{"id":26933,"date":"2022-06-08T16:15:20","date_gmt":"2022-06-08T08:15:20","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26933"},"modified":"2022-10-20T15:51:57","modified_gmt":"2022-10-20T07:51:57","slug":"mems_fabrication_05","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/","title":{"rendered":"Micro y nanoprocesamiento | Procesado fino MEMS (V)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26933\" class=\"elementor elementor-26933\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-44cb9ac7 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"44cb9ac7\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-62735589\" data-id=\"62735589\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1c11e568 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1c11e568\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2d7be2b2\" data-id=\"2d7be2b2\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6e89644a elementor-widget elementor-widget-heading\" data-id=\"6e89644a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">Micro y nanoprocesamiento | Procesado fino MEMS (V)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7d1ec218 elementor-widget elementor-widget-text-editor\" data-id=\"7d1ec218\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.5 T\u00e9cnicas de grabado por haz de alta energ\u00eda<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) Grabado por haz de electrones<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Para el grabado se utiliza el efecto qu\u00edmico del haz de electrones. La superficie de la pieza de trabajo se irradia con un haz de electrones de densidad de potencia bastante baja, que casi no causa aumento de la temperatura de la superficie, y cuando los electrones incidentes chocan con las mol\u00e9culas del material polim\u00e9rico, hacen que las cadenas moleculares se rompan o re-polimericen, causando as\u00ed un cambio en las propiedades qu\u00edmicas y el peso molecular del material polim\u00e9rico, utilizando este efecto, se puede llevar a cabo la exposici\u00f3n de haz de electrones. La exposici\u00f3n se divide principalmente en dos tipos, uno es el tipo de exploraci\u00f3n de haz de electrones, se centrar\u00e1 dentro de 1 \u03bcm haz de electrones en el rango de alrededor de 0,5 ~ 5 mm de exploraci\u00f3n, puede exponer cualquier gr\u00e1fico; el otro es un tipo de proyecci\u00f3n reducida exposici\u00f3n de haz de electrones, de modo que el haz de electrones primero a trav\u00e9s de la placa de m\u00e1scara, y luego a 1\/5 ~ 1\/10 de la relaci\u00f3n de reducido, proyectado sobre la resistencia electr\u00f3nica para la exposici\u00f3n de gr\u00e1ficos de circuitos integrados a gran escala. El grabado por haz de electrones es actualmente la mejor tecnolog\u00eda de producci\u00f3n de gr\u00e1ficos de alta resoluci\u00f3n, en condiciones de laboratorio, hasta 2 nm de tama\u00f1o de caracter\u00edstica, en la producci\u00f3n, por lo general tambi\u00e9n puede alcanzar 0,5 ~ 1 \u03bcm de tama\u00f1o de caracter\u00edstica.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El tratamiento por haz de electrones se realiza en condiciones de vac\u00edo. En un entorno de vac\u00edo, los electrones pueden moverse a gran velocidad, el c\u00e1todo no se oxida y la superficie a procesar est\u00e1 protegida de la oxidaci\u00f3n del vapor. Debido a la necesidad de estar en el vac\u00edo, existen ciertas limitaciones.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) Grabado por haz de iones<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado por haz de iones es un m\u00e9todo de microfabricaci\u00f3n que utiliza iones de elementos gaseosos inertes u otros elementos acelerados en una corriente de haz de iones de alta velocidad en un campo el\u00e9ctrico para realizar diversos procesos de microfabricaci\u00f3n con su energ\u00eda cin\u00e9tica. Es un m\u00e9todo prometedor de procesamiento con una amplia gama de capacidades de proceso en precisi\u00f3n submicr\u00f3nica e incluso milim\u00e9trica. Puede dividirse en:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u2460 Proceso de eliminaci\u00f3n. En primer lugar, arg\u00f3n, cript\u00f3n o xen\u00f3n y otros gases inertes en una c\u00e1mara de ionizaci\u00f3n de bajo vac\u00edo, con descarga de alta frecuencia o descarga de CC para que sea igual ionizaci\u00f3n (es decir, el n\u00famero de iones positivos y el n\u00famero de iones negativos mezcla igual), en el papel de los electrodos de aceleraci\u00f3n, los iones del plasma se extrae en un haz, desde la superficie de la pieza de trabajo para golpear los \u00e1tomos o mol\u00e9culas, de modo que usted puede completar directamente la superficie de procesamiento de piezas de trabajo o grabado gr\u00e1fico. El fresado i\u00f3nico, el pulido i\u00f3nico, el adelgazamiento i\u00f3nico y el pulverizado i\u00f3nico utilizan este principio.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u2461 Proceso de recubrimiento. El proceso de microfabricaci\u00f3n consistente en adherir iones incidentes de baja energ\u00eda a la superficie de una pieza se denomina proceso de adhesi\u00f3n i\u00f3nica. Un proceso t\u00edpico de adhesi\u00f3n i\u00f3nica es el recubrimiento i\u00f3nico. En el recubrimiento i\u00f3nico, los \u00e1tomos o mol\u00e9culas impactados por el haz de iones se adhieren a la superficie de la pieza de trabajo con gran energ\u00eda, lo que da como resultado una alta resistencia del recubrimiento y una buena calidad del mismo. Con la tecnolog\u00eda de recubrimiento i\u00f3nico se pueden producir pel\u00edculas de mejora de superficies resistentes al desgaste, a la corrosi\u00f3n y al calor, as\u00ed como pel\u00edculas para electr\u00f3nica, semiconductores y circuitos integrados.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(iii) Procesamiento por inyecci\u00f3n. La inyecci\u00f3n de iones es el ion acelerado a decenas o cientos de kiloelectronvoltios (keV) de energ\u00eda, despu\u00e9s de bombardear la superficie de la pieza de trabajo, la capa superficial de la pieza de trabajo de iones de alta velocidad en la brecha at\u00f3mica o en forma de \u00e1tomos de reemplazo incrustados en la superficie de la pieza de trabajo y retenidos en la capa superficial del proceso. En la fabricaci\u00f3n de circuitos integrados, la implantaci\u00f3n de iones puede controlar la cantidad de dopaje para obtener par\u00e1metros el\u00e9ctricos uniformes del circuito integrado, y en la fabricaci\u00f3n de piezas, la implantaci\u00f3n de iones puede utilizarse para lograr la modificaci\u00f3n de la superficie met\u00e1lica.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u2463 Escritura por haz de iones. A diferencia de la exposici\u00f3n por haz de electrones, la exposici\u00f3n por haz de electrones, el principal factor que afecta a la resoluci\u00f3n es la sensibilidad del gel fotogr\u00e1fico, la generaci\u00f3n de electrones secundarios y el sustrato de los electrones reflejados, mientras que la masa de iones es mucho mayor que los electrones, dispersos en el s\u00f3lido peque\u00f1o, en el sustrato para producir un efecto de retrodispersi\u00f3n d\u00e9bil, causada por el efecto de proximidad peque\u00f1a, por lo que puede producir un ancho de l\u00ednea de menos de 0,1\u03bcm precisi\u00f3n micro-finos gr\u00e1ficos. Debido a la gran masa de iones y part\u00edculas grandes, la resistencia despu\u00e9s de entrar en la resistencia es tambi\u00e9n grande, por lo que el rango es m\u00e1s corto, por lo que la energ\u00eda de iones es totalmente absorbida por la resistencia, por lo que la sensibilidad de la resistencia aumenta.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) Grabado con plasma<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado por haz de iones es un proceso de grabado basado en la acci\u00f3n f\u00edsica. El grabado por plasma es un proceso de grabado qu\u00edmico. En el grabado por plasma, se utiliza un plasma a baja temperatura, en el que los radicales libres son qu\u00edmicamente activos y la reacci\u00f3n qu\u00edmica con el material grabado se utiliza para grabar el material de pel\u00edcula fina.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) Grabado l\u00e1ser<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">El grabado l\u00e1ser utiliza principalmente l\u00e1seres de estado s\u00f3lido, los l\u00e1seres de CO2 tienen longitudes de onda largas y generalmente no son adecuados para la microfabricaci\u00f3n. Te\u00f3ricamente, el di\u00e1metro del punto l\u00e1ser se puede enfocar a 1 \u03bcm, pero ahora el material de trabajo del l\u00e1ser, debido a la calidad desigual del material y la distribuci\u00f3n de la temperatura interna y otros factores, la formaci\u00f3n del l\u00e1ser es propensa a m\u00faltiples oscilaciones u oscilaciones exc\u00e9ntricas, por lo que el \u00e1ngulo de divergencia del l\u00e1ser aumenta, es dif\u00edcil enfocar a aproximadamente 1 \u03bcm. Sin embargo, debido a la distribuci\u00f3n de la intensidad en el plano focal, hay una zona de concentraci\u00f3n de energ\u00eda estrecha, de modo que hay un umbral de densidad de energ\u00eda que se puede utilizar para el procesamiento, de modo que el agujero puede ser procesado que el di\u00e1metro del punto del haz es peque\u00f1o. Las perforaciones l\u00e1ser pueden ser tan peque\u00f1as como de unos 10 \u03bcm y tener una relaci\u00f3n profundidad-di\u00e1metro de 5 o m\u00e1s.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">Los principales factores que afectan a la precisi\u00f3n del grabado l\u00e1ser son el efecto de la potencia de salida y la anchura del pulso; el efecto de la longitud focal y el \u00e1ngulo de divergencia; y el efecto de la posici\u00f3n del punto focal;<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">El efecto de la distribuci\u00f3n de la energ\u00eda dentro del punto; el efecto de la irradiaci\u00f3n l\u00e1ser m\u00faltiple y el efecto del material de la pieza, etc.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6b14baeb elementor-widget elementor-widget-text-editor\" data-id=\"6b14baeb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<span style=\"color: #0e2143;\"><strong><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\">Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/a>,<\/strong><\/span> No dude en dejarnos un mensaje con su consulta.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2284baf8 elementor-widget elementor-widget-wpforms\" data-id=\"2284baf8\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/es\/wp-json\/wp\/v2\/posts\/26933\" data-token=\"3e6450b4b4d03ea94099b06a229330b6\" data-trp-original-action=\"\/es\/wp-json\/wp\/v2\/posts\/26933\"><noscript class=\"wpforms-error-noscript\">Por favor, active JavaScript en su navegador para completar este formulario.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">Correo electr\u00f3nico<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">Confirmar el correo electr\u00f3nico<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">Requisitos de micro y nanotecnolog\u00eda<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">Enviar<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"Cargando\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"es\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2a22fd2e\" data-id=\"2a22fd2e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-23b4ad8e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"23b4ad8e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6618ad elementor-widget elementor-widget-heading\" data-id=\"a6618ad\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Productos relacionados<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e075a85 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"5e075a85\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" >\n\t\t\t\tSistema de impresi\u00f3n 3D por polimerizaci\u00f3n bifot\u00f3nica de alta precisi\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/producto\/2pp-polimerizacion-de-dos-fotones\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Sistema de impresi\u00f3n 3D por polimerizaci\u00f3n bifot\u00f3nica de alta precisi\u00f3n\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" >\n\t\t\t\tMatrices de microlentes para micro\u00f3ptica y nano\u00f3ptica\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/conjuntos-de-microlentes\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Optics\u4e28Microlens arrays (OEM)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) Subcontrataci\u00f3n\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-nanofabrication\u4e28Nano-Imprinting (NIL) Substitute Processing\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2fe17bdd elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2fe17bdd\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6194a62e elementor-widget elementor-widget-heading\" data-id=\"6194a62e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Lecturas relacionadas<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7595a58b elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"7595a58b\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26856 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_navi\/\" >\n\t\t\t\tMicro y nanoprocesamiento | Descripci\u00f3n general del proceso\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Microprocesado y nanoprocesado: deposici\u00f3n de capas finas, litograf\u00eda y grabado <\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofabricacion_navi\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Procesado micro-nano | Descripci\u00f3n general del proceso\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29236 post type-post status-publish format-standard has-post-thumbnail hentry category-solutions category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/que-es-la-litografia-por-haz-de-electrones\/\" >\n\t\t\t\tIntroducci\u00f3n a la litograf\u00eda por haz de electrones (EBL)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>Introducci\u00f3n a la litograf\u00eda por haz de electrones (EBL) <\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/soluciones\/que-es-la-litografia-por-haz-de-electrones\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Processing\u4e28Electron Beam Lithography (EBL) Technology Introduction\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26882 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/chapado\/\" >\n\t\t\t\tProcesado micro-nano | Introducci\u00f3n a la galvanoplastia\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u7535\u9540\u5de5\u827a\u4ecb\u7ecd \u7535\u9540\u662f\u5229\u7528\u7535<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/chapado\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micronanofabricaci\u00f3n | Introducci\u00f3n a los procesos galv\u00e1nicos\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2f9be90a elementor-widget elementor-widget-heading\" data-id=\"2f9be90a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/es\/vision\/\">M\u00e1s relacionados...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) 1 [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26933","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -<\/title>\n<meta name=\"description\" content=\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/\" \/>\n<meta property=\"og:locale\" content=\"es_ES\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\" \/>\n<meta property=\"og:description\" content=\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-08T08:15:20+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-10-20T07:51:57+00:00\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Escrito por\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"Tiempo de lectura\" \/>\n\t<meta name=\"twitter:data2\" content=\"2 minutos\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\",\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"wordCount\":19,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"es\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"description\":\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\"},\"inLanguage\":\"es\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"es\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"es\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/es\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/","og_locale":"es_ES","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","og_description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","og_url":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/","article_published_time":"2022-06-08T08:15:20+00:00","article_modified_time":"2022-10-20T07:51:57+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"Escrito por":"admin","Tiempo de lectura":"2 minutos"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"wordCount":19,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"es"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb"},"inLanguage":"es","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"es"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"es","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/es\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26933","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/comments?post=26933"}],"version-history":[{"count":16,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26933\/revisions"}],"predecessor-version":[{"id":28228,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/posts\/26933\/revisions\/28228"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/media?parent=26933"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/categories?post=26933"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/es\/wp-json\/wp\/v2\/tags?post=26933"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}