{"id":27270,"date":"2022-07-28T15:05:49","date_gmt":"2022-07-28T07:05:49","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27270"},"modified":"2022-10-26T15:40:51","modified_gmt":"2022-10-26T07:40:51","slug":"nanofab_opto","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%bb%e3%82%aa%e3%83%97%e3%83%88\/","title":{"rendered":"\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\uff5c\u5149\u30c7\u30d0\u30a4\u30b9\u7528\u6750\u6599"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27270\" class=\"elementor elementor-27270\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7048bd0c elementor-section-full_width elementor-section-stretched 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100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><strong>\u30b7\u30ea\u30b3\u30f3<\/strong><\/p><\/section><\/section><p>\u30b7\u30ea\u30b3\u30f3\u306f\u3001\u96c6\u7a4d\u56de\u8def\u306e\u6a19\u6e96\u7684\u306a\u6750\u6599\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u3066\u304a\u308a\u3001\u4e16\u754c\u3067\u6700\u3082\u5e83\u304f\u7814\u7a76\u3055\u308c\u3066\u3044\u308b\u6750\u6599\u306e\u4e00\u3064\u3067\u3042\u308b\u3002\u3053\u306e\u6750\u6599\u306f\u9ad8\u6e29\u534a\u5c0e\u4f53\u3068\u3057\u3066\u4f7f\u7528\u3059\u308b\u306e\u306b\u9069\u3057\u3066\u304a\u308a\u3001\u9178\u5316\u7269\u7d76\u7e01\u6750\u6599\u3068\u3057\u3066\u5bb9\u6613\u306b\u6210\u9577\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u7279\u6027\u3068\u3001\u73fe\u5728\u306e\u3059\u3079\u3066\u306e\u7523\u696d\u30a4\u30f3\u30d5\u30e9\u3068\u30c4\u30fc\u30eb\u306b\u3088\u308a\u3001\u96c6\u7a4d\u30b7\u30ea\u30b3\u30f3\u5149\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u306b\u5927\u304d\u306a\u95a2\u5fc3\u304c\u96c6\u307e\u3063\u3066\u3044\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u306f\u3001\u767a\u5149\u30c0\u30a4\u30aa\u30fc\u30c9\uff08LED\uff09\u3001\u5c0e\u6ce2\u7ba1\u3001\u592a\u967d\u96fb\u6c60\u306a\u3069\u306e\u5149\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u3084\u3001\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0\uff08MEMS\uff09\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p><p>\u5f93\u6765\u306e\u5316\u5b66\u51e6\u7406\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u306e\u7570\u65b9\u6027\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001KOH\uff1aH2O\uff08\u91cd\u91cf\u6bd41\uff1a1\uff09\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u6db2\u3092\u4f7f\u7528\u3057\u300180\u2103\u3067\u7d041.4\u03bcm\/min\u306e\u901f\u5ea6\u3067\u884c\u3046\u3002\u3053\u306e\u5316\u5b66\u6cd5\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u5fae\u7d30\u52a0\u5de5\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u30b9\u30eb\u30fc\u30db\u30fc\u30eb\u306e\u52a0\u5de5\u3084\u8584\u819c\u306e\u5206\u96e2\u306b\u3088\u304f\u7528\u3044\u3089\u308c\u308b\u3002\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u306e\u7570\u65b9\u6027\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001SF6\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u6db2\u3067\u9054\u6210\u3055\u308c\u307e\u3059\u3002\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7814\u7a76\u3057\u305f\u7d50\u679c\u3001DeepReactiveIonEtch\uff08DRIE\uff09\u6280\u8853\u306b\u884c\u304d\u7740\u304d\u307e\u3057\u305f\u3002\u3053\u306e\u6280\u8853\u3067\u306f\u3001SF6\/Ar\u3068CHF3\/Ar\u306e\u5316\u5b66\u30a8\u30c3\u30c1\u30e3\u30f3\u30c8\u3092\u4ea4\u4e92\u306b\u4f7f\u7528\u3057\u307e\u3059\u3002\u3053\u306e\u6df7\u5408\u30ac\u30b9\u306b\u3088\u308a\u3001\u3059\u3079\u3066\u306e\u9732\u51fa\u9762\u306b\u30c6\u30d5\u30ed\u30f3\u30dd\u30ea\u30de\u30fc\u306e\u5806\u7a4d\u304c\u4fc3\u9032\u3055\u308c\u307e\u3059\u3002\u30a4\u30aa\u30f3\u7832\u6483\u306b\u3088\u308a\u3001SF6\/Ar\u30d7\u30ed\u30bb\u30b9\u306f\u6c34\u5e73\u9762\u304b\u3089\u30dd\u30ea\u30de\u30fc\u3092\u7d20\u65e9\u304f\u9664\u53bb\u3057\u3001\u9732\u51fa\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u9762\u3092\u30a8\u30c3\u30c1\u30f3\u30b0\u3057\u307e\u3059\u3002\u30b3\u30dd\u30ea\u30de\u30fc\u51e6\u7406\u306b\u3088\u308a\u3001\u5074\u58c1\u3078\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u56de\u907f\u3055\u308c\u3001\u9ad8\u5ea6\u306b\u7570\u65b9\u6027\u306e\u3042\u308b\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5206\u5e03\u306e\u5f62\u6210\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002<\/p><p>PMMA\u306e\u7dda\u5e45\u304c10nm\u4ee5\u4e0b\u3067\u3042\u308c\u3070\u3001\u96fb\u5b50\u30d3\u30fc\u30e0\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3092\u7528\u3044\u3066\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u52a0\u5de5\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3067\u3059\u3002\u7c73\u56fd\u30b5\u30f3\u30c7\u30a3\u30a2\u56fd\u7acb\u7814\u7a76\u6240\u3067\u306f\u3001\u8868\u9762\u30de\u30a4\u30af\u30ed\u30e1\u30ab\u30cb\u30ab\u30eb\u30ea\u30d5\u30ec\u30af\u30bf\u30fc\u30c7\u30d0\u30a4\u30b9\u3084\u96c6\u5149\u578b\u592a\u967d\u96fb\u6c60\u306a\u3069\u3001\u591a\u304f\u306e\u5149\u5b66\u30c7\u30d0\u30a4\u30b9\u3092\u30b7\u30ea\u30b3\u30f3\u3067\u52a0\u5de5\u3057\u3066\u3044\u307e\u3059\u3002\u00a0<\/p><p>\u00a0<\/p><section 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style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><strong>\u6eb6\u878d\u30b7\u30ea\u30ab<\/strong><\/p><\/section><\/section><p>\u6eb6\u878d\u77f3\u82f1\u306f\u3001\u975e\u6676\u8cea\u30b7\u30ea\u30ab\uff08SiO2\uff09\u3092\u542b\u3080\u30ac\u30e9\u30b9\u3067\u3042\u308b\u3002\u5408\u6210\u6642\u306e\u7d14\u5ea6\u304c\u9ad8\u3044\u305f\u3081\u3001\u77f3\u82f1\u306e\u5149\u5b66\u7684\u3001\u71b1\u7684\u7279\u6027\u306f\u4ed6\u306e\u30ac\u30e9\u30b9\u3088\u308a\u512a\u308c\u3066\u3044\u307e\u3059\u3002\u71b1\u81a8\u5f35\u4fc2\u6570\u304c\u975e\u5e38\u306b\u5c0f\u3055\u304f\uff0820\uff5e320\u2103\u306e\u6e29\u5ea6\u7bc4\u56f2\u3067\u7d045.5\u00d710-7cm\/\uff08cm\u30fbK\uff09\uff09\u3001\u6e29\u5ea6\u5909\u5316\u306e\u6fc0\u3057\u3044\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002\u7d2b\u5916\u304b\u3089\u8d64\u5916\u57df\u306b\u304b\u3051\u3066\u9ad8\u3044\u900f\u904e\u7387\u3068\u4f4e\u3044\u5c48\u6298\u7387\uff08\u30d5\u30ec\u30cd\u30eb\u53cd\u5c04\u640d\u5931\u304c\u4f4e\u3044\uff09\u3092\u6709\u3057\u3001\u5149\u5b66\u7528\u9014\u306b\u6700\u9069\u306a\u6750\u6599\u3067\u3059\u3002\u3053\u306e\u6750\u6599\u306f\u3001\u69d8\u3005\u306a\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c7\u30d0\u30a4\u30b9\u3084\u5e83\u5e2f\u57df\u5149\u5b66\u90e8\u54c1\u306b\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p><p>\u6700\u65b0\u306e\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u88c5\u7f6e\u3092\u4f7f\u7528\u3057\u3066\u3053\u306e\u6750\u6599\u3092\u51e6\u7406\u3059\u308b\u305f\u3081\u306b\u3001\u6eb6\u878d\u30b7\u30ea\u30ab\u6750\u6599\u306b\u7279\u5316\u3057\u305f\u3055\u307e\u3056\u307e\u306a\u6280\u8853\u304c\u958b\u767a\u3055\u308c\u3066\u3044\u308b\u3002\u3053\u308c\u307e\u3067\u306e\u7814\u7a76\u3067\u306f\u3001\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u30a6\u30a7\u30fc\u30cf\u306f\u3093\u3060\u4ed8\u3051\u306b\u30d5\u30c3\u9178\uff08HF\uff09\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u4e2d\u5fc3\u3067\u3057\u305f\u3002\u6eb6\u878d\u30b7\u30ea\u30ab\u306f\u975e\u7d50\u6676\u6027\u6750\u6599\u3067\u3042\u308b\u305f\u3081\u3001\u6e7f\u5f0f\u5316\u5b66\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u7b49\u65b9\u7684\u306a\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5206\u5e03\u304c\u89b3\u5bdf\u3055\u308c\u307e\u3059\u3002\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3068\u30d5\u30c3\u9178\u30d0\u30c3\u30d5\u30a1\u30fc\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u77f3\u82f1\u4e0a\u306b\u7406\u60f3\u306b\u8fd1\u3044\u534a\u5186\u7b52\u5f62\u72b6\u3092\u5f62\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u30a6\u30a7\u30fc\u30cf\u306f\u3093\u3060\u4ed8\u3051\u6280\u8853\uff08\u7d041000\u2103\uff09\u306b\u3088\u308a\u3001\u5186\u7b52\u5f62\u306e\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c1\u30e3\u30f3\u30cd\u30eb\u3092\u4f5c\u88fd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p><p>\u6700\u8fd1\u306e\u30ca\u30ce\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3092\u7528\u3044\u3066\u4f5c\u88fd\u3055\u308c\u305f\u5149\u5b66\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u30d5\u30ec\u30cd\u30eb\u30ec\u30f3\u30ba\u3084\u3001\u30d0\u30a4\u30ca\u30ea\u30fc\u30aa\u30d7\u30c6\u30a3\u30af\u30b9\u3001\u52fe\u914d\u5c48\u6298\u7387\u30ec\u30f3\u30ba\u3001\u30b5\u30d6\u6ce2\u9577\u4eba\u5de5\u52fe\u914d\u5c48\u6298\u7387\u30ec\u30f3\u30ba\u306a\u3069\u306e\u56de\u6298\u7d20\u5b50\u306e\u6a5f\u80fd\u3092\u53ef\u80fd\u306b\u3059\u308b\u52fe\u914d\u307e\u305f\u306f\u89d2\u5ea6\u4ed8\u304d\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5206\u5e03\u3092\u6301\u3064\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u7c73\u56fd\u30b5\u30f3\u30c7\u30a3\u30a2\u56fd\u7acb\u7814\u7a76\u6240\u306e\u7814\u7a76\u8005\u306f\u3001\u96fb\u5b50\u30d3\u30fc\u30e0\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\uff08RIE\uff09\u3092\u6570\u30b5\u30a4\u30af\u30eb\u7528\u3044\u3066\u3001\u8907\u6570\u306e\u30b9\u30c6\u30c3\u30d7\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5206\u5e03\u3092\u6301\u3064\u6eb6\u878d\u30b7\u30ea\u30ab\u30d0\u30a4\u30ca\u30ea\u30ec\u30f3\u30ba\u3092\u4f5c\u88fd\u3057\u307e\u3057\u305f\u3002\u7814\u7a76\u8005\u3089\u306f\u3001\u30cb\u30c3\u30b1\u30eb\uff08Ni\uff09\u30de\u30b9\u30af\uff08\u30af\u30ed\u30e0\uff08Cr\uff09\u307e\u305f\u306f\u30c1\u30bf\u30f3\uff08Ti\uff09\u4ed8\u7740\u5c64\u3092\u542b\u3080\uff09\u3068\u3001\u30c8\u30ea\u30af\u30ed\u30ed\u30e1\u30bf\u30f3\uff08CHF3\uff0940sccm\uff08\u6a19\u6e96\u30d5\u30ed\u30fc\uff09\u3068\u9178\u7d203sccm\u306e\u6700\u9069\u306a\u30a8\u30c3\u30c1\u30f3\u30b0\u6db2\u6bd4\u3092\u7d44\u307f\u5408\u308f\u305b\u300140mTorr\u306e\u5727\u529b\u3068\u9178\u7d20\u3092\u9069\u7528\u3057\u307e\u3057\u305f\u3002396V\u306e\u30d9\u30fc\u30b9\u30d0\u30a4\u30a2\u30b9\u3068200W\u306eRF\u30d1\u30ef\u30fc\u306b\u3088\u308a\u3001\u6975\u3081\u3066\u9ad8\u3044\u7570\u65b9\u6027\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u5206\u5e03\u304c\u5f97\u3089\u308c\u308b\u3002<\/p><p>\u6eb6\u878d\u30b7\u30ea\u30ab\u306e\u54c1\u8cea\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6700\u7d42\u7684\u306a\u54c1\u8cea\u306b\u91cd\u8981\u306a\u5f71\u97ff\u3092\u53ca\u307c\u3057\u307e\u3059\u3002\u4f4e\u54c1\u8cea\u306e\u6eb6\u878d\u30b7\u30ea\u30ab\u306f\u3001\u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u5de5\u7a0b\u5f8c\u306b\u30dc\u30a4\u30c9\u304c\u767a\u751f\u3057\u305f\u308a\u3001\u8868\u9762\u304c\u8352\u308c\u305f\u308a\u3001\u3067\u3053\u307c\u3053\u306b\u306a\u3063\u305f\u308a\u3059\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u6700\u9069\u306a\u7570\u65b9\u6027\u3068\u8868\u9762\u5e73\u6ed1\u6027\u3092\u6301\u3064\u9ad8\u54c1\u8cea\u306e\u57fa\u677f\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u306f\u3001\u5149\u5b66\u90e8\u54c1\u306b\u3068\u3063\u3066\u307b\u3068\u3093\u3069\u6700\u3082\u57fa\u672c\u7684\u306a\u8981\u4ef6\u3067\u3042\u308b\u3002<\/p><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2007227d elementor-widget elementor-widget-text-editor\" data-id=\"2007227d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u3092\u8fc5\u901f\u306b\u63d0\u4f9b\u3057\u307e\u3059\u3002<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/\" target=\"_blank\" rel=\"noopener\"><b>MEMS\u30c7\u30d0\u30a4\u30b9\uff0f\u5fae\u7d30\u30fb\u30ca\u30ce\u69cb\u9020\u52a0\u5de5\u8a2d\u8a08\u30b5\u30fc\u30d3\u30b9<\/b><\/a>\u304a\u6c17\u8efd\u306b\u30b3\u30e1\u30f3\u30c8\u3092\u304a\u5bc4\u305b\u304f\u3060\u3055\u3044\u3002<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-749e771 elementor-widget elementor-widget-wpforms\" data-id=\"749e771\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ja\/wp-json\/wp\/v2\/posts\/27270\" data-token=\"4ad40585b6ccf18e34a3ca745a09f991\" data-trp-original-action=\"\/ja\/wp-json\/wp\/v2\/posts\/27270\"><noscript class=\"wpforms-error-noscript\">\u3053\u306e\u6620\u753b\u306fJavaScript\u3092\u4f7f\u7528\u3057\u3066\u304a\u308a\u3001\u52b9\u679c\u7684\u3067\u3042\u308b\u3002<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\u30e1\u30fc\u30eb\u30a2\u30c9\u30ec\u30b9<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\u30e1\u30fc\u30eb\u30a2\u30c9\u30ec\u30b9\u3092\u78ba\u8a8d<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u52a0\u5de5\u3078\u306e\u8981\u6c42<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\u9001\u4fe1<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\u8aad\u66f8\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ja\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2c18f588\" data-id=\"2c18f588\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-62885605 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"62885605\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-256c592 elementor-widget elementor-widget-heading\" data-id=\"256c592\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u88fd\u54c1<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-79ba4248 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"79ba4248\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/2pp-2%e5%85%89%e5%ad%90%e9%87%8d%e5%90%88\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/2pp-2%e5%85%89%e5%ad%90%e9%87%8d%e5%90%88\/\" >\n\t\t\t\t\u9ad8\u7cbe\u5ea62\u5149\u5b50\u91cd\u54083D\u30d7\u30ea\u30f3\u30c6\u30a3\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%97%e3%83%ad%e3%83%80%e3%82%af%e3%83%88\/2pp-2%e5%85%89%e5%ad%90%e9%87%8d%e5%90%88\/\" aria-label=\"\u9ad8\u7cbe\u5ea62\u5149\u5b50\u91cd\u54083D\u30d7\u30ea\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%ac%e3%83%b3%e3%82%ba%e3%82%a2%e3%83%ac%e3%82%a4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%ac%e3%83%b3%e3%82%ba%e3%82%a2%e3%83%ac%e3%82%a4\/\" >\n\t\t\t\t\u30de\u30a4\u30af\u30ed\u30fb\u30ca\u30ce\u30aa\u30d7\u30c6\u30a3\u30af\u30b9\u7528\u30de\u30a4\u30af\u30ed\u30ec\u30f3\u30ba\u30a2\u30ec\u30a4\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%83%ac%e3%83%b3%e3%82%ba%e3%82%a2%e3%83%ac%e3%82%a4\/\" aria-label=\"\u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0\u7528\u30de\u30a4\u30af\u30ed\u30ec\u30f3\u30ba\u30a2\u30ec\u30a4 \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" >\n\t\t\t\t\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8(NIL)\u306e\u4e0b\u8acb\u3051\u696d\u52d9\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e3%83%8a%e3%83%8e%e3%82%a4%e3%83%b3%e3%83%97%e3%83%aa%e3%83%b3%e3%83%88%e3%83%bb%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc\/\" aria-label=\"\u30ca\u30ce\u52a0\u5de5\u4e28\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\uff08NIL\uff09OEM \u306b\u3064\u3044\u3066\u3082\u3063\u3068\u8aad\u3080\" tabindex=\"-1\" >\n\t\t\t\u7d9a\u304d\u3092\u8aad\u3080 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3998bd83 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"3998bd83\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e691b6d elementor-widget elementor-widget-heading\" data-id=\"5e691b6d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u95a2\u9023\u3059\u308b\u8aad\u307f\u65b9<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-611eb341 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"611eb341\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29153 post type-post status-publish format-standard has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e5%8e%9f%e5%ad%90%e5%b1%a4%e5%a0%86%e7%a9%8d%e6%b3%95%e3%81%a8%e3%81%af\/\" >\n\t\t\t\t\u8584\u819c\u5f62\u6210\u4e28\u539f\u5b50\u5c64\u5806\u7a4d\uff08ALD\uff09\u6280\u8853\u306e\u539f\u7406\u3068\u5fdc\u7528\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u8584\u819c\u6c89\u79ef\u4e28\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09 \u6280\u672f\u539f\u7406<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ja\/%e8%a7%a3%e6%b1%ba%e7%ad%96\/%e3%83%8a%e3%83%8e%e3%83%95%e3%82%a1%e3%83%96%e3%83%aa%e3%82%b1%e3%83%bc%e3%82%b7%e3%83%a7%e3%83%b3\/%e5%8e%9f%e5%ad%90%e5%b1%a4%e5%a0%86%e7%a9%8d%e6%b3%95%e3%81%a8%e3%81%af\/\" 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