{"id":26232,"date":"2022-04-22T21:59:53","date_gmt":"2022-04-22T13:59:53","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26232"},"modified":"2022-10-20T17:44:07","modified_gmt":"2022-10-20T09:44:07","slug":"app_fce10_004","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ja\/%e3%82%a4%e3%83%b3%e3%82%b5%e3%82%a4%e3%83%88\/%e3%82%a2%e3%83%97%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/app_fce10_004\/","title":{"rendered":"Al0.78Sc0.22N\u819c\u306b\u304a\u3051\u308b\u5f37\u8a98\u96fb\u4f53\u306e\u819c\u539a\u8abf\u6574\u306b\u3064\u3044\u3066"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26232\" class=\"elementor elementor-26232\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-666329bc elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"666329bc\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2c20a997\" data-id=\"2c20a997\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3a04a081 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"3a04a081\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-766aa1d5\" data-id=\"766aa1d5\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-514f487f elementor-widget elementor-widget-heading\" data-id=\"514f487f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">Al0.78Sc0.22N\u819c\u306b\u304a\u3051\u308b\u5f37\u8a98\u96fb\u4f53\u306e\u819c\u539a\u8abf\u6574\u306b\u3064\u3044\u3066<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7cd7adeb elementor-widget elementor-widget-text-editor\" data-id=\"7cd7adeb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<h4>\u30d7\u30ec\u30bc\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3<\/h4><p>\u968f\u7740\u79d1\u6280\u7684\u5927\u529b\u53d1\u5c55\uff0c\u4f4e\u529f\u8017\u975e\u6613\u5931\u6027\u5b58\u50a8\u5668\uff0c\u5305\u62ec\u78c1\u963b\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668\u548c\u94c1\u7535\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668(FRAM)\uff0c\u5df2\u4e0e\u7528\u4e8e\u7269\u8054\u7f51\u8bbe\u5907\u7684\u4f4e\u529f\u8017\u5fae\u63a7\u5236\u5668\u96c6\u6210\u3002)\u4e0e\u95ea\u5b58\u76f8\u6bd4\uff0c\u5177\u6709\u94c1\u7535Pb(ZrTi)O3 (PZT) \u8584\u819c\u7684 FRAM \u8fdc\u4f4e\u4e8e\u95ea\u5b58\u3002\u901a\u5e38\uff0c\u94c1\u7535\u8584\u819c\u4e2d\u7684\u539a\u5ea6\u7f29\u653e\u53ef\u4ee5\u51cf\u5c0f\u94c1\u7535\u7535\u5bb9\u5668\u7684\u5c3a\u5bf8\uff0c\u4ece\u800c\u964d\u4f4e\u529f\u8017\u3002\u4f46\u662f\uff0c\u4f17\u6240\u5468\u77e5\uff0cPZT \u8584\u819c\u5728\u5c06\u539a\u5ea6\u51cf\u8584\u81f3\u5c0f\u4e8e 100nm \u65f6\u4f1a\u5931\u53bb\u5176\u94c1\u7535\u6027\u3002\u6b64\u5916\uff0c\u5e26\u6709\u8d35\u91d1\u5c5e\u7535\u6781\u7684 PZT \u8584\u819c\u4e0e\u534a\u5bfc\u4f53\u5de5\u827a\u5e76\u4e0d\u5b8c\u5168\u517c\u5bb9\u3002\u5df2\u7ecf\u62a5\u9053\u4e86\u51e0\u79cd\u94c1\u7535\u6750\u6599\uff0c\u56e0\u6b64\u8fdc\u8fdc\u53d6\u4ee3\u4f20\u7edf\u7684\u94c1\u7535\u6750\u6599\u3002 2011\u5e74\u62a5\u9053\u7684\u94c1\u7535HfO2\u8584\u819c\u5177\u6709\u53ef\u4ee5\u5c06\u5176\u94c1\u7535\u6027\u4fdd\u6301\u57283nm\u4ee5\u4e0b\u7684\u4f18\u70b9\u3002\u5236\u9020\u8fc7\u7a0b\u53ef\u4ee5\u5728\u4f4e\u6e29\u4e0b\u901a\u8fc7\u5b8c\u5168\u517c\u5bb9\u7684\u534a\u5bfc\u4f53\u5de5\u827a\u5b8c\u6210\u3002\u6b64\u5916\uff0c2019 \u5e74\u62a5\u9053\u4e86\u94c1\u7535 Al1\u2212xScxN \u8584\u819c\uff0c\u5176\u5269\u4f59\u6781\u5316\u7387 (Pr) \u8d85\u8fc7 100 \u03bcC cm\u22122.26,27) A\u9ad8 Pr \u4e5f\u5f88\u6709\u5438\u5f15\u529b\uff0c\u56e0\u4e3a\u53ef\u4ee5\u8fdb\u4e00\u6b65\u51cf\u5c11\u94c1\u7535\u7535\u5bb9\u5668\u7684\u7535\u6781\u4ee5\u83b7\u5f97\u66f4\u9ad8\u7684\u4f53\u79ef\u5bc6\u5ea6\uff0c\u5e76\u4e14\u5728\u5199\u5165\u548c\u8bfb\u53d6\u64cd\u4f5c\u671f\u95f4\u7535\u6d41\u611f\u5e94\u53ef\u4ee5\u5bb9\u6613\u5730\u62b5\u6297\u566a\u58f0\u3002<\/p><p>Al1\u2212xScxN \u8584\u819c\u7684\u95ee\u9898\u4e4b\u4e00\u662f\u77eb\u987d\u573a (EC) \u76f8\u5bf9\u8f83\u9ad8\uff0c\u8fd9\u53d6\u51b3\u4e8e Al1\u2212xScxN \u8584\u819c\u4e2d Sc \u539f\u5b50\u7684\u7ec4\u6210 (x) \uff0c\u5e76\u4e14\u662f\u53ef\u63a7\u7684\u3002\u5728\u672f\u8bed\u65b9\u9762\u7684\u4f18\u52bfAl1-xScxN\u7684\u7ea4\u950c\u77ff\u578b\u7ed3\u6784\u5728 0 &lt; x &lt; 0.46\u8303\u56f4\u5185\u662f Al-Sc-N \u4f53\u7cfb\u4e2d\u7684\u7a33\u5b9a\u76f8\u6781\u6027\uff08\u5bf9\u4e8e\u6c2e\u5316\u7269\u60c5\u51b5\u3001\u91d1\u5c5e\u9762\u6216 N \u9762\uff09\uff0c\u6211\u4eec\u53ef\u4ee5\u9884\u671f\u5728\u8584\u819c\u533a\u57df\u4e5f\u6709\u81ea\u6781\u5316 c \u8f74\u53d6\u5411\u7684 Al1\u2212xScxN \u8584\u819c\u6c89\u79ef\u3002<\/p><p>\u6211\u4eec\u5df2\u7ecf\u62a5\u9053\u4e86\u4e00\u4e9b\u4e0e\u539a\u5ea6\u76f8\u5173\u7684\u94c1\u7535\u6027\u80fd\u4f4e\u81f3 20 nm\u3002\u6211\u4eec\u5c06\u8868\u5f81 Al0.78Sc0.22N \u8584\u819c\u7684\u539a\u5ea6\u6548\u5e94\u7684\u5de5\u4f5c\u6269\u5c55\u5230\u8584\u819c\u4e2d\u7684\u6676\u4f53\u53d6\u5411\u7a0b\u5ea6\u548c\u94c1\u7535\u6027\u80fd\u3002\u7528\u8fc7\u6c27\u5316\u786b\u6df7\u5408\u7269 (SPM,H2SO4\/H2O2= 3:1) \u6eb6\u6db2\u5bf9\u63ba\u6742\u5bc6\u5ea6\u4e3a 3 \u00d7 1018 cm-3 \u7684 n+Si \u886c\u5e95\u8fdb\u884c\u5316\u5b66\u6e05\u6d17\uff0c\u7136\u540e\u7528\u7a00\u91ca\u7684 HF(1%) \u6d78\u6e0d\u3002\u5728 0.22Pa \u7684\u538b\u529b\u4e0b\uff0c\u5728 Ar \u548c N2 \u6c14\u4f53\u6d41\u91cf\u5206\u522b\u4e3a 4 \u548c 6 sccm \u7684 Ti \u9776\u6750\u4e0a\uff0c\u4ee5 300 W \u7684\u5c04\u9891\u529f\u7387\u5728\u886c\u5e95\u4e0a\u6e85\u5c04\u6c89\u79ef TiN \u5e95\u90e8\u7535\u6781\u3002\u7136\u540e\uff0cAl0.78Sc0.22N \u8584\u819c\u901a\u8fc7\u76f4\u6d41\u6e85\u5c04\u5728 300W \u4e0b\u4ece Al0.57Sc0.43 \u9776\u6750\u4e0a\u6c89\u79ef\uff0cAr \u548c N2 \u6c14\u6d41\u5206\u522b\u4e3a 5 \u548c 10sccm\uff0c\u538b\u529b\u4e3a 0.7Pa\u3002\u5728\u6b64\u6761\u4ef6\u4e0b\u6c89\u79ef\u7684 Al0.78Sc0.22N \u8584\u819c\u7684\u6210\u5206\u7531 X \u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31\u6d4b\u5b9a\u3002\u6211\u4eec\u6539\u53d8\u4e86Al0.78Sc0.22N \u8584\u819c\u7684\u6c89\u79ef\u65f6\u95f4\uff0c\u4ee5\u5f62\u6210\u539a\u5ea6\u4e3a10-47nm \u7684\u8584\u819c\u3002\u53e6\u4e00\u4e2a TiN \u5c42\u539f\u4f4d\u6c89\u79ef\u5728 Al0.78Sc0.22N \u8584\u819c\u4e0a\u3002\u6240\u6709\u7684\u6c89\u79ef\u8fc7\u7a0b\u6e29\u5ea6\u4fdd\u6301\u6052\u5b9a\u5728 400 \u00b0C\u3002\u4f7f\u7528\u8fc7\u6c27\u5316\u94f5\u6df7\u5408\u7269 (APM,NH4OH: H2O2:H2O = 1:5:5) \u901a\u8fc7\u6e7f\u6cd5\u8680\u523b\u5bf9\u9876\u90e8 TiN \u5c42\u8fdb\u884c\u5149\u523b\u56fe\u6848\u5316\u4ee5\u5f62\u6210\u9876\u90e8\u7535\u6781\u3002\u6700\u540e\uff0c\u901a\u8fc7\u70ed\u84b8\u53d1\u5f62\u6210\u94dd\u80cc\u63a5\u89e6\u3002\u6211\u4eec\u5df2\u7ecf\u8bc1\u5b9e\uff0c\u7535\u5bb9\u5668\u5728\u65bd\u52a0\u7684\u7535\u573a\u4e2d\u5177\u6709\u51e0\u4e4e\u76f8\u540c\u7684\u6f0f\u7535\u6d41\uff0c\u8868\u660e\u8584\u819c\u5185\u90e8\u548c\u754c\u9762\u9644\u8fd1\u7684\u7f3a\u9677\u5bc6\u5ea6\u5927\u5c0f\u662f\u76f8\u540c\u7684\u3002\u8bc4\u4f30\u4e86\u8584\u819c\u4e2d\u6676\u7c92\u7684\u7ed3\u6676\u548c\u53d6\u5411\u901a\u8fc7\u5e73\u9762\u5916\u548c\u6447\u6446\u66f2\u7ebf\u914d\u7f6e\u4e0b\u7684 X \u5c04\u7ebf\u884d\u5c04 (XRD)\u3002 X \u5c04\u7ebf\u6e90\u662f\u53d1\u6563\u89d2\u4e3a 0.04\u00b0 \u7684 CuKa\u3002\u4f7f\u7528 Agilent E4980A LCR \u8ba1\u5728 100 kHz \u4e0b\u4ee5 50 mV \u7684\u5c0f\u4fe1\u53f7\u5e45\u5ea6\u83b7\u5f97\u7535\u5bb9 &#8211; \u7535\u538b (CV) \u7279\u6027\u3002\u6781\u5316 &#8211; \u7535\u538b (PV)\u4f7f\u7528 TOYO \u516c\u53f8\u7684 FCE10 \u7cfb\u5217\u8bbe\u7f6e\u5728 10 kHz \u4e0b\u6d4b\u91cf\u7535\u5bb9\u5668\u7684\u7279\u6027\u3002<\/p><h4>\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h4><p>\u672c\u6587\u4e2d\u4e3b\u8981\u9610\u8ff0\u4e86\u7684\u662f\u5df2\u7ecf\u68c0\u67e5\u4e86\u6e85\u5c04\u6c89\u79ef\u7684\u65e0\u6781\u5316Al0.78Sc0.22N \u8584\u819c\u7684\u94c1\u7535\u6027\u80fd\u7684\u539a\u5ea6\u7f29\u653e\u3002 \u901a\u8fc7 X \u5c04\u7ebf\u6447\u6446\u66f2\u7ebf\u6d4b\u91cf\uff0c\u7528\u8584\u81f3 10 nm\u7684\u8584\u819c\u786e\u8ba4\u4e86 c \u8f74\u53d6\u5411\u7684\u8584\u819c\u3002 \u4ece\u7535\u5bb9\u6d4b\u91cf\u4e2d\u89c2\u5bdf\u5230\u94c1\u7535\u578b\u6ede\u540e\u548c\u65e0\u6781\u5316\u884c\u4e3a\uff0c\u5373\u4f7f\u539a\u5ea6\u4e3a 20 nm\u3002 \u5f53\u539a\u5ea6\u5c0f\u4e8e 35 nm \u65f6\uff0c\u5269\u4f59\u6781\u5316 (Pr) \u663e\u793a\u51fa\u9010\u6e10\u9000\u5316\u3002 \u5f00\u5173 (SW) \u5faa\u73af\u6d4b\u8bd5\u63ed\u793a\u4e86\u8584\u819c\u7684\u5524\u9192\u6548\u5e94\uff0c\u7279\u522b\u662f\u5bf9\u4e8e\u8d85\u8fc7 35 nm\u7684\u539a\u8584\u819c\u3002<\/p><h4><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-26236\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4.png\" alt=\"\" width=\"1106\" height=\"485\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4.png 1106w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-300x132.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-1024x449.png 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-768x337.png 768w\" sizes=\"(max-width: 1106px) 100vw, 1106px\" \/><\/h4><p>\u6211\u4eec\u5bf9 20 \u548c 40 nm \u539a\u7684 Al0.78Sc0.22N \u8584\u819c\u8fdb\u884c\u4e86\u6781\u6027\u76f8\u5173\u7684 CV \u6d4b\u91cf\uff0c\u5982\u56fe 4 \u6240\u793a\u3002 \u6700\u521d\u5e94\u7528\u4e8e\u6837\u54c1\uff0c\u7535\u5bb9\u5728\u4e0a\u4e0b\u626b\u63cf\u4e4b\u95f4\u51e0\u4e4e\u6ca1\u6709\u5dee\u5f02[\u56fe4\uff08a\uff09]\u3002 \u968f\u540e\uff0c\u901a\u8fc7\u5411\u9876\u90e8\u7535\u6781\u65bd\u52a0\u8d1f\u7535\u538b\uff0c\u89c2\u5bdf\u5230\u7535\u5bb9\u9010\u6e10\u589e\u52a0\u5e76\u4f34\u968f\u7740\u5728\u4e00\u5b9a\u7535\u538b\u4e0b\u7684\u7a81\u7136\u4e0b\u964d\u3002 \u4ee5\u4e0b\u5411\u6b63\u65b9\u5411\u65bd\u52a0\u7684\u7535\u538b\u663e\u793a\u51fa\u94c1\u7535\u5f00\u5173 (SW) \u884c\u4e3a\u3002 \u53e6\u4e00\u65b9\u9762\uff0c\u5f53\u5bf9\u65b0\u9c9c\u6837\u54c1\u65bd\u52a0\u7684\u521d\u59cb\u7535\u538b\u8bbe\u7f6e\u4e3a\u8d1f\u65b9\u5411\u65f6\uff0c\u5982\u56fe4\uff08b\uff09\u6240\u793a\uff0c\u6211\u4eec\u770b\u5230\u7535\u5bb9\u7a81\u7136\u4e0b\u964d\uff0c\u8868\u660e\u8584\u819c\u88ab\u5207\u6362\u3002 \u4ece\u8fd9\u4e9b\u6d4b\u91cf\u4e2d\uff0c\u6211\u4eec\u53ef\u4ee5\u5f97\u51fa\u7ed3\u8bba\uff0cAl0.78Sc0.22N \u8584\u819c\u5df2\u7ecf\u5728\u4ece\u8868\u9762\u5230\u57fa\u677f\u7684\u65b9\u5411\u4e0a\u81ea\u6781\u5316\u3002<\/p><h4>\u30bd\u30fc\u30b9<\/h4><p>\u4f5c\u8005\uff1aSung-Lin Tsai,Takuya Hoshii1,HitoshiWakabayashi1,Kazuo Tsutsui,Tien-Kan Chung ,Edward Yi Chang,and KuniyukiKakushima<\/p><p>\u673a\u6784\uff1aSchool of Engineering, Tokyo Institute ofTechnology, 4259 S2-20, Nagatsuta, Midori-ku, Yokohama 226-8502, Japan 2International College of Semiconductor Technology, National Chiao TungUniversity, 1001 University Road, Hsinchu 30010, Taiwan ROC 3 Institute ofInnovative Research, Tokyo Institute of Technology, 4259 S2-20, Nagatsuta,Midori-ku, Yokohama 226-8502, Japan 4 Department of Mechanical Engineering,National Chiao Tung University, 1001 University Road, Hsinchu 30010, Taiwan ROC<\/p><p>\u53d1\u5e03\u65f6\u95f4\uff1aReceived October 16, 2020; revised March 7, 2021;accepted March 16, 2021; published online April 1, 2021<\/p><p>\u671f\u520a\uff1aJapanese Journal of Applied Physics 60, SBBA05(2021)<\/p><p>\u6587\u7ae0\u6765\u6e90\u7f51\u7ad9\uff1aOn the thickness scaling of ferroelectricity inAl0.78Sc0.22N films\uff08<a href=\"https:\/\/iopscience.iop.org\/article\/10.35848\/1347-4065\/abef15\/pdf%EF%BC%89\">https:\/\/iopscience.iop.org\/article\/10.35848\/1347-4065\/abef15\/pdf\uff09<\/a><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-704a406\" data-id=\"704a406\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-39dd93ae elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"39dd93ae\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 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href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/%e5%bc%b7%e8%aa%98%e9%9b%bb%e4%bd%93%e8%a9%a6%e9%a8%93%e6%a9%9f\/\" aria-label=\"Read more about FCE10\u94c1\u7535\u6750\u6599\u6d4b\u8bd5\u8bbe\u5907\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Al0.78Sc0.22N\u8584\u819c\u4e2d\u94c1\u7535\u4f53\u7684 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