas es un paso importante en la fabricaci\u00f3n de muchos dispositivos y productos optoelectr\u00f3nicos, de estado s\u00f3lido y m\u00e9dicos, como la electr\u00f3nica de consumo, los l\u00e1seres semiconductores, los l\u00e1seres de fibra, las pantallas LED, los filtros, los semiconductores compuestos, la \u00f3ptica de precisi\u00f3n, los portaobjetos para microscopios y microan\u00e1lisis y los implantes m\u00e9dicos.<\/div><div>\u00a0<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6f63dc elementor-widget elementor-widget-heading\" data-id=\"a6f63dc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Comparaci\u00f3n de los tipos de procesos de deposici\u00f3n de pel\u00edculas finas y sus ventajas e inconvenientes<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f62d0 elementor-widget elementor-widget-text-editor\" data-id=\"35f62d0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div>Los procesos de deposici\u00f3n de pel\u00edcula fina m\u00e1s utilizados en micro y nanotecnolog\u00eda son los siguientes<strong>Deposici\u00f3n f\u00edsica de vapor (PVD)<\/strong>con<strong>Deposici\u00f3n qu\u00edmica en fase vapor (CVD)<\/strong>.<\/div><div>\u00a0<\/div><\/div><\/div><p><b>La deposici\u00f3n f\u00edsica de vapor (PVD) es un m\u00e9todo de crecimiento de pel\u00edculas finas sobre un sustrato que consiste en calentar el material de partida al vac\u00edo para que los \u00e1tomos o mol\u00e9culas escapen de la superficie del material de partida.<\/b>Los principales m\u00e9todos de deposici\u00f3n f\u00edsica de vapor son la deposici\u00f3n de vapor por resistencia o por haz de electrones en vac\u00edo, el recubrimiento por pulverizaci\u00f3n cat\u00f3dica, el recubrimiento por arco de plasma, el recubrimiento i\u00f3nico y la epitaxia por haz molecular, etc. El sistema de evaporaci\u00f3n por haz de electrones y el sistema de pulverizaci\u00f3n cat\u00f3dica de AEMD son ambos de deposici\u00f3n f\u00edsica de vapor.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Cosas<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n f\u00edsica de vapor (PVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 ); font-weight: bold;\">\u00a0<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">pueden dividirse en dos categor\u00edas principales: deposici\u00f3n por evaporaci\u00f3n t\u00e9rmica y deposici\u00f3n por pulverizaci\u00f3n de plasma.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n por evaporaci\u00f3n t\u00e9rmica:<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n por evaporaci\u00f3n de resistencia<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">, ,<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n por evaporaci\u00f3n de haz de electrones<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">(a) Los siguientes son algunos de los productos m\u00e1s comunes y m\u00e1s populares del mundo;<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n por pulverizaci\u00f3n de plasma<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">:: Lo siguiente<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">sputtering DC, sputtering RF, sputtering magnetr\u00f3n, PVD ionizado<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">.<\/span><\/p><p><span style=\"font-size: 1rem; background-color: var( --e-global-color-astglobalcolor5 );\">\u00a0<\/span><\/p><p><b>El dep\u00f3sito qu\u00edmico en fase vapor (CVD) es el proceso por el que una sustancia gaseosa reacciona qu\u00edmicamente en la superficie de un s\u00f3lido y se deposita en ella para formar una pel\u00edcula s\u00f3lida estable.<\/b>Hay cuatro etapas principales importantes: 1) difusi\u00f3n del gas de reacci\u00f3n a la superficie del sustrato; 2) adsorci\u00f3n del gas de reacci\u00f3n en la superficie del sustrato; 3) desprendimiento de la superficie de los subproductos en fase gaseosa generados en la superficie del sustrato; y 4) formaci\u00f3n de una capa de revestimiento a partir de los reactivos remanentes. El uso de t\u00e9cnicas como el plasma y la asistencia l\u00e1ser puede facilitar significativamente las reacciones qu\u00edmicas, permitiendo que la deposici\u00f3n tenga lugar a temperaturas m\u00e1s bajas.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Deposici\u00f3n qu\u00edmica en fase vapor (CVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Incluyendo baja presi\u00f3n (LPCVD), presi\u00f3n atmosf\u00e9rica (APCVD), deposici\u00f3n de capas at\u00f3micas (ALD), plasma mejorado (PECVD) y compuestos org\u00e1nicos met\u00e1licos (MOCVD).<\/span><\/p><p><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/p><p><b>Deposici\u00f3n de capas at\u00f3micas (ALD)<\/b>Es un tipo de deposici\u00f3n qu\u00edmica en fase vapor (CVD), un m\u00e9todo que permite depositar sustancias sobre la superficie de un sustrato en forma de pel\u00edcula at\u00f3mica capa a capa. La deposici\u00f3n en capa at\u00f3mica presenta similitudes con la deposici\u00f3n qu\u00edmica normal. Sin embargo, durante la deposici\u00f3n de capas at\u00f3micas, la reacci\u00f3n qu\u00edmica de la nueva capa de \u00e1tomos se asocia directamente con la capa anterior, lo que permite depositar s\u00f3lo una capa de \u00e1tomos por reacci\u00f3n de este modo.<\/p><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\u00a0<\/b><\/span><\/h6><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>Comparaci\u00f3n de las ventajas e inconvenientes de los distintos m\u00e9todos de deposici\u00f3n de pel\u00edculas<\/b><\/span><\/h6><table><thead><tr><th><strong>Artesan\u00eda<\/strong><\/th><th><strong>Deposici\u00f3n de capas at\u00f3micas<br \/>(ALD)<\/strong><\/th><th><strong>Deposici\u00f3n f\u00edsica de vapor<br \/>(PVD)<\/strong><\/th><th><strong>Deposici\u00f3n qu\u00edmica en fase vapor<br \/>(CVD)<\/strong><\/th><th><strong>Deposici\u00f3n qu\u00edmica en fase vapor a baja presi\u00f3n<br \/>(tubo de horno LPCVD)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>Principio de deposici\u00f3n<\/td><td>Saturaci\u00f3n qu\u00edmica de la superficie<br \/>Reacci\u00f3n-Deposici\u00f3n<\/td><td>Evaporaci\u00f3n-Consolidaci\u00f3n<\/td><td>Reacci\u00f3n en fase gaseosa - deposici\u00f3n<\/td><td>Deposici\u00f3n qu\u00edmica en fase vapor a baja presi\u00f3n<br \/>(Estufa y Tubo)<\/td><\/tr><tr><td>Proceso de deposici\u00f3n<\/td><td>Crecimiento laminar<\/td><td>Crecimiento por nucleaci\u00f3n<\/td><td>Crecimiento por nucleaci\u00f3n<\/td><td>Crecimiento por nucleaci\u00f3n<\/td><\/tr><tr><td>Cobertura de terrazas<\/td><td>Excelente<\/td><td>General<\/td><td>Bien<\/td><td>Bien<\/td><\/tr><tr><td>Tasa de deposici\u00f3n<\/td><td>lento<\/td><td>R\u00e1pido<\/td><td>R\u00e1pido<\/td><td>M\u00e1s lento<\/td><\/tr><tr><td>Temperatura de deposici\u00f3n<\/td><td>Bajo (&lt;500\u00b0C)<\/td><td>Bajo<\/td><td>Alta<\/td><td>M\u00e1s alto<\/td><\/tr><tr><td>Homogeneidad<\/td><td>Excelente<br \/>0,07 - 0,1 nm<\/td><td>General<br \/>Alrededor de 5nm<\/td><td>Mejor<br \/>0,5 - 2nm<\/td><td><p>Mejor<\/p><\/td><\/tr><tr><td>Control del espesor<\/td><td>N\u00famero de ciclos de reacci\u00f3n<\/td><td>Tiempo de deposici\u00f3n<\/td><td>Tiempo de deposici\u00f3n<br \/>Presi\u00f3n parcial en fase vapor<\/td><td>Tiempo de deposici\u00f3n<br \/>Proporci\u00f3n de gas<\/td><\/tr><tr><td>Ingredientes<\/td><td>Uniformidad con pocas impurezas<\/td><td>Sin adulterar<\/td><td>F\u00e1cil de contener impurezas<\/td><td>Sin adulterar<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7196e2d elementor-widget elementor-widget-heading\" data-id=\"7196e2d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">Tipos de pel\u00edcula y escenarios de aplicaci\u00f3n<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5b53a73 elementor-widget elementor-widget-text-editor\" data-id=\"5b53a73\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"font-size: 16px; font-style: normal;\" width=\"978\"><tbody><tr><td width=\"98\">Tipos de pel\u00edcula<\/td><td width=\"197\">Clasificaci\u00f3n<\/td><td width=\"277\">Materiales de deposici\u00f3n de pel\u00edculas finas<\/td><td width=\"405\">Aplicaciones<\/td><\/tr><tr><td rowspan=\"5\" width=\"98\">Semiconductores<\/td><td width=\"197\">Polisilicio<\/td><td width=\"277\">SiH4 (silano)<\/td><td width=\"405\">Compuertas, resistencias de alto valor, etc. para MOS<\/td><\/tr><tr><td rowspan=\"3\" width=\"197\">Silicio monocristalino<\/td><td width=\"277\">SiH\u2082Cl\u2082 (diclorosilano; DCS)<\/td><td rowspan=\"3\" width=\"405\">Capas epitaxiales monocristalinas para dispositivos de potencia, etc.<\/td><\/tr><tr><td width=\"277\">SiHCl3 (triclorosilano; TCS)<\/td><\/tr><tr><td width=\"277\">SiCl4 (cloruro de silicio; Siltet)<\/td><\/tr><tr><td width=\"197\">Silicio amorfo<\/td><td width=\"277\">SiH4 (silano)<\/td><td width=\"405\">C\u00e9lulas solares Alfa-Si, \u00e1rea de la zanja fuente\/drenaje, etc.<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">Calidad diel\u00e9ctrica<\/td><td width=\"197\">Si02 (di\u00f3xido de silicio)<\/td><td width=\"277\">SiH4, O2<br \/>SiH4, N20<br \/>Si(OC2H5)4 (tetraetoxisilano), O2\/O3<\/td><td width=\"405\">Las pel\u00edculas diel\u00e9ctricas m\u00e1s utilizadas, STI, \u00f3xido de puerta, paredes laterales, PMD, IMD, resistencia, m\u00e1scara dura, etc.<\/td><\/tr><tr><td width=\"197\">Si3N4\/SiN (nitruro de silicio)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<br \/>C8H22N2Si [ Bis(terc-butilamino)silano ]<\/td><td width=\"405\">Capa de parada de grabado, m\u00e1scara dura, capa de pasivaci\u00f3n, etc.<\/td><\/tr><tr><td width=\"197\">SiON (nitruro de silicio)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<\/td><td width=\"405\">Capas antirreflectantes, rejillas de \u00f3xido, m\u00e1scaras duras, etc.<\/td><\/tr><tr><td width=\"197\">PSG\/BPSG <br \/>(Fosforosilicato \/ vidrio de borosilicato)<\/td><td width=\"277\">Silanos, boranos, fosforanos, etc.<\/td><td width=\"405\">PMD, capa de pasivaci\u00f3n, etc.<\/td><\/tr><tr><td width=\"197\">Materiales de bajo K (bajo diel\u00e9ctrico)<\/td><td width=\"277\">Poliimida (PI), etc.<\/td><td width=\"405\">Sustituci\u00f3n de SiO2 en PMD<\/td><\/tr><tr><td width=\"197\">Materiales de alto K (alto diel\u00e9ctrico)<\/td><td width=\"277\">Hf, O2, SiO2, etc.<\/td><td width=\"405\">Sustituci\u00f3n de SiO2 en la capa media de la rejilla<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">Metal<br \/>Compuestos met\u00e1licos<\/td><td width=\"197\">W (tungsteno)<\/td><td width=\"277\">WF6 (hexafluoruro de volframio), SiH4, H2<\/td><td width=\"405\">L\u00e1minas el\u00e9ctricas, l\u00e1minas \u00f3pticas, l\u00e1minas r\u00edgidas, l\u00e1minas resistentes a la corrosi\u00f3n, orificios de contacto, orificios pasantes, compuertas, etc.<\/td><\/tr><tr><td width=\"197\">WSi2\/TiSi2<br \/>\/CoSix\/NiSi<\/td><td width=\"277\">WF6, silano, etc.<\/td><td width=\"405\">Capa de siliciuro en la fuente\/drenaje\/puerta<\/td><\/tr><tr><td width=\"197\">TiN<\/td><td width=\"277\">Ti[N(CH3)2]4 [ tetraquis(dimetilamino)titanio ]<\/td><td rowspan=\"3\" width=\"405\">Capas de barrera, rejillas met\u00e1licas, etc.<\/td><\/tr><tr><td width=\"197\">Ti<\/td><td width=\"277\">TiCl4 (cloruro de titanio)<\/td><\/tr><tr><td width=\"197\">Ta\/TaN<\/td><td width=\"277\">\u00a0<\/td><\/tr><tr><td width=\"197\">Au\/Al\/Cu<\/td><td width=\"277\">\u00a0<\/td><td width=\"405\">Capas met\u00e1licas, rejillas met\u00e1licas, etc.<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-33a3365 elementor-widget elementor-widget-text-editor\" data-id=\"33a3365\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><b>Lectura ampliada.<\/b><\/p><ul><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/anofabrication_navi\/\">Micro y nanoprocesamiento<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_nanoimpresion\/\" target=\"_blank\" rel=\"noopener\">Micro y nanoprocesado | Fotolitograf\u00eda - Litograf\u00eda de nanoimpresi\u00f3n\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_fib_litografia\/\" target=\"_blank\" rel=\"noopener\">Procesado micro y nano | Litograf\u00eda - Foco en las FIB de haz i\u00f3nico<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_litografia_de_haz_electronico\/\" target=\"_blank\" rel=\"noopener\">Procesado micro y nano | Litograf\u00eda - Litograf\u00eda por haz de electrones\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_grabado\/\" target=\"_blank\" rel=\"noopener\">Micro y nanoprocesamiento | Fotolitograf\u00eda - Litograf\u00eda \u00f3ptica\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_grabado\/\" target=\"_blank\" rel=\"noopener\">Micro y nanoprocesamiento | Grabado\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_epitaxia\/\" target=\"_blank\" rel=\"noopener\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - Epitaxia\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_pvd\/\" target=\"_blank\" rel=\"noopener\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - PVD\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/anofabrication_cvd\/\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - CVD<\/a><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fdcf92b elementor-widget elementor-widget-text-editor\" data-id=\"fdcf92b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<b><a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/revestimiento-de-fabricacion\/\" target=\"_blank\" rel=\"noopener\">\u00a0Deposici\u00f3n de capas finas \/ Servicios de dise\u00f1o de procesamiento de microestructuras y nanoestructuras<\/a>,<\/b> No dude en dejarnos 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name=search_term_string\"}],\"inLanguage\":\"es\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/es\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -","description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/deposicion_delgada\/","og_locale":"es_ES","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd","og_description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","og_url":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/deposicion_delgada\/","article_published_time":"2022-06-07T09:23:36+00:00","article_modified_time":"2022-11-17T06:31:42+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Escrito por":"admin","Tiempo de lectura":"3 minutos"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd","datePublished":"2022-06-07T09:23:36+00:00","dateModified":"2022-11-17T06:31:42+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"},"wordCount":112,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"es"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/","name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-07T09:23:36+00:00","dateModified":"2022-11-17T06:31:42+00:00","description":"\u5728\u57fa\u7247\u4e0a\u6c89\u79ef\u5404\u79cd\u6750\u6599\u7684\u8584\u819c\u662f\u5fae\u7eb3\u52a0\u5de5\u7684\u91cd\u8981\u624b\u6bb5\u4e4b\u4e00\uff0c\u4e3b\u8981\u65b9\u6cd5\u6709\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u3001\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u3002\u5e73\u53f0\u73b0\u6709\u591a\u53f0\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u5305\u62ec\uff1a\u6c89\u79ef\u4ecb\u8d28\u8584\u819c\u7684\u7b49\u79bb\u5b50\u4f53\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u7cfb\u7edf\uff08PECVD\uff09\u548c\u4f4e\u538b\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08LPCVD\uff09\u7089\u7ba1\uff1b\u6c89\u79ef\u91d1\u5c5e\u3001\u78c1\u6027\u6750\u6599\u548c\u5316\u5408\u7269\u7b49\u591a\u6837\u6750\u6599\u7684\u7535\u5b50\u675f\u84b8\u53d1\u9540\u819c\u8bbe\u5907\u548c\u591a\u9776\u78c1\u63a7\u6e85\u5c04\u9540\u819c\u7cfb\u7edf\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb"},"inLanguage":"es","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/thin_film_deposition\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u4ecb\u7ecd"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"es"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/es\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26865","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/comments?post=26865"}],"version-history":[{"count":18,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26865\/revisions"}],"predecessor-version":[{"id":29175,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26865\/revisions\/29175"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/media?parent=26865"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/categories?post=26865"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/tags?post=26865"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}