{"id":26914,"date":"2022-06-08T16:05:44","date_gmt":"2022-06-08T08:05:44","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26914"},"modified":"2022-10-20T16:36:52","modified_gmt":"2022-10-20T08:36:52","slug":"mems_fabrication_03","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_03\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(III)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26914\" class=\"elementor elementor-26914\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-82048c0 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"82048c0\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6ad832a4\" data-id=\"6ad832a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-5b1571ac elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5b1571ac\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-78b5e856\" data-id=\"78b5e856\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-49537c63 elementor-widget elementor-widget-heading\" data-id=\"49537c63\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(III)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-22cbc296 elementor-widget elementor-widget-text-editor\" data-id=\"22cbc296\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">MEMS \uc911\uc2ec\uc758 \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc740 \uc9d1\uc801 \ud68c\ub85c\ub97c \uae30\ubc18\uc73c\ub85c \ud615\uc131\ub418\uba70 \ucd08\uc815\ubc00 \uac00\uacf5, \uc2ec\uce35 \ubc18\uc751 \uc774\uc628 \uc5d0\uce6d, LIGA \ubc0f \uc900 LIGA \uae30\uc220, \ubd84\uc790 \uc870\ub9bd \uae30\uc220 \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ucc98\ub9ac \uc218\ub2e8\uc5d0\ub294 \uc804\uc790\ube54, \uc774\uc628\ube54, \uad11\uc790\ube54(\uc790\uc678\uc120, X-\uc120 \ubc0f \ub808\uc774\uc800 \ube54), \uc6d0\uc790\ube54, \ubd84\uc790\ube54, \ud50c\ub77c\uc988\ub9c8, \ucd08\uc74c\ud30c, \ub9c8\uc774\ud06c\ub85c\ud30c, \ud654\ud559 \ubc0f \uc804\uae30\ud654\ud559 \ub4f1\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.1 \ucd08\uc815\ubc00 \uac00\uacf5 \uae30\uc220<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ucd08\uc815\ubc00 \uac00\uacf5 \uae30\uc220\uc740 \uc808\uc0ad \uacf5\uad6c\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc7ac\ub8cc\uc758 \ubaa8\uc591\uc744 \ubcc0\uacbd\ud558\uac70\ub098 \uc7ac\ub8cc\uc758 \ud45c\uba74\uce35\uc744 \ud30c\uad34\ud558\uc5ec \ud544\uc694\ud55c \ubaa8\uc591\uc744 \uc5bb\uae30 \uc704\ud574 \uc81c\uac70\ud560 \uce69\uc758 \ud615\ud0dc\ub85c \uac00\uacf5\ud558\ub294 \uae30\uc220\uc785\ub2c8\ub2e4. \ub2e8\uacb0\uc815 \ub2e4\uc774\uc544\ubaac\ub4dc \uacf5\uad6c \uc120\uc0ad \ubc0f \ubc00\ub9c1, \ub9c8\uc774\ud06c\ub85c \ud2b8\uc704\uc2a4\ud2b8 \ub4dc\ub9b4\uc758 \ub9c8\uc774\ud06c\ub85c \ub4dc\ub9b4\ub9c1 \uae30\uc220, \ub9c8\uc774\ud06c\ub85c \uc5f0\uc0ad \uae30\uc220 \ub4f1\uc774 \uc5ec\uae30\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. \ucd08\uc815\ubc00 \uac00\uacf5\uc740 \ubcf5\uc7a1\ud55c 3\ucc28\uc6d0 \ud615\uc0c1\uc744 \uac00\uacf5\ud560 \uc218 \uc788\ub294 \uac83\uc774 \ud2b9\uc9d5\uc774\uba70, 10~100\u03bcm\uc758 \uc791\uc740 3\ucc28\uc6d0 \ubd80\ud488\uc744 \uc131\uacf5\uc801\uc73c\ub85c \uc0dd\uc0b0\ud588\uc2b5\ub2c8\ub2e4. \uac00\uc7a5 \uc791\uc740 \uc0e4\ud504\ud2b8 \uc9c1\uacbd\uc740 10\u03bcm\uc785\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.2 \uc2e4\ub9ac\ucf58 \ubbf8\uc138 \uc81c\uc870 \uae30\uc220<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc2e4\ub9ac\ucf58\uc740 \uac00\uc7a5 \uae30\ubcf8\uc801\uc778 \ubbf8\uc138 \uac00\uacf5 \uc7ac\ub8cc\uc774\uba70, \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc5d0\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58 \uc7ac\ub8cc\uac00 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870 \uae30\uc220\uc758 \uc5f0\uc7a5\uc120\uc0c1\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc740 \uc8fc\ub85c \uc2e4\ub9ac\ucf58 \uc18c\uc7ac\ub97c \uae30\ubc18\uc73c\ub85c \ub2e4\uc591\ud55c \ubbf8\uc138 \uae30\uacc4 \ubd80\ud488\uc744 \uc0dd\uc0b0\ud558\ub294 \uac83\uc744 \ub9d0\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) \uc9d1\uc801 \ud68c\ub85c \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc9d1\uc801 \ud68c\ub85c \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uacf5\uc815: \uccab \ubc88\uc9f8 \uae30\ud310(\uc8fc\ub85c \uc2e4\ub9ac\ucf58) \uc0b0\ud654 \ucc98\ub9ac\ub85c SiO2\uc758 \ubcf4\ud638\ub9c9\uc744 \ud615\uc131\ud55c \ub2e4\uc74c \ubcf4\ud638\ub9c9\uc5d0 \ud3ec\ud1a0\ud3f4\ub9ac\uba38\ub97c \ucf54\ud305\ud558\uace0, \uaddc\uc815\ub41c \uad11\uc6d0 \ub178\ucd9c\uc5d0\uc11c \ub9c8\uc2a4\ud06c\ub97c \uc0ac\uc6a9\ud558\uace0, \ud604\uc0c1\ud558\uace0, \uc5d0\uce6d\uc81c\ub85c \uc5d0\uce6d\ud558\uc5ec \ud3ec\ud1a0\ud3f4\ub9ac\uba38\uc758 \ub9c8\uc9c0\ub9c9 \uc81c\uac70 \ucc3d \ubd80\ubd84\uc758 \ubcf4\ud638\ub9c9\uc744 \uc5d0\uce6d\ud558\uace0 \ub3d9\uc77c\ud55c \ucd08\ubbf8\uc138 \uadf8\ub798\ud53d\uc758 \uadf8\ub798\ud53d\uc5d0 \ub9c8\uc2a4\ud06c\ub97c \uc5bb\uc74c\uc73c\ub85c\uc368 \uc9d1\uc801 \ud68c\ub85c\ub97c \ud615\uc131\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uadf8\ub798\ud53d\uc758 \ucd5c\uc18c \ud53c\ucc98 \ud06c\uae30(\ud574\uc0c1\ub3c4)\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc694\uc18c\ub294 \ud3ec\ud1a0\ud3f4\ub9ac\uba38\uc758 \ub178\ucd9c \ud2b9\uc131, \ud544\ub984 \uce35\uc758 \ub450\uaed8\uc640 \uade0\uc77c\uc131, \uad11\uc6d0 \ube54\uc774 \ud3ec\ud1a0\ud3f4\ub9ac\uba38 \uce35\uc758 \ub178\ucd9c \ud2b9\uc131(\ud68c\uc808, \uc0b0\ub780), \ud604\uc0c1 \ubc0f \uc5d0\uce6d \ucc98\ub9ac \uacf5\uc815, \ub178\ucd9c \ubc29\ubc95 \ub4f1\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \ub178\ucd9c \ubc29\uc2dd\uc5d0\ub294 \uc811\ucd09\uc2dd, \uadfc\uc811\uc2dd, \ud22c\uc601\uc2dd \uc138 \uac00\uc9c0\uac00 \uc788\uc2b5\ub2c8\ub2e4. \uc811\ucd09 \ub178\uad11\uc740 \u03bcm \ubbf8\ub9cc\uc758 \uc815\ud655\ub3c4\ub97c \uc5bb\uc744 \uc218 \uc788\uc9c0\ub9cc \ub178\ucd9c \uacf5\uc815\uc5d0\uc11c \ub9c8\uc2a4\ud06c\uac00 \uae30\uacc4\uc801 \ubd80\ud558\ub97c \uacac\ub514\uae30 \ub54c\ubb38\uc5d0 \uc811\ucd09 \ud45c\uba74\uc774 \uc785\uc790\uc5d0 \uc758\ud574 \uae01\ud788\uae30 \uc27d\uae30 \ub54c\ubb38\uc5d0 \ub300\ub7c9 \uc0dd\uc0b0\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc73c\uba70, \ub178\ucd9c \uc720\ud615\uc5d0 \uac00\uae5d\uac8c \ub9c8\uc2a4\ud06c\uc640 \uae30\ud310 \uc0ac\uc774\uc5d0 20 ~ 50\u03bcm \uac04\uaca9\uc73c\ub85c \ub9c8\uc2a4\ud06c\uc758 \ub9c8\ubaa8\ub97c \uc904\uc774\uc9c0 \ub9cc \ud68c\uc808 \ud6a8\uacfc\ub85c \uc778\ud574 2\u03bcm\uc758 \ud55c\uacc4 \uc815\ud655\ub3c4; \ud22c\uc601 \ub178\ucd9c\uc740 \uc57d 0.5\u03bcm\uc758 \uad6c\uc870\uc758 \uc815\ud655\ub3c4\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) \ubc14\ub514 \ub9c8\uc774\ud06c\ub85c \uac00\uacf5<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ubcfc\ub968 \ubbf8\uc138 \uac00\uacf5\uc744 \ud1b5\ud574 \uc2e4\ub9ac\ucf58 \ubbf8\uc138 \uad6c\uc870\ub97c 3\ucc28\uc6d0\uc73c\ub85c \uc81c\uc791\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc5d0\uc11c \uc9c1\uc811 \uace0\uc885\ud6a1\ube44 \ubbf8\uc138 \uae30\uacc4 \ubd80\ud488\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub294 \uad11\ud559 \uc5d0\uce6d\uc73c\ub85c \uc804\ucc98\ub9ac\ub41c \ud6c4 \ub178\ucd9c\ub41c \ub808\uc9c0\uc2a4\ud2b8 \ubb3c\uc9c8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \ub808\uc9c0\uc2a4\ud2b8\uc5d0 \uc774\ubc29\uc131 \uc5d0\uce6d \uc6a9\uc561\uc744 \uc120\ud0dd\uc801\uc73c\ub85c \uc0ac\uc6a9\ud558\uba74 \uae30\ud310\uc5d0 \uae4a\uc740 \ud648\uc744 \uc5bb\uc744 \uc218 \uc788\uc73c\uba70, \ub0a8\uc740 \ub808\uc9c0\uc2a4\ud2b8\ub294 \ub9c8\uc2a4\ud06c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc73c\uba70 \ucd5c\uc885 \ud615\ud0dc\ub294 \uae30\ud310\uc758 \uaca9\uc790 \ubc29\ud5a5\uc5d0 \uc758\ud574\uc11c\ub9cc \uacb0\uc815\ub429\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc774 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uba74 \uad50\ub7c9, \ubcf4, \ud544\ub984 \ub4f1 \ub2e4\uc591\ud55c \uad6c\uc870\ubb3c\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub300\ub7c9 \ubbf8\uc138 \uac00\uacf5\uc744 \ud1b5\ud574 \uc81c\uc791\ub41c \uc6e8\uc774\ud37c\ub294 \ubcf8\ub529 \ub610\ub294 \uae30\ud0c0 \uc0c1\ud638 \uc5f0\uacb0 \uae30\uc220\ub85c \uc5f0\uacb0\ud558\uc5ec \ubcf5\uc7a1\ud55c 3\ucc28\uc6d0 \uad6c\uc870\ub97c \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc2e4\ub9ac\ucf58\uc758 \uaca9\uc790 \ubc29\ud5a5\uc774 \uc77c\uc815\ud558\uae30 \ub54c\ubb38\uc5d0 \uc774 \uae30\uc220\ub85c\ub294 \ub2e8\uc21c\ud55c \uc6d0, \uc6d0\ud1b5\ud615 \uad6c\uba4d \ub610\ub294 \ubd80\ud53c\ub97c \ud615\uc131\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c\ub97c \uc815\ud655\ud558\uac8c \uad6c\uc131\ud558\ub824\uba74 \uc5d0\uce6d \uacf5\uc815\uc744 \uc911\ub2e8\ud560 \uc2dc\uc810\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud574\uc57c \ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) \ud45c\uba74 \ubbf8\uc138 \uac00\uacf5<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ud45c\uba74 \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uba74 \uae30\ud310 \ud45c\uba74\uc5d0\uc11c \uc790\uc720\ub86d\uac8c \uc11c \uc788\ub294 \uce94\ud2f8\ub808\ubc84 \uad6c\uc870 \ub610\ub294 \ubc15\ub9c9\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud504\ub85c\uc138\uc2a4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(i) \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc5d0 \uc758\ud55c \ud76c\uc0dd\uce35 \ud615\uc131, (ii) \ud45c\uba74 \ubb3c\uc9c8 \uc120\ud0dd\uc801 \uc81c\uac70, (iii) \ud3f4\ub9ac\uc2e4\ub9ac\ucf58 \uad6c\uc870\uce35 \uc99d\ucc29, (iv) \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \uc5d0\uce6d, (v) \ud76c\uc0dd\uce35 \ubb3c\uc9c8\uc744 \uc5d0\uce6d\ud558\uc5ec \uc6d0\ud558\ub294 \ubbf8\uc138 \uad6c\uc870\ub97c \uc5bb\ub294 \uacfc\uc815\uc73c\ub85c \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ubcf4\ub2e4 \ubcf5\uc7a1\ud55c 3\ucc28\uc6d0 \ubbf8\uc138 \uad6c\uc870\ub97c \uc5bb\uae30 \uc704\ud574 \uc801\uc808\ud55c \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ubc0f \uc5d0\uce6d \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \ud76c\uc0dd\uce35\uacfc \uad6c\uc870\uce35\uc744 \uac01\uac01 \uc5f0\uc18d\uc801\uc73c\ub85c \ucd94\uac00\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc774 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uba74 \uc5ec\ub7ec \uac1c\uc758 \uc587\uc740 \uce35\uc73c\ub85c \uad6c\uc131\ub41c \ucd5c\ub300 20\u03bcm \ub192\uc774\uc758 \ubcf5\uc7a1\ud55c 3D \ub9c8\uc774\ud06c\ub85c\uad6c\uc870\ub97c \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) \uadf8\ub808\uc774 \ud1a4 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud5a5\uc0c1\ub41c \ubbf8\uc138 \uad6c\uc870\ub97c \uc5bb\uae30 \uc704\ud574 \uadf8\ub808\uc774 \ud1a4 \ub9ac\uc18c\uadf8\ub798\ud53c\ub77c\ub294 \uae30\uc220\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ud2b9\uc218 \uaca9\uc790 \uc2a4\ud06c\ub9b0 \ud3ec\ud1a0 \ub9c8\uc2a4\ud06c\ub97c \uc0ac\uc6a9\ud558\ub294 \uadf8\ub808\uc774 \ud1a4 \ud3ec\ud1a0 \ub9ac\uc18c\uadf8\ub798\ud53c\ub294 \ubcc0\ud654 \ubc29\ud5a5\uc758 \uae38\uc774\uc5d0 \ub530\ub77c\uc774 \ub9c8\uc2a4\ud06c\uc758 \ud22c\uba85\ub3c4\uac00 \uc5f0\uc18d\uc801\uc774\uac70\ub098 \ubd88\uc5f0\uc18d\uc801 \uc77c \uc218 \uc788\uc73c\uba70, \uc774\ub294 \ud06c\ub86c \uce35\uc758 \ub450\uaed8\ub97c \ubcc0\uacbd\ud558\uac70\ub098 \ub9e4\uc6b0 \uc791\uace0 \uc815\ubc00\ud55c \uad6c\uba4d \ubc30\uc5f4\ub85c \ubc30\uce58 \ub41c \uce35\uc5d0\uc11c \ub2ec\uc131 \ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \ub808\uc9c0\uc2a4\ud2b8\uc758 \ub2e4\ub978 \uc601\uc5ed\uc774 \ub2e4\ub978 \uad11\ub3c4\ub97c \ubc1b\ub3c4\ub85d\ud558\uc5ec \ubd80\uc2dd \uc815\ub3c4\ub3c4 \ub2e4\ub974\ubbc0\ub85c \uad6c\uc870\uc758 \ud2b9\ubcc4\ud55c \ubd80\uc2dd\uc744 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(5) \ub9ac\ud504\ud2b8 \uc624\ud504 \uae30\uc220<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2a4\ud37c\ud130\ub9c1\uc73c\ub85c \uad6c\uc870 \uc7ac\ub8cc\ub97c \uc99d\ucc29\ud560 \ub54c \uc6a9\uc561\uc73c\ub85c \ub808\uc9c0\uc2a4\ud2b8 \uce35\uc744 \uc81c\uac70\ud558\uba74 \uadf8 \uc704\uc5d0 \uc99d\ucc29\ub41c \uad6c\uc870 \uc7ac\ub8cc\uac00 \ub808\uc9c0\uc2a4\ud2b8\uc640 \ud568\uaed8 \ub4e4\uc5b4 \uc62c\ub824\uc9c0\uae30 \ub54c\ubb38\uc5d0 \ub9ac\ud504\ud2b8 \uc624\ud504 \uae30\uc220\uc774\ub77c\ub294 \uc774\ub984\uc774 \ubd99\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uae30\uc220\uc740 \uc5d0\uce6d\ud558\uae30 \uc5b4\ub824\uc6b4 \uae08\uc18d\uc758 \uc81c\uc870\uc5d0 \ud2b9\ud788 \uc801\ud569\ud558\uba70 \ud1b5\ud569 \ucee4\ud328\uc2dc\ud130 \uc81c\uc870\uc5d0\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae08\uc18d\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29\uc73c\ub85c \uc99d\ucc29\ub418\uba70, \uc8fc\ub85c \ubc31\uae08, \ud2f0\ud0c0\ub284 \ub610\ub294 \uae08\uc774 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/span><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><br \/><\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-18719c36 elementor-widget elementor-widget-text-editor\" data-id=\"18719c36\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<b><a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\">MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/a>,<\/b> \ubb38\uc758 \uc0ac\ud56d\uc774 \uc788\uc73c\uc2dc\uba74 \uc5b8\uc81c\ub4e0\uc9c0 \uba54\uc2dc\uc9c0\ub97c \ub0a8\uaca8\uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9a31f5b elementor-widget elementor-widget-wpforms\" data-id=\"9a31f5b\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/26914\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/26914\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-27413f33\" data-id=\"27413f33\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-47de7bce elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"47de7bce\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-57461f9 elementor-widget elementor-widget-heading\" data-id=\"57461f9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3d660804 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"3d660804\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-268ac04e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"268ac04e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5fd9c822 elementor-widget elementor-widget-heading\" data-id=\"5fd9c822\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1852f7f9 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"1852f7f9\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27025 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/liga_app_01\/\" >\n\t\t\t\tLIGA \ub3c4\uae08 | \uae08\uc18d \ubbf8\uc138 \uad6c\uc870\ubb3c, \uad00\uc131 \uac10\uc9c0\/RF\/\ubc29\uc5f4\ud310 \ubd80\ud488 \uac00\uacf5\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>LIGA\/UV-LIGA\u7535\u9540 | \u91d1\u5c5e\u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/liga_app_01\/\" aria-label=\"\uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 LIGA \ub3c4\uae08 | \uae08\uc18d \ubbf8\uc138 \uad6c\uc870 \uac00\uacf5, \uad00\uc131 \uac10\uc9c0\/RF\/\ubc29\uc5f4\ud310 \ubd80\ud488 \uac00\uacf5\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26897 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26967 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%ec%95%b1_02\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \uc140\ub8f0\ub7ec \uc5b4\ub808\uc774\uc6a9\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u7528\u4e8e\u7ec6\u80de\u9635\u5217\u5316 \u7ec6\u80de\u5fae\u9635\u5217<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%ec%95%b1_02\/\" aria-label=\"\ub098\ub178 \uc81c\uc870\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | \uc140 \uc5b4\ub808\uc774\uc6a9\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6529e9c6 elementor-widget elementor-widget-heading\" data-id=\"6529e9c6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%9d%b8%ec%82%ac%ec%9d%b4%ed%8a%b8\/\">\ub354 \ub9ce\uc740 \uad00\ub828 \uc815\ubcf4...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) \u9762 [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26914","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) -<\/title>\n<meta name=\"description\" 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class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09)\",\"datePublished\":\"2022-06-08T08:05:44+00:00\",\"dateModified\":\"2022-10-20T08:36:52+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/\"},\"wordCount\":23,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"ko-KR\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-08T08:05:44+00:00\",\"dateModified\":\"2022-10-20T08:36:52+00:00\",\"description\":\"\u9762\u5411MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684,\u5148\u540e\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/ko\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) -","description":"\u9762\u5411MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684,\u5148\u540e\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_03\/","og_locale":"ko_KR","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09)","og_description":"\u9762\u5411MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684,\u5148\u540e\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","og_url":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_03\/","article_published_time":"2022-06-08T08:05:44+00:00","article_modified_time":"2022-10-20T08:36:52+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"\uae00\uc4f4\uc774":"admin","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"2\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09)","datePublished":"2022-06-08T08:05:44+00:00","dateModified":"2022-10-20T08:36:52+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/"},"wordCount":23,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"ko-KR"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/","name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09) -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-08T08:05:44+00:00","dateModified":"2022-10-20T08:36:52+00:00","description":"\u9762\u5411MEMS\u7684\u5fae\u7ec6\u52a0\u5de5\u6280\u672f\u662f\u5728\u96c6\u6210\u7535\u8def\u7684\u57fa\u7840\u4e0a\u5f62\u6210\u7684,\u5148\u540e\u6709\u4e86\u8d85\u7cbe\u5bc6\u673a\u68b0\u52a0\u5de5\u3001\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\u3001LIGA\u53ca\u51c6LIGA\u6280\u672f\u3001\u5206\u5b50\u88c5\u914d\u6280\u672f\u7b49\u3002\u5176\u52a0\u5de5\u624b\u6bb5\u5305\u62ec\u7535\u5b50\u675f\u3001\u79bb\u5b50\u675f\u3001\u5149\u5b50\u675f\uff08\u7d2b\u5916\u7ebf\u3001X\u5c04\u7ebf\u53ca\u6fc0\u5149\u675f\uff09\u3001\u539f\u5b50\u675f\u3001\u5206\u5b50\u675f\u3001\u7b49\u79bb\u5b50\u4f53\u3001\u8d85\u58f0\u3001\u5fae\u6ce2\u3001\u5316\u5b66\u548c\u7535\u5316\u5b66\u7b49\u7b49\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_03\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e09)"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/ko\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26914","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/comments?post=26914"}],"version-history":[{"count":19,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26914\/revisions"}],"predecessor-version":[{"id":28244,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26914\/revisions\/28244"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/media?parent=26914"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/categories?post=26914"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/tags?post=26914"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}