{"id":26865,"date":"2022-06-07T17:23:36","date_gmt":"2022-06-07T09:23:36","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26865"},"modified":"2022-11-17T14:31:42","modified_gmt":"2022-11-17T06:31:42","slug":"thin_film_deposition","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e8%96%84%e8%86%9c%e8%92%b8%e7%9d%80\/","title":{"rendered":"\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u8584\u819c\u5f62\u6210\u5165\u9580"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26865\" class=\"elementor elementor-26865\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1dc53e2c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" 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1rem;\">\u00a0<\/span><\/div><div>\u8584\u819c\u5f62\u6210\u306f\u3001\u5bb6\u96fb\u88fd\u54c1\u3001\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u3001\u30d5\u30a1\u30a4\u30d0\u30fc\u30ec\u30fc\u30b6\u30fc\u3001LED\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u3001\u30d5\u30a3\u30eb\u30bf\u30fc\u3001\u5316\u5408\u7269\u534a\u5c0e\u4f53\u3001\u7cbe\u5bc6\u5149\u5b66\u6a5f\u5668\u3001\u9855\u5fae\u93e1\u30fb\u5fae\u91cf\u5206\u6790\u7528\u30b5\u30f3\u30d7\u30eb\u30b9\u30e9\u30a4\u30c9\u3001\u533b\u7642\u7528\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u306a\u3069\u3001\u591a\u304f\u306e\u5149\u96fb\u5b50\u3001\u56fa\u4f53\u3001\u533b\u7642\u6a5f\u5668\u3084\u88fd\u54c1\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u88fd\u9020\u5de5\u7a0b\u3067\u3042\u308b\u3002<\/div><div>\u00a0<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6f63dc elementor-widget elementor-widget-heading\" data-id=\"a6f63dc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\u8584\u819c\u5f62\u6210\u30d7\u30ed\u30bb\u30b9\u306e\u7a2e\u985e\u3068\u30e1\u30ea\u30c3\u30c8\u30fb\u30c7\u30e1\u30ea\u30c3\u30c8\u306e\u6bd4\u8f03<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f62d0 elementor-widget elementor-widget-text-editor\" data-id=\"35f62d0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div>\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\u306b\u7528\u3044\u3089\u308c\u308b\u4ee3\u8868\u7684\u306a\u8584\u819c\u5f62\u6210\u30d7\u30ed\u30bb\u30b9\u3068\u3057\u3066\u306f<strong>\u7269\u7406\u7684\u6c17\u76f8\u6210\u9577\u6cd5(PVD)<\/strong>\u3068<strong>\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5(CVD)<\/strong>.<\/div><div>\u00a0<\/div><\/div><\/div><p><b>\u7269\u7406\u7684\u6c17\u76f8\u6210\u9577\u6cd5\uff08PVD\uff09\u3068\u306f\u3001\u771f\u7a7a\u4e0b\u3067\u539f\u6599\u3092\u52a0\u71b1\u3057\u3001\u539f\u6599\u306e\u8868\u9762\u304b\u3089\u539f\u5b50\u3084\u5206\u5b50\u3092\u653e\u51fa\u3055\u305b\u3001\u57fa\u677f\u4e0a\u306b\u8584\u819c\u3092\u6210\u9577\u3055\u305b\u308b\u65b9\u6cd5\u3067\u3042\u308b\u3002<\/b>\u7269\u7406\u84b8\u7740\u306f\u3001\u771f\u7a7a\u96fb\u5b50\u30d3\u30fc\u30e0\u84b8\u7740\u3084\u62b5\u6297\u84b8\u7740\u3001\u30b9\u30d1\u30c3\u30bf\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u30a2\u30fc\u30af\u30d7\u30e9\u30ba\u30de\u84b8\u7740\u3001\u30a4\u30aa\u30f3\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u5206\u5b50\u7dda\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306a\u3069\u304c\u4e3b\u306a\u65b9\u6cd5\u3067\u3001AEMD\u306e\u96fb\u5b50\u30d3\u30fc\u30e0\u84b8\u7740\u88c5\u7f6e\u3084\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e\u306f\u3044\u305a\u308c\u3082\u7269\u7406\u84b8\u7740\u3067\u3042\u308b\u3002<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u3082\u306e<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u7269\u7406\u7684\u6c17\u76f8\u6210\u9577\u6cd5(PVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 ); font-weight: bold;\">\u00a0<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u306f\u3001\u71b1\u84b8\u7740\u3068\u30d7\u30e9\u30ba\u30de\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6210\u819c\u306e2\u3064\u306b\u5927\u5225\u3055\u308c\u308b\u3002<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">Thermal evaporation deposition\uff08\u71b1\u84b8\u7740\uff09\u3067\u3059\u3002<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u62b5\u6297\u84b8\u767a\u6210\u819c<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">, ,<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u96fb\u5b50\u30d3\u30fc\u30e0\u84b8\u7740<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">(a)\u65b0\u30b7\u30b9\u30c6\u30e0\u306e\u91cd\u8981\u306a\u7279\u5fb4\u3068\u3057\u3066\u3001\u6b21\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308a\u307e\u3059\u3002<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u30d7\u30e9\u30ba\u30de\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30c7\u30dd\u30b8\u30b7\u30e7\u30f3<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">:: \u4ee5\u4e0b\u306e\u3068\u304a\u308a\u3067\u3059\u3002<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">DC\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001RF\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u6027PVD<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">.<\/span><\/p><p><span style=\"font-size: 1rem; background-color: var( --e-global-color-astglobalcolor5 );\">\u00a0<\/span><\/p><p><b>CVD\uff08Chemical Vapour Deposition\uff09\u3068\u306f\u3001\u6c17\u4f53\u72b6\u306e\u7269\u8cea\u3092\u56fa\u4f53\u8868\u9762\u3067\u5316\u5b66\u53cd\u5fdc\u3055\u305b\u3001\u305d\u306e\u8868\u9762\u306b\u5806\u7a4d\u3055\u305b\u308b\u3053\u3068\u3067\u5b89\u5b9a\u3057\u305f\u56fa\u4f53\u819c\u3092\u5f62\u6210\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u3067\u3059\u3002<\/b>1\uff09\u53cd\u5fdc\u30ac\u30b9\u306e\u57fa\u677f\u8868\u9762\u3078\u306e\u62e1\u6563\u30012\uff09\u53cd\u5fdc\u30ac\u30b9\u306e\u57fa\u677f\u8868\u9762\u3078\u306e\u5438\u7740\u30013\uff09\u57fa\u677f\u8868\u9762\u3067\u767a\u751f\u3057\u305f\u6c17\u76f8\u526f\u751f\u6210\u7269\u306e\u8868\u9762\u304b\u3089\u306e\u5265\u96e2\u30014\uff09\u6b8b\u3055\u308c\u305f\u53cd\u5fdc\u7269\u304b\u3089\u306e\u30af\u30e9\u30c3\u30c9\u5c64\u306e\u5f62\u6210\u3001\u3068\u3044\u30464\u3064\u306e\u4e3b\u8981\u306a\u91cd\u8981\u6bb5\u968e\u304c\u3042\u308b\u3002\u30d7\u30e9\u30ba\u30de\u3084\u30ec\u30fc\u30b6\u30fc\u30a2\u30b7\u30b9\u30c8\u306a\u3069\u306e\u6280\u8853\u3092\u7528\u3044\u308b\u3068\u3001\u5316\u5b66\u53cd\u5fdc\u304c\u5927\u5e45\u306b\u4fc3\u9032\u3055\u308c\u3001\u3088\u308a\u4f4e\u6e29\u3067\u306e\u6210\u819c\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5(CVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u4f4e\u5727\uff08LPCVD\uff09\u3001\u5927\u6c17\u5727\uff08APCVD\uff09\u3001\u539f\u5b50\u5c64\u5806\u7a4d\uff08ALD\uff09\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c8\uff08PECVD\uff09\u3001\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\uff08MOCVD\uff09\u3092\u542b\u3080<\/span><\/p><p><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/p><p><b>\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5(ALD)<\/b>\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09\u306e\u4e00\u7a2e\u3067\u3001\u57fa\u677f\u8868\u9762\u306b\u7269\u8cea\u30921\u5c64\u305a\u3064\u539f\u5b50\u819c\u72b6\u306b\u30e1\u30c3\u30ad\u3057\u3066\u3044\u304f\u65b9\u6cd5\u3067\u3042\u308b\u3002\u539f\u5b50\u5c64\u84b8\u7740\u306f\u3001\u901a\u5e38\u306e\u5316\u5b66\u84b8\u7740\u3068\u985e\u4f3c\u3057\u3066\u3044\u307e\u3059\u3002\u3057\u304b\u3057\u3001\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\u3067\u306f\u3001\u65b0\u3057\u3044\u539f\u5b50\u306e\u5c64\u306e\u5316\u5b66\u53cd\u5fdc\u306f\u524d\u306e\u5c64\u3068\u76f4\u63a5\u95a2\u9023\u3057\u3001\u3053\u306e\u65b9\u6cd5\u3067\u306f1\u56de\u306e\u53cd\u5fdc\u306b\u3064\u304d1\u5c64\u306e\u539f\u5b50\u3057\u304b\u5806\u7a4d\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u306a\u3044\u3002<\/p><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\u00a0<\/b><\/span><\/h6><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\u5404\u7a2e\u6210\u819c\u65b9\u6cd5\u306e\u30e1\u30ea\u30c3\u30c8\u30fb\u30c7\u30e1\u30ea\u30c3\u30c8\u306e\u6bd4\u8f03<\/b><\/span><\/h6><table><thead><tr><th><strong>\u30af\u30e9\u30d5\u30c8\u30de\u30f3\u30b7\u30c3\u30d7<\/strong><\/th><th><strong>\u30a2\u30c8\u30df\u30c3\u30af\u30ec\u30a4\u30e4\u30fc\u30c7\u30dd\u30b8\u30b7\u30e7\u30f3<br \/>(ALD)\u3067\u3059\u3002<\/strong><\/th><th><strong>\u7269\u7406\u7684\u6c17\u76f8\u6210\u9577\uff08Physical Vapour Deposition<br \/>(PVD)<\/strong><\/th><th><strong>\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08Chemical Vapour Deposition<br \/>(CVD)<\/strong><\/th><th><strong>\u4f4e\u5727\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08Low Pressure Chemical Vapour Deposition<br \/>(LPCVD\u7089\u5fc3\u7ba1)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>\u6210\u819c\u539f\u7406<\/td><td>\u5316\u5b66\u7684\u8868\u9762\u98fd\u548c<br \/>\u53cd\u5fdc-\u6c88\u6bbf<\/td><td>\u30a8\u30d0\u30dd\u30ec\u30fc\u30b7\u30e7\u30f3-\u30b3\u30f3\u30bd\u30ea\u30c7\u30fc\u30b7\u30e7\u30f3<\/td><td>\u6c17\u76f8\u53cd\u5fdc - \u84b8\u7740<\/td><td>\u4f4e\u5727\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08Low Pressure Chemical Vapour Deposition<br \/>(\u30b9\u30c8\u30fc\u30d6\uff06\u30c1\u30e5\u30fc\u30d6)<\/td><\/tr><tr><td>\u6210\u819c\u30d7\u30ed\u30bb\u30b9<\/td><td>\u5c64\u6d41\u6210\u9577<\/td><td>\u6838\u751f\u6210\u6210\u9577<\/td><td>\u6838\u751f\u6210\u6210\u9577<\/td><td>\u6838\u751f\u6210\u6210\u9577<\/td><\/tr><tr><td>\u30c6\u30e9\u30b9\u306e\u5e83\u3055<\/td><td>\u30a8\u30af\u30bb\u30ec\u30f3\u30c8<\/td><td>\u4e00\u822c<\/td><td>\u826f\u3044<\/td><td>\u826f\u3044<\/td><\/tr><tr><td>\u6210\u819c\u901f\u5ea6<\/td><td>\u3042\u305f\u307e\u304c\u308f\u308b\u3044<\/td><td>\u30af\u30a4\u30c3\u30af<\/td><td>\u30af\u30a4\u30c3\u30af<\/td><td>\u3088\u308a\u4f4e\u901f<\/td><\/tr><tr><td>\u6210\u819c\u6e29\u5ea6<\/td><td>\u4f4e\u3044 (&lt;500\u00b0C)<\/td><td>\u4f4e\u3044<\/td><td>\u30cf\u30a4<\/td><td>\u3088\u308a\u9ad8\u3044<\/td><\/tr><tr><td>\u5747\u8cea\u6027<\/td><td>\u30a8\u30af\u30bb\u30ec\u30f3\u30c8<br \/>0.07 - 0.1nm<\/td><td>\u4e00\u822c<br \/>5nm\u7a0b\u5ea6<\/td><td>\u3088\u308a\u826f\u3044<br \/>0.5 - 2nm<\/td><td><p>\u3088\u308a\u826f\u3044<\/p><\/td><\/tr><tr><td>\u539a\u307f\u5236\u5fa1<\/td><td>\u53cd\u5fdc\u30b5\u30a4\u30af\u30eb\u6570<\/td><td>\u6210\u819c\u6642\u9593<\/td><td>\u6210\u819c\u6642\u9593<br \/>\u6c17\u76f8\u5206\u5727<\/td><td>\u6210\u819c\u6642\u9593<br \/>\u30ac\u30b9\u6bd4<\/td><\/tr><tr><td>\u539f\u6750\u6599\u540d<\/td><td>\u4e0d\u7d14\u7269\u304c\u5c11\u306a\u304f\u3001\u5747\u4e00<\/td><td>\u7121\u6dfb\u52a0<\/td><td>\u4e0d\u7d14\u7269\u3092\u542b\u307f\u3084\u3059\u3044<\/td><td>\u7121\u6dfb\u52a0<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7196e2d elementor-widget elementor-widget-heading\" data-id=\"7196e2d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\u30d5\u30a3\u30eb\u30e0\u306e\u7a2e\u985e\u3068\u9069\u7528\u30b7\u30fc\u30f3<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5b53a73 elementor-widget elementor-widget-text-editor\" data-id=\"5b53a73\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"font-size: 16px; font-style: normal;\" width=\"978\"><tbody><tr><td width=\"98\">\u30d5\u30a3\u30eb\u30e0\u306e\u7a2e\u985e<\/td><td width=\"197\">\u5206\u985e<\/td><td width=\"277\">\u8584\u819c\u5f62\u6210\u6750\u6599<\/td><td width=\"405\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/td><\/tr><tr><td rowspan=\"5\" width=\"98\">\u534a\u5c0e\u4f53<\/td><td width=\"197\">\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3<\/td><td width=\"277\">SiH4 (\u30b7\u30e9\u30f3)<\/td><td width=\"405\">MOS\u306e\u30b2\u30fc\u30c8\u3001\u9ad8\u62b5\u6297\u306a\u3069\u3002<\/td><\/tr><tr><td rowspan=\"3\" width=\"197\">\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3<\/td><td width=\"277\">SiH\u2082Cl\u2082\uff08\u30b8\u30af\u30ed\u30ed\u30b7\u30e9\u30f3; DCS\uff09<\/td><td rowspan=\"3\" width=\"405\">\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u7528\u5358\u7d50\u6676\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u5c64\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"277\">SiHCl3 (\u30c8\u30ea\u30af\u30ed\u30ed\u30b7\u30e9\u30f3; TCS)<\/td><\/tr><tr><td width=\"277\">SiCl4\uff08\u5869\u5316\u30b1\u30a4\u7d20\uff1b\u30b7\u30eb\u30c6\u30c3\u30c8\uff09<\/td><\/tr><tr><td width=\"197\">\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3<\/td><td width=\"277\">SiH4 (\u30b7\u30e9\u30f3)<\/td><td width=\"405\">\u03b1-Si\u592a\u967d\u96fb\u6c60\u3001\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\u30c8\u30ec\u30f3\u30c1\u9762\u7a4d\u306a\u3069\u3002<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">\u8a98\u96fb\u54c1\u8cea<\/td><td width=\"197\">Si02\uff08\u4e8c\u9178\u5316\u73ea\u7d20\uff09<\/td><td width=\"277\">SiH4\u3001O2<br \/>SiH4\u3001N20<br \/>Si\uff08OC2H5\uff094\uff08\u30c6\u30c8\u30e9\u30a8\u30c8\u30ad\u30b7\u30b7\u30e9\u30f3\uff09\u3001O2\uff0fO3<\/td><td width=\"405\">\u6700\u3082\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b\u8a98\u96fb\u4f53\u819c\u3001STI\u3001\u30b2\u30fc\u30c8\u9178\u5316\u819c\u3001\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u3001PMD\u3001IMD\u3001\u30ec\u30b8\u30b9\u30c8\u3001\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">Si3N4\/SiN (\u7a92\u5316\u73ea\u7d20)<\/td><td width=\"277\">SiH4\u3001N2O\u3001N2\u3001NH3<br \/>C8H22N2Si [ \u30d3\u30b9\uff08tert-\u30d6\u30c1\u30eb\u30a2\u30df\u30ce\uff09\u30b7\u30e9\u30f3 ]\u3002<\/td><td width=\"405\">\u30a8\u30c3\u30c1\u30b9\u30c8\u30c3\u30d7\u5c64\u3001\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u3001\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">SiON (\u7a92\u5316\u30b1\u30a4\u7d20)<\/td><td width=\"277\">SiH4\u3001N2O\u3001N2\u3001NH3<\/td><td width=\"405\">\u53cd\u5c04\u9632\u6b62\u5c64\u3001\u9178\u5316\u819c\u30b0\u30ea\u30eb\u3001\u30cf\u30fc\u30c9\u30de\u30b9\u30af\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">PSG\/BPSG <br \/>(\u30db\u30b9\u30db\u30ed\u30b7\u30ea\u30b1\u30fc\u30c8\uff0f\u30db\u30a6\u30b1\u30a4\u9178\u30ac\u30e9\u30b9\uff09\u3002<\/td><td width=\"277\">\u30b7\u30e9\u30f3\u3001\u30dc\u30e9\u30f3\u3001\u30d5\u30a9\u30b9\u30d5\u30a9\u30e9\u30f3\u7b49<\/td><td width=\"405\">PMD\u3001\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u5c64\u3001\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">\u4f4e\u8a98\u96fb\u7387\uff08Low-K\uff09\u6750\u6599<\/td><td width=\"277\">\u30dd\u30ea\u30a4\u30df\u30c9(PI)\u306a\u3069<\/td><td width=\"405\">PMD\u306eSiO2\u7f6e\u63db<\/td><\/tr><tr><td width=\"197\">High-K\uff08\u9ad8\u8a98\u96fb\u7387\uff09\u6750\u6599<\/td><td width=\"277\">Hf\u3001O2\u3001SiO2\u306a\u3069\u3002<\/td><td width=\"405\">\u30b0\u30ea\u30c3\u30c9\u30e1\u30c7\u30a3\u30a2\u5c64\u306b\u304a\u3051\u308bSiO2\u306e\u7f6e\u304d\u63db\u3048<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">\u30e1\u30bf\u30eb<br \/>\u91d1\u5c5e\u5316\u5408\u7269<\/td><td width=\"197\">W\uff08\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff09<\/td><td width=\"277\">WF6\uff08\u516d\u30d5\u30c3\u5316\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\uff09\u3001SiH4\u3001H2<\/td><td width=\"405\">\u96fb\u6c17\u30d5\u30a3\u30eb\u30e0\u3001\u5149\u5b66\u30d5\u30a3\u30eb\u30e0\u3001\u30ea\u30b8\u30c3\u30c9\u30d5\u30a3\u30eb\u30e0\u3001\u8010\u98df\u30d5\u30a3\u30eb\u30e0\u3001\u30b3\u30f3\u30bf\u30af\u30c8\u30db\u30fc\u30eb\u3001\u30b9\u30eb\u30fc\u30db\u30fc\u30eb\u3001\u30b2\u30fc\u30c8\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">WSi2\/TiSi2<br \/>\/CoSix\/NiSi<\/td><td width=\"277\">WF6\u3001\u30b7\u30e9\u30f3\u306a\u3069<\/td><td width=\"405\">\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\/\u30b2\u30fc\u30c8\u306e\u30b7\u30ea\u30b5\u30a4\u30c9\u5c64<\/td><\/tr><tr><td width=\"197\">\u30c1\u30bf\u30f3<\/td><td width=\"277\">Ti[N(CH3)2]4 [ \u30c6\u30c8\u30e9\u30ad\u30b9\uff08\u30b8\u30e1\u30c1\u30eb\u30a2\u30df\u30ce\uff09\u30c1\u30bf\u30f3 ]\u3002<\/td><td rowspan=\"3\" width=\"405\">\u30d0\u30ea\u30a2\u5c64\u3001\u30e1\u30bf\u30eb\u30b0\u30ea\u30eb\u306a\u3069\u3002<\/td><\/tr><tr><td width=\"197\">\u30c6\u30a3<\/td><td width=\"277\">TiCl4 (\u5869\u5316\u30c1\u30bf\u30f3)<\/td><\/tr><tr><td width=\"197\">\u30bf\u30fb\u30bf\u30fb\u30f3<\/td><td width=\"277\">\u00a0<\/td><\/tr><tr><td width=\"197\">Au\/Al\/Cu<\/td><td width=\"277\">\u00a0<\/td><td width=\"405\">\u91d1\u5c5e\u5c64\u3001\u91d1\u5c5e\u30b0\u30ea\u30c3\u30c9\u306a\u3069<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-33a3365 elementor-widget elementor-widget-text-editor\" data-id=\"33a3365\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><b>\u62e1\u5f35\u3055\u308c\u305f\u8aad\u66f8\u3002<\/b><\/p><ul><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/anofabrication_navi\/\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0\uff5c\u6982\u8981<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3 - \u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_fib_%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc - \u30a4\u30aa\u30f3\u30d3\u30fc\u30e0FIB\u3092\u4e2d\u5fc3\u306b<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e5%8a%a0%e5%b7%a5_%e9%9b%bb%e5%ad%90%e3%83%93%e3%83%bc%e3%83%a0%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3 - \u96fb\u5b50\u30d3\u30fc\u30e0\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_%e3%82%a8%e3%83%83%e3%83%81\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3 - \u5149\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_%e3%82%a8%e3%83%83%e3%83%81\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u30a8\u30c3\u30c1\u30f3\u30b0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_%e3%82%a8%e3%83%94%e3%82%bf%e3%82%ad%e3%82%b7%e3%83%bc\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u30d7\u30ed\u30bb\u30b9\uff5c\u8584\u819c\u4f5c\u88fd-\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_pvd\/\" target=\"_blank\" rel=\"noopener\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u8584\u819c\u4f5c\u88fd-PVD\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/anofabrication_cvd\/\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u8584\u819c\u4f5c\u88fd - CVD<\/a><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fdcf92b elementor-widget elementor-widget-text-editor\" data-id=\"fdcf92b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u3092\u8fc5\u901f\u306b\u63d0\u4f9b\u3057\u307e\u3059\u3002<b><a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%82%b3%e3%83%bc%e3%83%86%e3%82%a3%e3%83%b3%e3%82%b0\/\" target=\"_blank\" rel=\"noopener\">\u00a0\u8584\u819c\u5f62\u6210 \/ \u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u69cb\u9020\u30d7\u30ed\u30bb\u30b9\u8a2d\u8a08\u30b5\u30fc\u30d3\u30b9<\/a>,<\/b> \u304a\u554f\u3044\u5408\u308f\u305b\u306e\u969b\u306f\u3001\u304a\u6c17\u8efd\u306b\u30e1\u30c3\u30bb\u30fc\u30b8\u3092\u6b8b\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b39d0bb elementor-widget elementor-widget-wpforms\" data-id=\"b39d0bb\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ja\/wp-json\/wp\/v2\/posts\/26865\" data-token=\"2f272d3c7b772803bd29484326b52e15\" data-trp-original-action=\"\/ja\/wp-json\/wp\/v2\/posts\/26865\"><noscript class=\"wpforms-error-noscript\">\u3053\u306e\u6620\u753b\u306fJavaScript\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u52b9\u679c\u7684\u3067\u3042\u308b\u3002<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row 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.elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-70cee70e elementor-widget elementor-widget-heading\" data-id=\"70cee70e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u88fd\u54c1<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e9aa5a9 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"5e9aa5a9\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27540 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28814\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-1024x768.jpg 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784.jpg 1280w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" >\n\t\t\t\t\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5 - \u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" aria-label=\"\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5 - \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27547 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"285\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg\" class=\"attachment-medium size-medium wp-image-26719\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3.jpg 744w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0\/\" >\n\t\t\t\t\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5 - \u30a8\u30c3\u30c1\u30f3\u30b0\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0\/\" aria-label=\"\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5 - \u30a8\u30c3\u30c1\u30f3\u30b0\u52a0\u5de5 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 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srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/cadence-comparison-\u78c1\u63a7\u6e85\u5c04\u9540\u819c-1-300x228.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/cadence-comparison-\u78c1\u63a7\u6e85\u5c04\u9540\u819c-1.jpg 625w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3%e3%83%bb%e3%82%b3%e3%83%bc%e3%83%86%e3%82%a3%e3%83%b3%e3%82%b0\/\" >\n\t\t\t\t\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u30d7\u30ed\u30bb\u30b9 - \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" 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