{"id":26944,"date":"2022-06-08T16:20:38","date_gmt":"2022-06-08T08:20:38","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26944"},"modified":"2022-10-26T15:58:31","modified_gmt":"2022-10-26T07:58:31","slug":"mems_fabrication_06","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_06\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(VI)"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26944\" class=\"elementor elementor-26944\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-54128778 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"54128778\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-69c843a5\" data-id=\"69c843a5\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-6a18ec9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"6a18ec9\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1744f10\" data-id=\"1744f10\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6fc1209b elementor-widget elementor-widget-heading\" data-id=\"6fc1209b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-24ca13ca elementor-widget elementor-widget-text-editor\" data-id=\"24ca13ca\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.6 \ud76c\uc0dd \ub808\uc774\uc5b4 \uae30\uc220<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ud76c\uc0dd\uce35 \uae30\uc220\uc740 \ubd84\ub9ac\uce35 \uae30\uc220\uc774\ub77c\uace0\ub3c4 \ud569\ub2c8\ub2e4. \ud76c\uc0dd\uce35 \uae30\uc220\uc5d0\uc11c\ub294 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29\uc744 \ud1b5\ud574 \uc2e4\ub9ac\ucf58 \uae30\ud310 \uc704\uc5d0 \ub9c8\uc774\ud06c\ub85c \ubd80\ud488\uc744 \ud615\uc131\ud558\uace0, \ubd80\ud488 \uc8fc\ubcc0\uc758 \ube48 \uacf5\uac04\uc5d0 \ubd84\ub9ac\uce35\uc744 \ucd94\uac00\ud55c \ub2e4\uc74c, \uc6a9\ud574 \ub610\ub294 \uc5d0\uce6d\uc744 \ud1b5\ud574 \ubd84\ub9ac\uce35\uc744 \uc81c\uac70\ud558\uc5ec \ub9c8\uc774\ud06c\ub85c \ubd80\ud488\uc744 \uae30\ud310\uc5d0\uc11c \ubd84\ub9ac\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.7 \uc5d0\ud53c\ud0dd\uc2dc<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc740 \ubbf8\uc138 \uac00\uacf5\uc5d0\uc11c \uac00\uc7a5 \uc911\uc694\ud55c \ub3c4\uad6c \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \uc5d0\ud53c\ud0dd\uc15c \uce35\uc774 \uae30\ud310\uacfc \ub3d9\uc77c\ud55c \uacb0\uc815 \ubc29\ud5a5\uc744 \uc720\uc9c0\ud560 \uc218 \uc788\uae30 \ub54c\ubb38\uc5d0 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0 \ub2e4\uc591\ud55c \uac00\ub85c \ubc0f \uc138\ub85c \ub3c4\ud551 \ubd84\ud3ec\uc640 \uc5d0\uce6d \uacf5\uc815\uc744 \uc218\ud589\ud558\uc5ec \ub2e4\uc591\ud55c \uad6c\uc870\ub97c \uc0dd\uc131\ud560 \uc218 \uc788\ub2e4\ub294 \ud2b9\uc9d5\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.8 LIGA \ubc0f \uc900 LIGA \uae30\uc220<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) LIGA \uae30\uc220<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">LIGA \uae30\uc220\uc740 \ub3c5\uc77c \uce74\ub97c\uc2a4\ub8e8\uc5d0\uc758 \ud575\ubb3c\ub9ac \uc5f0\uad6c \uc13c\ud130\uc5d0\uc11c \ucc98\uc74c \uac1c\ubc1c\ub418\uc5c8\uc73c\uba70 \uc0c8\ub85c\uc6b4 3\ucc28\uc6d0 \ubbf8\uc138 \uc81c\uc870 \uae30\uc220\ub85c \uc778\uc815\ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uac00\uc7a5 \uc911\uc694\ud55c \ub2e8\uacc4\ub294 \uace0\uc815\ubc00 \ub9c8\uc2a4\ud06c \uc0dd\uc0b0\uc774\uba70, \uac00\uc7a5 \uc911\uc694\ud55c \ub2e8\uacc4\ub294 0.2~0.6nm \ud30c\uc7a5\uc758 \uc804\uc790\uae30 \uac00\uc18d\uae30\uc5d0\uc11c \uc0dd\uc131\ub418\uc5b4 \ub192\uc740 \uc5d0\ub108\uc9c0 \ubc00\ub3c4\uc640 \ud3c9\ud589\uc131\uc744 \uac00\uc9c4 \uad11\uc120\uc744 \uc0dd\uc131\ud558\ub294 \uc2f1\ud06c\ub85c\ud2b8\ub860 \ubc29\uc0ac\uc120\uc744 \uc774\uc6a9\ud55c \ub9ac\uc18c\uadf8\ub798\ud53c\uc785\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">X-\uc120\uc758 \uae4a\uc740 \ud22c\uacfc\ub825\uc73c\ub85c \uc778\ud574 X-\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c\ub294 \uc2f1\ud06c\ub85c\ud2b8\ub860 \ubc29\uc0ac\uc120\uc758 \uace0\uc5d0\ub108\uc9c0\ub85c\ub9cc \ub2ec\uc131\ud560 \uc218 \uc788\ub294 \ud06c\uae30 \ubc94\uc704\uc778 \ubbf8\ud06c\ub860 \ub610\ub294 \uc11c\ube0c\ubbf8\ud06c\ub860 \ubc94\uc704\uc758 \uc8fc\ubcc0 \uce58\uc218\ub97c \uac00\uc9c4 \ucd5c\ub300 1mm \ub192\uc774\uc758 \ub9c8\uc774\ud06c\ub85c\uba38\uc2e0\uc744 \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uce94\ud2f8\ub808\ubc84\uac00 \uc788\ub294 \uad6c\uc870\ubb3c\uc744 \ub9cc\ub4e4\uae30 \uc704\ud574 \ud76c\uc0dd\uce35 LIGA \uae30\uc220\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ud76c\uc0dd\uce35 LIGA \uae30\uc220\uc740 \ub9c8\uc774\ud06c\ub85c \ub4dc\ub77c\uc774\ubc84 \ubc0f \ub9c8\uc774\ud06c\ub85c \uc13c\uc11c \uc81c\uc791, \uce94\ud2f8\ub808\ubc84\uac00 \uc788\ub294 \ub9c8\uc774\ud06c\ub85c \uad6c\uc870\ubb3c \uc81c\uc791 \ubc0f \ub9c8\uc774\ud06c\ub85c \uc804\uc790 \ud68c\ub85c \uc5f0\uacb0\uc5d0 \uc911\uc694\ud55c \ubbf8\uc138 \uae30\uacc4 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">LIGA \uae30\uc220\uc758 \ud55c\uacc4\ub294 \uc2f1\ud06c\ub85c\ud2b8\ub860 X-\uc120 \uc18c\uc2a4\ub97c \uc0ac\uc6a9\ud574\uc57c \ud55c\ub2e4\ub294 \uc810, \uae34 \ucc98\ub9ac \uc2dc\uac04, \uacf5\uc815\uc758 \ubcf5\uc7a1\uc131, \ub192\uc740 \ube44\uc6a9, \uace1\uba74\uc774 \uc788\ub294 \ubbf8\uc138 \uad6c\uc870\ub97c \uc0dd\uc131\ud558\uae30 \uc5b4\ub835\ub2e4\ub294 \uc810\uc785\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) \uc900-LIGA \uae30\uc220<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">LIGA \uae30\uc220\uc740 \ucc98\ub9ac\ud560 \uc218 \uc788\ub294 \uc7ac\ub8cc\uc758 \ubc94\uc704\uac00 \ub113\uace0 \uc815\ud655\ub3c4\uac00 \ub192\ub2e4\ub294 \uc810\uc5d0\uc11c \uace0\uc720\ud55c \uc7a5\uc810\uc744 \uac00\uc9c0\uace0 \uc788\uc9c0\ub9cc, \uc704\uc5d0\uc11c \uc5b8\uae09\ud55c \uba87 \uac00\uc9c0 \ub2e8\uc810\ub3c4 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \uadf9\ubcf5\ud558\uae30 \uc704\ud574 LIG-<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uacf5\uc815 \uae30\uc220 \ubbf8\ube44, \uc2e4\ub9ac\ucf58 \uc900 LIGA \uae30\uc220, UV \ub525 \ub9ac\uc18c\uadf8\ub798\ud53c, UV \uc2a4\ud14c\ub808\uc624 \ub9ac\uc18c\uadf8\ub798\ud53c, \ub808\uc774\uc800 LIGA \uae30\uc220 \ub4f1\uacfc \uac19\uc740 \uc900 LIGA \uae30\uc220\uc5d0 \ub300\ud55c \uad6d\uc81c\uc801 \uc5f0\uad6c.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc2e4\ub9ac\ucf58 \uc900-LIGA \uae30\uc220. \uc2f1\ud06c\ub85c\ud2b8\ub860 X-\uc120 \ub525 \ub9ac\uc18c\uadf8\ub798\ud53c \ub300\uc2e0 \ub525 \uc5d0\uce6d \uacf5\uc815\uacfc \ud6c4\uc18d \ub9c8\uc774\ud06c\ub85c \uc77c\ub809\ud2b8\ub85c\ud3ec\ubc0d \ubc0f<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub9c8\uc774\ud06c\ub85c\uce74\ud53c \uacf5\uc815\uc5d0\ub294 \uace0\uac00\uc758 \uc2f1\ud06c\ub85c\ud2b8\ub860 \uad11\uc6d0\uacfc \ud2b9\uc218 LIGA \ub9c8\uc2a4\ud06c \ud50c\ub808\uc774\ud2b8\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \uace0\uc885\ud6a1\ube44 \ud50c\ub77c\uc2a4\ud2f1 \ub610\ub294 \uc2e4\ub9ac\ucf58 \uc5d0\uce6d, \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc5d0\uc11c \uc9c1\uc811 \ubbf8\uc138 \uc804\uae30 \uc8fc\uc870, \uae08\uc18d \uae08\ud615, \ub9c8\uc774\ud06c\ub85c\uce74\ud53c \uacf5\uc815\uc5d0 \uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8(ICD: induc-tively coupled plasma) \uc5d0\uce6d \uc7a5\ube44\ub97c \uc0ac\uc6a9\ud558\uba74 \ubbf8\uc138 \uae30\uacc4 \uc7a5\uce58\uc758 \ub300\ub7c9 \uc0dd\uc0b0\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. \uc774 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uba74 \ube44\uc2e4\ub9ac\ucf58 \uc7ac\ub8cc\uc5d0\uc11c \ub192\uc740 \uc885\ud6a1\ube44\ub97c \uac00\uc9c4 \ub9c8\uc774\ud06c\ub85c \uad6c\uc870\ubb3c\uc744 \uc81c\uc791\ud560 \uc218 \uc788\uc73c\uba70 \ub9c8\uc774\ud06c\ub85c \uc804\uc790 \uae30\uc220\uacfc\uc758 \ud638\ud658\uc131\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4. \uc774 \uc2dc\uc2a4\ud15c\uc740 SF6\ub97c \uc8fc \uc5d0\uce6d \uac00\uc2a4\ub85c \uc0ac\uc6a9\ud558\uba70 \ud6c4\ucc98\ub9ac \uacf5\uc815\uc774 \ud544\uc694\ud558\uc9c0 \uc54a\uc740 \uac83\uc774 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. \uc774 \uace0\uc885\ud6a1\ube44 \uc5d0\uce6d \uae30\uc220\uc740 \uc2e4\ub9ac\ucf58 \ub9c8\uc774\ud06c\ub85c\uba54\uce74\ub2c9\uc2a4 \uc801\uc6a9\uc5d0 \uc788\uc5b4 \uc911\uc694\ud55c \uc9c4\uc804\uc73c\ub85c, \uc774\uc804\uc5d0\ub294 LIGA \uae30\uc220\ub85c\ub9cc \uac00\ub2a5\ud588\ub358 \uace0\uc885\ud6a1\ube44 \uae08\ud615 \uad6c\uc870\uc758 \uc81c\uc870\ub97c \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub808\uc774\uc800 LIGA \uae30\uc220. 193nm\uc758 \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\ub294 X-\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c \ub300\uc2e0 PMMA \ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8\ub97c \uc9c1\uc811 \uc81c\uac70\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\ub294 \uc791\ub3d9 \uac00\uc2a4\ub97c \uc815\uae30\uc801\uc73c\ub85c \uad50\uccb4\ud574\uc57c \ud558\uae30 \ub54c\ubb38\uc5d0 \uac00\uc2a4 \uc18c\ube44\ub7c9\uc774 \ub9ce\uace0 \uc7a6\uc740 \uc720\uc9c0\ubcf4\uc218\uac00 \ud544\uc694\ud558\uba70 \uc0dd\uc0b0 \uacf5\uc815\uc5d0\ub3c4 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4. YAG \uace0\uccb4 \ub808\uc774\uc800\ub294 KTP \ubc0f BBO \uacb0\uc815\uc744 \ud1b5\ud574 4\uc911 \uc8fc\ud30c\uc218 \uc6d0\uc790\uc678\uc120 \ub808\uc774\uc800\ub97c \uc0dd\uc131\ud558\uc5ec \uc704\uc5d0\uc11c \uc5b8\uae09 \ud55c \uc5d1\uc2dc\uba38 \ub808\uc774\uc800\uc758 \ub2e8\uc810\uc744 \ud53c\ud560 \uc218 \uc788\uc73c\uba70, \uc774\ub294 \uc7a5\uae30 \uc791\ub3d9\uc774 \uac00\ub2a5\ud558\uace0\ubcf4\ub2e4 \uc548\uc815\uc801\uc774\uace0 \uc2e0\ub8b0\ud560 \uc218\uc788\ub294 \ub9ac\uc18c\uadf8\ub798\ud53c \ud488\uc9c8\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\"><b>1.9 \ud2b9\uc218 \ubbf8\uc138 \uac00\uacf5 \uae30\uc220<\/b><\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) \ub9c8\uc774\ud06c\ub85c EDM<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub9c8\uc774\ud06c\ub85c EDM\uc758 \uc6d0\ub9ac\ub294 \uc77c\ubc18 EDM\uc758 \uc6d0\ub9ac\uc640 \uadfc\ubcf8\uc801\uc73c\ub85c \ub2e4\ub974\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c EDM\uc758 \ud575\uc2ec\uc740 \ub9c8\uc774\ud06c\ub85c \ucd95 (\uacf5\uad6c \uc804\uadf9), \ub9c8\uc774\ud06c\ub85c \uc5d0\ub108\uc9c0 \ubc29\uc804 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \uacf5\uad6c \uc804\uadf9\uc758 \ub9c8\uc774\ud06c\ub85c \uc11c\ubcf4 \uacf5\uae09, \uac00\uacf5 \uc0c1\ud0dc \uac10\uc9c0, \uc2dc\uc2a4\ud15c \uc81c\uc5b4 \ubc0f \uac00\uacf5 \ud504\ub85c\uc138\uc2a4\uc758 \uc81c\uc870\uc785\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c \uc804\uadf9\uc740 \uc0dd\uc0b0\uc774 \ub9e4\uc6b0 \uc5b4\ub835\uac70\ub098 \ubd88\uac00\ub2a5\ud558\uae30 \ub54c\ubb38\uc5d0 \ub9c8\uc774\ud06c\ub85c 3D \ucee8\ud22c\uc5b4\ub9c1\uc5d0 \uc804\ud1b5\uc801\uc778 EDM \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uc740 \uc2e4\uc6a9\uc801\uc774\uc9c0 \uc54a\uc73c\ubbc0\ub85c \uc0ac\ub78c\ub4e4\uc740 CNC \ubc00\ub9c1\uc744 \ud1b5\ud574 \ub9c8\uc774\ud06c\ub85c 3D \ucee8\ud22c\uc5b4\ub9c1\uc758 EDM\uc5d0 \uac04\ub2e8\ud55c \ubaa8\uc591\uc758 \uc804\uadf9 \uc0ac\uc6a9\uc744 \ubaa8\uc0c9\ud558\uae30 \uc2dc\uc791\ud588\uc2b5\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c EDM \uae30\uc220\uc744 \uc801\uc6a9\ud558\uba74 \uc9c1\uacbd 2.5\u03bcm\uc758 \ub9c8\uc774\ud06c\ub85c \uc0e4\ud504\ud2b8\uc640 \uc9c1\uacbd 5\u03bcm\uc758 \ub9c8\uc774\ud06c\ub85c \ud640\uc744 \uac00\uacf5 \ud560 \uc218 \uc788\uc73c\uba70 \uae38\uc774 0.5mm, \ub108\ube44 0.2mm, \uae4a\uc774 0.2mm\uc758 \ub9c8\uc774\ud06c\ub85c \uc790\ub3d9\ucc28 \uae08\ud615\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc9c1\uacbd 0.3mm, \ubaa8\ub4c8 0.1mm\uc758 \ub9c8\uc774\ud06c\ub85c \uae30\uc5b4\ub3c4 \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(2) \ucd08\ubbf8\uc138 \uc804\ud574 \ucc98\ub9ac<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc804\ud574 \uac00\uacf5\uc740 \uae08\uc18d \uc591\uadf9\uc758 \uc804\uae30 \ud654\ud559\uc801 \uc6a9\ud574 \uc6d0\ub9ac\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc774\uc628 \uc6a9\ud574 \ud615\ud0dc\ub85c \uc7ac\ub8cc\ub97c \uc81c\uac70\ud558\ub294 \uc81c\uc870 \uae30\uc220\ub85c, \uc804\ud574 \uac00\uacf5\uc744 \ud1b5\ud574 \ubbf8\uc138 \uac00\uacf5\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \ud070 \uac00\uacf5 \uac04\uaca9\uc740 \uc804\ud574 \uac00\uacf5\uc758 \uc815\ud655\ub3c4\ub97c \uc81c\ud55c\ud558\ub294 \uc8fc\uc694 \uc694\uc778 \uc911 \ud558\ub098\ub85c, \uac00\uacf5 \uac04\uaca9\uc744 \ud06c\uac8c \uc904\uc77c \uc218 \uc788\ub2e4\uba74 \uac00\uacf5 \uc815\ud655\ub3c4\uac00 \ud06c\uac8c \ud5a5\uc0c1\ub418\uace0 \uc804\uae30\ubd84\ud574\ub97c \uc774\uc6a9\ud55c \ubbf8\uc138 \uac00\uacf5\uc758 \uac00\ub2a5\uc131\uc774 \ub192\uc544\uc9c8 \uac83\uc785\ub2c8\ub2e4. \uac00\uacf5 \uc804\uc555\uacfc \uc804\ud574\uc9c8 \ub18d\ub3c4\ub97c \uc904\uc784\uc73c\ub85c\uc368 \uac00\uacf5 \uac2d\uc744 10\u03bcm \ubbf8\ub9cc\uc73c\ub85c \uc131\uacf5\uc801\uc73c\ub85c \uc81c\uc5b4\ud588\uc2b5\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c \ud53c\ub4dc\uc640 \uae08\uc18d \ub9c8\uc774\ud06c\ub85c \ud29c\ube0c \uc804\uadf9\uc744 \uc0ac\uc6a9\ud558\uc5ec 0.2mm \ub2c8\ucf08\uc744 \uc0dd\uc0b0\ud588\uc2b5\ub2c8\ub2e4.<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit;\">\ud50c\ub808\uc774\ud2b8\uc5d0 0.17mm\uc758 \uc791\uc740 \uad6c\uba4d\uc744 \uac00\uacf5\ud588\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc804\ud574 \uac00\uacf5\uc740 \ubbf8\uc138 \uc0e4\ud504\ud2b8 \ubd80\ud488\uc758 \ub9c8\uac10\uc5d0\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ub9c8\uc774\ud06c\ub85c \uc640\uc774\uc5b4 \uc804\uadf9\uc758 EDM \uc5f0\uc0ad\uacfc \uc720\uc0ac\ud55c \ubc29\uc2dd\uc73c\ub85c, \uc6c0\uc9c1\uc774\ub294 \uae08\uc18d \uc640\uc774\uc5b4\ub97c \uc74c\uadf9\uc73c\ub85c \uc0ac\uc6a9\ud558\uace0 \uc591\uadf9 \uc0e4\ud504\ud2b8\uc640 \uc74c\uadf9 \uc640\uc774\uc5b4 \uc0ac\uc774\uc5d0 \uc804\ud574\uc9c8\uc744 \ubd84\uc0ac\ud558\uc5ec \uc0e4\ud504\ud2b8 \ud45c\uba74\uc5d0 \uc804\uae30 \ud654\ud559\uc801 \ubbf8\uc138 \ubd80\uc2dd\uc744 \uc77c\uc73c\ud0b5\ub2c8\ub2e4. \uc774 \ubc29\ubc95\uc740 \uc9c1\uacbd \uc218\uc2ed \ubbf8\ud06c\ub860\uc758 \uc791\uc740 \uc0e4\ud504\ud2b8\ub97c \uc5f0\ub9c8\ud560 \ub54c \uc88b\uc740 \uacf5\uc815 \uacb0\uacfc\ub97c \uc5bb\uc5c8\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc804\ud574 \ubbf8\uc138 \uac00\uacf5\uacfc \uad00\ub828\ub41c \ud06c\uae30 \ubc94\uc704\ub294 \uc2e4\ub9ac\ucf58 \ubbf8\uc138 \uac00\uacf5 \ubc0f LIGA \uae30\uc220\ub85c \ub2ec\uc131\ud560 \uc218 \uc788\ub294 \uc791\uc740 \ud06c\uae30\ubcf4\ub2e4 \ud6e8\uc52c \ub354 \ud07d\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(3) \ucd08\ubbf8\uc138 \ucd08\uc74c\ud30c \ucc98\ub9ac<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uacb0\uc815\uc9c8 \uc2e4\ub9ac\ucf58, \uad11\ud559 \uc720\ub9ac \ubc0f \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9\uacfc \uac19\uc740 \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\uac00 \ubbf8\uc138 \uae30\uacc4\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub428\uc5d0 \ub530\ub77c \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\uc758 \uace0\uc815\ubc00 3\ucc28\uc6d0 \ubbf8\uc138 \uac00\uacf5\uc774 \uc911\uc694\ud55c \uc5f0\uad6c \uc8fc\uc81c\uac00 \ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ud604\uc7ac \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\ub97c \uac00\uacf5\ud558\ub294 \ub370 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub294 \uc8fc\uc694 \ubc29\ubc95\uc740 \ub9ac\uc18c\uadf8\ub798\ud53c, EDM, \uc804\ud574 \uac00\uacf5, \ub808\uc774\uc800 \uac00\uacf5 \ubc0f \ucd08\uc74c\ud30c \uac00\uacf5\uc785\ub2c8\ub2e4. EDM, \uc804\ud574 \uac00\uacf5, \ub808\uc774\uc800 \uac00\uacf5, \ucd08\uc74c\ud30c \uac00\uacf5\uacfc \ube44\uad50\ud558\uc5ec \uc7ac\ub8cc\uc758 \uc804\uae30 \uc804\ub3c4\ub3c4\uc5d0 \uc758\uc874\ud558\uc9c0 \uc54a\uc73c\uba70 \uc5f4 \ubb3c\ub9ac \ud6a8\uacfc\uac00 \uc5c6\uc73c\uba70 \ub9ac\uc18c\uadf8\ub798\ud53c\uc640 \ube44\uad50\ud558\uc5ec 3 \ucc28\uc6d0 \uad6c\uc870\uc758 \ub192\uc740 \uae4a\uc774 \ub300 \ud3ed \ube44\uc728\uc744 \ucc98\ub9ac \ud560 \uc218\uc788\uc5b4 \uc138\ub77c\ubbf9, \ubc18\ub3c4\uccb4 \uc2e4\ub9ac\ucf58 \ubc0f \uae30\ud0c0 \ube44\uae08\uc18d \uacbd\uc9c8 \ubc0f \ucde8\uc131 \uc7ac\ub8cc \uac00\uacf5\uc5d0\uc11c \ucd08\uc74c\ud30c \uac00\uacf5\uc744 \uacb0\uc815\ud558\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ubaa8\uba58\ud140.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ub9c8\uc774\ud06c\ub85c \ucd08\uc74c\ud30c\ub294 \uacf5\uc815\uc758 \ud06c\uae30\uac00 \uc791\ub2e4\ub294 \uc810\uc744 \uc81c\uc678\ud558\uba74 \uae30\uc874 \ucd08\uc74c\ud30c\uc758 \uc6d0\ub9ac\uc640 \ud2b9\uc131\uc774 \ub3d9\uc77c\ud569\ub2c8\ub2e4. \uae30\uc874 \ucd08\uc74c\ud30c\uc5d0 \ud544\uc694\ud55c \uc9c4\ud3ed\uc740 \uc77c\ubc18\uc801\uc73c\ub85c 0.01~0.1mm\uc774\ubbc0\ub85c \uc555\uc804 \ub610\ub294 \uc790\uae30 \ubcc0\ud615\uc758 \ubcc0\ud615\uc774 \ub9e4\uc6b0 \uc791\uae30 \ub54c\ubb38\uc5d0(0.005~0.01mm) \uc9c4\ud3ed\uc744 \ub450\uaebc\uc6b4 \uc0c1\ubd80 \uc9c4\ud3ed\ubd09\uacfc \uc587\uc740 \ud558\ubd80 \uc9c4\ud3ed\ubd09\uc73c\ub85c \ud655\uc7a5\ud574\uc57c \ud569\ub2c8\ub2e4. \ubbf8\uc138 \ucd08\uc74c\ud30c\uc758 \uacbd\uc6b0 \uc555\uc804 \ub610\ub294 \uc790\uae30 \ubcc0\ud615 \uc9c4\ud3ed\uc740 \uc774\ubbf8 \ubbf8\uc138 \uac00\uacf5\uc5d0 \ucda9\ubd84\ud558\ubbc0\ub85c \uc9c4\ud3ed \ub9c9\ub300\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ucd08\uc74c\ud30c \ubbf8\uc138 \uac00\uacf5 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uacf5\uc791\ubb3c \uc9c4\ub3d9\uc744 \ud1b5\ud574 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \uc138\ub77c\ubbf9 \uc18c\uc7ac\uc5d0 \ucd5c\uc18c \uc9c1\uacbd 5\u03bcm\uc758 \ub9c8\uc774\ud06c\ub85c \ud640\uc744 \uac00\uacf5\ud588\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(4) \ub808\uc774\uc800\ub97c \uc774\uc6a9\ud55c \ubbf8\uc138 \uac00\uacf5<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uae30\uc874\uc758 \ud2b9\uc218 \uacf5\uc815\uacfc \ub2ec\ub9ac \ub808\uc774\uc800 \uc131\ud615\uc740 \uc7ac\ub8cc\ub97c \uc81c\uac70\ud558\ub294 \uac83\uc774 \uc544\ub2c8\ub77c \uc7ac\ub8cc\ub97c \ucd94\uac00\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \ub808\uc774\uc800 \uc131\ud615\uc740 \uac00\uacf5\ub418\ub294 \uc7ac\ub8cc\uc640 \uba54\ucee4\ub2c8\uc998\uc5d0 \ub530\ub77c \uad11\uacbd\ud654 \uc131\ud615, \uc120\ud0dd\uc801 \ub808\uc774\uc800 \uc18c\uacb0 \uc131\ud615 \ubc0f \uc801\uce35 \uace0\uccb4 \uc131\ud615\uacfc \uac19\uc740 \ub2e4\uc591\ud55c \uc720\ud615\uc73c\ub85c \ub098\ub20c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uad11 \uacbd\ud654 \uc131\ud615\uc740 \uc561\uccb4 \uac10\uad11\uc131 \uc218\uc9c0\ub97c \uae30\ubc18\uc73c\ub85c \ud569\ub2c8\ub2e4. \uc561\uccb4 \uc218\uc9c0\uc758 \ud45c\uba74\uc5d0 \uc9d1\uc911\ub41c \uc6d0\uac70\ub9ac \uc790\uc678\uc120 \uad11\uc6d0\uc744 \uc870\uc0ac\ud558\uc5ec \ub178\ucd9c\ub41c \ubd80\ubd84\uc744 \uacbd\ud654\uc2dc\ud0b5\ub2c8\ub2e4. \uad11 \uacbd\ud654\ub97c \ud1b5\ud574 10\u03bcm ~ 1mm \ubc94\uc704\uc758 \ubbf8\uc138 \uad6c\uc870\ub97c \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc30\uce58 \uc0dd\uc0b0 \ubb38\uc81c\ub97c \ud574\uacb0\ud558\uae30 \uc704\ud574 \uc815\ubc00 \uad11\uc12c\uc720 \uc5b4\ub808\uc774\ub97c \uc0ac\uc6a9\ud558\uc5ec \ud55c \ubc88\uc5d0 \ub9ce\uc740 \uc218\uc758 \ubbf8\uc138 \uad6c\uc870\ub97c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(i) \uae4a\uc774 \uc815\ud655\ub3c4\ub294 \ub193\uc778 \uce35\uc758 \ub450\uaed8\uc5d0 \uc758\ud574 \uc81c\ud55c\ub418\uba70, (ii) \uce58\uc218 \ud6a8\uacfc(\uc561\uccb4 \uac10\uad11\uc131 \uc218\uc9c0\uc758 \uc810\ub3c4, \ud45c\uba74 \uc7a5\ub825)\uc758 \uc601\ud5a5, (iii) \ubbf8\uc138 \uad6c\uc870 \ubcc0\ud615 \ub4f1\uc758 \uc601\ud5a5\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc5d0 \ub300\ud55c<\/span><span style=\"color: #051c2c; font-family: \u5fae\u8f6f\u96c5\u9ed1; font-style: inherit; font-weight: inherit;\">\uc774\ub7ec\ud55c \ud6a8\uacfc\ub97c \uc5c6\uc560\uae30 \uc704\ud574 \uc0c8\ub85c\uc6b4 \ub808\uc774\uc800 \uc131\ud615 \ubc29\ubc95\uc774 \ub4f1\uc7a5\ud588\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ucd08\uc810\uc774 \ub9de\ucdb0\uc9c4 \ub808\uc774\uc800 \ube54\uc774 \ub808\uc9c4 \ubc30\uc2a4\uc5d0\uc11c 3\ucc28\uc6d0\uc73c\ub85c \uc2a4\uce94\ub418\uace0 \ucd08\uc810\uc5d0\uc11c \ub178\ucd9c \uc784\uacc4\uac12\uc744 \ucd08\uacfc\ud560 \ub54c\ub9cc \ub808\uc9c4\uc774 \uacbd\ud654\ub418\uc5b4 \uc790\uc720\ub86d\uac8c \uc6c0\uc9c1\uc77c \uc218 \uc788\ub294 \ubbf8\uc138 \uad6c\uc870\ub97c \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uae30\uc220\uc758 \uc7a5\uc810\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(1) \ub808\uc774\uc800 \ucd08\uc810 \ud3ec\uc778\ud2b8\uc758 \ud06c\uae30\uc5d0 \ub530\ub77c \uae4a\uc774\uc640 \uc8fc\ubcc0 \uc815\ud655\ub3c4\uac00 \uacb0\uc815\ub418\uba70 3\ucc28\uc6d0\uc5d0\uc11c \uc815\ud655\ub3c4\uac00 1\u03bcm\ubcf4\ub2e4 \ub192\uc2b5\ub2c8\ub2e4. (2) \uc9c0\uc9c0 \ubd80\ud488\uc774\ub098 \ub9c8\uc2a4\ud06c\uac00 \ud544\uc694\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. (3) \uc561\uccb4 \uac10\uad11\uc131 \uc218\uc9c0 \ud0f1\ud06c\uc5d0 \uc6c0\uc9c1\uc774\ub294 \ubd80\ud488\uc774 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uc218\uc9c0 \uc810\ub3c4\uc640 \ud45c\uba74 \uc7a5\ub825\uc758 \uc601\ud5a5\uc774 \uc81c\uac70\ub429\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">(5) \uc815\ubc00 \uc804\uae30 \uc131\ud615<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\ud640\uc758 \uc804\uae30 \uc131\ud615\uc740 \ud640\uc758 \ucf54\uc5b4\ub97c \uc0dd\uc131\ud55c \ub2e4\uc74c \uadf8 \uc8fc\uc704\uc5d0 \uc804\uae30 \uc131\ud615\ub41c \uae08\uc18d\uc744 \uc131\uc7a5\uc2dc\ud0a4\uace0 \ub9c8\uc9c0\ub9c9\uc73c\ub85c \ucf54\uc5b4\ub97c \uc778\ucd9c\ud558\uac70\ub098 \uc6a9\ud574\uc2dc\ud0a8\ub2e4\ub294 \uc810\uc5d0\uc11c \uc808\uc0ad \ubc29\ubc95\uacfc \ub2e4\ub985\ub2c8\ub2e4. \uadf9\ub3c4\ub85c \ubbf8\uc138\ud55c \ud640, \ub0b4\ubd80 \ud45c\uba74 \uac70\uce60\uae30 \uc694\uad6c \uc0ac\ud56d\uc774 \ub192\uc740 \uacf5\uc791\ubb3c \ub610\ub294 \ud2b9\uc218\ud55c \ub2e8\uba74 \ud615\uc0c1\uc744 \uac00\uc9c4 \uacf5\uc791\ubb3c\uacfc \uac19\uc774 \uae30\uc874\uc758 \uc81c\uac70 \uac00\uacf5\uc73c\ub85c\ub294 \ub2ec\uc131\ud560 \uc218 \uc5c6\ub294 \uacbd\uc6b0 \uc77c\ub809\ud2b8\ub85c\ud3ec\ubc0d\uc744 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uc54c\ub8e8\ubbf8\ub284 \ud569\uae08\uc740 \uc8fc\ub85c \uc218\uc0b0\ud654\ub098\ud2b8\ub968 \uc6a9\uc561\uc5d0 \ub179\ub294 \ucf54\uc5b4\uc5d0 \uc0ac\uc6a9\ub418\uba70, \ub2c8\ucf08\uc740 \uc190\uc0c1\ub418\uc9c0 \uc54a\uace0 \uc548\uc2ec\ud558\uace0 \uc791\uc5c5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc808\ub2e8\ud558\uae30 \uc5b4\ub824\uc6b4 \ud2b9\ud788 \ubbf8\uc138\ud55c \uc54c\ub8e8\ubbf8\ub284 \ucf54\uc5b4\ub97c \uc81c\uc870\ud560 \ub54c\ub294 \ud669\ub3d9\uc744 \ub300\uc2e0 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc9c0\ub9cc, \ub2c8\ucf08 \ud45c\uba74\uc744 \ubd80\uc2dd\uc2dc\ud0a4\uc9c0 \uc54a\uc73c\uba74\uc11c \ud669\ub3d9\uc744 \ube60\ub974\uac8c \ub179\uc774\ub294 \uc801\uc808\ud55c \uc561\uccb4\ub97c \uc0ac\uc6a9\ud558\ub294 \uacbd\uc6b0\uc5d0\ub9cc \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1; color: #051c2c;\">\uad6c\uba4d\uc758 \ubaa8\uc591\uc774 \uc5b4\ub5bb\ub4e0 \uce58\uc218 \uc815\ud655\ub3c4\uc640 \ud45c\uba74 \uac70\uce60\uae30\ub294 \ucf54\uc5b4\uc758 \ud488\uc9c8\uc5d0 \ub530\ub77c \uacb0\uc815\ub418\ubbc0\ub85c \uad6c\uba4d\uc774 \uc544\ubb34\ub9ac \ubbf8\uc138\ud558\ub354\ub77c\ub3c4 \ud2b9\uc815 \uac00\uacf5 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucf54\uc5b4\ub97c \ub9cc\ub4e4 \uc218\uc788\ub294 \ud55c \uc804\uae30 \uc131\ud615 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uad6c\uba4d\uc744 \uac00\uacf5 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-16b3f2b3 elementor-widget elementor-widget-text-editor\" data-id=\"16b3f2b3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<span style=\"color: #0e2143;\"><b><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\">MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/a>,<\/b><\/span> \ubb38\uc758 \uc0ac\ud56d\uc774 \uc788\uc73c\uc2dc\uba74 \uc5b8\uc81c\ub4e0\uc9c0 \uba54\uc2dc\uc9c0\ub97c \ub0a8\uaca8\uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-19d957c8 elementor-widget elementor-widget-wpforms\" data-id=\"19d957c8\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/26944\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/26944\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-39af961f\" data-id=\"39af961f\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-43cfd957 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"43cfd957\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1395824 elementor-widget elementor-widget-heading\" data-id=\"1395824\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1f211001 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"1f211001\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-37d4f3f5 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"37d4f3f5\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-34e5441a elementor-widget elementor-widget-heading\" data-id=\"34e5441a\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4cc8d502 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"4cc8d502\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26897 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29095 post type-post status-publish format-standard has-post-thumbnail hentry category-solutions category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%af%b8%ec%84%b8-%ec%9c%a0%ec%b2%b4-%ec%b9%a9%ec%9d%b4%eb%9e%80\/\" >\n\t\t\t\t\ubbf8\uc138 \uc720\uccb4 \uce69 \uc18c\uac1c \u4e28 \uc77c\ubc18\uc801\uc778 \uc7ac\ub8cc \ubc0f \uc900\ube44 \ubc0f \uac00\uacf5 \ubc29\ubc95\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\ubbf8\uc138 \uc720\uccb4 \uce69 \uc18c\uac1c \u4e28 \uc77c\ubc18\uc801\uc778 \uc7ac\ub8cc \ubc0f \uc900\ube44 \ubc0f \uac00\uacf5 \ubc29\ubc95 <\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%af%b8%ec%84%b8-%ec%9c%a0%ec%b2%b4-%ec%b9%a9%ec%9d%b4%eb%9e%80\/\" aria-label=\"\ubbf8\uc138 \uc720\uccb4 \uce69 \uc18c\uac1c \u4e28 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \uc7ac\ub8cc \ubc0f \uc900\ube44 \ubc0f \ucc98\ub9ac \ubc29\ubc95\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27207 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%a9%a4%ec%8a%a4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \uc5f0\uad6c \ubc29\ud5a5\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7814\u7a76\u65b9\u5411\u5206\u7c7b ME<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%a9%a4%ec%8a%a4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \uc5f0\uad6c \ubc29\ud5a5\" tabindex=\"-1\" 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