{"id":26914,"date":"2022-06-08T16:05:44","date_gmt":"2022-06-08T08:05:44","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26914"},"modified":"2022-10-20T16:36:52","modified_gmt":"2022-10-20T08:36:52","slug":"mems_fabrication_03","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabrication_03\/","title":{"rendered":"Micro y nanoprocesamiento | Procesado fino MEMS (III)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26914\" class=\"elementor elementor-26914\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-82048c0 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"82048c0\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6ad832a4\" data-id=\"6ad832a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-5b1571ac elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5b1571ac\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-78b5e856\" data-id=\"78b5e856\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-49537c63 elementor-widget elementor-widget-heading\" data-id=\"49537c63\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Micro y nanoprocesamiento | Procesado fino MEMS (III)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-22cbc296 elementor-widget elementor-widget-text-editor\" data-id=\"22cbc296\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">La tecnolog\u00eda de microfabricaci\u00f3n para MEMS se cre\u00f3 sobre la base de los circuitos integrados, con mecanizado de ultraprecisi\u00f3n, grabado i\u00f3nico reactivo profundo, tecnolog\u00eda LIGA y cuasi-LIGA, tecnolog\u00eda de ensamblaje molecular, etc\u00e9tera. Los m\u00e9todos de procesamiento incluyen haz de electrones, haz de iones, haz de fotones (UV, rayos X y haz l\u00e1ser), haz at\u00f3mico, haz molecular, plasma, ultrasonidos, microondas, qu\u00edmica y electroqu\u00edmica, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.1 Tecnolog\u00eda de mecanizado de ultraprecisi\u00f3n<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">La tecnolog\u00eda de mecanizado de ultraprecisi\u00f3n consiste en utilizar herramientas para cambiar la forma del material o destruir la capa superficial del material y eliminarla en forma de virutas para conseguir la forma deseada. Entre ellas se encuentran las herramientas de diamante monocristalino para torneado y fresado, la tecnolog\u00eda de microperforaci\u00f3n para microtaladros helicoidales y la tecnolog\u00eda de rectificado fino. El mecanizado de ultraprecisi\u00f3n se caracteriza por la posibilidad de procesar formas tridimensionales complejas, y ha producido con \u00e9xito componentes tridimensionales diminutos con dimensiones de 10 a 100 \u03bcm. El di\u00e1metro m\u00e1s peque\u00f1o del extremo del eje es de 10\u03bcm.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.2 Tecnolog\u00eda de microfabricaci\u00f3n de silicio<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El silicio es el material m\u00e1s b\u00e1sico para el micromecanizado y la tecnolog\u00eda de microfabricaci\u00f3n suele implicar materiales de silicio. Como extensi\u00f3n de la tecnolog\u00eda de fabricaci\u00f3n de circuitos integrados de silicio, la tecnolog\u00eda de microfabricaci\u00f3n de silicio se refiere a la producci\u00f3n de diversos componentes micromecanizados basados en materiales de silicio.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) Litograf\u00eda de circuitos integrados<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El proceso de fotolitograf\u00eda para circuitos integrados es el siguiente: en primer lugar, se oxida el sustrato (principalmente silicio) para formar una pel\u00edcula protectora de SiO2; a continuaci\u00f3n, se aplica un fotopol\u00edmero a la pel\u00edcula protectora; se expone la m\u00e1scara bajo una fuente de luz prescrita; se realiza el revelado; se graba la parte de la ventana de la pel\u00edcula protectora con un agente grabador; por \u00faltimo, se retira el fotopol\u00edmero para obtener el mismo patr\u00f3n microsc\u00f3pico que el de la m\u00e1scara.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Los factores que afectan al tama\u00f1o m\u00ednimo de las caracter\u00edsticas (resoluci\u00f3n) de un gr\u00e1fico son: las caracter\u00edsticas de exposici\u00f3n de la pel\u00edcula fotogr\u00e1fica, el grosor y la uniformidad de la capa de la pel\u00edcula, las caracter\u00edsticas de exposici\u00f3n del haz de la fuente de luz a la capa de la pel\u00edcula fotogr\u00e1fica (difracci\u00f3n, dispersi\u00f3n), el proceso de revelado y grabado y el m\u00e9todo de exposici\u00f3n. Los m\u00e9todos de exposici\u00f3n incluyen contacto, proximidad y proyecci\u00f3n. La exposici\u00f3n por contacto permite obtener una precisi\u00f3n inferior a \u03bcm, pero no es apta para la producci\u00f3n en serie, ya que la m\u00e1scara en el proceso de exposici\u00f3n para soportar la carga mec\u00e1nica, la superficie de contacto es f\u00e1cil de rayar por las part\u00edculas; la exposici\u00f3n por proximidad, en la m\u00e1scara y el sustrato entre la brecha de 20 a 50\u03bcm, lo que reduce el desgaste de la m\u00e1scara, pero debido al efecto de difracci\u00f3n, la precisi\u00f3n se limita a 2\u03bcm; la exposici\u00f3n por proyecci\u00f3n se puede obtener alrededor de 0,5\u03bcm de precisi\u00f3n estructural.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) Micromecanizado corporal<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El micromecanizado in vivo permite fabricar microestructuras de silicio en tres dimensiones, lo que permite obtener piezas micromec\u00e1nicas con elevadas relaciones de aspecto directamente en la oblea de silicio. Las obleas de silicio se someten primero a un pretratamiento de grabado \u00f3ptico y, a continuaci\u00f3n, se elimina el material de resistencia expuesto. Mediante el uso selectivo de una soluci\u00f3n de grabado anis\u00f3tropo en la resistencia, se pueden obtener ranuras profundas en el sustrato y utilizar la resistencia restante como m\u00e1scara, con la forma final determinada \u00fanicamente por la orientaci\u00f3n de la red del sustrato.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Con esta tecnolog\u00eda se pueden fabricar diferentes estructuras, como puentes, vigas, l\u00e1minas, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Las obleas fabricadas mediante micromecanizado a granel pueden unirse mediante pegado u otras t\u00e9cnicas de interconexi\u00f3n para formar complejas estructuras tridimensionales.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Dado que la orientaci\u00f3n de la red de silicio es constante, no se pueden formar c\u00edrculos simples, agujeros cil\u00edndricos o vol\u00famenes con esta t\u00e9cnica. Para construir la oblea con precisi\u00f3n, es necesario controlar con exactitud cu\u00e1ndo interrumpir el proceso de grabado.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) Micromecanizado de superficies<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Mediante t\u00e9cnicas de micromecanizado superficial, se pueden producir estructuras o pel\u00edculas en voladizo que sobresalen de la superficie del sustrato. El proceso es el siguiente:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(i) formaci\u00f3n de una denominada capa de sacrificio mediante fotolitograf\u00eda; (ii) eliminaci\u00f3n selectiva del material superficial; (iii) deposici\u00f3n de una capa estructural de silicio policristalino; (iv) grabado fotolitogr\u00e1fico; y (v) erosi\u00f3n del material de la capa de sacrificio para obtener la microestructura deseada.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Para obtener microestructuras tridimensionales m\u00e1s complejas, pueden a\u00f1adirse sucesivamente capas de sacrificio y estructurales, utilizando t\u00e9cnicas adecuadas de litograf\u00eda y grabado, respectivamente.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Con este m\u00e9todo es posible formar complejas microestructuras tridimensionales de muchas capas finas de hasta 20 \u03bcm de altura.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) Litograf\u00eda de tonos grises<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Para obtener microestructuras mejoradas mediante fotolitograf\u00eda, se ha desarrollado una t\u00e9cnica conocida como litograf\u00eda de tonos grises. Esto puede lograrse variando el grosor de la capa de cromo o colocando agujeros muy peque\u00f1os y dispuestos con precisi\u00f3n en la capa, de modo que distintas zonas de la resistencia reciban distintas intensidades de luz, lo que da lugar a distintos niveles de corrosi\u00f3n y, por tanto, a estructuras grabadas especiales.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(5) Tecnolog\u00eda Lift-Off<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Una vez depositado el material estructural por pulverizaci\u00f3n cat\u00f3dica, se retira la capa de laca en soluci\u00f3n para que el material estructural depositado sobre ella se desprenda con la laca, de ah\u00ed el t\u00e9rmino tecnolog\u00eda Lift-Off. Esta t\u00e9cnica es especialmente adecuada para la fabricaci\u00f3n de metales dif\u00edciles de grabar y tambi\u00e9n puede utilizarse para la fabricaci\u00f3n de condensadores integrados. Los metales suelen depositarse mediante t\u00e9cnicas de deposici\u00f3n qu\u00edmica en fase vapor, principalmente platino, titanio u oro.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><br \/><\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18719c36 elementor-widget elementor-widget-text-editor\" data-id=\"18719c36\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<b><a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\">Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/a>,<\/b> No dude en dejarnos un mensaje con su consulta.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9a31f5b elementor-widget elementor-widget-wpforms\" data-id=\"9a31f5b\" 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src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" >\n\t\t\t\tMatrices de microlentes para micro\u00f3ptica y nano\u00f3ptica\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" 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768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) Subcontrataci\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-nanofabrication\u4e28Nano-Imprinting (NIL) Substitute Processing\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-268ac04e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"268ac04e\" 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\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6529e9c6 elementor-widget elementor-widget-heading\" data-id=\"6529e9c6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/es\/vision\/\">M\u00e1s relacionados...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) \u9762 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