{"id":27064,"date":"2022-06-14T15:26:05","date_gmt":"2022-06-14T07:26:05","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27064"},"modified":"2022-10-26T15:44:49","modified_gmt":"2022-10-26T07:44:49","slug":"mems_capability","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/capacidad_mems\/","title":{"rendered":"Capacidades de fundici\u00f3n de MEMS | Fotolitograf\u00eda Galvanoplastia Grabado Recubrimiento"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27064\" class=\"elementor elementor-27064\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-23f3d625 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"23f3d625\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-577da76a\" data-id=\"577da76a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-7b198e0a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7b198e0a\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-42bed617\" data-id=\"42bed617\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3a045cd6 elementor-widget elementor-widget-heading\" data-id=\"3a045cd6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>Capacidades tecnol\u00f3gicas de la plataforma de fundici\u00f3n de microestructuras y nanoestructuras \/ MEMS<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3569726a elementor-widget elementor-widget-text-editor\" data-id=\"3569726a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">La plataforma del laboratorio cuenta con un total de m\u00e1s de 200 equipos, etc., de los cuales el equipo principal (m\u00e1s de 40 piezas) incluye:<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Equipos gr\u00e1ficos<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Exposici\u00f3n por haz de electrones, escritura directa por l\u00e1ser, litograf\u00eda de contacto de sobremesa, litograf\u00eda de sobremesa, etc.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Equipos de deposici\u00f3n de pel\u00edculas<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICP-PECVD, LPCVD, pulverizaci\u00f3n cat\u00f3dica por magnetr\u00f3n, recubrimiento por evaporaci\u00f3n de haz de electrones, PE-ALD, deposici\u00f3n de pel\u00edcula fina de DLC, etc., galvanoplastia (Au, Ag, Cu, Ni, Sn, etc.)<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Equipo de grabado<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICP-RIE, RIE, IBE, grabado profundo de silicio DRIE, m\u00e1quina de grabado de silicio de mesa XeF2, grabado en fase de vapor HF y otros equipos de grabado en seco y equipos de grabado en h\u00famedo para silicio a granel, pel\u00edculas diel\u00e9ctricas, \u00f3xidos met\u00e1licos, metales, etc. y equipos de liberaci\u00f3n supercr\u00edtica de CO2 correspondientes.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Equipos de caracterizaci\u00f3n y ensayo<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM, medidor de pasos, espectroscopia Raman, SEM, FIB, microscopio confocal, interfer\u00f3metro de luz blanca, c\u00e1mara termogr\u00e1fica de infrarrojos, comprobador micro y nanomec\u00e1nico FEMTO-TOOL, c\u00e1mara de ultra alta velocidad, vibr\u00f3metro l\u00e1ser 3D Doppler, platina de sonda CC\/RF (60GHZ), analizador de redes (60GHz), analizador de semiconductores, analizador de impedancia y prototipo el\u00e9ctrico de alta precisi\u00f3n, etc. impedancia y prot\u00f3metro el\u00e9ctrico de alta precisi\u00f3n, etc.<\/span><\/p>\n<h3 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Equipos de envasado del back-end del dispositivo<\/span><\/h3>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Adelgazamiento de obleas, pulido CMP, pegado de obleas, m\u00e1quina de colocaci\u00f3n, m\u00e1quina de trazado, m\u00e1quina de pegado de alambre, m\u00e1quina de estado s\u00f3lido, m\u00e1quina de soldadura l\u00e1ser y otros equipos de procesamiento desarrollados por el equipo, equipos de embalaje y pruebas.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"> <img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-27066\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\" alt=\"\" width=\"1000\" height=\"571\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png 1000w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-300x171.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-768x439.png 768w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/span><\/p>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\">\n<section style=\"text-align: center;\">\n<section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\">\n<section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\">\n<section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\">\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">Capacidades t\u00e9cnicas de la plataforma<\/span><\/strong><\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><\/section>\n<\/section>\n<\/section>\n<h4>&nbsp;<\/h4>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Integraci\u00f3n de procesos y capacidades de plataforma<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Capa de pel\u00edcula DLC conductora (subcapa superdeslizante, capa de pel\u00edcula superdura conductora, etc.)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Proceso de pel\u00edcula fina -AIN\/PZT (material de accionamiento piezoel\u00e9ctrico)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Procesos de crecimiento de material de carbono altamente orientado de gran tama\u00f1o y de procesamiento de dispositivos.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Uni\u00f3n: uni\u00f3n an\u00f3dica, uni\u00f3n por soldadura de vidrio, uni\u00f3n eut\u00e9ctica (AIGe), procesos de uni\u00f3n por difusi\u00f3n.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Encapsulado en atm\u00f3sfera o al vac\u00edo, Resellado<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Procesos de adelgazamiento de las muelas y de pulido a nivel at\u00f3mico.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Procesado de micro y nanodispositivos de sustrato flexible - Procesado de micro y nanodispositivos de sustrato flexible<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Capacidades de fabricaci\u00f3n y envasado<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Agujero pasante de silicona (TSV) Agujero pasante de vidrio (TGV)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-sensores de presi\u00f3n\/gas\/infrarrojos\/humedad<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Procesamiento de chips microflu\u00eddicos y pruebas relacionadas<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Una capacidad de procesamiento de dispositivos de radiofrecuencia\/inerciales superr\u00e1pida<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-Capacidades de encapsulaci\u00f3n total del troquel<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-932789b elementor-hidden-mobile elementor-widget elementor-widget-text-editor\" data-id=\"932789b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 699.516px; height: 3203px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Categor\u00edas de aplicaciones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Nombre del equipo<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Modelo de equipo<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Par\u00e1metros del proceso<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n qu\u00edmica en fase vapor a baja presi\u00f3n (LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n fina de SIN, TEOS, poli, etc.<br \/>Pel\u00edcula 1-50 piezas\/horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxidaci\u00f3n t\u00e9rmica<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxidaci\u00f3n t\u00e9rmica de tubos de horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recocido<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Horno de recocido r\u00e1pido RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealsys AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Temperatura m\u00e1xima hasta 1500\u00b0C, velocidad de calentamiento<br \/>M\u00e1x. 200\u00b0C\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Tratamiento FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Haz de iones focalizado FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Scios 2 HiVac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Preparaci\u00f3n de muestras TEM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Observaciones morfol\u00f3gicas SEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscopio electr\u00f3nico de barrido ambiental de emisi\u00f3n de campo ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Quattro S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Espectroscopia SEM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento por evaporaci\u00f3n de haz de electrones - metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n de pel\u00edcula met\u00e1lica, revestimiento por proceso de despegue disponible, compatible con sustrato de 8\" hacia atr\u00e1s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recubrimiento por evaporaci\u00f3n de haz de electrones - Medios<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n por vapor de pel\u00edculas de soportes de hasta 10 sustratos de cuatro pulgadas en un horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recubrimiento por magnetr\u00f3n sputtering - Metales<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de pulverizaci\u00f3n cat\u00f3dica por magnetr\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">fse-bsls-rd-6pulgadas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Pel\u00edculas met\u00e1licas pulverizadas, sustratos de 6<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n de capas at\u00f3micas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de deposici\u00f3n de capas at\u00f3micas mejorados por plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Actualmente dominado por Al2O3<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento DLC<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de deposici\u00f3n qu\u00edmica de pel\u00edculas finas similares al diamante<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado en seco<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">M\u00e1quinas de grabado en seco<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Huachuang septentrional<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Silicio Bosch y grabado a temperatura ultrabaja, SiO2 y cuarzo grabado en profundidad, por debajo de 8 pulg.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado OIE<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistema de grabado por haz de iones (IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado de materiales estructurados tridimensionales, pendiente de grabado superior a 85 grados, precisi\u00f3n de grabado de 10 nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Desmoldeo por plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Desbobinadora de plasma por microondas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma Alfa<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda ultravioleta<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda UV<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Precisi\u00f3n de alineaci\u00f3n: \u00b10,5um, resoluci\u00f3n 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Galvanoplastia<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Chapadoras<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Chapado de Cu, chapado de Au, chapado de aleaci\u00f3n Ni\/Ni<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Secado cr\u00edtico<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Secadores de punto supercr\u00edtico<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Automegasamdri-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Zonificaci\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Trazadores de m\u00e1quinas de corte<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Discoteca D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Uni\u00f3n de obleas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">M\u00e1quinas de pegado de obleas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Uni\u00f3n de \u00e1nodos<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Pruebas AFM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscop\u00eda de fuerza at\u00f3mica de alta resoluci\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxford Cypher ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscop\u00eda de fuerza at\u00f3mica<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Elionix ELS-F125G8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Los costes de material son adicionales en funci\u00f3n del tipo de cola utilizada, y no incluyen el coste del solado, etc.<\/span><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-762b0ea elementor-hidden-desktop elementor-hidden-tablet elementor-widget elementor-widget-text-editor\" data-id=\"762b0ea\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 349px; height: 3077px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Categor\u00edas de aplicaciones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Nombre del equipo<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Modelo de equipo<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Par\u00e1metros del proceso<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n qu\u00edmica en fase vapor a baja presi\u00f3n (LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n fina de SIN, TEOS, poli, etc.<br \/>Pel\u00edcula 1-50 piezas\/horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxidaci\u00f3n t\u00e9rmica<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxidaci\u00f3n t\u00e9rmica de tubos de horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recocido<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Horno de recocido r\u00e1pido RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Annealsys AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Temperatura m\u00e1xima hasta 1500\u00b0C, velocidad de calentamiento<br \/>M\u00e1x. 200\u00b0C\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Tratamiento FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Haz de iones focalizado FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Scios 2 HiVac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Preparaci\u00f3n de muestras TEM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Observaciones morfol\u00f3gicas SEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscopio electr\u00f3nico de barrido ambiental de emisi\u00f3n de campo ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Thermo Fisher Quattro S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Espectroscopia SEM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento por evaporaci\u00f3n de haz de electrones - metal<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n de pel\u00edcula met\u00e1lica, revestimiento por proceso de despegue disponible, compatible con sustrato de 8\" hacia atr\u00e1s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recubrimiento por evaporaci\u00f3n de haz de electrones - Medios<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Evaporaci\u00f3n por haz de electrones<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n por vapor de pel\u00edculas de soportes de hasta 10 sustratos de cuatro pulgadas en un horno<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Recubrimiento por magnetr\u00f3n sputtering - Metales<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de pulverizaci\u00f3n cat\u00f3dica por magnetr\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">fse-bsls-rd-6pulgadas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Pel\u00edculas met\u00e1licas pulverizadas, sustratos de 6<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Deposici\u00f3n de capas at\u00f3micas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de deposici\u00f3n de capas at\u00f3micas mejorados por plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Actualmente dominado por Al2O3<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Revestimiento DLC<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistemas de deposici\u00f3n qu\u00edmica de pel\u00edculas finas similares al diamante<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado en seco<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">M\u00e1quinas de grabado en seco<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Huachuang septentrional<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Silicio Bosch y grabado a temperatura ultrabaja, SiO2 y cuarzo grabado en profundidad, por debajo de 8 pulg.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado OIE<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Sistema de grabado por haz de iones (IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Grabado de materiales estructurados tridimensionales, pendiente de grabado superior a 85 grados, precisi\u00f3n de grabado de 10 nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Desmoldeo por plasma<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Desbobinadora de plasma por microondas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Plasma Alfa<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda ultravioleta<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Litograf\u00eda UV<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Precisi\u00f3n de alineaci\u00f3n: \u00b10,5um, resoluci\u00f3n 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Galvanoplastia<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Chapadoras<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Chapado de Cu, chapado de Au, chapado de aleaci\u00f3n Ni\/Ni<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Secado cr\u00edtico<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Secadores de punto supercr\u00edtico<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Automegasamdri-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Zonificaci\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Trazadores de m\u00e1quinas de corte<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Discoteca D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Uni\u00f3n de obleas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">M\u00e1quinas de pegado de obleas<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Uni\u00f3n de \u00e1nodos<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Pruebas AFM<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscop\u00eda de fuerza at\u00f3mica de alta resoluci\u00f3n<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Oxford Cypher ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Microscop\u00eda de fuerza at\u00f3mica<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: 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href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/litografia-de-nanoimpresion\/\" >\n\t\t\t\tNanoimpresi\u00f3n (NIL) 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elementor-widget-heading\" data-id=\"b60a5e0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Lecturas relacionadas<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-659b6d3a elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"659b6d3a\" data-element_type=\"widget\" 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href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/\" >\n\t\t\t\tMicro y nanoprocesamiento | Procesado fino MEMS (V)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) 1<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/mems_fabricacion_05\/\" aria-label=\"M\u00e1s informaci\u00f3n sobre Micro-Nano Processing | MEMS Fine Processing(V)\" tabindex=\"-1\" >\n\t\t\tLeer M\u00e1s \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-29b2a563 elementor-widget elementor-widget-heading\" data-id=\"29b2a563\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-27064","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -<\/title>\n<meta name=\"description\" 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