{"id":26933,"date":"2022-06-08T16:15:20","date_gmt":"2022-06-08T08:15:20","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26933"},"modified":"2022-10-20T15:51:57","modified_gmt":"2022-10-20T07:51:57","slug":"mems_fabrication_05","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_05\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(V)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26933\" class=\"elementor elementor-26933\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-44cb9ac7 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"44cb9ac7\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-62735589\" data-id=\"62735589\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1c11e568 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1c11e568\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2d7be2b2\" data-id=\"2d7be2b2\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6e89644a elementor-widget elementor-widget-heading\" data-id=\"6e89644a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\"><h3 data-elementor-setting-key=\"title\" data-pen-placeholder=\"\u5728\u6b64\u8f93\u5165...\" style=\"font-style: normal;\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(V)<\/h3><\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7d1ec218 elementor-widget elementor-widget-text-editor\" data-id=\"7d1ec218\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.5 \uace0\uc5d0\ub108\uc9c0 \ube54 \uc5d0\uce6d<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) \uc804\uc790\ube54 \uc5d0\uce6d<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc804\uc790\ube54\uc758 \ud654\ud559\uc801 \ud6a8\uacfc\ub294 \uc5d0\uce6d\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uacf5\uc791\ubb3c \ud45c\uba74\uc758 \uc804\uc790\ube54 \uc870\uc0ac\uc758 \uc804\ub825 \ubc00\ub3c4\uac00 \uc0c1\ub2f9\ud788 \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ud45c\uba74 \uc628\ub3c4 \uc0c1\uc2b9\uc744 \uac70\uc758 \uc77c\uc73c\ud0a4\uc9c0 \uc54a\uace0 \uc785\uc0ac \uc804\uc790\uc640 \uace0\ubd84\uc790 \uc7ac\ub8cc \ubd84\uc790\uac00 \ucda9\ub3cc\ud558\uc5ec \ubd84\uc790 \uc0ac\uc2ac\uc774 \ub04a\uc5b4 \uc9c0\uac70\ub098 \uc7ac \uc911\ud569\ub418\uc5b4 \uace0\ubd84\uc790 \uc7ac\ub8cc\uc758 \ud654\ud559\uc801 \ud2b9\uc131 \ubc0f \ubd84\uc790\ub7c9 \ubcc0\ud654,\uc774 \ud6a8\uacfc\uc758 \uc0ac\uc6a9\uc740 \uc804\uc790\ube54\uc758 \ub178\ucd9c\ub85c \uc218\ud589 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub178\ucd9c\uc740 \uc8fc\ub85c \ub450 \uac00\uc9c0 \uc885\ub958\uc758 \ub178\ucd9c\ub85c \ub098\ub258\uba70, \ud558\ub098\ub294 \uc804\uc790\ube54 \uc2a4\uce90\ub2dd \uc720\ud615\uc774\uba70, \uc57d 0.5 ~ 5mm \uc2a4\uce90\ub2dd\uc5d0\uc11c \uc804\uc790\ube54\uc758 1\u03bcm \uc774\ub0b4\uc5d0 \ucd08\uc810\uc744 \ub9de\ucd94\uace0 \ubaa8\ub4e0 \uadf8\ub798\ud53d\uc5d0 \ub178\ucd9c \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\ub978 \ud558\ub098\ub294 \uc804\uc790\ube54\uc758 \ud22c\uc601 \uc720\ud615 \ub178\ucd9c\uc758 \uac10\uc18c\ub85c, \uc804\uc790\ube54\uc774 \ub9c8\uc2a4\ud06c \ud50c\ub808\uc774\ud2b8\ub97c \ud1b5\uacfc \ud55c \ub2e4\uc74c \uadf8\ub798\ud53d \ub178\ucd9c\uc744\uc704\ud55c \ub300\uaddc\ubaa8 \uc9d1\uc801 \ud68c\ub85c\uc758 \uc804\uc790 \ub808\uc9c0\uc2a4\ud2b8\uc5d0 \ub300\ud55c \ud22c\uc601 \uac10\uc18c \ube44\uc728\uc758 1 \/ 5 ~ 1 \/ 10\uc744 \uac10\uc18c\uc2dc\ud0a4\ub294 \uac83\uc785\ub2c8\ub2e4. \uc804\uc790\ube54 \uc5d0\uce6d\uc740 \ud604\uc7ac \ucd5c\uace0\uc758 \uace0\ud574\uc0c1\ub3c4 \uadf8\ub798\ud53d \uc0dd\uc0b0 \uae30\uc220\uc774\uba70, \uc2e4\ud5d8\uc2e4 \uc870\uac74\uc5d0\uc11c \ucd5c\ub300 2nm \ud53c\ucc98 \ud06c\uae30, \uc0dd\uc0b0\uc5d0\uc11c \uc77c\ubc18\uc801\uc73c\ub85c 0.5 ~ 1\u03bcm \ud53c\ucc98 \ud06c\uae30\uc5d0 \ub3c4\ub2ec \ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc804\uc790\ube54 \ucc98\ub9ac\ub294 \uc9c4\uacf5 \uc870\uac74\uc5d0\uc11c \uc218\ud589\ud574\uc57c \ud569\ub2c8\ub2e4. \uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c\ub294 \uc804\uc790\uac00 \uace0\uc18d\uc73c\ub85c \uc774\ub3d9\ud560 \uc218 \uc788\uace0 \uc74c\uadf9\uc774 \uc0b0\ud654\ub418\uc9c0 \uc54a\uc73c\uba70 \ucc98\ub9ac\ub41c \ud45c\uba74\uc774 \uc99d\uae30\uc5d0 \uc758\ud574 \uc0b0\ud654\ub418\ub294 \uac83\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc9c4\uacf5 \uc0c1\ud0dc\uc5d0\uc11c \uc218\ud589\ud574\uc57c \ud558\ubbc0\ub85c \uba87 \uac00\uc9c0 \uc81c\ud55c \uc0ac\ud56d\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) \uc774\uc628 \ube54 \uc5d0\uce6d<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc774\uc628 \ube54 \uc5d0\uce6d\uc740 \ub2e4\uc591\ud55c \ubbf8\uc138 \uac00\uacf5 \ubc29\ubc95\uc744 \uc704\ud55c \uc6b4\ub3d9 \uc5d0\ub108\uc9c0\ub85c \uace0\uc18d \uc774\uc628 \ube54 \ud750\ub984\uc73c\ub85c \uac00\uc18d\ub41c \uc804\uae30\uc7a5\uc5d0\uc11c \ud76c\uadc0 \uac00\uc2a4 \uc6d0\uc18c \ub610\ub294 \uae30\ud0c0 \uc774\uc628 \uc6d0\uc18c\ub97c \uc0ac\uc6a9\ud558\uc5ec \ubbf8\ud06c\ub860 \uc774\ud558 \ub610\ub294 \ubc00\ub9ac\ubbf8\ud130 \uc218\uc900\uc758 \uc815\ubc00 \uac00\uacf5\uc73c\ub85c \uc720\ub9dd\ud558\uace0 \uad11\ubc94\uc704\ud55c \uac00\uacf5 \ubc29\ubc95\uc758 \uacf5\uc815 \ub2a5\ub825\uc744 \uac1c\ubc1c\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \ub2e4\uc74c\uacfc \uac19\uc774 \ub098\ub20c \uc218 \uc788\uc2b5\ub2c8\ub2e4:<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(i) \uc81c\uac70 \uacfc\uc815. \uc6b0\uc120, \uc544\ub974\uace4, \ud06c\ub9bd\ud1a4 \ub610\ub294 \ud06c\uc138\ub17c \ubc0f \uae30\ud0c0 \ubd88\ud65c\uc131 \uac00\uc2a4\ub97c \uc774\uc628\ud654 \ucc54\ubc84\uc5d0\uc11c \uc800 \uc9c4\uacf5\uc73c\ub85c \uace0\uc8fc\ud30c \ubc29\uc804 \ub610\ub294 \uc9c1\ub958 \ubc29\uc804\uc73c\ub85c \uc774\uc628\ud654 (\uc989, \uc591\uc774\uc628\uc758 \uc218\uc640 \uc74c\uc774\uc628\uc758 \uc218\uac00 \ud63c\ud569\ubb3c\uacfc \ub3d9\uc77c)\ud558\uace0, \uac00\uc18d \uc804\uadf9\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8\uc758 \uc774\uc628\uc744 \ube54 \ud615\ud0dc\ub85c \uacf5\uc791\ubb3c \ud45c\uba74\uc5d0\uc11c \uc6d0\uc790 \ub610\ub294 \ubd84\uc790\ub85c\ubd80\ud130 \ub04c\uc5b4\ub0b4\uc5b4 \uacf5\uc791\ubb3c \uac00\uacf5 \ud45c\uba74 \ub610\ub294 \uc5d0\uce6d \uadf8\ub798\ud504\uc5d0\uc11c \uc9c1\uc811 \uc644\ub8cc \ud560 \uc218 \uc788\ub3c4\ub85d\ud569\ub2c8\ub2e4. \uc774\uc628 \ubc00\ub9c1, \uc774\uc628 \uc5f0\ub9c8, \uc774\uc628 \ubc15\ub9c9\ud654 \ubc0f \uc774\uc628 \uc2a4\ud37c\ud130\ub9c1\uc774 \uc774 \uc6d0\ub9ac\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ucf54\ud305 \ucc98\ub9ac. \uc800\uc5d0\ub108\uc9c0 \uc785\uc0ac \uc774\uc628\uc744 \uacf5\uc791\ubb3c \ubbf8\uc138 \uac00\uacf5 \ud45c\uba74\uc5d0 \ubd80\ucc29\ud558\ub294 \uac83\uc744 \uc774\uc628 \ubd80\ucc29 \uac00\uacf5\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. \ub300\ud45c\uc801\uc778 \uc774\uc628 \ubd80\ucc29 \uacf5\uc815\uc740 \uc774\uc628 \ucf54\ud305 \uacf5\uc815\uc785\ub2c8\ub2e4. \uc774\uc628 \ucf54\ud305\uc740 \uc6d0\uc790 \ub610\ub294 \ubd84\uc790\uc758 \uc774\uc628 \ube54 \ucda9\uaca9\uc744 \uc0ac\uc6a9\ud558\uc5ec \uacf5\uc791\ubb3c \ud45c\uba74\uc5d0 \ud070 \uc5d0\ub108\uc9c0\ub85c \ubd80\ucc29\ub418\ubbc0\ub85c \ucf54\ud305 \uac15\ub3c4\uac00 \ub192\uace0 \ucf54\ud305\uc758 \ud488\uc9c8\uc774 \uc88b\uc2b5\ub2c8\ub2e4. \uc774\uc628 \ucf54\ud305 \uae30\uc220\uc740 \ub0b4\ub9c8\ubaa8\uc131, \ub0b4\uc2dd\uc131, \ub0b4\uc5f4\uc131 \ud45c\uba74 \uac15\ud654 \ud544\ub984\uc740 \ubb3c\ub860 \uc804\uc790, \ubc18\ub3c4\uccb4, \uc9d1\uc801 \ud68c\ub85c\uc6a9 \ubc15\ub9c9\uc744 \uc0dd\uc0b0\ud558\ub294 \ub370 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(iii) \uc8fc\uc785 \ucc98\ub9ac. \uc774\uc628 \uc8fc\uc785\uc740 \uc218\uc2ed\uc5d0\uc11c \uc218\ubc31 \ud0ac\ub85c\uc804\uc790\ubcfc\ud2b8(keV) \uc5d0\ub108\uc9c0\ub85c \uac00\uc18d\ub41c \uc774\uc628, \uacf5\uc791\ubb3c \ud45c\uba74\uc758 \ucda9\uaca9, \uace0\uc18d \uc774\uc628\uc774 \uacf5\uc791\ubb3c \ud45c\uba74\uce35\uc5d0 \uc6d0\uc790 \uac2d\uc5d0 \ub3c4\ub2ec\ud558\uac70\ub098 \uacf5\uc791\ubb3c \ud45c\uba74\uce35\uc5d0 \ub0b4\uc7a5\ub41c \ub300\uccb4 \uc6d0\uc790 \ud615\ud0dc\ub85c \uacf5\uc815\uc758 \ud45c\uba74\uce35\uc5d0 \uc720\uc9c0\ub418\ub294 \uc774\uc628\uc785\ub2c8\ub2e4. \uc9d1\uc801 \ud68c\ub85c\uc5d0\uc11c \uc774\uc628 \uc8fc\uc785\uc740 \ub3c4\ud551 \uc591\uc744 \uc81c\uc5b4\ud558\uace0 \uc9d1\uc801 \ud68c\ub85c\uc758 \uade0\uc77c \ud55c \uc804\uae30\uc801 \ub9e4\uac1c \ubcc0\uc218\ub97c \uc5bb\uc744 \uc218 \uc788\uc73c\uba70 \ubd80\ud488 \uc81c\uc870\uc5d0\uc11c \uc774\uc628 \uc8fc\uc785 \uacf5\uc815\uc758 \uc0ac\uc6a9\uc740 \uae08\uc18d \ud45c\uba74\uce35\uc758 \uc218\uc815\uc73c\ub85c \ub2ec\uc131 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc774\uc628 \ube54 \uc4f0\uae30. \uc804\uc790\ube54 \ub178\ucd9c, \uc804\uc790\ube54 \ub178\ucd9c, \ud3ec\ud1a0 \ud3f4\ub9ac\uba38\uc758 \uac10\ub3c4, \uc774\ucc28 \uc804\uc790\uc758 \uc0dd\uc131 \ubc0f \ubc18\uc0ac \uc804\uc790\uc758 \uae30\ud310\uc758 \ud574\uc0c1\ub3c4\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc8fc\uc694 \uc694\uc778\uc740 \uc774\uc628\uc758 \uc9c8\ub7c9\uc774 \uc804\uc790\ubcf4\ub2e4 \ud6e8\uc52c \ud070 \ubc18\uba74, \uace0\uccb4 \uc0b0\ub780\uc740 \uc791\uace0, \uadfc\uc811 \ud6a8\uacfc\ub85c \uc778\ud55c \ud6c4\ubc29 \uc0b0\ub780 \ud6a8\uacfc\ub97c \uc0dd\uc131\ud558\ub294 \uae30\ud310\uc740 \uc57d\ud558\ubbc0\ub85c \ubbf8\uc138\ud55c \uadf8\ub798\ud53d\uc758 \uc815\ubc00\ub3c4\ub97c 0.1\u03bcm \ubbf8\ub9cc\uc758 \uc120\ud3ed\uc73c\ub85c \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc800\ud56d \ud6c4 \ub808\uc9c0\uc2a4\ud2b8\uc5d0 \ub4e4\uc5b4\uac00\ub294 \uc774\uc628, \uc785\uc790\uc758 \uc9c8\ub7c9\uc774 \ud06c\uae30 \ub54c\ubb38\uc5d0 \ubc94\uc704\uac00 \uc9e7\uc544\uc11c \uc774\uc628 \uc5d0\ub108\uc9c0\uac00 \ub808\uc9c0\uc2a4\ud2b8\uc5d0 \uc644\uc804\ud788 \ud761\uc218\ub418\uc5b4 \ub808\uc9c0\uc2a4\ud2b8\uc758 \uac10\ub3c4\uac00 \uc99d\uac00\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc774\uc628 \ube54 \uc5d0\uce6d\uc740 \ubb3c\ub9ac\uc801 \uae30\ubc18 \uc5d0\uce6d \ud504\ub85c\uc138\uc2a4\uc785\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d\uc740 \ud654\ud559 \ubc18\uc751 \uae30\ubc18 \uc5d0\uce6d \uacf5\uc815\uc785\ub2c8\ub2e4. \uc800\uc628 \ud50c\ub77c\uc988\ub9c8\ub97c \uc0ac\uc6a9\ud558\ub294 \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d\uc740 \uc774 \ud50c\ub77c\uc988\ub9c8\uc5d0\uc11c \uc790\uc720 \ub77c\ub514\uce7c\uc758 \ud654\ud559\uc801 \ud2b9\uc131\uc774 \ub9e4\uc6b0 \ud65c\ubc1c\ud558\uc5ec \ubc15\ub9c9 \uc7ac\ub8cc \uc5d0\uce6d\uc758 \ubaa9\uc801\uc744 \ub2ec\uc131\ud558\uae30 \uc704\ud574 \uc5d0\uce6d\ud560 \uc7ac\ub8cc\uc640\uc758 \ud654\ud559 \ubc18\uc751\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) \ub808\uc774\uc800 \uc5d0\uce6d<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub808\uc774\uc800 \uc5d0\uce6d\uc740 \uc8fc\ub85c \uace0\uccb4 \ub808\uc774\uc800\uc5d0 \uc0ac\uc6a9\ub418\uba70 CO2 \ub808\uc774\uc800 \ud30c\uc7a5\uc740 \ub354 \uae38\uace0 \uc77c\ubc18\uc801\uc73c\ub85c \ubbf8\uc138 \uac00\uacf5\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uc774\ub860\uc801\uc73c\ub85c \ub808\uc774\uc800 \uc2a4\ud3ff\uc758 \uc9c1\uacbd\uc740 1\u03bcm\uae4c\uc9c0 \ucd08\uc810\uc744 \ub9de\ucd9c \uc218 \uc788\uc9c0\ub9cc \ud604\uc7ac \ub808\uc774\uc800 \uc791\uc5c5 \uc7ac\ub8cc\uc758 \uc0ac\uc6a9\uc740 \uc7ac\ub8cc\uc758 \ud488\uc9c8\uc774 \uace0\ub974\uc9c0 \uc54a\uace0 \ub808\uc774\uc800 \ud615\uc131\uc758 \uc601\ud5a5\uacfc \uac19\uc740 \uc694\uc778\uc758 \ub0b4\ubd80 \uc628\ub3c4 \ubd84\ud3ec\ub85c \uc778\ud574 \uc5ec\ub7ec \uc9c4\ub3d9 \ub610\ub294 \ud3b8\uc2ec \uc9c4\ub3d9\uc744 \uc0dd\uc131\ud558\uae30 \uc27d\uae30 \ub54c\ubb38\uc5d0 \ub808\uc774\uc800 \ubc1c\uc0b0 \uac01\uc774 \uc99d\uac00\ud558\uace0 1\u03bcm \uc815\ub3c4\uc5d0 \ucd08\uc810\uc744 \ub9de\ucd94\uae30\uac00 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ucd08\uc810\uba74\uc758 \uac15\ub3c4 \ubd84\ud3ec\ub85c \uc778\ud574 \uc5d0\ub108\uc9c0 \uc9d1\uc911\uc758 \uc881\uc740 \ub300\uc5ed\uc774\uc788\uc5b4 \uac00\uacf5\uc5d0 \uc0ac\uc6a9\ud560 \uc218\uc788\ub294 \uc5d0\ub108\uc9c0 \ubc00\ub3c4\uc758 \uc784\uacc4 \uac12\uc774 \uc788\uc73c\ubbc0\ub85c \uad6c\uba4d\uc758 \ube54 \uc2a4\ud3ff \uc9c1\uacbd\uc774 \uc791\uc740 \uac83\ubcf4\ub2e4 \uac00\uacf5 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub808\uc774\uc800 \ub4dc\ub9b4\ub9c1\uc758 \uad6c\uba4d \uc9c1\uacbd\uc740 \uae4a\uc774 \ub300 \uc9c1\uacbd \ube44\uc728\uc774 5 \uc774\uc0c1\uc778 \uc57d 10\u03bcm \uc815\ub3c4\ub85c \uc791\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub808\uc774\uc800 \uc5d0\uce6d\uc758 \uc815\ud655\ub3c4\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\ub294 \uc8fc\uc694 \uc694\uc778\uc740 \ucd9c\ub825 \uc804\ub825\uacfc \ud384\uc2a4 \ud3ed\uc758 \uc601\ud5a5, \ucd08\uc810 \uac70\ub9ac\uc640 \ubc1c\uc0b0 \uac01\ub3c4\uc758 \uc601\ud5a5, \ucd08\uc810 \uc704\uce58\uc758 \uc601\ud5a5\uc785\ub2c8\ub2e4;<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\uc2a4\ud3ff \ub0b4 \uc5d0\ub108\uc9c0 \ubd84\ud3ec\uc758 \ud6a8\uacfc, \ub2e4\uc911 \ub808\uc774\uc800 \uc870\uc0ac\uc758 \ud6a8\uacfc \ubc0f \uacf5\uc791\ubb3c \uc7ac\ub8cc\uc758 \ud6a8\uacfc.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6b14baeb elementor-widget elementor-widget-text-editor\" data-id=\"6b14baeb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<span style=\"color: #0e2143;\"><strong><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\">MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/a>,<\/strong><\/span> \ubb38\uc758 \uc0ac\ud56d\uc774 \uc788\uc73c\uc2dc\uba74 \uc5b8\uc81c\ub4e0\uc9c0 \uba54\uc2dc\uc9c0\ub97c \ub0a8\uaca8\uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2284baf8 elementor-widget elementor-widget-wpforms\" data-id=\"2284baf8\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/26933\" data-token=\"9bf8d5b3ff28279e401be12577ba0c06\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/26933\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2a22fd2e\" data-id=\"2a22fd2e\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-23b4ad8e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"23b4ad8e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6618ad elementor-widget elementor-widget-heading\" data-id=\"a6618ad\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e075a85 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"5e075a85\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2fe17bdd elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"2fe17bdd\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6194a62e elementor-widget elementor-widget-heading\" data-id=\"6194a62e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7595a58b elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"7595a58b\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29272 post type-post status-publish format-standard has-post-thumbnail hentry category-solutions category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/pvd%eb%9e%80\/\" >\n\t\t\t\t\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD) \uc720\ud615, \ud2b9\uc131 \ubc0f \uc751\uc6a9 \ubd84\uc57c \uc18c\uac1c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u79cd\u7c7b\u3001\u7279\u70b9\u53ca\u5e94\u7528\u4ecb<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/pvd%eb%9e%80\/\" aria-label=\"\ubb3c\ub9ac\uc801 \uae30\uc0c1 \uc99d\ucc29(PVD) \uc720\ud615, \ud2b9\uc131 \ubc0f \uc751\uc6a9 \ubd84\uc57c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27207 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%a9%a4%ec%8a%a4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \uc5f0\uad6c \ubc29\ud5a5\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7814\u7a76\u65b9\u5411\u5206\u7c7b ME<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%a9%a4%ec%8a%a4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \uc5f0\uad6c \ubc29\ud5a5\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26897 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2f9be90a elementor-widget elementor-widget-heading\" data-id=\"2f9be90a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%9d%b8%ec%82%ac%ec%9d%b4%ed%8a%b8\/\">\ub354 \ub9ce\uc740 \uad00\ub828 \uc815\ubcf4...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) 1 [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-26933","post","type-post","status-publish","format-standard","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -<\/title>\n<meta name=\"description\" content=\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_05\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\" \/>\n<meta property=\"og:description\" content=\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_05\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-08T08:15:20+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-10-20T07:51:57+00:00\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\uae00\uc4f4\uc774\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04\" \/>\n\t<meta name=\"twitter:data2\" content=\"2\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\",\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"},\"wordCount\":19,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"ko-KR\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\",\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"datePublished\":\"2022-06-08T08:15:20+00:00\",\"dateModified\":\"2022-10-20T07:51:57+00:00\",\"description\":\"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/ko\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_05\/","og_locale":"ko_KR","og_type":"article","og_title":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","og_description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","og_url":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/\uba64\uc2a4_\ud328\ube0c\ub9ac\ucf00\uc774\uc158_05\/","article_published_time":"2022-06-08T08:15:20+00:00","article_modified_time":"2022-10-20T07:51:57+00:00","author":"admin","twitter_card":"summary_large_image","twitter_misc":{"\uae00\uc4f4\uc774":"admin","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"2\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)","datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"},"wordCount":19,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"ko-KR"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/","name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"datePublished":"2022-06-08T08:15:20+00:00","dateModified":"2022-10-20T07:51:57+00:00","description":"\u5229\u7528\u7535\u5b50\u675f\u7684\u5316\u5b66\u6548\u5e94\u8fdb\u884c\u523b\u8680\u3002\u7528\u529f\u7387\u5bc6\u5ea6\u76f8\u5f53\u4f4e\u7684\u7535\u5b50\u675f\u7167\u5c04\u5de5\u4ef6\u8868\u9762,\u51e0\u4e4e\u4e0d\u4f1a\u5f15\u8d77\u8868\u9762\u6e29\u5347,\u5165\u5c04\u7684\u7535\u5b50\u4e0e\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5206\u5b50\u76f8\u78b0\u649e\u65f6,\u4f1a\u4f7f\u5176\u5206\u5b50\u94fe\u65ad\u5f00\u6216\u91cd\u65b0\u805a\u5408,\u4ece\u800c\u5f15\u8d77\u9ad8\u5206\u5b50\u6750\u6599\u7684\u5316\u5b66\u6027\u8d28\u548c\u5206\u5b50\u91cf\u53d1\u751f\u6539\u53d8,\u5229\u7528\u8fd9\u79cd\u6548\u5e94,\u53ef\u4ee5\u8fdb\u884c\u7535\u5b50\u675f\u66dd\u5149\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_fabrication_05\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94)"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/ko\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26933","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/comments?post=26933"}],"version-history":[{"count":16,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26933\/revisions"}],"predecessor-version":[{"id":28228,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/26933\/revisions\/28228"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/media?parent=26933"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/categories?post=26933"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/tags?post=26933"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}