{"id":27064,"date":"2022-06-14T15:26:05","date_gmt":"2022-06-14T07:26:05","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27064"},"modified":"2022-10-26T15:44:49","modified_gmt":"2022-10-26T07:44:49","slug":"mems_capability","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_capability\/","title":{"rendered":"MEMS \ud30c\uc6b4\ub4dc\ub9ac \uc5ed\ub7c9 | \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c \ub3c4\uae08 \uc5d0\uce6d \ucf54\ud305"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27064\" class=\"elementor elementor-27064\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-23f3d625 elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"23f3d625\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-577da76a\" data-id=\"577da76a\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-7b198e0a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7b198e0a\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-42bed617\" data-id=\"42bed617\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3a045cd6 elementor-widget elementor-widget-heading\" data-id=\"3a045cd6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870\/MEMS \ud30c\uc6b4\ub4dc\ub9ac \ud50c\ub7ab\ud3fc \uae30\uc220 \uc5ed\ub7c9<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3569726a elementor-widget elementor-widget-text-editor\" data-id=\"3569726a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2e4\ud5d8\uc2e4 \ud50c\ub7ab\ud3fc\uc5d0\ub294 \ucd1d 200\uc5ec \ub300\uc758 \uc7a5\ube44 \ub4f1\uc774 \uc788\uc73c\uba70, \uc774 \uc911 \uc8fc\uc694 \uc7a5\ube44(40\uc5ec \ub300)\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uadf8\ub798\ud53d \uc7a5\uce58<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \ub178\ucd9c, \ub808\uc774\uc800 \uc9c1\uc811 \uc4f0\uae30, \ud0c1\uc0c1\uc6a9 \uc811\ucd09\uc2dd \ub9ac\uc18c\uadf8\ub798\ud53c, \ub370\uc2a4\ud06c\ud0d1 \ub9ac\uc18c\uadf8\ub798\ud53c \ub4f1\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ud544\ub984 \uc99d\ucc29 \uc7a5\ube44<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICP-PECVD, LPCVD, \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1, \uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305, PE-ALD, DLC \ubc15\ub9c9 \uc99d\ucc29 \ub4f1, \uc804\uae30\ub3c4\uae08(Au, Ag, Cu, Ni, Sn \ub4f1)<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc5d0\uce6d \uc7a5\ube44<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ubc8c\ud06c \uc2e4\ub9ac\ucf58, \uc720\uc804\ub9c9, \uae08\uc18d \uc0b0\ud654\ubb3c, \uae08\uc18d \ub4f1\uc758 \uc694\uad6c\ub97c \ucda9\uc871\ud558\ub294 ICP-RIE, RIE, IBE, DRIE \ub525 \uc2e4\ub9ac\ucf58 \uc5d0\uce6d, XeF2 \ud45c\ud53c \uc2e4\ub9ac\ucf58 \uc5d0\uce6d \uae30\uacc4, HF \uae30\uc0c1 \uc5d0\uce6d \ubc0f \uae30\ud0c0 \uac74\uc2dd \uc5d0\uce6d \uc7a5\ube44, \uc2b5\uc2dd \uc5d0\uce6d \uc7a5\ube44\uc640 \uadf8\uc5d0 \ub9de\ub294 \uc774\uc0b0\ud654\ud0c4\uc18c \ucd08\uc784\uacc4 \ubc29\ucd9c \uc7a5\ube44\ub97c \uac16\ucd94\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ud2b9\uc131\ud654 \ubc0f \ud14c\uc2a4\ud2b8 \uc7a5\ube44<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM, \uc2a4\ud15d \ubbf8\ud130, \ub77c\ub9cc \ubd84\uad11\uae30, SEM, FIB, \uacf5\ucd08\uc810 \ud604\ubbf8\uacbd, \ubc31\uc0c9\uad11 \uac04\uc12d\uacc4, \uc801\uc678\uc120 \uc5f4\ud654\uc0c1 \uce74\uba54\ub77c, FEMTO-TOOLS \ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uc5ed\ud559 \ud14c\uc2a4\ud130, \ucd08\uace0\uc18d \uce74\uba54\ub77c, 3D \ub3c4\ud50c\ub7ec \ub808\uc774\uc800 \uc9c4\ub3d9\uacc4, DC\/RF \ud504\ub85c\ube0c \uc2a4\ud14c\uc774\uc158(60GHZ), \ub124\ud2b8\uc6cc\ud06c \ubd84\uc11d\uae30(60GHz), \ubc18\ub3c4\uccb4 \ubd84\uc11d\uae30, \uc784\ud53c\ub358\uc2a4 \ubd84\uc11d\uae30, \uc784\ud53c\ub358\uc2a4 \ubd84\uc11d\uae30 \ubd84\uc11d\uae30, \uc784\ud53c\ub358\uc2a4 \ubd84\uc11d\uae30 \ubc0f \uace0\uc815\ubc00 \uc804\uae30 1\ucc28 \ubbf8\ud130 \ub4f1<\/span><\/p>\n<h3 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ub514\ubc14\uc774\uc2a4 \ubc31\uc5d4\ub4dc \ud328\ud0a4\uc9d5 \uc7a5\ube44<\/span><\/h3>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6e8\uc774\ud37c \ubc15\ub9c9\ud654, CMP \uc5f0\ub9c8, \uc6e8\uc774\ud37c \ubcf8\ub529, \ubc30\uce58\uae30, \uc2a4\ud06c\ub77c\uc774\ube59\uae30, \uc640\uc774\uc5b4 \ubcf8\ub529\uae30, \uc194\ub9ac\ub4dc \ud06c\ub9ac\uc2a4\ud0c8 \uae30\uacc4, \ub808\uc774\uc800 \uc6a9\uc811\uae30 \ubc0f \uae30\ud0c0 \ud300 \uc790\uccb4 \uac1c\ubc1c \uac00\uacf5 \uc7a5\ube44, \ubc00\ubd09 \ubc0f \ud14c\uc2a4\ud2b8 \uc7a5\ube44.<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\"> <img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-full wp-image-27066\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\" alt=\"\" width=\"1000\" height=\"571\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png 1000w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-300x171.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b-768x439.png 768w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/span><\/p>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\">\n<section style=\"text-align: center;\">\n<section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\">\n<section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section>\n<\/section>\n<\/section>\n<\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\">\n<section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\">\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><strong><span style=\"font-family: \u5b8b\u4f53, SimSun;\">\ud50c\ub7ab\ud3fc \uae30\uc220 \uc5ed\ub7c9<\/span><\/strong><\/section>\n<section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><\/section>\n<\/section>\n<\/section>\n<h4>&nbsp;<\/h4>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ud504\ub85c\uc138\uc2a4 \ud1b5\ud569 \ubc0f \ud50c\ub7ab\ud3fc \uae30\ub2a5<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc804\ub3c4\uc131 DLC \ud544\ub984 \ub808\uc774\uc5b4(\uc288\ud37c \uc2ac\ub9bd \ubc14\uc774\uc2a4, \uc804\ub3c4\uc131 \uc288\ud37c \ud558\ub4dc \ud544\ub984 \ub808\uc774\uc5b4 \ub4f1)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-AIN\/PZT \ubc15\ub9c9 \uacf5\uc815(\uc555\uc804 \uc561\ucd94\uc5d0\uc774\ud130 \uc18c\uc7ac)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ub300\ud615 \uace0\ubc30\ud5a5 \ud0c4\uc18c \uc18c\uc7ac \uc131\uc7a5 \ubc0f \uc18c\uc790 \uac00\uacf5 \uacf5\uc815<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ubcf8\ub529: \uc591\uadf9 \ubcf8\ub529, \uc720\ub9ac \uc194\ub354 \ubcf8\ub529, \uc720\ud14d \ubcf8\ub529(AIGe), \ud655\uc0b0 \ubcf8\ub529 \uacf5\uc815<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ub300\uae30 \ub610\ub294 \uc9c4\uacf5 \ucea1\uc290\ud654, \uc7ac\ubc00\ubd09<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc5f0\uc0ad \uc231\uc774 \uac10\uc18c \ubc0f \uc6d0\uc790 \uc218\uc900 \uc5f0\ub9c8 \uacf5\uc815<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc2e4\ub9ac\ucf58 \uae30\ubc18 \uc644\uc804 \uc2b5\uc2dd \ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815 -\uc720\uc5f0\ud55c \uae30\ud310 \ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uc18c\uc790 \ucc98\ub9ac<\/span><\/p>\n<h4 style=\"font-size: 16px; line-height: 1.6em;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc81c\uc870 \ubc0f \ud328\ud0a4\uc9d5 \uc5ed\ub7c9<\/span><\/h4>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc2e4\ub9ac\ucf58 \uad00\ud1b5 \ud640(TSV) \uc720\ub9ac \uad00\ud1b5 \ud640(TGV)<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\uc555\ub825\/\uac00\uc2a4\/\uc801\uc678\uc120\/\uc2b5\ub3c4 \uc13c\uc11c<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ubbf8\uc138 \uc720\uccb4 \uce69 \ucc98\ub9ac \ubc0f \uad00\ub828 \ud14c\uc2a4\ud2b8<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud558\ub098\uc758 \uc288\ud37c \uc2ac\ub9bd RF\/\uad00\uc131 \ub514\ubc14\uc774\uc2a4 \ucc98\ub9ac \uae30\ub2a5<\/span><\/p>\n<p><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">-\ub2e4\uc774\uc758 \uc644\uc804\ud55c \ucea1\uc290\ud654 \uae30\ub2a5<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-932789b elementor-hidden-mobile elementor-widget elementor-widget-text-editor\" data-id=\"932789b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 699.516px; height: 3203px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uce74\ud14c\uace0\ub9ac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc7a5\ube44 \uc774\ub984<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc7a5\ube44 \ubaa8\ub378<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud504\ub85c\uc138\uc2a4 \ub9e4\uac1c\ubcc0\uc218<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub3c4\uae08<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SIN, TEOS, \ud3f4\ub9ac \ub4f1\uc744 \uc785\uae08\ud569\ub2c8\ub2e4.<br \/>\uba64\ube0c\ub808\uc778 1-50\uac1c\/\uc624\ube10<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5f4 \uc0b0\ud654<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6a9\uad11\ub85c \ud29c\ube0c\uc758 \uc5f4 \uc0b0\ud654<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5b4\ub2d0\ub9c1(\uc57c\uae08)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uace0\uc18d \uc5b4\ub2d0\ub9c1\ub85c RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc564\uc54c\uc2dc\uc2a4 AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucd5c\ub300 \uc628\ub3c4 \ucd5c\ub300 1500\u00b0C, \uc0c1\uc2b9 \uc18d\ub3c4<br \/>\ucd5c\ub300 200\u00b0C\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FIB \ucc98\ub9ac<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc9d1\uc18d \uc774\uc628 \ube54 FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc368\ubaa8 \ud53c\uc154 \uc2dc\uc624\uc2a4 2 \ud558\uc774\ubc31<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">TEM \uc0d8\ud50c \uc900\ube44<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM \ud615\ud0dc \uad00\ucc30<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uacc4 \ubc29\ucd9c \ud658\uacbd \uc8fc\uc0ac \uc804\uc790 \ud604\ubbf8\uacbd ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc368\ubaa8 \ud53c\uc154 \ucf70\ud2b8\ub85c S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM \uc2a4\ud399\ud2b8\ub7fc \ubd84\uc11d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305 - \uae08\uc18d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ubc1c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uae08\uc18d \ud544\ub984 \uc99d\ucc29, \ub9ac\ud504\ud2b8\uc624\ud504 \uacf5\uc815 \ucf54\ud305, 8\uc778\uce58 \uae30\ud310 \uc5ed\ud638\ud658\uc131<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305 - \uc911\uac04<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ubc1c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc720\uc804\uccb4 \ud544\ub984\uc758 \uc99d\ucc29\uc740 \ud558\ub098\uc758 \uc6a9\uad11\ub85c\uc5d0\uc11c 10\uac1c\uc758 4\uc778\uce58 \uae30\ud310\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ucf54\ud305 - \uae08\uc18d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FSE-BSLS-RD-6\uc778\uce58<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2a4\ud37c\ud130\ub9c1 \uae08\uc18d \ud544\ub984, 6\" \uae30\ud310<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6d0\uc790\uce35 \uc99d\ucc29<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \uc6d0\uc790\uce35 \uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud604\uc7ac Al2O3\uac00 \uc9c0\ubc30\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">DLC \ucf54\ud305<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uac19\uc740 \ubc15\ub9c9 \ud654\ud559 \uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac74\uc2dd \uc5d0\uce6d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac74\uc2dd \uc5d0\uce6d \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ubd81\ubd80 \ud654\ucc3d(\ud68c\uc0ac\uba85)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2e4\ub9ac\ucf58 \ubcf4\uc26c \ubc0f \ucd08\uc800\uc628 \uc5d0\uce6d, \uc11d\uc601 \ub525 \uc5d0\uce6d\uc774 \uc801\uc6a9\ub41c SiO2, 8\uc778\uce58 \ubbf8\ub9cc<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">IBE \uc5d0\uce6d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc774\uc628 \ube54 \uc5d0\uce6d \uc2dc\uc2a4\ud15c(IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">3\ucc28\uc6d0 \uad6c\uc870 \uc7ac\ub8cc \uc5d0\uce6d, 85\ub3c4 \uc774\uc0c1\uc758 \uc5d0\uce6d \uacbd\uc0ac\ub3c4, \uc5d0\uce6d \uc815\ud655\ub3c4 10nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud50c\ub77c\uc988\ub9c8 \ub514\uac70\ubc0d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8 \ub514\uac70\ubc0d \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc54c\ud30c \ud50c\ub77c\uc988\ub9c8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc790\uc678\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc790\uc678\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc815\ub82c \uc815\ud655\ub3c4: \u00b10.5um, \ud574\uc0c1\ub3c4 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac08\ubc14\ub2c8\uc988<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub3c4\uae08 \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cu \ub3c4\uae08, Au \ub3c4\uae08, Ni\/Ni \ud569\uae08 \ub3c4\uae08<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc784\uacc4 \uac74\uc870<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucd08\uc784\uacc4\uc810 \uac74\uc870\uae30<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc624\ud1a0\uba54\uac00\uc0bc\ub4dc\ub9ac-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud2b9\uc815 \uc9c0\uc5ed(\uc608: \ub3d9\ub124)\uc5d0 \uc601\ud654 \ud560\ub2f9\ud558\uae30<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucee4\ud305\uae30 \uc2a4\ud06c\ub77c\uc774\ube59 \uba38\uc2e0<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub514\uc2a4\ucf54 D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6e8\uc774\ud37c \ubcf8\ub529<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6e8\uc774\ud37c \ubcf8\ub529 \uba38\uc2e0<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc591\uadf9 \uacb0\ud569<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM \ud14c\uc2a4\ud2b8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uace0\ud574\uc0c1\ub3c4 \uc6d0\uc790\ub825 \ud604\ubbf8\uacbd<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc625\uc2a4\ud3ec\ub4dc \uc0ac\uc774\ud37c ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6d0\uc790\ub825 \ud604\ubbf8\uacbd<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5d8\ub9ac\uc624\ub2c9\uc2a4 ELS-F125G8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2a4\ud06c \ub9ac\ub4dc \ub4f1\uc758 \ube44\uc6a9\uc740 \ud3ec\ud568\ub418\uc9c0 \uc54a\uc73c\uba70, \uc0ac\uc6a9\ud558\ub294 \uc811\ucc29\uc81c\uc758 \uc885\ub958\uc5d0 \ub530\ub978 \uc7ac\ub8cc\ube44\ub294 \ubcc4\ub3c4\uc785\ub2c8\ub2e4.<\/span><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-762b0ea elementor-hidden-desktop elementor-hidden-tablet elementor-widget elementor-widget-text-editor\" data-id=\"762b0ea\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<table style=\"width: 349px; height: 3077px;\" width=\"373\" cellspacing=\"0\" cellpadding=\"0\"><tbody><tr class=\"firstRow\" style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"254\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uce74\ud14c\uace0\ub9ac<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"249\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc7a5\ube44 \uc774\ub984<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"303\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc7a5\ube44 \ubaa8\ub378<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\" width=\"331\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud504\ub85c\uc138\uc2a4 \ub9e4\uac1c\ubcc0\uc218<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub3c4\uae08<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(LPCVD)<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">HORIS L6471-1<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SIN, TEOS, \ud3f4\ub9ac \ub4f1\uc744 \uc785\uae08\ud569\ub2c8\ub2e4.<br \/>\uba64\ube0c\ub808\uc778 1-50\uac1c\/\uc624\ube10<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5f4 \uc0b0\ud654<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6a9\uad11\ub85c \ud29c\ube0c\uc758 \uc5f4 \uc0b0\ud654<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5b4\ub2d0\ub9c1(\uc57c\uae08)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uace0\uc18d \uc5b4\ub2d0\ub9c1\ub85c RTP<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc564\uc54c\uc2dc\uc2a4 AS-One 150<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucd5c\ub300 \uc628\ub3c4 \ucd5c\ub300 1500\u00b0C, \uc0c1\uc2b9 \uc18d\ub3c4<br \/>\ucd5c\ub300 200\u00b0C\/s<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FIB \ucc98\ub9ac<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc9d1\uc18d \uc774\uc628 \ube54 FIB<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc368\ubaa8 \ud53c\uc154 \uc2dc\uc624\uc2a4 2 \ud558\uc774\ubc31<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">TEM \uc0d8\ud50c \uc900\ube44<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM \ud615\ud0dc \uad00\ucc30<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uacc4 \ubc29\ucd9c \ud658\uacbd \uc8fc\uc0ac \uc804\uc790 \ud604\ubbf8\uacbd ESEM<\/span><\/td><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc368\ubaa8 \ud53c\uc154 \ucf70\ud2b8\ub85c S<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SEM \uc2a4\ud399\ud2b8\ub7fc \ubd84\uc11d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305 - \uae08\uc18d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ubc1c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-20PEB-950<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uae08\uc18d \ud544\ub984 \uc99d\ucc29, \ub9ac\ud504\ud2b8\uc624\ud504 \uacf5\uc815 \ucf54\ud305, 8\uc778\uce58 \uae30\ud310 \uc5ed\ud638\ud658\uc131<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ucc29 \ucf54\ud305 - \uc911\uac04<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790\ube54 \uc99d\ubc1c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FU-12PEB<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc720\uc804\uccb4 \ud544\ub984\uc758 \uc99d\ucc29\uc740 \ud558\ub098\uc758 \uc6a9\uad11\ub85c\uc5d0\uc11c 10\uac1c\uc758 4\uc778\uce58 \uae30\ud310\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ucf54\ud305 - \uae08\uc18d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">FSE-BSLS-RD-6\uc778\uce58<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2a4\ud37c\ud130\ub9c1 \uae08\uc18d \ud544\ub984, 6\" \uae30\ud310<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6d0\uc790\uce35 \uc99d\ucc29<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud50c\ub77c\uc988\ub9c8 \uac15\ud654 \uc6d0\uc790\uce35 \uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">ICPALD-S200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud604\uc7ac Al2O3\uac00 \uc9c0\ubc30\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">DLC \ucf54\ud305<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uac19\uc740 \ubc15\ub9c9 \ud654\ud559 \uc99d\ucc29 \uc2dc\uc2a4\ud15c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">CNT-DLC-CL200<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac74\uc2dd \uc5d0\uce6d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac74\uc2dd \uc5d0\uce6d \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ubd81\ubd80 \ud654\ucc3d(\ud68c\uc0ac\uba85)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2e4\ub9ac\ucf58 \ubcf4\uc26c \ubc0f \ucd08\uc800\uc628 \uc5d0\uce6d, \uc11d\uc601 \ub525 \uc5d0\uce6d\uc774 \uc801\uc6a9\ub41c SiO2, 8\uc778\uce58 \ubbf8\ub9cc<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">IBE \uc5d0\uce6d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc774\uc628 \ube54 \uc5d0\uce6d \uc2dc\uc2a4\ud15c(IBE)<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AE4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">3\ucc28\uc6d0 \uad6c\uc870 \uc7ac\ub8cc \uc5d0\uce6d, 85\ub3c4 \uc774\uc0c1\uc758 \uc5d0\uce6d \uacbd\uc0ac\ub3c4, \uc5d0\uce6d \uc815\ud655\ub3c4 10nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud50c\ub77c\uc988\ub9c8 \ub514\uac70\ubc0d<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub9c8\uc774\ud06c\ub85c\ud30c \ud50c\ub77c\uc988\ub9c8 \ub514\uac70\ubc0d \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc54c\ud30c \ud50c\ub77c\uc988\ub9c8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc790\uc678\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc790\uc678\uc120 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUS MA6BA6GEN4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc815\ub82c \uc815\ud655\ub3c4: \u00b10.5um, \ud574\uc0c1\ub3c4 600nm<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uac08\ubc14\ub2c8\uc988<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub3c4\uae08 \uae30\uacc4<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">WPS-200MT<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Cu \ub3c4\uae08, Au \ub3c4\uae08, Ni\/Ni \ud569\uae08 \ub3c4\uae08<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc784\uacc4 \uac74\uc870<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucd08\uc784\uacc4\uc810 \uac74\uc870\uae30<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc624\ud1a0\uba54\uac00\uc0bc\ub4dc\ub9ac-915B<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ud2b9\uc815 \uc9c0\uc5ed(\uc608: \ub3d9\ub124)\uc5d0 \uc601\ud654 \ud560\ub2f9\ud558\uae30<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ucee4\ud305\uae30 \uc2a4\ud06c\ub77c\uc774\ube59 \uba38\uc2e0<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\ub514\uc2a4\ucf54 D323<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6e8\uc774\ud37c \ubcf8\ub529<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6e8\uc774\ud37c \ubcf8\ub529 \uba38\uc2e0<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">SUSS MicroTec SB6Gen2<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc591\uadf9 \uacb0\ud569<\/span><\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et3\" style=\"margin: 5px 10px;\" rowspan=\"2\" height=\"27\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">AFM \ud14c\uc2a4\ud2b8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uace0\ud574\uc0c1\ub3c4 \uc6d0\uc790\ub825 \ud604\ubbf8\uacbd<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc625\uc2a4\ud3ec\ub4dc \uc0ac\uc774\ud37c ES<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc6d0\uc790\ub825 \ud604\ubbf8\uacbd<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">Park Systems NX20<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\">\u00a0<\/td><\/tr><tr style=\"height: 13.5pt;\"><td class=\"et2\" style=\"margin: 5px 10px;\" height=\"13\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc5d8\ub9ac\uc624\ub2c9\uc2a4 ELS-F125G8<\/span><\/td><td class=\"et2\" style=\"margin: 5px 10px;\"><span style=\"font-family: \u5fae\u8f6f\u96c5\u9ed1;\">\uc2a4\ud06c \ub9ac\ub4dc \ub4f1\uc758 \ube44\uc6a9\uc740 \ud3ec\ud568\ub418\uc9c0 \uc54a\uc73c\uba70, \uc0ac\uc6a9\ud558\ub294 \uc811\ucc29\uc81c\uc758 \uc885\ub958\uc5d0 \ub530\ub978 \uc7ac\ub8cc\ube44\ub294 \ubcc4\ub3c4\uc785\ub2c8\ub2e4.<\/span><\/td><\/tr><\/tbody><\/table>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7772d391 elementor-widget elementor-widget-text-editor\" data-id=\"7772d391\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\"><b><u>MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/u><\/b><\/a>\uc5d0 \ub313\uae00\uc744 \ub0a8\uaca8 \uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-10ca8ab7 elementor-widget elementor-widget-wpforms\" data-id=\"10ca8ab7\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/27064\" data-token=\"20f036a788b75cd79e232763d5557046\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/27064\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1146ae2b\" data-id=\"1146ae2b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4e3be01e elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"4e3be01e\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f054d53 elementor-widget elementor-widget-heading\" data-id=\"f054d53\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-221c4f3 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"221c4f3\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-187e4251 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"187e4251\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b60a5e0 elementor-widget elementor-widget-heading\" data-id=\"b60a5e0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-659b6d3a elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"659b6d3a\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26933 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_05\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(V)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e94) 1<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_05\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(V)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-27158 post type-post status-publish format-standard has-post-thumbnail hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%94%94%ec%8a%a4%ed%94%8c%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815 | \uc804\uc790 \uc885\uc774 \ub9c8\uc774\ud06c\ub85c \ucef5 \ubc0f \ub9c8\uc774\ud06c\ub85c \ucc54\ubc84 \uad6c\uc870 \uc900\ube44\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815 | \uc804\uc790 \uc885\uc774\ub97c \uc704\ud55c \ub9c8\uc774\ud06c\ub85c \ucef5 \ubc0f \ub9c8\uc774\ud06c\ub85c \ucc54\ubc84 \uad6c\uc870\uc758 \uc900\ube44 <\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_%eb%94%94%ec%8a%a4%ed%94%8c%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub098\ub178 \uc81c\uc870\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | \uc804\uc790 \uc885\uc774\ub97c \uc704\ud55c \ub9c8\uc774\ud06c\ub85c\ucef5 \ubc0f \ub9c8\uc774\ud06c\ub85c \ucc54\ubc84 \uad6c\uc870\uc758 \uc900\ube44\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26897 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-29b2a563 elementor-widget elementor-widget-heading\" data-id=\"29b2a563\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%9d%b8%ec%82%ac%ec%9d%b4%ed%8a%b8\/\">\ub354 \ub9ce\uc740 \uad00\ub828 \uc815\ubcf4...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u7ed3\u6784\/MEMS\u4ee3\u5de5\u5e73\u53f0\u6280\u672f\u80fd\u529b \u5b9e\u9a8c [&hellip;]<\/p>","protected":false},"author":1,"featured_media":27066,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[47],"tags":[46],"class_list":["post-27064","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-nanofabrication","tag-nanofabrication"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v21.9 (Yoast SEO v22.7) - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -<\/title>\n<meta name=\"description\" content=\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/mems_capability\/\" \/>\n<meta property=\"og:locale\" content=\"ko_KR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\" \/>\n<meta property=\"og:description\" content=\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/mems_capability\/\" \/>\n<meta property=\"article:published_time\" content=\"2022-06-14T07:26:05+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2022-10-26T07:44:49+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\" \/>\n\t<meta property=\"og:image:width\" content=\"1000\" \/>\n\t<meta property=\"og:image:height\" content=\"571\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"author\" content=\"admin\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\uae00\uc4f4\uc774\" \/>\n\t<meta name=\"twitter:data1\" content=\"admin\" \/>\n\t<meta name=\"twitter:label2\" content=\"\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04\" \/>\n\t<meta name=\"twitter:data2\" content=\"3\ubd84\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"},\"author\":{\"name\":\"admin\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\"},\"headline\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\",\"datePublished\":\"2022-06-14T07:26:05+00:00\",\"dateModified\":\"2022-10-26T07:44:49+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"},\"wordCount\":200,\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"keywords\":[\"App_Nanofabrication\"],\"articleSection\":[\"\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5\"],\"inLanguage\":\"ko-KR\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\",\"url\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\",\"name\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -\",\"isPartOf\":{\"@id\":\"https:\/\/www.accscicn.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"datePublished\":\"2022-06-14T07:26:05+00:00\",\"dateModified\":\"2022-10-26T07:44:49+00:00\",\"description\":\"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICP\\\\RIE\\\\IBE\\\\\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002\",\"breadcrumb\":{\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png\",\"width\":1000,\"height\":571},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.accscicn.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.accscicn.com\/#website\",\"url\":\"https:\/\/www.accscicn.com\/\",\"name\":\"\",\"description\":\"We transform tomorrow\",\"publisher\":{\"@id\":\"https:\/\/www.accscicn.com\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.accscicn.com\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"ko-KR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.accscicn.com\/#organization\",\"name\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\",\"url\":\"https:\/\/www.accscicn.com\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"contentUrl\":\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png\",\"width\":512,\"height\":512,\"caption\":\"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\"},\"image\":{\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023\",\"name\":\"admin\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g\",\"caption\":\"admin\"},\"sameAs\":[\"https:\/\/www.accscicn.com\/\"],\"url\":\"https:\/\/www.accscicn.com\/ko\/author\/admin\/\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -","description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/mems_capability\/","og_locale":"ko_KR","og_type":"article","og_title":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c","og_description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICPRIEIBE\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","og_url":"https:\/\/www.accscicn.com\/ko\/\uc194\ub8e8\uc158\/\ub098\ub178-\uc81c\uc870\/mems_capability\/","article_published_time":"2022-06-14T07:26:05+00:00","article_modified_time":"2022-10-26T07:44:49+00:00","og_image":[{"width":1000,"height":571,"url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","type":"image\/png"}],"author":"admin","twitter_card":"summary_large_image","twitter_misc":{"\uae00\uc4f4\uc774":"admin","\uc608\uc0c1 \ub418\ub294 \ud310\ub3c5 \uc2dc\uac04":"3\ubd84"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#article","isPartOf":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"},"author":{"name":"admin","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023"},"headline":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c","datePublished":"2022-06-14T07:26:05+00:00","dateModified":"2022-10-26T07:44:49+00:00","mainEntityOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"},"wordCount":200,"publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"image":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"thumbnailUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","keywords":["App_Nanofabrication"],"articleSection":["\u89e3\u51b3\u65b9\u6848 - \u5fae\u7eb3\u52a0\u5de5"],"inLanguage":"ko-KR"},{"@type":"WebPage","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/","url":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/","name":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c -","isPartOf":{"@id":"https:\/\/www.accscicn.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"image":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage"},"thumbnailUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","datePublished":"2022-06-14T07:26:05+00:00","dateModified":"2022-10-26T07:44:49+00:00","description":"\u5e73\u53f0\u62e5\u6709\u5149\u523b\u8bbe\u5907\u3001\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u3001\u523b\u8680\u8bbe\u5907\u3001\u8868\u5f81\u6d4b\u8bd5\u8bbe\u5907\u3001\u5668\u4ef6\u540e\u9053\u5c01\u88c5\u8bbe\u5907\u4ee5\u53ca\u81ea\u4e3b\u7814\u53d1\u7684\u8bbe\u5907\u7b49\u5171\u8ba1200\u4f59\u53f0\u3002\u6574\u5408\u7684\u5de5\u827a\u5305\u62ec\uff1a\u5149\u523b\uff08\u7d2b\u5916\u5149\u523b\uff0c\u6fc0\u5149\u76f4\u5199\uff0c\u7535\u5b50\u675f\u5149\u523b\u7b49\uff09\u9540\u819c\uff08PVD\u3001CVD\u3001ALD\u7b49\uff09\u523b\u8680\uff08ICP\\RIE\\IBE\\\u6e7f\u6cd5\u7b49\uff09\u3001\u952e\u5408\u3001CMP\u3001\u8868\u5f81\u6d4b\u8bd5\u3001\u5c01\u88c5\u3002","breadcrumb":{"@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb"},"inLanguage":"ko-KR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/"]}]},{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#primaryimage","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u52a0\u5de5\u80fd\u529b.png","width":1000,"height":571},{"@type":"BreadcrumbList","@id":"https:\/\/www.accscicn.com\/solutions\/nanofabrication\/mems_capability\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u9996\u9875","item":"https:\/\/www.accscicn.com\/"},{"@type":"ListItem","position":2,"name":"MEMS\u4ee3\u5de5\u80fd\u529b | \u5149\u523b\u7535\u9540\u523b\u8680\u9540\u819c"}]},{"@type":"WebSite","@id":"https:\/\/www.accscicn.com\/#website","url":"https:\/\/www.accscicn.com\/","name":"","description":"We transform tomorrow","publisher":{"@id":"https:\/\/www.accscicn.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.accscicn.com\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"ko-KR"},{"@type":"Organization","@id":"https:\/\/www.accscicn.com\/#organization","name":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8","url":"https:\/\/www.accscicn.com\/","logo":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","contentUrl":"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/02\/cropped-logo-1.png","width":512,"height":512,"caption":"\u4e0a\u6d77\u82f1\u751f\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8"},"image":{"@id":"https:\/\/www.accscicn.com\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/2767c229124ce838616141e311459023","name":"admin","image":{"@type":"ImageObject","inLanguage":"ko-KR","@id":"https:\/\/www.accscicn.com\/#\/schema\/person\/image\/","url":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/132bd954260b9fe20dcccbd41aba4d67692e9074b8a36c1129fc3ee607782887?s=96&d=mm&r=g","caption":"admin"},"sameAs":["https:\/\/www.accscicn.com\/"],"url":"https:\/\/www.accscicn.com\/ko\/author\/admin\/"}]}},"_links":{"self":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/27064","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/comments?post=27064"}],"version-history":[{"count":20,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/27064\/revisions"}],"predecessor-version":[{"id":28653,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/posts\/27064\/revisions\/28653"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/media\/27066"}],"wp:attachment":[{"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/media?parent=27064"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/categories?post=27064"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.accscicn.com\/ko\/wp-json\/wp\/v2\/tags?post=27064"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}