{"id":26922,"date":"2022-06-08T16:10:42","date_gmt":"2022-06-08T08:10:42","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26922"},"modified":"2022-10-20T16:11:07","modified_gmt":"2022-10-20T08:11:07","slug":"mems_fabrication_04","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_04\/","title":{"rendered":"Procesado micro y nano | Procesado fino MEMS (IV)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26922\" class=\"elementor elementor-26922\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-3459726a elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"3459726a\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-32bf616c\" data-id=\"32bf616c\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-59f53420 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"59f53420\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-55735407\" data-id=\"55735407\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-44b664e6 elementor-widget elementor-widget-heading\" data-id=\"44b664e6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Procesado micro y nano | Procesado fino MEMS (IV)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-77b23695 elementor-widget elementor-widget-text-editor\" data-id=\"77b23695\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><b><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">1.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">3 Fotolitograf\u00eda<\/span><\/b><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">La fotolitograf\u00eda, tambi\u00e9n conocida como fotolitograf\u00eda, tiene su origen en la fabricaci\u00f3n de circuitos integrados para microelectr\u00f3nica. La fotolitograf\u00eda es una tecnolog\u00eda de proceso clave para la fabricaci\u00f3n de estructuras o dispositivos semiconductores y estructuras microgr\u00e1ficas de circuitos integrados, que se basa en el principio de recubrir un material de sustrato, como el silicio, con fotorresistencia y, a continuaci\u00f3n, exponer la fotorresistencia a trav\u00e9s de una m\u00e1scara mediante un haz de energ\u00eda con una alta resoluci\u00f3n final. estructuras en el material de la pieza mediante el grabado y otros m\u00e9todos. El proceso de la fotolitograf\u00eda incluye generalmente la producci\u00f3n de la imagen original, la litograf\u00eda, el pretratamiento del sustrato, el recubrimiento de la capa fotorresistente, la precocci\u00f3n, la exposici\u00f3n y el revelado.<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Sombreado, endurecimiento de la pel\u00edcula, grabado y despegado, etc.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.4 T\u00e9cnicas de grabado<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado se suele dividir en grabado isotr\u00f3pico y grabado anisotr\u00f3pico. El grabado isotr\u00f3pico permite fabricar microestructuras de geometr\u00eda lateral arbitraria, generalmente de unas pocas micras de altura, y se limita a la fabricaci\u00f3n de estructuras planas. El grabado anisotr\u00f3pico permite la fabricaci\u00f3n de estructuras espaciales tridimensionales con grandes relaciones de aspecto y profundidades de hasta varios cientos de micras.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) Grabado qu\u00edmico anis\u00f3tropo<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado qu\u00edmico tiene unas caracter\u00edsticas \u00fanicas de subgrabado lateral que permiten grabar el material a una velocidad que depende de la orientaci\u00f3n del cristal. El silicio monocristalino tiene caras cristalinas con diferentes orientaciones cristalogr\u00e1ficas, y en soluciones alcalinas existen diferencias significativas en la velocidad de grabado entre las caras cristalogr\u00e1ficas. El dopaje controlado del silicio introduce una capa de parada de grabado muy eficaz que impide que se produzca el grabado, lo que permite el grabado selectivo para la fabricaci\u00f3n de microestructuras.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) Grabado por haz de iones<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado por haz de iones tambi\u00e9n se divide en grabado por haz de iones focalizado y grabado por haz de iones reactivo. El grabado por haz de iones focalizado produce haces de di\u00e1metro submicr\u00f3nico con densidades de iones del orden de A\/cm2, lo que permite el grabado directo de la superficie de la pieza y un control preciso de la densidad y la energ\u00eda del haz. Esto se consigue transfiriendo el impulso de los iones incidentes a los \u00e1tomos de la superficie del material de la pieza, lo que da como resultado el grabado \u00e1tomo por \u00e1tomo de la superficie de la pieza, consiguiendo as\u00ed una precisi\u00f3n de fabricaci\u00f3n a escala nanom\u00e9trica. El grabado por haz de iones reactivos es un m\u00e9todo de grabado por reacci\u00f3n fisicoqu\u00edmica. Consiste en dirigir un haz de iones de gas reactivo sobre la superficie de la pieza, donde la reacci\u00f3n forma un producto que es vol\u00e1til y f\u00e1cilmente procesable por la energ\u00eda cin\u00e9tica de los iones, y que se graba por pulverizaci\u00f3n cat\u00f3dica del haz de iones de gas reactivo. Se trata de una tecnolog\u00eda de micromecanizado submicrom\u00e9trico.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) Grabado l\u00e1ser<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado por l\u00e1ser suele realizarse con l\u00e1seres YAG y l\u00e1seres de exc\u00edmeros. Los l\u00e1seres excimer son las fuentes l\u00e1ser m\u00e1s prometedoras debido a su corta longitud de onda, peque\u00f1o di\u00e1metro de foco, alta densidad de espectro de potencia y fuente de luz fr\u00eda. Los l\u00e1seres de exc\u00edmero m\u00e1s utilizados son el l\u00e1ser de exc\u00edmero de fluoruro de arg\u00f3n y el l\u00e1ser de exc\u00edmero de fluoruro de xen\u00f3n.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El rayo l\u00e1ser ultravioleta lejano producido por el l\u00e1ser excimer de fluoruro de arg\u00f3n graba materiales polim\u00e9ricos duros, como los pl\u00e1sticos, no s\u00f3lo con l\u00edneas extremadamente finas, sino tambi\u00e9n sin generaci\u00f3n de calor y sin difusi\u00f3n de calor ni quemaduras alrededor del material donde se enfoca el rayo. El material se graba no como resultado directo de la intensidad de la radiaci\u00f3n del haz l\u00e1ser, sino como resultado de la radiaci\u00f3n l\u00e1ser que rompe los enlaces qu\u00edmicos entre los \u00e1tomos del pol\u00edmero, que se vaporizan a muy baja temperatura para producir peque\u00f1as mol\u00e9culas.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Y estas peque\u00f1as divisiones<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">El l\u00e1ser excimer elimina el exceso de calor del pulso l\u00e1ser. El l\u00e1ser excimer produce luz ultravioleta lejana a una longitud de onda de 193 nm, con una frecuencia de repetici\u00f3n de 1 Hz o superior y una anchura de pulso de 12 ns. Un solo pulso puede grabar ranuras de varias micras. Con este pulso l\u00e1ser, el material puede despegarse capa a capa y grabarse en finas l\u00edneas.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">La longitud de onda casi ultravioleta del l\u00e1ser excimer de fluoruro de xen\u00f3n es de 300 nm. El proceso de grabado es el siguiente: la oblea de silicio colocada en el gas de cloro se somete a radiaci\u00f3n l\u00e1ser, las mol\u00e9culas de cloro se descomponen en \u00e1tomos de cloro y, al mismo tiempo, los electrones de la oblea de silicio sometida a radiaci\u00f3n l\u00e1ser se adhieren a los \u00e1tomos de cloro, formando iones de cloro cargados negativamente, que a su vez reaccionan qu\u00edmicamente con los \u00e1tomos de silicio cargados positivamente para formar un gas vol\u00e1til de tetracloruro de silicio, que pasa a trav\u00e9s del reactor. El tetracloruro de silicio se retira y se suministra gas cloro fresco, de modo que se corroe la oblea de silicio y se obtiene la imagen deseada sin necesidad de fotorresistencia.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1c84e7d4 elementor-widget elementor-widget-text-editor\" data-id=\"1c84e7d4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<span style=\"color: #0e2143;\"><b><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\">Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/a>, <\/b><\/span>No dude en dejarnos un mensaje con su consulta.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2371fc6f elementor-widget elementor-widget-wpforms\" 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