{"id":26874,"date":"2022-06-07T17:29:28","date_gmt":"2022-06-07T09:29:28","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26874"},"modified":"2022-10-26T16:00:14","modified_gmt":"2022-10-26T08:00:14","slug":"dry_etching","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/grabado-en-seco\/","title":{"rendered":"Micro y nanoprocesado | Introducci\u00f3n al grabado en seco"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26874\" class=\"elementor elementor-26874\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-531e6456 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"531e6456\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4d540fd9\" data-id=\"4d540fd9\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3550fbab elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"3550fbab\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-6ea21e4b\" data-id=\"6ea21e4b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-30f91159 elementor-widget elementor-widget-heading\" data-id=\"30f91159\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>Micro y nanoprocesamiento | Introducci\u00f3n a los procesos de grabado en seco<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-31e44b28 elementor-widget elementor-widget-text-editor\" data-id=\"31e44b28\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><b>Las t\u00e9cnicas de grabado se dividen en: grabado h\u00famedo y grabado seco<\/b><\/p><p><b>El grabado h\u00famedo se divide en: grabado qu\u00edmico y grabado electrol\u00edtico<\/b><\/p><p><b>El mordentado en seco se divide en: mordentado por plasma, mordentado por pulverizaci\u00f3n de haces de iones, mordentado por iones reactivos<\/b><\/p><p>El grabado en seco es una t\u00e9cnica para grabar pel\u00edculas finas con la naturaleza qu\u00edmicamente m\u00e1s activa del plasma.<\/p><p>En funci\u00f3n del mecanismo de grabado mediante iones, existen tres tipos de grabado en seco:<b>Aguafuerte f\u00edsico, aguafuerte qu\u00edmico, aguafuerte f\u00edsico-qu\u00edmico.<\/b>El mordentado f\u00edsico, tambi\u00e9n conocido como mordentado por pulverizaci\u00f3n cat\u00f3dica, es altamente direccional y puede ser anisotr\u00f3pico, pero no puede ser selectivo. El mordentado qu\u00edmico utiliza grupos at\u00f3micos qu\u00edmicamente activos en el plasma para reaccionar qu\u00edmicamente con el material que se est\u00e1 grabando, logrando as\u00ed el prop\u00f3sito del mordentado. Como el n\u00facleo del mordentado sigue siendo una reacci\u00f3n qu\u00edmica, el efecto del mordentado es algo similar al del mordentado h\u00famedo, con mejor selectividad pero menos anisotrop\u00eda.<\/p><p><strong>Comparaci\u00f3n de los mecanismos de mordentado en seco por plasma y de los par\u00e1metros de mordentado<\/strong><\/p><table><thead><tr><th>Par\u00e1metros de grabado<\/th><th>Grabado f\u00edsico - Corte vertical del campo de RF<\/th><th>Grabado qu\u00edmico - Hoja paralela de campo RF<\/th><th>Grabado f\u00edsico y qu\u00edmico - Hoja vertical de campo RF<\/th><\/tr><\/thead><tbody><tr><td>Mecanismo de grabado<\/td><td>Pulverizaci\u00f3n f\u00edsica de iones<\/td><td>Qu\u00edmica de los elementos reactivos<\/td><td>Pulverizaci\u00f3n i\u00f3nica y qu\u00edmica de elementos reactivos<\/td><\/tr><tr><td>Perfil de la pared lateral<\/td><td>Anis\u00f3tropo<\/td><td>Is\u00f3tropo<\/td><td>Anis\u00f3tropo<\/td><\/tr><tr><td>Elija entre m\u00e1s de<\/td><td>Elevaci\u00f3n baja\/dif\u00edcil (1:1)<\/td><td>Muy alto (500:1)<\/td><td>Alta (de 5:1 a 100:1)<\/td><\/tr><tr><td>Velocidad de grabado<\/td><td>Alta<\/td><td>lento<\/td><td>Moderado<\/td><\/tr><tr><td>Control del ancho de l\u00ednea<\/td><td>Bien<\/td><td>Muy pobre<\/td><td>Muy buena<\/td><\/tr><\/tbody><\/table><p>Seg\u00fan el m\u00e9todo de generaci\u00f3n del plasma, se clasifican el plasma de acoplamiento inductivo ICP, el plasma de acoplamiento capacitivo CCP y el plasma de resonancia de ciclotr\u00f3n electr\u00f3nico de microondas ECR. resonancia ciclotr\u00f3nica).<\/p><p>\u00a0<\/p><p><strong>Lectura ampliada.<\/strong><\/p><p>\u00a0<\/p><ul><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/anofabrication_navi\/\">Micro y nanoprocesamiento<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_nanoimpresion\/\">Micro y nanoprocesado | Fotolitograf\u00eda - Litograf\u00eda de nanoimpresi\u00f3n<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_fib_litografia\/\">Procesado micro y nano | Litograf\u00eda - Foco en las FIB de haz i\u00f3nico<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_litografia_de_haz_electronico\/\">Procesado micro y nano | Litograf\u00eda - Litograf\u00eda por haz de electrones<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_grabado\/\">Micro y nanoprocesamiento | Fotolitograf\u00eda - Litograf\u00eda \u00f3ptica<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_grabado\/\">Micro y nanoprocesamiento | Grabado<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_epitaxia\/\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - Epitaxia<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_pvd\/\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - PVD<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/anofabrication_cvd\/\">Micro y nanoprocesado | Preparaci\u00f3n de pel\u00edculas finas - CVD<\/a><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-48e4834 elementor-widget elementor-widget-text-editor\" data-id=\"48e4834\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<b><a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\">Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/a>,<\/b> No dude en dejarnos un mensaje con su consulta.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div 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category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" >\n\t\t\t\tSistema de impresi\u00f3n 3D por polimerizaci\u00f3n bifot\u00f3nica de alta precisi\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Sistema de impresi\u00f3n 3D por polimerizaci\u00f3n bifot\u00f3nica de alta precisi\u00f3n\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" >\n\t\t\t\tMatrices de microlentes para micro\u00f3ptica y nano\u00f3ptica\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Optics\u4e28Microlens arrays (OEM)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) Subcontrataci\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-nanofabrication\u4e28Nano-Imprinting (NIL) Substitute Processing\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u5e72\u6cd5\u523b\u8680\u5de5\u827a\u4ecb\u7ecd 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26874","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | \u5e72\u6cd5\u523b\u8680\u4ecb\u7ecd -<\/title>\n<meta name=\"description\" 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