{"id":26232,"date":"2022-04-22T21:59:53","date_gmt":"2022-04-22T13:59:53","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26232"},"modified":"2022-10-20T17:44:07","modified_gmt":"2022-10-20T09:44:07","slug":"app_fce10_004","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%9d%b8%ec%82%ac%ec%9d%b4%ed%8a%b8\/%ec%95%a0%ed%94%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98\/app_fce10_004\/","title":{"rendered":"Al0.78Sc0.22N \ud544\ub984\uc5d0\uc11c \uac15\uc720\uc804\uccb4\uc758 \ub450\uaed8 \uc870\uc815"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26232\" class=\"elementor elementor-26232\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-666329bc elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"666329bc\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-2c20a997\" data-id=\"2c20a997\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3a04a081 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"3a04a081\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-766aa1d5\" data-id=\"766aa1d5\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-514f487f elementor-widget elementor-widget-heading\" data-id=\"514f487f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">Al0.78Sc0.22N \ud544\ub984\uc5d0\uc11c \uac15\uc720\uc804\uccb4\uc758 \ub450\uaed8 \uc870\uc815<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7cd7adeb elementor-widget elementor-widget-text-editor\" data-id=\"7cd7adeb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<h4>\ud504\ub808\uc820\ud14c\uc774\uc158<\/h4><p>\uac15\ub825\ud55c \uae30\uc220 \ubc1c\uc804\uc73c\ub85c \uc790\uae30 \uc800\ud56d\uc131 \ub79c\ub364 \uc561\uc138\uc2a4 \uba54\ubaa8\ub9ac\uc640 \uac15\uc720\uc804\uccb4 \ub79c\ub364 \uc561\uc138\uc2a4 \uba54\ubaa8\ub9ac(FRAM)\ub97c \ud3ec\ud568\ud55c \uc800\uc804\ub825 \ube44\ud718\ubc1c\uc131 \uba54\ubaa8\ub9ac\uac00 IoT \uc7a5\uce58\uc6a9 \uc800\uc804\ub825 \ub9c8\uc774\ud06c\ub85c \ucee8\ud2b8\ub864\ub7ec\uc640 \ud1b5\ud569\ub418\uc5c8\uc2b5\ub2c8\ub2e4). \uac15\uc720\uc804\uccb4 Pb(ZrTi)O3(PZT) \ud544\ub984\uc744 \uc0ac\uc6a9\ud55c FRAM\uc740 \ud50c\ub798\uc2dc \uba54\ubaa8\ub9ac\uc5d0 \ube44\ud574 \ud6e8\uc52c \uc800\ub834\ud569\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uac15\uc720\uc804\uccb4 \ud544\ub984\uc758 \ub450\uaed8\ub97c \ub298\ub9ac\uba74 \uac15\uc720\uc804\uccb4 \ucee4\ud328\uc2dc\ud130\uc758 \ud06c\uae30\uac00 \uc904\uc5b4\ub4e4\uc5b4 \uc804\ub825 \uc18c\ube44\uac00 \uac10\uc18c\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 PZT \ud544\ub984\uc740 100nm \ubbf8\ub9cc\uc73c\ub85c \uc587\uc544\uc9c0\uba74 \uac15\uc720\uc804\uc131\uc744 \uc783\ub294 \uac83\uc73c\ub85c \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c \uadc0\uae08\uc18d \uc804\uadf9\uc774 \uc788\ub294 PZT \ud544\ub984\uc740 \ubc18\ub3c4\uccb4 \uacf5\uc815\uacfc \uc644\uc804\ud788 \ud638\ud658\ub418\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc9c0\uae08\uae4c\uc9c0 \uae30\uc874\uc758 \uac15\uc720\uc804\uccb4 \uc18c\uc7ac\ub97c \ub300\uccb4\ud560 \uc218 \uc788\ub294 \uc5ec\ub7ec \uac15\uc720\uc804\uccb4 \uc18c\uc7ac\uac00 \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4. 2011\ub144\uc5d0 \ubcf4\uace0\ub41c \uac15\uc720\uc804\uccb4 HfO2 \ud544\ub984\uc740 \uac15\uc720\uc804\uc131\uc744 3nm \uc774\ud558\ub85c \uc720\uc9c0\ud560 \uc218 \uc788\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc81c\uc870 \uacf5\uc815\uc740 \ubc18\ub3c4\uccb4 \uacf5\uc815\uacfc \uc644\uc804\ud788 \ud638\ud658\ub418\ub294 \ubc29\uc2dd\uc73c\ub85c \uc800\uc628\uc5d0\uc11c \uc218\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c 2019\ub144\uc5d0 100\u03bcC cm-2 \uc774\uc0c1\uc758 \uc794\ub958 \ubd84\uadf9(Pr)\uc744 \uac16\ub294 \uac15\uc720\uc804\uccb4 Al1-xScxN \ud544\ub984\uc774 \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4.26,27) \ub192\uc740 Pr\uc740 \uac15\uc720\uc804\uccb4 \ucee4\ud328\uc2dc\ud130\uc758 \uc804\uadf9\uc744 \ub354\uc6b1 \uc904\uc5ec \ub354 \ub192\uc740 \ubd80\ud53c \ubc00\ub3c4\ub97c \uc5bb\uc744 \uc218 \uc788\uace0 \uc4f0\uae30 \ubc0f \uc77d\uae30 \uc791\uc5c5 \uc911 \uc804\ub958 \uc4f0\uae30 \ubc0f \uc77d\uae30 \uc791\uc5c5 \uc911 \uac10\uc9c0\ub294 \ub178\uc774\uc988\uc5d0 \uc27d\uac8c \uc800\ud56d\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>Al1-xScxN \ud544\ub984\uc758 \ubb38\uc81c\uc810 \uc911 \ud558\ub098\ub294 \uc0c1\ub300\uc801\uc73c\ub85c \ub192\uc740 \ubcf4\uc790\ub825(EC)\uc73c\ub85c, \uc774\ub294 Al1-xScxN \ud544\ub984\uc758 Sc \uc6d0\uc790\uc758 \uad6c\uc131(x)\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c0\uba70 \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc6a9\uc5b4\uc801 \uce21\uba74\uc5d0\uc11c\uc758 \uc7a5\uc810 Al1-xScxN\uc758 \ud53c\ube0c\ub9b4 \uc9d5\ud06c\uc0ac\uc774\ud2b8\ud615 \uad6c\uc870\ub294 0 &lt; x &lt; 0.46 \ubc94\uc704(\uc9c8\ud654\ubb3c, \uae08\uc18d\uba74 \ub610\ub294 N\uba74\uc758 \uacbd\uc6b0)\uc5d0\uc11c Al-Sc-N \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc0c1 \uadf9\uc131\uc744 \uac00\uc9c0\uba70, \ud544\ub984 \uc601\uc5ed\uc5d0\uc11c\ub3c4 \uc790\uae30 \ud3b8\uad11\ub41c c\ucd95 \ubc29\ud5a5\uc758 Al1-xScxN \ud544\ub984 \uc99d\ucc29\uc744 \uae30\ub300\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\uc6b0\ub9ac\ub294 \ub450\uaed8\uc5d0 \ub530\ub978 \uac15\uc720\uc804 \ud2b9\uc131\uc744 20nm\uae4c\uc9c0 \ubcf4\uace0\ud588\uc2b5\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 Al0.78Sc0.22N \ud544\ub984\uc5d0\uc11c \ub450\uaed8 \ud6a8\uacfc\ub97c \ud2b9\uc131\ud654\ud558\ub294 \uc791\uc5c5\uc744 \ud544\ub984\uc758 \uacb0\uc815 \ubc30\ud5a5 \ubc0f \uac15\uc720\uc804 \ud2b9\uc131 \uc815\ub3c4\uae4c\uc9c0 \ud655\uc7a5\ud588\uc2b5\ub2c8\ub2e4. \ub3c4\ud551 \ubc00\ub3c4\uac00 3 \u00d7 1018 cm-3\uc778 n+Si \uae30\ud310\uc744 \uacfc\uc0b0\ud654\ud669 \ud63c\ud569\ubb3c \uc6a9\uc561(SPM, H2SO4\/H2O2= 3:1)\uc73c\ub85c \ud654\ud559\uc801\uc73c\ub85c \uc138\ucc99\ud55c \ub2e4\uc74c \ubb3d\uc740 HF(1%)\ub85c \ud568\uce68\uc2dc\ucf30\uc2b5\ub2c8\ub2e4. TiN \ubc14\ub2e5 \uc804\uadf9\uc740 300W\uc758 RF \uc804\ub825\uc5d0\uc11c \uac01\uac01 4 \ubc0f 6 sccm\uc758 Ar \ubc0f N2 \uac00\uc2a4 \uc720\uc18d\uc73c\ub85c Ti \ud0c0\uac9f\uc5d0 0.22 Pa\uc758 \uc555\ub825\uc73c\ub85c \uae30\ud310\uc5d0 \uc2a4\ud37c\ud130 \uc99d\ucc29\ub41c \ub2e4\uc74c \uae30\ud310\uc740 3 \u00d7 1018 cm-3\uc758 \ub3c4\ud551 \ubc00\ub3c4 \ubc0f 3 \u00d7 1018 cm-3\uc758 \ub3c4\ud380\ud2b8 \ubc00\ub3c4\ub85c n+Si \uc6a9\uc561\uc5d0 \uc2a4\ud37c\ud130 \uc99d\ucc29\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \uac01\uac01 5 \ubc0f 10 sccm\uc758 Ar \ubc0f N2 \uac00\uc2a4 \uc720\ub7c9\uacfc 0.7 Pa\uc758 \uc555\ub825\uc73c\ub85c 300W\uc5d0\uc11c DC \uc2a4\ud37c\ud130\ub9c1\uc744 \ud1b5\ud574 Al0.57Sc0.43 \ud0c0\uac9f\uc5d0\uc11c Al0.78Sc0.22N \ud544\ub984\uc744 \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc870\uac74\uc5d0\uc11c \uc99d\ucc29\ub41c Al0.78Sc0.22N \ud544\ub984\uc758 \uc870\uc131\uc740 X-\uc120 \uad11\uc804\uc790 \ubd84\uad11\ubc95\uc73c\ub85c \uacb0\uc815\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 Al0.78Sc0.22N \ud544\ub984\uc758 \uc99d\ucc29 \uc2dc\uac04\uc744 \ubcc0\ud654\uc2dc\ucf1c 10-47nm \ub450\uaed8\uc758 \ud544\ub984\uc744 \ud615\uc131\ud588\uc2b5\ub2c8\ub2e4. Al0.78Sc0.22N \ud544\ub984 \uc704\uc5d0 \ub610 \ub2e4\ub978 TiN \uce35\uc744 \uc81c\uc790\ub9ac\uc5d0\uc11c \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4. \ubaa8\ub4e0 \uc99d\ucc29 \uacf5\uc815\uc740 400\u00b0C\uc758 \uc77c\uc815\ud55c \uc628\ub3c4\uc5d0\uc11c \uc720\uc9c0\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc0c1\ub2e8 TiN \uce35\uc740 \uacfc\uc0b0\ud654\uc554\ubaa8\ub284 \ud63c\ud569\ubb3c(APM, NH4OH: H2O2:H2O = 1:5:5)\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc2b5\uc2dd \uc5d0\uce6d\uc73c\ub85c \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ud328\ud134\uc744 \ud615\uc131\ud558\uc5ec \uc0c1\ub2e8 \uc804\uadf9\uc744 \ud615\uc131\ud588\uc2b5\ub2c8\ub2e4. \ub9c8\uc9c0\ub9c9\uc73c\ub85c \uc5f4 \uc99d\ubc1c\uc5d0 \uc758\ud574 \uc54c\ub8e8\ubbf8\ub284 \ud6c4\uba74 \uc811\ucd09\uc774 \ud615\uc131\ub429\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 \ucee4\ud328\uc2dc\ud130\uac00 \uc778\uac00\ub41c \uc804\uae30\uc7a5\uc5d0\uc11c \uac70\uc758 \ub3d9\uc77c\ud55c \ub204\uc124 \uc804\ub958\ub97c \uac00\uc9c0\uba70, \uc774\ub294 \ud544\ub984 \ub0b4\ubd80\uc640 \uacc4\uba74 \uadfc\ucc98\uc758 \uacb0\ud568 \ubc00\ub3c4 \ud06c\uae30\uac00 \ub3d9\uc77c\ud558\ub2e4\ub294 \uac83\uc744 \uc2dc\uc0ac\ud569\ub2c8\ub2e4. \ud544\ub984 \ub0b4 \uacb0\uc815\ud654 \ubc0f \uacb0\uc815\ub9bd\uc758 \ubc29\ud5a5\uc740 \ud3c9\uba74 \uc678 \ubc0f \ud754\ub4e4\ub9ac\ub294 \uace1\uc120 \uad6c\uc131\uc5d0\uc11c X\uc120 \ud68c\uc808(XRD)\ub85c \ud3c9\uac00\ud588\uc2b5\ub2c8\ub2e4. X-\uc120 \uc18c\uc2a4\ub294 \ubc1c\uc0b0\uac01\uc774 0.04\u00b0\uc778 CuKa\ub97c \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4. \uc815\uc804 \uc6a9\ub7c9-\uc804\uc555(CV) \ud2b9\uc131\uc740 50mV\uc758 \uc791\uc740 \uc2e0\ud638 \uc9c4\ud3ed\uc73c\ub85c 100kHz\uc5d0\uc11c \uc560\uc9c8\ub7f0\ud2b8 E4980A LCR \ubbf8\ud130\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc5bb\uc5c8\uc2b5\ub2c8\ub2e4. \ucee4\ud328\uc2dc\ud130\uc758 \ud2b9\uc131\uc744 \ud30c\uc545\ud558\uae30 \uc704\ud574 10kHz\uc5d0\uc11c TOYO FCE10 \uc2dc\ub9ac\uc988 \uc124\uc815\uc744 \uc0ac\uc6a9\ud558\uc5ec \ud3b8\uad11-\uc804\uc555(PV)\uc744 \uce21\uc815\ud588\uc2b5\ub2c8\ub2e4.<\/p><h4>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h4><p>\uc774 \ubc31\uc11c\uc758 \uc8fc\uc694 \ucd08\uc810\uc740 \uac15\uc720\uc804 \ud2b9\uc131\uc744 \uc870\uc0ac\ud55c \uc2a4\ud37c\ud130 \uc99d\ucc29\ub41c \ubb34\uadf9\uc131 Al0.78Sc0.22N \ud544\ub984\uc758 \ub450\uaed8 \uc2a4\ucf00\uc77c\ub9c1\uc5d0 \uc788\uc2b5\ub2c8\ub2e4. 10nm \uc815\ub3c4\uc758 \uc587\uc740 \ud544\ub984\uc73c\ub85c X-\uc120 \uc704\uae00 \uace1\uc120 \uce21\uc815\uc744 \ud1b5\ud574 c\ucd95 \ubc30\ud5a5 \ud544\ub984\uc774 \ud655\uc778\ub418\uc5c8\uc2b5\ub2c8\ub2e4. 20nm \ub450\uaed8\uc5d0\uc11c\ub3c4 \uc815\uc804\uc6a9\ub7c9 \uce21\uc815\uc5d0\uc11c \uac15\uc720\uc804 \ud788\uc2a4\ud14c\ub9ac\uc2dc\uc2a4 \ubc0f \ube44\ubd84\uadf9 \uac70\ub3d9\uc774 \uad00\ucc30\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc794\ub958 \ud3b8\uad11(Pr)\uc740 35nm \ubbf8\ub9cc\uc758 \ub450\uaed8\uc5d0\uc11c \uc810\uc9c4\uc801\uc73c\ub85c \uc800\ud558\ub418\ub294 \uac83\uc73c\ub85c \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. \uc2a4\uc704\uce6d(SW) \uc0ac\uc774\ud074\ub9c1 \ud14c\uc2a4\ud2b8\uc5d0\uc11c\ub294 \ud2b9\ud788 35nm\ubcf4\ub2e4 \ub450\uaebc\uc6b4 \ud544\ub984\uc758 \uacbd\uc6b0 \ud544\ub984\uc5d0\uc11c \uc6e8\uc774\ud06c\uc5c5 \ud6a8\uacfc\uac00 \ub098\ud0c0\ub0a9\ub2c8\ub2e4.<\/p><h4><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-26236\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4.png\" alt=\"\" width=\"1106\" height=\"485\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4.png 1106w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-300x132.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-1024x449.png 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/04\/image-4-768x337.png 768w\" sizes=\"(max-width: 1106px) 100vw, 1106px\" \/><\/h4><p>\uadf8\ub9bc 4\uc640 \uac19\uc774 20 \ubc0f 40nm \ub450\uaed8\uc758 Al0.78Sc0.22N \ud544\ub984\uc5d0\uc11c \uadf9\uc131 \uc758\uc874\uc801 CV \uce21\uc815\uc744 \uc218\ud589\ud588\uc2b5\ub2c8\ub2e4. \ucc98\uc74c\uc5d0 \uc0d8\ud50c\uc5d0 \uc801\uc6a9\ub41c \ucee4\ud328\uc2dc\ud134\uc2a4\ub294 \uc0c1\ub2e8\uacfc \ud558\ub2e8 \uc2a4\uce94 \uac04\uc5d0 \uac70\uc758 \ucc28\uc774\uac00 \uc5c6\uc5c8\uc2b5\ub2c8\ub2e4 [\uadf8\ub9bc 4(a)]. \uadf8 \ud6c4, \uc0c1\ub2e8 \uc804\uadf9\uc5d0 \uc74c\uc758 \uc804\uc555\uc744 \uac00\ud558\uba74 \ud2b9\uc815 \uc804\uc555\uc5d0\uc11c \uae09\uaca9\ud55c \uac15\ud558\uc640 \ud568\uaed8 \ucee4\ud328\uc2dc\ud134\uc2a4\uac00 \uc810\uc9c4\uc801\uc73c\ub85c \uc99d\uac00\ud558\ub294 \uac83\uc774 \uad00\ucc30\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774\uc5b4\uc11c \uc591\uc758 \ubc29\ud5a5\uc73c\ub85c \uc804\uc555\uc744 \uc778\uac00\ud558\uba74 \uac15\uc720\uc804\uccb4 \uc2a4\uc704\uce6d(SW) \ub3d9\uc791\uc774 \ub098\ud0c0\ub0ac\uc2b5\ub2c8\ub2e4. \ubc18\uba74\uc5d0 \uadf8\ub9bc 4(b)\uc640 \uac19\uc774 \uc2e0\uc120\ud55c \uc0d8\ud50c\uc5d0 \ucd08\uae30 \uc804\uc555\uc744 \uc74c\uc758 \ubc29\ud5a5\uc73c\ub85c \uc124\uc815\ud558\uba74 \ud544\ub984\uc774 \uc2a4\uc704\uce6d\ub418\uc5c8\uc74c\uc744 \ub098\ud0c0\ub0b4\ub294 \ucee4\ud328\uc2dc\ud134\uc2a4\uac00 \uae09\uaca9\ud788 \ub5a8\uc5b4\uc9c0\ub294 \uac83\uc744 \ubcfc \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uce21\uc815 \uacb0\uacfc\ub97c \ud1b5\ud574 Al0.78Sc0.22N \ud544\ub984\uc774 \ud45c\uba74\uc5d0\uc11c \uae30\ud310 \ubc29\ud5a5\uc73c\ub85c \uc790\uccb4 \ud3b8\uad11\ub418\uc5c8\ub2e4\ub294 \uacb0\ub860\uc744 \ub0b4\ub9b4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><h4>\ucd9c\ucc98<\/h4><p>\uc800\uc790: \ucc28\uc774 \uc131\ub9b0, \ud638\uc2dc\uc774 \ud0c0\ucfe0\uc57c1, \uc640\uce74\ubc14\uc57c\uc2dc \ud788\ud1a0\uc2dc1, \uce20\uce20\uc774 \uce74\uc988\uc624, \uc815 \ud2f0\uc5d4 \uce78, \uc5d0\ub4dc\uc6cc\ub4dc \uc774 \ucc3d, \uce74\ucfe0\uc2dc\ub9c8 \ucfe0\ub2c8\uc720\ud0a4<\/p><p>\uae30\uad00 : \ub3c4\ucfc4\uacf5\uc5c5\ub300\ud559 \uacf5\ud559\ubd80, 4259 S2-20, \ub098\uac00\uce20\ud0c0, \ubbf8\ub3c4\ub9ac\uad6c, \uc694\ucf54\ud558\ub9c8 226-8502, \uc77c\ubcf8 2\uad6d\uc81c\ub300\ud559 \uc624\ube0c \ubc18\ub3c4\uccb4 \uae30\uc220, \uad6d\ub9bd \uc911\uc815\ub300\ud559\uad50, 1001 University Road, Hsinchu 30010, Taiwan ROC 3\ud601\uc2e0 \uc5f0\uad6c \uc5f0\uad6c\uc18c, \ub3c4\ucfc4 \uc77c\ubcf8 \uc694\ucf54\ud558\ub9c8 \ubbf8\ub3c4\ub9ac\uad6c \ub098\uac00\uce20\ud0c0 4259 S2-20, \ub098\uac00\uce20\ud0c0 226-8502, \uc77c\ubcf8 4 \uad6d\ub9bd \uce58\uc544\uc624\ud241\ub300\ud559\uad50 \uae30\uacc4\uacf5\ud559\uacfc \uad6d\ub9bd \uc911\uc815\ub300\ud559\uad50 \uae30\uacc4\uacf5\ud559\uacfc, 1001 University Road, Hsinchu 30010, Taiwan ROC<\/p><p>\ubc1c\ud589: 2020\ub144 10\uc6d4 16\uc77c \uc811\uc218, 2021\ub144 3\uc6d4 7\uc77c \uc218\uc815, 2021\ub144 3\uc6d4 16\uc77c \uc2b9\uc778, 2021\ub144 4\uc6d4 1\uc77c \uc628\ub77c\uc778 \uac8c\uc2dc<\/p><p>\uc800\ub110: \uc77c\ubcf8 \uc751\uc6a9 \ubb3c\ub9ac\ud559 \uc800\ub110 60, SBBA05(2021)<\/p><p>\uae30\uc0ac \ucd9c\ucc98 \uc6f9\uc0ac\uc774\ud2b8: \uac15\uc720\uc804\uccb4(Al0.78Sc0.22N) \ud544\ub984\uc758 \ub450\uaed8 \uc2a4\ucf00\uc77c\ub9c1\uc5d0 \uad00\ud558\uc5ec (<a href=\"https:\/\/iopscience.iop.org\/article\/10.35848\/1347-4065\/abef15\/pdf%EF%BC%89\">(https:\/\/iopscience.iop.org\/article\/10.35848\/1347-4065\/abef15\/pdf)<\/a><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-704a406\" data-id=\"704a406\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-39dd93ae elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"39dd93ae\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 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100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3d09e193 elementor-widget elementor-widget-heading\" data-id=\"3d09e193\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-74b6752c elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"74b6752c\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-25743 page type-page status-publish hentry category-product tag-toyo-fce10 tag-toyo\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/%ea%b0%95%ec%9c%a0%ec%a0%84%ec%b2%b4-%ec%9e%ac%eb%a3%8c-%ed%85%8c%ec%8a%a4%ed%84%b0\/\" >\n\t\t\t\tFCE10 \uac15\uc720\uc804\uccb4 \uc7ac\ub8cc \ud14c\uc2a4\ud2b8 \uc7a5\ube44\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u65e5\u672cToyo Technica \u9ad8\u9891\u4f4e\u566a<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/%ea%b0%95%ec%9c%a0%ec%a0%84%ec%b2%b4-%ec%9e%ac%eb%a3%8c-%ed%85%8c%ec%8a%a4%ed%84%b0\/\" aria-label=\"FCE10 \uac15\uc720\uc804\uccb4 \uc7ac\ub8cc \ud14c\uc2a4\ud2b8 \uc7a5\ube44\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Al0.78Sc0.22N\u8584\u819c\u4e2d\u94c1\u7535\u4f53\u7684 [&hellip;]<\/p>","protected":false},"author":1,"featured_media":26236,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center 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