{"id":27315,"date":"2022-07-28T16:03:07","date_gmt":"2022-07-28T08:03:07","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27315"},"modified":"2022-10-26T15:38:11","modified_gmt":"2022-10-26T07:38:11","slug":"nanofab_ebl","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/es\/soluciones\/nanofabricacion\/nanofab_ebl\/","title":{"rendered":"Micro y nanoprocesamiento | Principios de procesamiento de la litograf\u00eda por haz de electrones"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27315\" class=\"elementor elementor-27315\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-24da5a2c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"24da5a2c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2bfa96cf\" data-id=\"2bfa96cf\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-55d06a48 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"55d06a48\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1e359461\" data-id=\"1e359461\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-46f07a7f elementor-widget elementor-widget-heading\" data-id=\"46f07a7f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>Micro y nanoprocesamiento | Principios de la litograf\u00eda por haz de electrones<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2c403f81 elementor-widget elementor-widget-text-editor\" data-id=\"2c403f81\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>La litograf\u00eda por haz de electrones tiene la ventaja de poder fabricar componentes con caracter\u00edsticas de menor tama\u00f1o que las que pueden obtenerse mediante t\u00e9cnicas \u00f3pticas. El tama\u00f1o de la caracter\u00edstica de un componente est\u00e1 limitado esencialmente por la longitud de onda de la onda luminosa utilizada. El tama\u00f1o del punto del haz de electrones utilizado en la litograf\u00eda por haz de electrones puede oscilar entre unos pocos nan\u00f3metros y varios cientos de nan\u00f3metros, dependiendo de la aplicaci\u00f3n. La longitud de onda deBroglie de un electr\u00f3n es<\/p><p><img decoding=\"async\" class=\"alignnone size-full wp-image-27318\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/07\/EBL.png\" alt=\"\" width=\"191\" height=\"59\" \/><\/p><p>donde Vb es la tensi\u00f3n de aceleraci\u00f3n. La mayor\u00eda de los sistemas de haz de electrones funcionan con tensiones superiores a 1 kV y la longitud de onda de los electrones en la litograf\u00eda por haz de electrones no tiene ning\u00fan efecto sobre la resoluci\u00f3n que puede alcanzarse.<\/p><p>Los sistemas de litograf\u00eda por haz de electrones se utilizan ampliamente para la fabricaci\u00f3n de m\u00e1scaras fotolitogr\u00e1ficas, prototipos de principios avanzados y para la investigaci\u00f3n y el desarrollo cient\u00edficos a escala nanom\u00e9trica. Los sistemas de litograf\u00eda por haz de electrones m\u00e1s avanzados permiten transferir patrones (mediante t\u00e9cnicas de decapado met\u00e1lico, grabado o adici\u00f3n de color) a tama\u00f1os extremos inferiores a 10 nm con una resoluci\u00f3n ultraelevada. Adem\u00e1s, estos patrones pueden procesarse en una gran variedad de materiales, como semiconductores como Si y GaAs, s\u00edlice fundida, diamante amorfo, aislantes como SiO2 y SiN y diversos metales.<\/p><p>La litograf\u00eda general por haz de electrones consiste en el escaneado determinista de superficies resistentes sensibles a los electrones mediante un haz de electrones altamente focalizado. La litograf\u00eda por haz de electrones puede utilizar una gran variedad de resistivos positivos y negativos. En los sistemas de litograf\u00eda de alta resoluci\u00f3n, se suele utilizar una fuente de emisi\u00f3n de campo caliente, por ejemplo, se forma un haz de electrones con un emisor ZrO\/W. Varias etapas de lentes electrost\u00e1ticas y\/o magn\u00e9ticas enfocan el haz de electrones y le dan forma dentro del ca\u00f1\u00f3n de electrones, utilizando bobinas de deflexi\u00f3n electromagn\u00e9ticas para escanear el haz a trav\u00e9s del campo de visi\u00f3n efectivo (valores t\u00edpicos de 0,1 a 1 mm en un lado, dependiendo del sistema y de los par\u00e1metros del haz de electrones). Los sistemas dedicados de litograf\u00eda por haz de electrones se utilizan generalmente con la ayuda de una mesa interferom\u00e9trica l\u00e1ser para mover la muestra durante la exposici\u00f3n en diferentes campos de visi\u00f3n de trabajo. Mediante el c\u00e1lculo de las franjas de interferencia a medida que se mueve la mesa interferom\u00e9trica, se puede minimizar (menos de 20 nm) el error de costura o el error de desplazamiento entre rangos de escritura de haces adyacentes. Tambi\u00e9n se utiliza un conjunto de escudos de haz electrost\u00e1ticos para desviar el haz de electrones fuera de la trayectoria \u00f3ptica de los electrones si es necesario.<\/p><p>Se utiliza un sistema inform\u00e1tico para controlar la bobina deflectora, lo que permite la inscripci\u00f3n gr\u00e1fica y el control de la m\u00e1scara, permitiendo en \u00faltima instancia ajustar la cantidad de exposici\u00f3n de electrones que incide sobre una apertura cuadrada determinada. La ecuaci\u00f3n de exposici\u00f3n de \u00e1rea puede escribirse simplemente como<\/p><p>Dosis x \u00e1rea = corriente del haz de electrones x tiempo de permanencia = n\u00famero total de electrones incidentes<\/p><p>Como puede observarse al aumentar y disminuir los valores de exposici\u00f3n, tiempo de exposici\u00f3n y corriente del haz de electrones, la mayor desventaja de la litograf\u00eda por haz de electrones es que el proceso de exposici\u00f3n en serie da lugar a tiempos de grabado m\u00e1s largos. Una corriente de haz de alta resoluci\u00f3n de aproximadamente 500pA, suponiendo un polimetacrilato de metilo (PMMA) de 495K de 300nm de espesor (aproximadamente 1000\u03bcC\/cm2 para un corte de tensi\u00f3n de aceleraci\u00f3n de 50kV), un generador gr\u00e1fico de 25MHz y un tama\u00f1o de agujero de 10nm, requerir\u00eda aproximadamente 5,5h para grabar un \u00e1rea de 1cm2 (cobertura del 50%). Teniendo en cuenta el tiempo de desplazamiento del interfer\u00f3metro y el tiempo de \"permanencia\" del haz de electrones, es decir, el tiempo de espera entre desviaciones para que el haz se estabilice, es evidente que inscribir una gran superficie requerir\u00e1 mucho tiempo.<\/p><p>El uso de marcas de alineaci\u00f3n permite alinear el patr\u00f3n de litograf\u00eda por haz de electrones con las caracter\u00edsticas existentes en la muestra. Estas marcas pueden pintarse o grabarse y suelen ser formas geom\u00e9tricas simples o cruces. Deben visualizarse mediante retrodispersi\u00f3n de electrones con alto contraste, por lo que suelen estar compuestas de metal (por ejemplo, oro) o de estructuras superficiales grabadas. A continuaci\u00f3n, el operador procede a preparar archivos de trabajo que identifican y utilizan las marcas existentes en la superficie del sustrato para determinar y compensar los errores de rotaci\u00f3n, ganancia y posici\u00f3n.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-72565e8a elementor-widget elementor-widget-text-editor\" data-id=\"72565e8a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Ofrecemos<a href=\"https:\/\/www.accscicn.com\/es\/nanofabricacion\/\" target=\"_blank\" rel=\"noopener\"><b>Servicios de dise\u00f1o de dispositivos MEMS \/ procesamiento de microestructuras y nanoestructuras<\/b><\/a>no dude en dejarnos un comentario.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-244c7e82 elementor-widget elementor-widget-wpforms\" data-id=\"244c7e82\" 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