{"id":26897,"date":"2022-06-08T15:48:00","date_gmt":"2022-06-08T07:48:00","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26897"},"modified":"2022-10-20T16:42:30","modified_gmt":"2022-10-20T08:42:30","slug":"mems_fabrication_01","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabrication_01\/","title":{"rendered":"Procesado micro y nano | Procesado fino MEMS (I)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26897\" class=\"elementor elementor-26897\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-3d4874ac elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"3d4874ac\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-49b5460b\" data-id=\"49b5460b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-2bcfa363 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"2bcfa363\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-61867b23\" data-id=\"61867b23\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5d06647e elementor-widget elementor-widget-heading\" data-id=\"5d06647e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Micro y nanoprocesamiento | Introducci\u00f3n al procesamiento MEMS (I)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6014324b elementor-widget elementor-widget-text-editor\" data-id=\"6014324b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Microsistema (Microsystem, el t\u00e9rmino europeo habitual), Sistema Microelectromec\u00e1nico (MEMS, el t\u00e9rmino estadounidense habitual) y Microm\u00e1quina (Micromachine, el t\u00e9rmino japon\u00e9s habitual) son tres t\u00e9rminos diferentes que se refieren al uso de la moderna tecnolog\u00eda de micro y nanoprocesamiento para integrar en un chip microsensores, microactuadores, microelectr\u00f3nica, microenerg\u00eda, circuitos de control y otras unidades microfuncionales, con funciones \u00f3pticas, electr\u00f3nicas, mec\u00e1nicas, de adquisici\u00f3n de datos y de an\u00e1lisis, La microm\u00e1quina es un microsistema inteligente completo con funciones \u00f3pticas, electr\u00f3nicas, mec\u00e1nicas, de adquisici\u00f3n de datos y de an\u00e1lisis, que se integra en un chip utilizando la moderna tecnolog\u00eda de micro y nanoprocesamiento.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Con las innovaciones y los avances en los campos de la medicina, la biolog\u00eda, la defensa, la protecci\u00f3n del medio ambiente, las comunicaciones, la aviaci\u00f3n y la industria aeroespacial, existe una b\u00fasqueda constante de sistemas y dispositivos de escala cada vez m\u00e1s peque\u00f1a, pero de funcionalidad cada vez m\u00e1s sofisticada. La idea visionaria de que la miniaturizaci\u00f3n es una importante direcci\u00f3n de futuro ya se plante\u00f3 en 2007, y se previ\u00f3 que la tecnolog\u00eda de fabricaci\u00f3n se desarrollar\u00eda siguiendo una v\u00eda de lo macrosc\u00f3pico a lo microsc\u00f3pico, lo que llevar\u00eda a la creaci\u00f3n de diversas herramientas de producci\u00f3n en serie a escala microsc\u00f3pica.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Desde la invenci\u00f3n del transistor por Badin-Benlet y otros en 1948, se inici\u00f3 la investigaci\u00f3n sobre la microfabricaci\u00f3n de materiales semiconductores, con el objetivo de integrar m\u00e1s unidades funcionales de electr\u00f3nica en el \u00e1rea m\u00e1s peque\u00f1a posible. El r\u00e1pido desarrollo de la microelectr\u00f3nica ha provocado una reducci\u00f3n constante de la escala de los chips de circuitos integrados y ha estimulado la b\u00fasqueda de nuevos avances en la tecnolog\u00eda de fabricaci\u00f3n en el campo de la producci\u00f3n a microescala, cuando se vio que pod\u00edan fabricarse simult\u00e1neamente millones de piezas diminutas y diestras utilizando la tecnolog\u00eda de fabricaci\u00f3n por lotes de chips semiconductores.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Esto condujo a una nueva revoluci\u00f3n en la fabricaci\u00f3n micromec\u00e1nica con la producci\u00f3n de prototipos a escala microm\u00e9trica de muchos sistemas macromec\u00e1nicos.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">En 1962 se present\u00f3 el primer microsensor de presi\u00f3n de silicio, al que siguieron microestructuras como engranajes, bombas de engranajes y turbinas neum\u00e1ticas de un tama\u00f1o comprendido entre 50um y 500um, y en 1987 se desarrollaron micromotores electrost\u00e1ticos de silicio con di\u00e1metros de rotor de 60-120um, lo que demostr\u00f3 el potencial de la utilizaci\u00f3n de procesos de micromecanizado de silicio para crear min\u00fasculas estructuras m\u00f3viles y microsistemas compatibles con circuitos integrados, que propiciaron la aparici\u00f3n de los microsistemas electromec\u00e1nicos (MEMS). La conferencia IEEE Micro Robots and Teleoperators de 1987, celebrada en Estados Unidos bajo el lema \"Small Machines, Big Opportunities - A Report on the Emerging Field of Microdynamics\", marc\u00f3 el inicio de un auge mundial de la investigaci\u00f3n. Esto marc\u00f3 el inicio de un boom mundial de la investigaci\u00f3n.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Los sistemas microelectromec\u00e1nicos no son s\u00f3lo una miniaturizaci\u00f3n de la macromec\u00e1nica o una simple superposici\u00f3n de microestructuras, sino un sistema completo con un gran n\u00famero de interfaces que conectan entre s\u00ed distintas unidades funcionales para lograr diversas funciones. Las se\u00f1ales f\u00edsicas y qu\u00edmicas como la luz, la electricidad, la temperatura, la fuerza y el sonido procedentes del entorno exterior son detectadas por sensores y transformadas en se\u00f1ales el\u00e9ctricas, que se adquieren, convierten y procesan antes de ser transmitidas al controlador y amplificadas por un amplificador para controlar la interacci\u00f3n entre el actuador y el mundo exterior. A diferencia de los circuitos integrados tradicionales, que s\u00f3lo implican una funci\u00f3n el\u00e9ctrica, los sistemas microelectromec\u00e1nicos pueden detectar se\u00f1ales f\u00edsicas y qu\u00edmicas como luz, electricidad, temperatura, fuerza y sonido del mundo exterior a trav\u00e9s de sensores y controlar la interacci\u00f3n de los actuadores con el mundo exterior.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">La tecnolog\u00eda de sistemas microelectromec\u00e1nicos es una disciplina multidisciplinar emergente en la que intervienen la micromec\u00e1nica de precisi\u00f3n, la microelectr\u00f3nica, la ciencia de los materiales, la microfabricaci\u00f3n, la tecnolog\u00eda de sistemas y control y otras disciplinas fundamentales como la f\u00edsica, la qu\u00edmica, la mec\u00e1nica y la biolog\u00eda. El objetivo de los sistemas microelectromec\u00e1nicos es, por un lado, permitir la producci\u00f3n de millones de piezas de microcomponentes mediante la miniaturizaci\u00f3n y la integraci\u00f3n, y reducir enormemente los costes, adem\u00e1s de contar con las ventajas del ahorro de energ\u00eda, el ahorro de material, la peque\u00f1a inercia, el f\u00e1cil control, la alta velocidad, la alta densidad de informaci\u00f3n, la alta densidad funcional, la alta densidad de interconexi\u00f3n, etc., y poder lograr una gran variedad de funciones en un espacio muy reducido; por otro lado, tambi\u00e9n radica en la preparaci\u00f3n de varios tipos de microsistemas con diferentes funciones nuevas. Entre ellos se encuentran las micropinzas que pueden recoger un gl\u00f3bulo rojo, las mariposas que pueden volar a trav\u00e9s de campos magn\u00e9ticos y los microrobots que pueden introducirse en los vasos sangu\u00edneos del cuerpo humano y realizar tratamientos m\u00e9dicos mediante coordinaci\u00f3n y control multivariados.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">La tecnolog\u00eda de los sistemas microelectromec\u00e1nicos es un sistema diminuto y complejo, para conseguir este sistema, adem\u00e1s de la investigaci\u00f3n b\u00e1sica te\u00f3rica, tambi\u00e9n es necesario desarrollar una variedad de tecnolog\u00edas b\u00e1sicas, que incluyen, (1) la tecnolog\u00eda de dise\u00f1o de sistemas microelectromec\u00e1nicos, incluyendo la selecci\u00f3n de materiales, tales como materiales de construcci\u00f3n y materiales funcionales (2) la tecnolog\u00eda de microfabricaci\u00f3n, tales como el procesamiento de alta profundidad a la relaci\u00f3n de anchura, de m\u00faltiples capas o procesamiento de microestructura tridimensional (3) micro-sensor de luz, electricidad, temperatura, fuerza,,, sonido (4) microactuadores microbombas, microv\u00e1lvulas, microinterruptores, etc. (5) ensamblaje de sistemas microelectromec\u00e1nicos y tecnolog\u00edas clave como la tecnolog\u00eda de uni\u00f3n. La investigaci\u00f3n b\u00e1sica en tecnolog\u00eda de microsistemas abarca los principales problemas a los que se enfrenta la nanotecnolog\u00eda. A medida que disminuye el tama\u00f1o del objeto de investigaci\u00f3n, es necesario explorar y conocer en profundidad la microdin\u00e1mica, la microhidrodin\u00e1mica, la microtermodin\u00e1mica, la microfricci\u00f3n, la micro\u00f3ptica, la microestructura y los efectos f\u00edsicos superficiales y los procesos qu\u00edmicos a escala micronano.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: rgb(5, 28, 44);\">Entre las tecnolog\u00edas b\u00e1sicas de los MEMS, la tecnolog\u00eda de microfabricaci\u00f3n es la base para la realizaci\u00f3n de MEMS y es la tecnolog\u00eda central y el punto caliente de investigaci\u00f3n de MEMS.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1206aee7 elementor-widget elementor-widget-text-editor\" data-id=\"1206aee7\" data-element_type=\"widget\" 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sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" >\n\t\t\t\tMatrices de microlentes para micro\u00f3ptica y nano\u00f3ptica\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Optics\u4e28Microlens arrays (OEM)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) Subcontrataci\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" 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aria-label=\"M\u00e1s informaci\u00f3n sobre Procesado micro-nano | Principios del procesado litogr\u00e1fico por haz de electrones\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4d2d3e53 elementor-widget elementor-widget-heading\" data-id=\"4d2d3e53\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/es\/vision\/\">M\u00e1s relacionados...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae 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\u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"es\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00) -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-08T07:48:00+00:00\",\"dateModified\":\"2022-10-20T08:42:30+00:00\",\"description\":\"MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684\u5148\u540e\uff0c\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/#breadcrumb\"},\"inLanguage\":\"es\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"es\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/es\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00) -","description":"MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684\u5148\u540e\uff0c\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabrication_01\/","og_locale":"es_ES","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00)","og_description":"MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684\u5148\u540e\uff0c\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","og_url":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabrication_01\/","article_published_time":"2022-06-08T07:48:00+00:00","article_modified_time":"2022-10-20T08:42:30+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Escrito por":"admin","Tiempo de lectura":"2 minutos"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00)","datePublished":"2022-06-08T07:48:00+00:00","dateModified":"2022-10-20T08:42:30+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/"},"wordCount":26,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"es"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/","name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00) -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-08T07:48:00+00:00","dateModified":"2022-10-20T08:42:30+00:00","description":"MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684\u5148\u540e\uff0c\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/#breadcrumb"},"inLanguage":"es","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_01\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e00)"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"es"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/es\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26897","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/comments?post=26897"}],"version-history":[{"count":14,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26897\/revisions"}],"predecessor-version":[{"id":28250,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26897\/revisions\/28250"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/media?parent=26897"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/categories?post=26897"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/tags?post=26897"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}