{"id":26865,"date":"2022-06-07T17:23:36","date_gmt":"2022-06-07T09:23:36","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26865"},"modified":"2022-11-17T14:31:42","modified_gmt":"2022-11-17T06:31:42","slug":"thin_film_deposition","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/thin_film_deposition\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ubc15\ub9c9 \uc99d\ucc29 \uc18c\uac1c"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26865\" class=\"elementor elementor-26865\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1dc53e2c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"1dc53e2c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-77faae72\" data-id=\"77faae72\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-277d3295 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"277d3295\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-161c1dbd\" data-id=\"161c1dbd\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a989da8 elementor-widget elementor-widget-heading\" data-id=\"a989da8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading 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.elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2eede1d elementor-widget elementor-widget-heading\" data-id=\"2eede1d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\ubc15\ub9c9 \uc99d\ucc29(\ucf54\ud305)\uc774\ub780 \ubb34\uc5c7\uc778\uac00\uc694?<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6438265b elementor-widget elementor-widget-text-editor\" data-id=\"6438265b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div><b>\ubc15\ub9c9 \uc99d\ucc29 (<span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\ub3c4\uae08<\/span><\/b><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>)\uc740 \uae30\ud310 \uc7ac\ub8cc\uc5d0 \ubc15\ub9c9 \ucf54\ud305\uc744 \ud615\uc131\ud558\uace0 \uc99d\ucc29\ud558\ub294 \uacf5\uc815\uc785\ub2c8\ub2e4.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\"><b>\uae30\ud310\uc5d0 \ub2e4\uc591\ud55c \uc7ac\ub8cc\uc758 \ubc15\ub9c9\uc744 \uc99d\ucc29\ud558\ub294 \uac83\uc740 \ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815\uc758 \uac00\uc7a5 \uc911\uc694\ud55c \uc218\ub2e8 \uc911 \ud558\ub098\uc785\ub2c8\ub2e4.<\/b><\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\ud544\ub984\uc5d0\ub294 \uae30\ud310 \uc131\ub2a5\uc758 \ud2b9\uc815 \uc694\uc18c\ub97c \uc218\uc815\ud558\uac70\ub098 \uac1c\uc120\ud558\ub294 \ub370 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub294 \ub2e4\uc591\ud55c \uc18d\uc131\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \ud22c\uba85\uc131, \ub0b4\uad6c\uc131, \uae01\ud798 \ubc29\uc9c0, \uc804\uae30 \uc804\ub3c4\ub3c4 \ub610\ub294 \uc2e0\ud638 \uc804\uc1a1\ub960 \uc99d\uac00 \ub610\ub294 \uac10\uc18c \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\ubc15\ub9c9 \uc99d\ucc29 \ub450\uaed8\ub294 \ub098\ub178\ubbf8\ud130\uc5d0\uc11c \ubbf8\ud06c\ub860 \uaddc\ubaa8\uae4c\uc9c0 \ub2e4\uc591\ud569\ub2c8\ub2e4.<\/span><\/div><div><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/div><div>\ubc15\ub9c9 \uc99d\ucc29\uc740 \uc18c\ube44\uc790 \uac00\uc804, \ubc18\ub3c4\uccb4 \ub808\uc774\uc800, \uad11\uc12c\uc720 \ub808\uc774\uc800, LED \ub514\uc2a4\ud50c\ub808\uc774, \ud544\ud130, \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4, \uc815\ubc00 \uad11\ud559, \ud604\ubbf8\uacbd \ubc0f \ubbf8\uc138 \ubd84\uc11d \uc0d8\ud50c \uc2ac\ub77c\uc774\ub4dc, \uc758\ub8cc\uc6a9 \uc784\ud50c\ub780\ud2b8 \ub4f1 \ub2e4\uc591\ud55c \uad11\uc804\uc790, \uace0\uccb4 \ubc0f \uc758\ub8cc \uae30\uae30 \ubc0f \uc81c\ud488 \uc0dd\uc0b0\uc5d0 \uc788\uc5b4 \uc911\uc694\ud55c \uc81c\uc870 \ub2e8\uacc4\uc785\ub2c8\ub2e4.<\/div><div>\u00a0<\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6f63dc elementor-widget elementor-widget-heading\" data-id=\"a6f63dc\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\ubc15\ub9c9 \uc99d\ucc29 \uacf5\uc815 \uc720\ud615 \ubc0f \uc7a5\ub2e8\uc810 \ube44\uad50<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35f62d0 elementor-widget elementor-widget-text-editor\" data-id=\"35f62d0\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div data-page-id=\"ZMKfdiDoOoIlpExw88ecEZd3nvb\" data-docx-has-block-data=\"false\"><div>\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uac00\uc7a5 \uc77c\ubc18\uc801\uc778 \ubc15\ub9c9 \uc99d\ucc29 \uacf5\uc815\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<strong>\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD)<\/strong>\uc640 \ud568\uaed8<strong>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)<\/strong>.<\/div><div>\u00a0<\/div><\/div><\/div><p><b>\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD)\uc740 \uc9c4\uacf5 \uc0c1\ud0dc\uc5d0\uc11c \uc6d0\ub8cc\ub97c \uac00\uc5f4\ud558\uc5ec \uc6d0\uc790\ub098 \ubd84\uc790\uac00 \uc6d0\uc7ac\ub8cc \ud45c\uba74\uc5d0\uc11c \ube60\uc838\ub098\uac00\ub3c4\ub85d \ud558\uc5ec \uae30\ud310 \uc704\uc5d0 \ubc15\ub9c9\uc744 \uc131\uc7a5\uc2dc\ud0a4\ub294 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/b>\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29\uc758 \uc8fc\uc694 \ubc29\ubc95\uc740 \uc9c4\uacf5 \uc804\uc790\ube54 \ub610\ub294 \uc800\ud56d \uae30\uc0c1 \uc99d\ucc29, \uc2a4\ud37c\ud130 \ucf54\ud305, \uc544\ud06c \ud50c\ub77c\uc988\ub9c8 \ucf54\ud305, \uc774\uc628 \ucf54\ud305, \ubd84\uc790 \ube54 \uc5d0\ud53c\ud0dd\uc2dc \ub4f1\uc785\ub2c8\ub2e4. AEMD\uc758 \uc804\uc790\ube54 \uc99d\ucc29 \uc2dc\uc2a4\ud15c\uacfc \uc2a4\ud37c\ud130\ub9c1 \uc2dc\uc2a4\ud15c\uc740 \ubaa8\ub450 \ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29 \ubc29\uc2dd\uc785\ub2c8\ub2e4.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc0ac\ubb3c<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 ); font-weight: bold;\">\u00a0<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc5f4 \uc99d\ucc29 \uc99d\ucc29\uacfc \ud50c\ub77c\uc988\ub9c8 \uc2a4\ud37c\ud130\ub9c1 \uc99d\ucc29\uc758 \ub450 \uac00\uc9c0 \uc8fc\uc694 \ubc94\uc8fc\ub85c \ub098\ub20c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc5f4 \uc99d\ucc29 \uc99d\ucc29.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc800\ud56d \uc99d\ucc29 \uc99d\ucc29<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">, ,<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc804\uc790\ube54 \uc99d\ucc29 \uc99d\ucc29<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">(a) \ub2e4\uc74c\uc740 \uc804 \uc138\uacc4\uc5d0\uc11c \uac00\uc7a5 \uc77c\ubc18\uc801\uc774\uace0 \uac00\uc7a5 \uc778\uae30 \uc788\ub294 \uc81c\ud488\uc785\ub2c8\ub2e4.<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\ud50c\ub77c\uc988\ub9c8 \uc2a4\ud37c\ud130\ub9c1 \uc99d\ucc29<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">:: \ub2e4\uc74c<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">DC \uc2a4\ud37c\ud130\ub9c1, RF \uc2a4\ud37c\ud130\ub9c1, \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1, \uc774\uc628\ud654 PVD<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">.<\/span><\/p><p><span style=\"font-size: 1rem; background-color: var( --e-global-color-astglobalcolor5 );\">\u00a0<\/span><\/p><p><b>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc740 \uae30\uccb4 \ubb3c\uc9c8\uc744 \uace0\uccb4 \ud45c\uba74\uc5d0 \ud654\ud559\uc801\uc73c\ub85c \ubc18\uc751\uc2dc\ucf1c \uadf8 \ud45c\uba74\uc5d0 \uc99d\ucc29\uc2dc\ucf1c \uc548\uc815\uc801\uc778 \uace0\uccb4 \ud544\ub984\uc744 \ud615\uc131\ud558\ub294 \uacf5\uc815\uc785\ub2c8\ub2e4.<\/b>1) \ubc18\uc751 \uac00\uc2a4\uc758 \uae30\ud310 \ud45c\uba74\uc73c\ub85c\uc758 \ud655\uc0b0, 2) \ubc18\uc751 \uac00\uc2a4\uc758 \uae30\ud310 \ud45c\uba74 \ud761\ucc29, 3) \uae30\ud310 \ud45c\uba74\uc5d0\uc11c \uc0dd\uc131\ub41c \uae30\uccb4\uc0c1 \ubd80\uc0b0\ubb3c\uc744 \ud45c\uba74\uc5d0\uc11c \ubd84\ub9ac, 4) \ub0a8\uc740 \ubc18\uc751\ubb3c\ub85c\ubd80\ud130 \ud074\ub798\ub529 \uce35 \ud615\uc131\uc758 \ub124 \uac00\uc9c0 \uc8fc\uc694 \ub2e8\uacc4\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8 \ubc0f \ub808\uc774\uc800 \uc9c0\uc6d0\uacfc \uac19\uc740 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uba74 \ud654\ud559 \ubc18\uc751\uc744 \ud06c\uac8c \ucd09\uc9c4\ud558\uc5ec \ub354 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \uc99d\ucc29\uc774 \uc774\ub8e8\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)<\/span><span style=\"font-size: 1rem; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc800\uc555(LPCVD), \ub300\uae30\uc555(APCVD), \uc6d0\uc790\uce35 \uc99d\ucc29(ALD), \ud50c\ub77c\uc988\ub9c8 \uac15\ud654(PECVD) \ubc0f \uae08\uc18d \uc720\uae30 \ud654\ud569\ubb3c(MOCVD)\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4.<\/span><\/p><p><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); font-size: 1rem;\">\u00a0<\/span><\/p><p><b>\uc6d0\uc790\uce35 \uc99d\ucc29(ALD)<\/b>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc758 \uc77c\uc885\uc73c\ub85c, \uae30\ud310 \ud45c\uba74\uc5d0 \ub2e8\uc77c \uc6d0\uc790\ub9c9 \ud615\ud0dc\ub85c \ubb3c\uc9c8\uc744 \ud55c \uce35\uc529 \ub3c4\uae08\ud560 \uc218 \uc788\ub294 \ubc29\ubc95\uc785\ub2c8\ub2e4. \uc6d0\uc790\uce35 \uc99d\ucc29\uc740 \uc77c\ubc18\uc801\uc778 \ud654\ud559 \uc99d\ucc29\uacfc \uc720\uc0ac\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc6d0\uc790\uce35 \uc99d\ucc29 \uc2dc \uc0c8\ub85c\uc6b4 \uc6d0\uc790\uce35\uc758 \ud654\ud559 \ubc18\uc751\uc774 \uc774\uc804 \uce35\uacfc \uc9c1\uc811\uc801\uc73c\ub85c \uc5f0\uad00\ub418\uc5b4 \ud55c \ubc88\uc758 \ubc18\uc751\ub2f9 \ud558\ub098\uc758 \uc6d0\uc790\uce35\ub9cc \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\u00a0<\/b><\/span><\/h6><h6 style=\"text-align: left;\"><span style=\"font-style: inherit; background-color: var( --e-global-color-astglobalcolor5 );\"><b>\ub2e4\uc591\ud55c \ud544\ub984 \uc99d\ucc29 \ubc29\ubc95\uc758 \uc7a5\ub2e8\uc810 \ube44\uad50<\/b><\/span><\/h6><table><thead><tr><th><strong>\uc7a5\uc778 \uc815\uc2e0<\/strong><\/th><th><strong>\uc6d0\uc790\uce35 \uc99d\ucc29<br \/>(ALD)<\/strong><\/th><th><strong>\ubb3c\ub9ac\uc801 \uc99d\uae30 \uc99d\ucc29<br \/>(PVD)<\/strong><\/th><th><strong>\ud654\ud559 \uc99d\uae30 \uc99d\ucc29<br \/>(CVD)<\/strong><\/th><th><strong>\uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29<br \/>(LPCVD \ud37c\ub2c8\uc2a4 \ud29c\ube0c)<\/strong><\/th><\/tr><\/thead><tbody><tr><td>\uc99d\ucc29 \uc6d0\ub9ac<\/td><td>\ud654\ud559\uc801 \ud45c\uba74 \ud3ec\ud654\ub3c4<br \/>\ubc18\uc751-\uc99d\ucc29<\/td><td>\uc99d\ubc1c-\ud1b5\ud569<\/td><td>\uae30\uccb4\uc0c1 \ubc18\uc751 - \uc99d\ucc29<\/td><td>\uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29<br \/>(\uc2a4\ud1a0\ube0c \ubc0f \ud29c\ube0c)<\/td><\/tr><tr><td>\uc99d\ucc29 \ud504\ub85c\uc138\uc2a4<\/td><td>\uce35\ub958 \uc131\uc7a5<\/td><td>\ud575 \uc0dd\uc131 \uc131\uc7a5<\/td><td>\ud575 \uc0dd\uc131 \uc131\uc7a5<\/td><td>\ud575 \uc0dd\uc131 \uc131\uc7a5<\/td><\/tr><tr><td>\ud14c\ub77c\uc2a4 \ucee4\ubc84\ub9ac\uc9c0<\/td><td>\uc6b0\uc218<\/td><td>\uc77c\ubc18<\/td><td>\uc591\ud638<\/td><td>\uc591\ud638<\/td><\/tr><tr><td>\uc785\uae08 \ube44\uc728<\/td><td>slow<\/td><td>\ube60\ub978<\/td><td>\ube60\ub978<\/td><td>\ub290\ub9b0<\/td><\/tr><tr><td>\uc99d\ucc29 \uc628\ub3c4<\/td><td>\ub0ae\uc74c(500\u00b0C \ubbf8\ub9cc)<\/td><td>\ub0ae\uc74c<\/td><td>\ub192\uc74c<\/td><td>\ub354 \ub192\uc740<\/td><\/tr><tr><td>\ub3d9\uc9c8\uc131<\/td><td>\uc6b0\uc218<br \/>0.07 - 0.1nm<\/td><td>\uc77c\ubc18<br \/>\uc57d 5nm<\/td><td>\ub354 \ub098\uc740<br \/>0.5 - 2nm<\/td><td><p>\ub354 \ub098\uc740<\/p><\/td><\/tr><tr><td>\ub450\uaed8 \uc81c\uc5b4<\/td><td>\ubc18\uc751 \uc8fc\uae30 \uc218<\/td><td>\uc99d\ucc29 \uc2dc\uac04<\/td><td>\uc99d\ucc29 \uc2dc\uac04<br \/>\uc99d\uae30\uc0c1 \ubd84\uc555<\/td><td>\uc99d\ucc29 \uc2dc\uac04<br \/>\uac00\uc2a4 \ube44\uc728<\/td><\/tr><tr><td>\uc7ac\ub8cc<\/td><td>\ubd88\uc21c\ubb3c\uc774 \uac70\uc758 \uc5c6\ub294 \uade0\uc77c\uc131<\/td><td>\ubb34\uacb0\uc810<\/td><td>\ubd88\uc21c\ubb3c \uc81c\uac70 \uc6a9\uc774<\/td><td>\ubb34\uacb0\uc810<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7196e2d elementor-widget elementor-widget-heading\" data-id=\"7196e2d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\ud544\ub984 \uc720\ud615 \ubc0f \uc801\uc6a9 \uc2dc\ub098\ub9ac\uc624<\/h4>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5b53a73 elementor-widget elementor-widget-text-editor\" data-id=\"5b53a73\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"font-size: 16px; font-style: normal;\" width=\"978\"><tbody><tr><td width=\"98\">\ud544\ub984 \uc720\ud615<\/td><td width=\"197\">\ubd84\ub958<\/td><td width=\"277\">\ubc15\ub9c9 \uc99d\ucc29 \uc7ac\ub8cc<\/td><td width=\"405\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/td><\/tr><tr><td rowspan=\"5\" width=\"98\">\ubc18\ub3c4\uccb4<\/td><td width=\"197\">\ud3f4\ub9ac\uc2e4\ub9ac\ucf58<\/td><td width=\"277\">SiH4(\uc2e4\ub780)<\/td><td width=\"405\">MOS \uac8c\uc774\ud2b8, \uace0\uac00 \uc800\ud56d\uae30 \ub4f1<\/td><\/tr><tr><td rowspan=\"3\" width=\"197\">\ub2e8\uacb0\uc815 \uc2e4\ub9ac\ucf58<\/td><td width=\"277\">SiH\u2082Cl\u2082(\ub514\ud074\ub85c\ub85c\uc2e4\ub780, DCS)<\/td><td rowspan=\"3\" width=\"405\">\uc804\ub825 \uc7a5\uce58 \ub4f1\uc744 \uc704\ud55c \ub2e8\uacb0\uc815 \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4.<\/td><\/tr><tr><td width=\"277\">SiHCl3(\ud2b8\ub9ac\ud074\ub85c\ub85c\uc2e4\ub780, TCS)<\/td><\/tr><tr><td width=\"277\">SiCl4(\uc5fc\ud654\uaddc\uc18c, \uc2e4\ud14c\ud2b8)<\/td><\/tr><tr><td width=\"197\">\ube44\uc815\uc9c8 \uc2e4\ub9ac\ucf58<\/td><td width=\"277\">SiH4(\uc2e4\ub780)<\/td><td width=\"405\">\uc54c\ud30c-Si \ud0dc\uc591 \uc804\uc9c0, \uc18c\uc2a4\/\ub4dc\ub808\uc778 \ud2b8\ub80c\uce58 \uc601\uc5ed \ub4f1<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">\uc720\uc804\uccb4 \ud488\uc9c8<\/td><td width=\"197\">Si02(\uc774\uc0b0\ud654\uaddc\uc18c)<\/td><td width=\"277\">SiH4, O2<br \/>SiH4, N20<br \/>Si(OC2H5)4(\ud14c\ud2b8\ub77c\uc5d0\ud1a1\uc2dc\uc2e4\ub780), O2\/O3<\/td><td width=\"405\">\uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc720\uc804\uccb4 \ud544\ub984, STI, \uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c, \uce21\ubcbd, PMD, IMD, \ub808\uc9c0\uc2a4\ud2b8, \ud558\ub4dc \ub9c8\uc2a4\ud06c \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/td><\/tr><tr><td width=\"197\">Si3N4\/SiN(\uc9c8\ud654\uaddc\uc18c)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<br \/>C8H22N2Si [ \ube44\uc2a4(\ud14c\ud2b8-\ubd80\ud2f8\uc544\ubbf8\ub178)\uc2e4\ub780 ]<\/td><td width=\"405\">\uc5d0\uce6d \uc2a4\ud1b1 \ub808\uc774\uc5b4, \ud558\ub4dc \ub9c8\uc2a4\ud06c, \ud328\uc2dc\ubca0\uc774\uc158 \ub808\uc774\uc5b4 \ub4f1<\/td><\/tr><tr><td width=\"197\">SiON(\uc9c8\ud654 \uaddc\uc18c)<\/td><td width=\"277\">SiH4, N2O, N2, NH3<\/td><td width=\"405\">\ubc18\uc0ac \ubc29\uc9c0 \ub808\uc774\uc5b4, \uc0b0\ud654\ubb3c \uadf8\ub9b4, \ud558\ub4dc \ub9c8\uc2a4\ud06c \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/td><\/tr><tr><td width=\"197\">PSG\/BPSG <br \/>(\uc778\uaddc\uc0b0\uc5fc\/\ubcf4\ub85c\uc2e4\ub9ac\ucf00\uc774\ud2b8 \uc720\ub9ac)<\/td><td width=\"277\">\uc2e4\ub780, \ubcf4\ub780, \ud3ec\uc2a4\ud3ec\ub780 \ub4f1<\/td><td width=\"405\">PMD, \ud328\uc2dc\ubca0\uc774\uc158 \ub808\uc774\uc5b4 \ub4f1<\/td><\/tr><tr><td width=\"197\">\uc800\uc720\uc804\uccb4(Low-K) \uc18c\uc7ac<\/td><td width=\"277\">\ud3f4\ub9ac\uc774\ubbf8\ub4dc(PI) \ub4f1<\/td><td width=\"405\">PMD\uc5d0\uc11c SiO2 \ub300\uccb4<\/td><\/tr><tr><td width=\"197\">\uace0\uc720\uc804\uccb4(High-K) \uc18c\uc7ac<\/td><td width=\"277\">Hf, O2, SiO2 \ub4f1<\/td><td width=\"405\">\uadf8\ub9ac\ub4dc \ubbf8\ub514\uc5b4 \ub808\uc774\uc5b4\uc5d0\uc11c SiO2 \uad50\uccb4<\/td><\/tr><tr><td rowspan=\"6\" width=\"98\">\uae08\uc18d<br \/>\uae08\uc18d \ud654\ud569\ubb3c<\/td><td width=\"197\">W(\ud145\uc2a4\ud150)<\/td><td width=\"277\">WF6(\uc721\ud50c\ub8e8\uc624\ub974\ud654\ud145\uc2a4\ud150), SiH4, H2<\/td><td width=\"405\">\uc804\uae30 \ud544\ub984, \uad11\ud559 \ud544\ub984, \uacbd\uc9c8 \ud544\ub984, \ubd80\uc2dd \ubc29\uc9c0 \ud544\ub984, \uc811\ucd09 \uad6c\uba4d, \uad00\ud1b5 \uad6c\uba4d, \uac8c\uc774\ud2b8 \ub4f1.<\/td><\/tr><tr><td width=\"197\">WSi2\/TiSi2<br \/>\/CoSix\/NiSi<\/td><td width=\"277\">WF6, \uc2e4\ub780 \ub4f1<\/td><td width=\"405\">\uc18c\uc2a4\/\ub4dc\ub808\uc778\/\uac8c\uc774\ud2b8\uc758 \uc2e4\ub9ac\uc0ac\uc774\ub4dc \ub808\uc774\uc5b4<\/td><\/tr><tr><td width=\"197\">TiN<\/td><td width=\"277\">Ti[N(CH3)2]4 [\ud14c\ud2b8\ub77c\ud0a4\uc2a4(\ub514\uba54\ud2f8\uc544\ubbf8\ub178)\ud2f0\ud0c0\ub284]4 [ \ud14c\ud2b8\ub77c\ud0a4\uc2a4(\ub514\uba54\ud2f8\uc544\ubbf8\ub178)\ud2f0\ud0c0\ub284 ]<\/td><td rowspan=\"3\" width=\"405\">\ubc30\ub9ac\uc5b4 \ub808\uc774\uc5b4, \uae08\uc18d \uadf8\ub9b4 \ub4f1<\/td><\/tr><tr><td width=\"197\">Ti<\/td><td width=\"277\">TiCl4(\uc5fc\ud654\ud2f0\ud0c0\ub284)<\/td><\/tr><tr><td width=\"197\">Ta\/TaN<\/td><td width=\"277\">\u00a0<\/td><\/tr><tr><td width=\"197\">Au\/Al\/Cu<\/td><td width=\"277\">\u00a0<\/td><td width=\"405\">\uae08\uc18d \ub808\uc774\uc5b4, \uae08\uc18d \uaca9\uc790 \ub4f1<\/td><\/tr><\/tbody><\/table><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-33a3365 elementor-widget elementor-widget-text-editor\" data-id=\"33a3365\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><b>\ub354 \uc790\uc138\ud788 \uc77d\uae30.<\/b><\/p><ul><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/anofabrication_navi\/\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ud504\ub85c\uc138\uc2f1 | \uac1c\uc694<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0_%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c - \ub098\ub178\uc784\ud504\ub9b0\ud2b8 \ub9ac\uc18c\uadf8\ub798\ud53c\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_fib_%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ub9ac\uc18c\uadf8\ub798\ud53c - \uc774\uc628 \ube54 FIB\uc5d0 \uc911\uc810\uc744 \ub461\ub2c8\ub2e4.<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0_%ec%a0%84%ec%9e%90%eb%b9%94_%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ub9ac\uc18c\uadf8\ub798\ud53c - \uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%ec%97%90%ec%b9%ad\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c - \uad11\ud559 \ub9ac\uc18c\uadf8\ub798\ud53c\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%ec%97%90%ec%b9%ad\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \uc5d0\uce6d\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0_%ec%97%90%ed%94%bc%ed%83%9d%ec%8b%9c\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ubc15\ub9c9 \uc900\ube44 - \uc5d0\ud53c\ud0dd\uc2dc\u00a0\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/nanofabrication_pvd\/\" target=\"_blank\" rel=\"noopener\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ubc15\ub9c9 \uc900\ube44 - PVD\u00a0<\/a><\/li><li><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/anofabrication_cvd\/\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \ubc15\ub9c9 \uc900\ube44 - CVD<\/a><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fdcf92b elementor-widget elementor-widget-text-editor\" data-id=\"fdcf92b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<b><a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%ec%a0%9c%ec%9e%91-%ec%bd%94%ed%8c%85\/\" target=\"_blank\" rel=\"noopener\">\u00a0\ubc15\ub9c9 \uc99d\ucc29\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/a>,<\/b> \ubb38\uc758 \uc0ac\ud56d\uc774 \uc788\uc73c\uc2dc\uba74 \uc5b8\uc81c\ub4e0\uc9c0 \uba54\uc2dc\uc9c0\ub97c \ub0a8\uaca8\uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b39d0bb elementor-widget elementor-widget-wpforms\" data-id=\"b39d0bb\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/26865\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/26865\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3920fa43\" data-id=\"3920fa43\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div 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data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27540 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%ec%a0%9c%ec%9e%91-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28814\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-1024x768.jpg 1024w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/11\/\u5fae\u7eb3\u7ed3\u6784.jpg 1280w\" sizes=\"(max-width: 300px) 100vw, 300px\" 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category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98-%ec%97%90%ec%b9%ad\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"285\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg\" class=\"attachment-medium size-medium wp-image-26719\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3-300x285.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/Slanted-3.jpg 744w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a 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