{"id":26828,"date":"2022-06-07T15:53:46","date_gmt":"2022-06-07T07:53:46","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26828"},"modified":"2022-10-20T17:11:19","modified_gmt":"2022-10-20T09:11:19","slug":"nanofabrication_lithography","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0_%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c - \uad11\ud559 \ub9ac\uc18c\uadf8\ub798\ud53c"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26828\" class=\"elementor elementor-26828\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4a069276 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"4a069276\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-169565cb\" data-id=\"169565cb\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-4ac12e1e elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4ac12e1e\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-7e3b7427\" data-id=\"7e3b7427\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-571fa7d3 elementor-widget elementor-widget-heading\" data-id=\"571fa7d3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c - \uad11\ud559 \ub9ac\uc18c\uadf8\ub798\ud53c<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4bd6e2e5 elementor-widget elementor-widget-text-editor\" data-id=\"4bd6e2e5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<section style=\"font-size: 14px;\"><p style=\"font-size: 14px;\"><span style=\"color: #051c2c; font-size: 16px;\">In Na<\/span><span style=\"color: #051c2c; font-size: 16px;\">m<\/span><span style=\"color: #051c2c; font-size: 16px;\">\ubc0f \ub9c8\uc774\ud06c\ub85c \ud50c\ub7ec\uc2a4<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc5c5\ubb34<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uae30\uc220 \ub9e5\ub77d\uc5d0\uc11c\uc758 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uae30\ud310 \ud14c\uc774\ube14\uc5d0\uc11c<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc5bc\uad74<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc704\uc758 \ub0b4\uc6a9\uc740 \ub2e4\uc74c\uacfc \uac19\uc544\uc57c \ud569\ub2c8\ub2e4.<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"color: #051c2c; font-size: 16px;\">\ud328\ud134\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub2e4\uc74c<\/span><span style=\"color: #051c2c; font-size: 16px;\">\uc5bc\uad74<\/span><span style=\"color: #051c2c; font-size: 16px;\">\ub97c \uc778\uc1c4\ud569\ub2c8\ub2e4.<\/span><\/p><p><span style=\"color: #051c2c; font-size: 16px;\">\uad11\ud559 \ub9ac\uc18c\uadf8\ub798\ud53c\ub294 \ube5b\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub9c8\uc2a4\ud130(\ud3ec\ud1a0\ub9c8\uc2a4\ud06c)\uc758 \ud328\ud134\uc744 \uae30\ud310\uc5d0 \ubcf5\uc0ac\ud569\ub2c8\ub2e4. \uc774 \uacfc\uc815\uc740 \uae30\uc874\uc758 \ub124\uac70\ud2f0\ube0c \uc0ac\uc9c4 \ubcf5\uc81c\uc640 \ub9e4\uc6b0 \uc720\uc0ac\ud569\ub2c8\ub2e4. \uac10\uad11\uc131 \ud3f4\ub9ac\uba38(\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8)\ub97c \uae30\ud310\uc5d0 \ub3c4\ud3ec\ud55c \ub2e4\uc74c \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\ub97c \ud1b5\ud574 \ub178\ucd9c\uc2dc\ud0b5\ub2c8\ub2e4. \ub178\ucd9c\ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ud654\ud559 \ubc18\uc751\uc744 \uac70\uccd0 \uc6a9\ud574\ub3c4\uc5d0 \ubcc0\ud654\ub97c \uc77c\uc73c\ud0b5\ub2c8\ub2e4. \uc774 \ud654\ud559 \ubc18\uc751\uc740 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uc77c\ubd80\ub97c \uc6a9\ud574\uc2dc\ud0a4\ub294 \ub370 \uc0ac\uc6a9\ub418\uba70, \ud328\ud134\ud654\ub41c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ub0a8\uac8c \ub429\ub2c8\ub2e4. \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uae30\uc220\uc5d0\ub294 \uc811\ucd09, \ud504\ub85c\uc81d\uc158, \uce68\uc9c0 \ubc0f \uac04\uc12d \uce21\uc815\uacfc \uac19\uc740 \uc5ec\ub7ec \uac00\uc9c0 \ubc29\uc2dd\uc774 \uc788\uc73c\uba70 UV, \ub525 UV, \uadf9\uc790\uc678\uc120 \ubc0f X-\ub808\uc774 \uae30\ubc18 \ubc29\uc2dd\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p><span style=\"color: #051c2c; font-size: 16px;\">\ube44\uad11\ud559 \ub9ac\uc18c\uadf8\ub798\ud53c\ub294 \uc804\uc790\ube54, \uc774\uc628\ube54 \ub610\ub294 \uae30\uacc4\uc801 \ud798\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub808\uc9c0\uc2a4\ud2b8 \ud544\ub984\uc5d0 \ud328\ud134\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c(EBL), \uc9d1\uc18d \uc774\uc628 \ube54(FIB) \ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \ub098\ub178 \uc784\ud504\ub9b0\ud2b8 \ub9ac\uc18c\uadf8\ub798\ud53c(NIL)\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\uc74c \uc139\uc158\uc5d0\uc11c\ub294 \uc774\ub7ec\ud55c \uae30\uc220\uacfc \uadf8 \ud55c\uacc4\uc5d0 \ub300\ud574 \uac04\ub7b5\ud558\uac8c \uc124\uba85\ud569\ub2c8\ub2e4.<\/span><\/p><\/section><section><section style=\"display: flex; flex-flow: row nowrap;\"><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">\uad11\uc6d0<\/span><\/strong><\/span><\/p><\/section><\/section><\/section><\/section><section style=\"margin: 15px 0%;\"><section style=\"color: #051c2c; line-height: 1.8;\"><p style=\"font-size: 14px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc790\uc678\uc120 \uad11\uc6d0\uc740 \uc77c\ubc18\uc801\uc73c\ub85c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c. \uc774\ub294 \uc9e7\uc740 \ud30c\uc7a5\uc73c\ub85c \uc778\ud574 \uc774\ubbf8\uc9c0 \ud574\uc0c1\ub3c4\uac00 \ud5a5\uc0c1\ub420 \ubfd0\ub9cc \uc544\ub2c8\ub77c \ubb34\uc120 \ud658\uacbd\uc5d0\uc11c \uc0ac\uc6a9\ub418\ub294 \uc790\uc678\uc120\uc5d0 \ubbfc\uac10\ud55c \uad11\ud654\ud559 \ubb3c\uc9c8\uc744 \ud1b5\ud574 \ub354 \ub098\uc740 \uc774\ubbf8\uc9c0 \ud574\uc0c1\ub3c4\ub97c \uc5bb\uc744 \uc218 \uc788\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">. \uc218\uc740 \uc99d\uae30<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uac00\uc2a4<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub7a8\ud504\ub294 \uc5ec\uc804\ud788 \ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0\uc11c \uc790\uc678\uc120\uc758 \uc8fc\uc694 \uc18c\uc2a4\uc774\uba70, \ubc29\ucd9c \ub77c\uc778\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">405nm (h \ub77c\uc778), 365nm (i \ub77c\uc778) \ubc0f 254nm.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub300\ubd80\ubd84<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc774 \uc2a4\ud399\ud2b8\ub7fc \ubc94\uc704\ub97c \uc704\ud574 365nm(i-\ub77c\uc778)\uc640 \uc5ec\ub7ec \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uac00 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc810\uc810 \ub354 \ub9ce\uc740 \uac83\uc744 \uc5bb\uc5b4\uc57c \ud560 \ud544\uc694\uc131<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub192\uc74c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc720\ubc29\uc758 \ud574\uc0c1\ub3c4, \uc0ac\ub78c\ub4e4\uc740 \ub9cc\ub4e4\uae30 \uc2dc\uc791\ud588\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uae4a\uc740 \uc790\uc678\uc120 \uad11\uc6d0, \uc608<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">248 \ubc0f 193nm \uc900\ubd84\ud560<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">sub<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub808\uc774\uc800.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ubaa9\ucc28<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc774\uc804\uc5d0\ub294 \uac1c\ubc1c \uc911\uc774\uc5c8\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">13.5nm EUV \uad11\uc6d0. \ub9ac\uc18c\uadf8\ub798\ud53c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc870\uba85\uc758 \uac15\ub3c4\uac00 \uc804\uccb4 \uae30\ud310 \ud14c\uc774\ube14\uc5d0 \uac78\uccd0 \uc77c\uc815 \uc218\uc900\uc774\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc5bc\uad74<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uacc4\uc18d \ucf1c\ub450\uae30<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">I<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">To.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub192\uc74c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">S \ube54\uc740 \ud5c8\uc6a9\ub418\uc9c0 \uc54a\uc73c\uba70 \ub2e4\uc74c\uc744 \uc704\ud574 \uc81c\uac70\ud574\uc57c \ud569\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\uc5d0\uc11c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ub808\uc774\uc800 \uc18c\uc2a4\uc758 \uc0b0\ub780 \ud328\ud134\uc785\ub2c8\ub2e4. \ub530\ub77c\uc11c \ube44\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">Big<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; font-size: 16px;\">\ubcfc\ub968 \uc5d0\ub108\uc9c0\uac00 \ube54\uc744 \ud3c9\ud3c9\ud558\uace0 \uace0\ub978 \ud504\ub85c\ud30c\uc77c\ub85c \ud615\uc131\ud569\ub2c8\ub2e4.<\/span><\/p><\/section><\/section><section><section style=\"display: flex; flex-flow: row nowrap;\"><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8<\/span><\/strong><\/span><\/p><\/section><\/section><\/section><\/section><section style=\"margin: 15px 0%;\"><section style=\"color: #051c2c; line-height: 1.8;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \uc6a9\ub9e4\uc5d0 \ud3ec\ud568\ub41c \uac10\uad11\uc131 \uc720\uae30 \ud3f4\ub9ac\uba38\ub85c, \ub300\ubd80\ubd84 \uc2a4\ud540 \ucf54\ud305\uc744 \ud1b5\ud574 \uae30\ud310\uc5d0 \ub3c4\ud3ec\ub429\ub2c8\ub2e4. \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \uac10\uad11\uc131 \ud654\ud569\ubb3c, \uc218\uc9c0, \uc6a9\ub9e4\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \uc6a9\ub9e4\ub294<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ubaa9\ucc28<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub294 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uac00 \uc2a4\ud540 \ucf54\ud305\ub420 \uc218 \uc788\ub3c4\ub85d \ud558\uae30 \uc704\ud55c \uac83\uc785\ub2c8\ub2e4. \uc2a4\ud540 \ucf54\ud305 \ub2e8\uacc4\uac00 \ub05d\ub098\uba74 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uac00\uc5f4\ud558\uc5ec \uc6a9\ub9e4\ub97c \uc81c\uac70\ud569\ub2c8\ub2e4. \ub808\uc9c4\uc740<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud6c4\uc18d \ud328\ud134 \uc804\uc1a1\uc744 \uc704\ud55c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uad6c\uc870\uc801 \uad6c\uc131\uc785\ub2c8\ub2e4. In<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">i-\ub77c\uc778(365nm) \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \uc911 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \uac83\uc740<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc0ac\uc6a9<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc218\uc9c0\ub294 \ud398\ub180 \uc218\uc9c0(\ud398\ub180 \uacc4\uc5f4\uc758 \uc77c\ubd80)\uc785\ub2c8\ub2e4. \uad11\ud65c\uc131 \ud654\ud569\ubb3c\uc740 \ub514\uc544\uc870-\ub098\ud504\ud1a0\ud034\ub17c\uc785\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">(DNQ). \uc790\uc678\uc120\uc5d0 \ub178\ucd9c\ub418\uba74 DNQ\uac00 \ubc29\ucd9c\ub429\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">I<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uad11\uc0b0\uc758 \uc885\ub958\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uadf8\ub9ac\uace0<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc218\uc9c0\uc758 \uc6a9\ud574\ub3c4\ub97c \uc99d\uac00\uc2dc\ud0b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc720\ud615\uc758 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ub178\ucd9c\ub41c \ubd80\ubd84\uc774 \uacb0\uad6d \uc81c\uac70\ub418\uae30 \ub54c\ubb38\uc5d0 \ud3ec\uc9c0\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub77c\uace0\ub3c4 \ud569\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uadf8\ub9ac\uace0<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub178\ucd9c\ub418\uc9c0 \uc54a\uc740 \uc601\uc5ed\uc740 \ubcf4\uc874\ub429\ub2c8\ub2e4. \uc6a9\ud574\ub3c4\uc758 \ub3d9\uc801 \ubc94\uc704\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Big<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc138 \uac00\uc9c0 \uc21c\uc11c\ub85c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub192\uc74c<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud559\uc704<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Not<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uc120\ud615\uc131, \uc774\uac83\uc774 \ubc14\ub85c \ub9ac\uc18c\uadf8\ub798\ud53c\uc758 \uc7a5\uc810\uc785\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc0c9\uc0c1<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub300\uc870\ub418\ub294 \uc774\uc720.<\/span><\/p><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub178\ucd9c\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc81c\uacf1\uc13c\ud2f0\ubbf8\ud130\ub2f9 \ubc00\ub9ac\uc904(mJ\/cm2) \ub2e8\uc704\ub85c \uce21\uc815\ub429\ub2c8\ub2e4. \uc774\ub294 \uc870\uba85 \uac15\ub3c4\uc5d0 \ub178\ucd9c \uc2dc\uac04\uc744 \uacf1\ud55c \uac12\uc73c\ub85c, mW\/cm2 \ub2e8\uc704\uc785\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc778 \uc120\ub7c9 \uac12\uc740 50~500mJ\/cm2\uc785\ub2c8\ub2e4.<\/span><\/p><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ubcc0\ud615\uc740 \ub124\uac70\ud2f0\ube0c \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc785\ub2c8\ub2e4. \uc774 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub294 \ub178\ucd9c \ud6c4 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\uc758 \uc6a9\ud574\ub3c4\uac00 \uac10\uc18c\ud558\ub294 \uc815\ubc18\ub300\uc758 \uac70\ub3d9\uc744 \ubcf4\uc785\ub2c8\ub2e4.<\/span><\/p><section><section style=\"display: flex; flex-flow: row nowrap;\"><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"padding-right: 10px; padding-left: 10px;\"><p><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">\ud3ec\ud1a0\ub9c8\uc2a4\ud06c<\/span><\/strong><\/p><\/section><\/section><\/section><\/section><section style=\"margin: 15px 0%;\"><section style=\"line-height: 1.8;\"><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud3ec\ud1a0\ub9c8\uc2a4\ud06c\ub294 \ube5b \ud22c\uacfc\ub97c \ucc28\ub2e8\ud558\uae30 \uc704\ud574 \uae08\uc18d \ud328\ud134\uc774 \ud615\uc131\ub41c \ud22c\uba85\ud55c \uc720\ub9ac \uae30\ud310\uc785\ub2c8\ub2e4. \uc774 \uae08\uc18d\uc740 \uc720\ub9ac\uc5d0 \ub300\ud55c \uc811\ucc29\ub825\uc774 \ub6f0\uc5b4\ub098\uace0 \uc790\uc678\uc120\uc5d0 \ub9e4\uc6b0 \ubd88\ud22c\uba85\ud558\uae30 \ub54c\ubb38\uc5d0 \uc77c\ubc18\uc801\uc73c\ub85c \ud06c\ub86c\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \ud45c\uc900 \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815\uc740 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\ub97c \ub9cc\ub4dc\ub294 \ub370 \uc0ac\uc6a9\ub418\uba70 \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub3c4\ud3ec, \ub178\ucd9c \ubc0f \ud328\ud134\uc744 \uc544\ub798 \ud06c\ub86c \uce35\uc73c\ub85c \uc804\uc0ac\ud558\ub294 \uacfc\uc815\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4.<\/span><\/p><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\u00a0<\/span><\/p><p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uadf8\ub7ec\ub098 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\uac00 \uc544\ub2cc \ub178\ucd9c\uc758 \uacbd\uc6b0 \uc2a4\uce90\ub108 \ub610\ub294 \uc804\uc790\ube54 \uc2a4\uce90\ub108\uc5d0 \ub808\uc774\uc800\uc640 \uac19\uc740 \uc2a4\uce90\ub2dd \ub3c4\uad6c\uac00 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. UV \ub808\uc774\uc800 \uc18c\uc2a4(\uc608: HeCd \ub610\ub294 ArF)\ub294 \uc804\uccb4 \ud45c\uba74\uc758 \ub808\uc774\uc800 \uc2a4\ud31f\uc744 \ub798\uc2a4\ud130 \uc2a4\uce94\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\uba70, \ub808\uc774\uc800 \ube54\uc740 \ud3ec\ud1a0\ub9c8\uc2a4\ud06c \ub514\uc790\uc778\uc774 \ud3ec\ud568\ub41c \uc18c\ud504\ud2b8\uc6e8\uc5b4 \uae30\ubc18 \uace0\uc18d \uc624\ube0c\uc81d\ud2b8\uc5d0 \uc758\ud574 \ucf1c\uc9c0\uace0 \uaebc\uc9d1\ub2c8\ub2e4. HeCd \ub808\uc774\uc800\uc758 \ud30c\uc7a5\uc774 325nm\ub77c\uace0 \uac00\uc815\ud560 \ub54c \ub2ec\uc131 \uac00\ub2a5\ud55c \uac00\uc7a5 \uc791\uc740 \uc2a4\ud31f \ud06c\uae30\ub294 \uc57d 300nm\uc785\ub2c8\ub2e4. \uc120\uacfc \uac19\uc740 \uc774\uc9c4 \ud53c\ucc98\uc5d0\ub294 \uc774 \uc2a4\ud31f\uc758 \ud3ed\uc774 \uc5ec\ub7ec \uac1c \ud544\uc694\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc77c\ubc18\uc801\uc73c\ub85c \uad11\uace0\ub418\ub294 \ub808\uc774\uc800 \uae30\ub85d \ud3ec\ud1a0\ub9c8\uc2a4\ud06c\uc758 \ud55c\uacc4\ub294 \uc57d 1mm\uc785\ub2c8\ub2e4. \ub354 \uc791\uc740 \ud53c\ucc98\uac00 \ud544\uc694\ud55c \uacbd\uc6b0 \uc804\uc790 \ube54 \ub77c\uc774\ud305\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/span><\/p><\/section><\/section><\/section><\/section>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-67e31c4 elementor-widget elementor-widget-text-editor\" data-id=\"67e31c4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<b><a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\">MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/a>,<\/b> \ubb38\uc758 \uc0ac\ud56d\uc774 \uc788\uc73c\uc2dc\uba74 \uc5b8\uc81c\ub4e0\uc9c0 \uba54\uc2dc\uc9c0\ub97c \ub0a8\uaca8\uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-79925e7 elementor-widget elementor-widget-wpforms\" data-id=\"79925e7\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/26828\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/26828\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2e6d0a6e\" data-id=\"2e6d0a6e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5d98341c elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"5d98341c\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span 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data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u5149\u523b-\u5149\u5b66\u5149\u523b\u7bc7 \u5728\u7eb3\u7c73\u548c<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26828","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | \u5149\u523b - \u5149\u5b66\u5149\u523b\u7bc7 -<\/title>\n<meta name=\"description\" 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