{"id":26933,"date":"2022-06-08T16:15:20","date_gmt":"2022-06-08T08:15:20","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26933"},"modified":"2022-10-20T15:51:57","modified_gmt":"2022-10-20T07:51:57","slug":"mems_fabrication_05","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%a1%e3%83%b3%e3%82%ba%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3_05\/","title":{"rendered":"\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5cMEMS\u30d5\u30a1\u30a4\u30f3\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0(V)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26933\" class=\"elementor elementor-26933\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-44cb9ac7 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"44cb9ac7\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-62735589\" data-id=\"62735589\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1c11e568 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1c11e568\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2d7be2b2\" data-id=\"2d7be2b2\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6e89644a elementor-widget elementor-widget-heading\" data-id=\"6e89644a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5cMEMS\u30d5\u30a1\u30a4\u30f3\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0(V)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7d1ec218 elementor-widget elementor-widget-text-editor\" data-id=\"7d1ec218\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.5 \u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30d3\u30fc\u30e0\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) \u96fb\u5b50\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u96fb\u5b50\u30d3\u30fc\u30e0\u306e\u5316\u5b66\u7684\u52b9\u679c\u306f\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002\u88ab\u52a0\u5de5\u7269\u306e\u8868\u9762\u3078\u306e\u96fb\u5b50\u30d3\u30fc\u30e0\u306e\u7167\u5c04\u306e\u51fa\u529b\u5bc6\u5ea6\u304c\u304b\u306a\u308a\u4f4e\u3044\u3068\u3001\u307b\u3068\u3093\u3069\u8868\u9762\u6e29\u5ea6\u306e\u4e0a\u6607\u3092\u5f15\u304d\u8d77\u3053\u3055\u306a\u3044\u3001\u5165\u5c04\u96fb\u5b50\u3068\u9ad8\u5206\u5b50\u6750\u6599\u306e\u5206\u5b50\u306e\u885d\u7a81\u306f\u3001\u305d\u306e\u5206\u5b50\u9396\u306e\u5207\u65ad\u3084\u518d\u91cd\u5408\u3092\u884c\u3044\u307e\u3059\u306e\u3067\u3001\u9ad8\u5206\u5b50\u6750\u6599\u306e\u5316\u5b66\u7684\u6027\u8cea\u3084\u5206\u5b50\u91cf\u306e\u5909\u5316\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u3053\u306e\u52b9\u679c\u306e\u4f7f\u7528\u306f\u3001\u96fb\u5b50\u30d3\u30fc\u30e0\u306e\u9732\u5149\u306b\u3088\u3063\u3066\u5b9f\u65bd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u9732\u5149\u306f\u4e3b\u306b\u4e8c\u7a2e\u985e\u306b\u5206\u3051\u3089\u308c\u3001\u4e00\u3064\u306f\u96fb\u5b50\u30d3\u30fc\u30e0\u8d70\u67fb\u578b\u3067\u3001\u7d040.5~5mm\u306e\u8d70\u67fb\u3067\u96fb\u5b50\u30d3\u30fc\u30e0\u306e1\u03bcm\u4ee5\u5185\u306b\u7126\u70b9\u3092\u5408\u308f\u305b\u3001\u3069\u3093\u306a\u30b0\u30e9\u30d5\u30a3\u30c3\u30af\u306b\u3082\u9732\u5149\u3067\u304d\u308b\u3002\u3082\u3046\u4e00\u3064\u306f\u96fb\u5b50\u30d3\u30fc\u30e0\u306e\u6295\u5f71\u578b\u9732\u5149\u306e\u7e2e\u5c0f\u578b\u3067\u3001\u96fb\u5b50\u30d3\u30fc\u30e0\u304c\u30de\u30b9\u30af\u677f\u3092\u8cab\u901a\u3057\u3001\u6295\u5f71\u306e\u7e2e\u5c0f\u6bd4\u306e1\/5~1\/10\u3067\u96fb\u5b50\u30ec\u30b8\u30b9\u30c8\u306b\u6295\u5f71\u3057\u3001\u5927\u898f\u6a21\u96c6\u7a4d\u56de\u8def\u306e\u30b0\u30e9\u30d5\u30a3\u30c3\u30af\u306e\u9732\u5149\u3092\u884c\u3046\u3002\u96fb\u5b50\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u73fe\u5728\u3001\u6700\u9ad8\u306e\u9ad8\u89e3\u50cf\u5ea6\u30b0\u30e9\u30d5\u30a3\u30c3\u30af\u30b9\u751f\u7523\u6280\u8853\u3067\u3042\u308a\u3001\u5b9f\u9a13\u5ba4\u306e\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u6700\u59272 nm\u306e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30b5\u30a4\u30ba\u3001\u751f\u7523\u3067\u306f\u3001\u4e00\u822c\u7684\u306b\u30010.5\u301c1 \u03bcm\u306e\u30d5\u30a3\u30fc\u30c1\u30e3\u30fc\u30b5\u30a4\u30ba\u306b\u5230\u9054\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u96fb\u5b50\u30d3\u30fc\u30e0\u52a0\u5de5\u306f\u771f\u7a7a\u6761\u4ef6\u4e0b\u3067\u884c\u3046\u5fc5\u8981\u304c\u3042\u308b\u3002\u771f\u7a7a\u74b0\u5883\u3067\u306f\u3001\u96fb\u5b50\u306f\u9ad8\u901f\u3067\u79fb\u52d5\u3067\u304d\u3001\u30ab\u30bd\u30fc\u30c9\u306f\u9178\u5316\u305b\u305a\u3001\u52a0\u5de5\u8868\u9762\u306f\u84b8\u6c17\u306b\u3088\u308b\u9178\u5316\u3092\u9632\u3050\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u771f\u7a7a\u4e2d\u3067\u884c\u3046\u5fc5\u8981\u304c\u3042\u308b\u305f\u3081\u3001\u4e00\u5b9a\u306e\u5236\u9650\u304c\u3042\u308b\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) \u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u69d8\u3005\u306a\u5fae\u7d30\u52a0\u5de5\u6cd5\u306e\u305f\u3081\u306e\u305d\u306e\u904b\u52d5\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u3001\u9ad8\u901f\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u6d41\u306b\u52a0\u901f\u3055\u308c\u305f\u96fb\u754c\u4e2d\u306e\u30a4\u30aa\u30f3\u306e\u5e0c\u30ac\u30b9\u5143\u7d20\u307e\u305f\u306f\u4ed6\u306e\u5143\u7d20\u306e\u4f7f\u7528\u3067\u3042\u308a\u3001\u51e6\u7406\u65b9\u6cd5\u306e\u30d7\u30ed\u30bb\u30b9\u80fd\u529b\u306e\u6709\u671b\u306a\u3001\u5e83\u3044\u7bc4\u56f2\u306e\u958b\u767a\u306b\u304a\u3051\u308b\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u3001\u3042\u308b\u3044\u306f\u30df\u30ea\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u7cbe\u5bc6\u52a0\u5de5\u3067\u3042\u308b\u3002\u305d\u308c\u306f\u306b\u5206\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\uff1a<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(i) \u9664\u53bb\u5de5\u7a0b\u3002\u307e\u305a\u3001\u30a2\u30eb\u30b4\u30f3\u3001\u30af\u30ea\u30d7\u30c8\u30f3\u3001\u30ad\u30bb\u30ce\u30f3\u306a\u3069\u306e\u4e0d\u6d3b\u6027\u30ac\u30b9\u3092\u30a4\u30aa\u30f3\u5316\u5ba4\u5185\u306e\u4f4e\u771f\u7a7a\u306b\u5165\u308c\u3001\u9ad8\u5468\u6ce2\u653e\u96fb\u307e\u305f\u306f\u76f4\u6d41\u653e\u96fb\u3067\u30a4\u30aa\u30f3\u5316\uff08\u30d7\u30e9\u30b9\u30a4\u30aa\u30f3\u306e\u6570\u3068\u30de\u30a4\u30ca\u30b9\u30a4\u30aa\u30f3\u306e\u6570\u304c\u7b49\u3057\u3044\u6df7\u5408\u7269\uff09\u3057\u3001\u52a0\u901f\u96fb\u6975\u3067\u3001\u30d3\u30fc\u30e0\u306e\u5f62\u3067\u30d7\u30e9\u30ba\u30de\u304b\u3089\u30a4\u30aa\u30f3\u3092\u539f\u5b50\u3084\u5206\u5b50\u304b\u3089\u88ab\u52a0\u5de5\u7269\u306e\u8868\u9762\u304b\u3089\u5f15\u304d\u51fa\u3057\u3001\u88ab\u52a0\u5de5\u7269\u306e\u8868\u9762\u306b\u76f4\u63a5\u52a0\u5de5\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u30b0\u30e9\u30d5\u3092\u5b8c\u6210\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u30a4\u30aa\u30f3\u30df\u30ea\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u30dd\u30ea\u30c3\u30b7\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u30b7\u30f3\u30cb\u30f3\u30b0\u3001\u30a4\u30aa\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3053\u306e\u539f\u7406\u3092\u5229\u7528\u3057\u3066\u3044\u307e\u3059\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u52a0\u5de5\u3002\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u5165\u5c04\u30a4\u30aa\u30f3\u3092\u30ef\u30fc\u30af\u8868\u9762\u306b\u4ed8\u7740\u3055\u305b\u308b\u5fae\u7d30\u52a0\u5de5\u3092\u30a4\u30aa\u30f3\u4ed8\u7740\u52a0\u5de5\u3068\u3044\u3044\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u30a4\u30aa\u30f3\u4ed8\u7740\u52a0\u5de5\u306f\u3001\u30a4\u30aa\u30f3\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u52a0\u5de5\u3067\u3059\u3002\u30a4\u30aa\u30f3\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u539f\u5b50\u3084\u5206\u5b50\u306e\u8868\u9762\u306b\u5927\u304d\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u3067\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u3092\u885d\u7a81\u3055\u305b\u3066\u4ed8\u7740\u3055\u305b\u308b\u305f\u3081\u3001\u88ab\u819c\u5f37\u5ea6\u304c\u9ad8\u304f\u3001\u88ab\u819c\u306e\u54c1\u8cea\u3082\u826f\u597d\u3067\u3059\u3002\u30a4\u30aa\u30f3\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u306f\u3001\u8010\u6469\u8017\u6027\u3001\u8010\u8150\u98df\u6027\u3001\u8010\u71b1\u6027\u306e\u8868\u9762\u5f37\u5316\u30d5\u30a3\u30eb\u30e0\u3084\u3001\u96fb\u5b50\u6a5f\u5668\u3001\u534a\u5c0e\u4f53\u3001\u96c6\u7a4d\u56de\u8def\u7528\u306e\u8584\u819c\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(iii) \u6ce8\u5165\u51e6\u7406\u3002\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u3001\u6570\u5341\u304b\u3089\u6570\u767e\u30ad\u30ed\u96fb\u5b50\u30dc\u30eb\u30c8\uff08keV\uff09\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306b\u52a0\u901f\u3055\u308c\u305f\u30a4\u30aa\u30f3\u306f\u3001\u9ad8\u901f\u30a4\u30aa\u30f3\u306b\u5230\u9054\u3059\u308b\u305f\u3081\u306b\u3001\u30ef\u30fc\u30af\u30d4\u30fc\u30b9\u306e\u8868\u9762\u3001\u30ef\u30fc\u30af\u30d4\u30fc\u30b9\u306e\u8868\u5c64\u306e\u539f\u5b50\u30ae\u30e3\u30c3\u30d7\u306b\u7832\u6483\u3001\u307e\u305f\u306f\u30ef\u30fc\u30af\u30d4\u30fc\u30b9\u306e\u8868\u5c64\u306b\u57cb\u3081\u8fbc\u307e\u308c\u305f\u7f6e\u63db\u539f\u5b50\u306e\u5f62\u3067\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u8868\u5c64\u306b\u4fdd\u6301\u3055\u308c\u307e\u3059\u3002\u96c6\u7a4d\u56de\u8def\u3067\u306f\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u91cf\u3092\u5236\u5fa1\u3057\u3001\u96c6\u7a4d\u56de\u8def\u306e\u5747\u4e00\u306a\u96fb\u6c17\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u90e8\u54c1\u306e\u88fd\u9020\u3067\u306f\u3001\u30a4\u30aa\u30f3\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9\u306e\u4f7f\u7528\u306f\u3001\u91d1\u5c5e\u8868\u9762\u5c64\u306e\u4fee\u98fe\u306b\u3088\u3063\u3066\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u63cf\u753b\u3002\u96fb\u5b50\u30d3\u30fc\u30e0\u9732\u5149\u3068\u306f\u7570\u306a\u308a\u3001\u96fb\u5b50\u30d3\u30fc\u30e0\u9732\u5149\u306f\u3001\u30d5\u30a9\u30c8\u30dd\u30ea\u30de\u30fc\u306e\u611f\u5ea6\u306e\u89e3\u50cf\u5ea6\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u4e3b\u306a\u8981\u56e0\u306f\u3001\u4e8c\u6b21\u96fb\u5b50\u306e\u767a\u751f\u3068\u53cd\u5c04\u96fb\u5b50\u306e\u57fa\u677f\u306f\u3001\u30a4\u30aa\u30f3\u306e\u8cea\u91cf\u306f\u96fb\u5b50\u3088\u308a\u3082\u306f\u308b\u304b\u306b\u5927\u304d\u3044\u304c\u3001\u56fa\u4f53\u4e2d\u306e\u6563\u4e71\u306f\u5c0f\u3055\u304f\u3001\u8fd1\u63a5\u52b9\u679c\u306b\u3088\u3063\u3066\u5f15\u304d\u8d77\u3053\u3055\u308c\u308b\u5f8c\u65b9\u6563\u4e71\u52b9\u679c\u3092\u751f\u6210\u3059\u308b\u305f\u3081\u306b\u57fa\u677f\u306b\u5f31\u3044\u3067\u3059\u306e\u3067\u3001\u30de\u30a4\u30af\u30ed\u30d5\u30a1\u30a4\u30f3\u30b0\u30e9\u30d5\u30a3\u30c3\u30af\u30b9\u306e\u7cbe\u5ea6\u306e0.1\u03bcm\u672a\u6e80\u306e\u7dda\u5e45\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u30a4\u30aa\u30f3\u306e\u8cea\u91cf\u304c\u5927\u304d\u3044\u305f\u3081\u3001\u7c92\u5b50\u306f\u3001\u62b5\u6297\u5f8c\u306e\u30ec\u30b8\u30b9\u30c8\u306b\u3082\u5927\u304d\u3044\u306e\u3067\u3001\u7bc4\u56f2\u304c\u77ed\u3044\u306e\u3067\u3001\u30a4\u30aa\u30f3\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u5b8c\u5168\u306b\u30ec\u30b8\u30b9\u30c8\u306b\u5438\u53ce\u3055\u308c\u308b\u306e\u3067\u3001\u30ec\u30b8\u30b9\u30c8\u306e\u611f\u5ea6\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) \u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u7269\u7406\u30d9\u30fc\u30b9\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308b\u3002\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u5316\u5b66\u53cd\u5fdc\u30d9\u30fc\u30b9\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308b\u3002\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u4f4e\u6e29\u30d7\u30e9\u30ba\u30de\u306e\u5fdc\u7528\u3067\u3001\u3053\u306e\u30d7\u30e9\u30ba\u30de\u306e\u4e2d\u3067\u3001\u30d5\u30ea\u30fc\u30e9\u30b8\u30ab\u30eb\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u975e\u5e38\u306b\u6d3b\u6027\u3067\u3042\u308a\u3001\u8584\u819c\u6750\u6599\u3092\u30a8\u30c3\u30c1\u30f3\u30b0\u3059\u308b\u76ee\u7684\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u88ab\u30a8\u30c3\u30c1\u30f3\u30b0\u6750\u6599\u3068\u306e\u5316\u5b66\u53cd\u5fdc\u3092\u4f7f\u7528\u3059\u308b\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) \u30ec\u30fc\u30b6\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30ec\u30fc\u30b6\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u4e3b\u306b\u56fa\u4f53\u30ec\u30fc\u30b6\u30fc\u3067\u4f7f\u7528\u3055\u308c\u3001CO2\u30ec\u30fc\u30b6\u30fc\u306e\u6ce2\u9577\u306f\u9577\u304f\u3001\u4e00\u822c\u7684\u306b\u5fae\u7d30\u52a0\u5de5\u306b\u306f\u9069\u3057\u3066\u3044\u307e\u305b\u3093\u3002\u7406\u8ad6\u7684\u306b\u306f\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30dd\u30c3\u30c8\u306e\u76f4\u5f84\u306f1\u03bcm\u307e\u3067\u96c6\u5149\u3067\u304d\u307e\u3059\u304c\u3001\u73fe\u5728\u3001\u30ec\u30fc\u30b6\u30fc\u52a0\u5de5\u6750\u6599\u3092\u4f7f\u7528\u3059\u308b\u5834\u5408\u3001\u6750\u6599\u306e\u54c1\u8cea\u30e0\u30e9\u3084\u30ec\u30fc\u30b6\u30fc\u306e\u5f62\u6210\u306b\u3088\u308b\u5f71\u97ff\u306a\u3069\u306e\u5185\u90e8\u6e29\u5ea6\u5206\u5e03\u306b\u3088\u308a\u3001\u591a\u632f\u52d5\u3084\u504f\u5fc3\u632f\u52d5\u304c\u767a\u751f\u3057\u3084\u3059\u304f\u3001\u30ec\u30fc\u30b6\u30fc\u306e\u767a\u6563\u89d2\u304c\u5927\u304d\u304f\u306a\u308b\u305f\u3081\u30011\u03bcm\u7a0b\u5ea6\u307e\u3067\u96c6\u5149\u3059\u308b\u3053\u3068\u306f\u56f0\u96e3\u3067\u3059\u3002\u3057\u304b\u3057\u3001\u7126\u70b9\u9762\u4e0a\u306e\u5f37\u5ea6\u5206\u5e03\u306b\u3088\u308a\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u96c6\u4e2d\u306e\u72ed\u3044\u5e2f\u57df\u304c\u3042\u308b\u305f\u3081\u3001\u52a0\u5de5\u306b\u4f7f\u7528\u3067\u304d\u308b\u30a8\u30cd\u30eb\u30ae\u30fc\u5bc6\u5ea6\u306e\u95be\u5024\u304c\u3042\u308a\u3001\u7a74\u306e\u30d3\u30fc\u30e0\u30b9\u30dd\u30c3\u30c8\u5f84\u304c\u5c0f\u3055\u3044\u3088\u308a\u3082\u52a0\u5de5\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u30ec\u30fc\u30b6\u30fc\u7a74\u3042\u3051\u306e\u7a74\u5f84\u306f10\u03bcm\u7a0b\u5ea6\u3068\u5c0f\u3055\u304f\u3001\u6df1\u3055\u5bfe\u76f4\u5f84\u6bd4\u306f5\u4ee5\u4e0a\u3068\u306a\u308b\u3002<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\u30ec\u30fc\u30b6\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u7cbe\u5ea6\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u4e3b\u306a\u8981\u56e0\u306f\u3001\u51fa\u529b\u30d1\u30ef\u30fc\u3068\u30d1\u30eb\u30b9\u5e45\u306e\u5f71\u97ff\u3001\u7126\u70b9\u8ddd\u96e2\u3068\u767a\u6563\u89d2\u306e\u5f71\u97ff\u3001\u7126\u70b9\u4f4d\u7f6e\u306e\u5f71\u97ff\u3067\u3042\u308b\uff1b<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u30b9\u30dd\u30c3\u30c8\u5185\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u5206\u5e03\u306e\u5f71\u97ff\u3001\u8907\u6570\u306e\u30ec\u30fc\u30b6\u30fc\u7167\u5c04\u306e\u5f71\u97ff\u3001\u88ab\u52a0\u5de5\u7269\u306e\u6750\u8cea\u306e\u5f71\u97ff\u3002<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6b14baeb elementor-widget elementor-widget-text-editor\" data-id=\"6b14baeb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u3092\u8fc5\u901f\u306b\u63d0\u4f9b\u3057\u307e\u3059\u3002<span style=\"color: #0e2143;\"><strong><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/\" target=\"_blank\" rel=\"noopener\">MEMS\u30c7\u30d0\u30a4\u30b9\uff0f\u5fae\u7d30\u30fb\u30ca\u30ce\u69cb\u9020\u52a0\u5de5\u8a2d\u8a08\u30b5\u30fc\u30d3\u30b9<\/a>,<\/strong><\/span> \u304a\u554f\u3044\u5408\u308f\u305b\u306e\u969b\u306f\u3001\u304a\u6c17\u8efd\u306b\u30e1\u30c3\u30bb\u30fc\u30b8\u3092\u6b8b\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2284baf8 elementor-widget elementor-widget-wpforms\" data-id=\"2284baf8\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ja\/wp-json\/wp\/v2\/posts\/26933\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ja\/wp-json\/wp\/v2\/posts\/26933\"><noscript class=\"wpforms-error-noscript\">\u3053\u306e\u6620\u753b\u306fJavaScript\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u52b9\u679c\u7684\u3067\u3042\u308b\u3002<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\u30e1\u30fc\u30eb\u30a2\u30c9\u30ec\u30b9<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\u30e1\u30fc\u30eb\u30a2\u30c9\u30ec\u30b9\u3092\u78ba\u8a8d<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\u3078\u306e\u8981\u6c42<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\u9001\u4fe1<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\u8aad\u66f8\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ja\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2a22fd2e\" data-id=\"2a22fd2e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-23b4ad8e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"23b4ad8e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6618ad elementor-widget elementor-widget-heading\" data-id=\"a6618ad\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div 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srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/2pp-2%e5%85%89%e5%ad%90%e9%87%8d%e5%90%88\/\" >\n\t\t\t\t\u9ad8\u7cbe\u5ea62\u5149\u5b50\u91cd\u54083D\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/2pp-2%e5%85%89%e5%ad%90%e9%87%8d%e5%90%88\/\" 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alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%ac%e3%83%b3%e3%82%ba%e3%82%a2%e3%83%ac%e3%82%a4\/\" >\n\t\t\t\t\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u30aa\u30d7\u30c6\u30a3\u30af\u30b9\u7528\u30de\u30a4\u30af\u30ed\u30ec\u30f3\u30ba\u30a2\u30ec\u30a4\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%ac%e3%83%b3%e3%82%ba%e3%82%a2%e3%83%ac%e3%82%a4\/\" aria-label=\"\u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0\u7528\u30de\u30a4\u30af\u30ed\u30ec\u30f3\u30ba\u30a2\u30ec\u30a4 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" >\n\t\t\t\t\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8(NIL)\u306e\u4e0b\u8acb\u3051\u696d\u52d9\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" aria-label=\"\u30ca\u30ce\u52a0\u5de5\u4e28\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\uff08NIL\uff09OEM \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2fe17bdd elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2fe17bdd\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6194a62e elementor-widget elementor-widget-heading\" data-id=\"6194a62e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u3059\u308b\u8aad\u307f\u65b9<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7595a58b elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"7595a58b\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container 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class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\",\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"wordCount\":19,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"ja\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"description\":\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ja\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/ja\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/ja\/\u89e3\u6c7a\u7b56\/\u30ca\u30ce\u30d5\u30a1\u30d6\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30e1\u30f3\u30ba\u30d5\u30a1\u30d6\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3_05\/","og_locale":"ja_JP","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","og_description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","og_url":"https:\/\/www.accscicn.com\/ja\/\u89e3\u6c7a\u7b56\/\u30ca\u30ce\u30d5\u30a1\u30d6\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\/\u30e1\u30f3\u30ba\u30d5\u30a1\u30d6\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3_05\/","article_published_time":"2022-06-08T08:15:20+00:00","article_modified_time":"2022-10-20T07:51:57+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"\u57f7\u7b46\u8005":"admin","\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"2\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"wordCount":19,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"ja"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ja"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/ja\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/posts\/26933","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/comments?post=26933"}],"version-history":[{"count":16,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/posts\/26933\/revisions"}],"predecessor-version":[{"id":28228,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/posts\/26933\/revisions\/28228"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/media?parent=26933"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/categories?post=26933"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/ja\/wp-json\/wp\/v2\/tags?post=26933"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}