{"id":27270,"date":"2022-07-28T15:05:49","date_gmt":"2022-07-28T07:05:49","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=27270"},"modified":"2022-10-26T15:40:51","modified_gmt":"2022-10-26T07:40:51","slug":"nanofab_opto","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8%ed%8c%b9_%ec%98%b5%ed%86%a0\/","title":{"rendered":"\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \uad11\ud559 \uc18c\uc790\uc6a9 \uc7ac\ub8cc"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"27270\" class=\"elementor elementor-27270\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7048bd0c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"7048bd0c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-22f67e5b\" data-id=\"22f67e5b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-25e1779b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"25e1779b\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-5559345f\" data-id=\"5559345f\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6502ea9f elementor-widget elementor-widget-heading\" data-id=\"6502ea9f\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h1 class=\"elementor-heading-title elementor-size-default\"><b>\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | \uae30\ud310 \/ \uad11\ud559 \uc7a5\uce58\uc6a9 \uae30\ud310<\/b><\/h1>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-60481270 elementor-widget elementor-widget-text-editor\" data-id=\"60481270\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><strong>\uc2e4\ub9ac\ucf58<\/strong><\/p><\/section><\/section><p>\uc2e4\ub9ac\ucf58\uc740 \uc9d1\uc801 \ud68c\ub85c\uc758 \ud45c\uc900 \uc7ac\ub8cc\ub85c \uc0ac\uc6a9\ub418\uba70 \uc138\uacc4\uc5d0\uc11c \uac00\uc7a5 \ub110\ub9ac \uc5f0\uad6c\ub418\ub294 \uc7ac\ub8cc \uc911 \ud558\ub098\uc785\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\ub294 \uace0\uc628 \ubc18\ub3c4\uccb4\ub85c \uc0ac\uc6a9\ud558\uae30\uc5d0 \uc801\ud569\ud558\uba70 \uc27d\uac8c \uc131\uc7a5\ud558\ub294 \uc0b0\ud654\ubb3c \uc808\uc5f0 \uc7ac\ub8cc\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uacfc \ud604\uc7ac\uc758 \ubaa8\ub4e0 \uc0b0\uc5c5 \uc778\ud504\ub77c \ubc0f \ud234\ub9c1\uc73c\ub85c \uc778\ud574 \ud1b5\ud569 \uc2e4\ub9ac\ucf58 \uad11\ud559 \uc18c\uc790 \uac1c\ubc1c\uc5d0 \ub9ce\uc740 \uad00\uc2ec\uc774 \uc9d1\uc911\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58\uc740 \ubc1c\uad11 \ub2e4\uc774\uc624\ub4dc(LED), \ub3c4\ud30c\uad00, \ud0dc\uc591 \uc804\uc9c0\uc640 \uac19\uc740 \uad11\uc804\uc790 \uc18c\uc790\uc640 \ubbf8\uc138\uc804\uc790\uae30\uacc4 \uc2dc\uc2a4\ud15c(MEMS)\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p><p>\ud654\ud559\uc801\uc73c\ub85c \ucc98\ub9ac\ub41c \uc2e4\ub9ac\ucf58\uc758 \uc804\ud1b5\uc801\uc778 \uc774\ubc29\uc131 \uc2b5\uc2dd \uc5d0\uce6d\uc740 80\u00b0C\uc5d0\uc11c \uc57d 1.4\u03bcm\/min\uc758 \uc18d\ub3c4\ub85c KOH:H2O(1:1 \uc911\ub7c9\ube44) \uc5d0\uce6d\uc561\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774 \ud654\ud559\uc801 \ubc29\ubc95\uc740 \uc2e4\ub9ac\ucf58 \ubbf8\uc138 \uac00\uacf5 \uacf5\uc815\uc5d0\uc11c \uc2a4\ub8e8\ud640 \ub610\ub294 \ubd84\ub9ac \ubc15\ub9c9\uc744 \ucc98\ub9ac\ud558\ub294 \ub370 \uc790\uc8fc \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uc7ac\ub8cc\uc758 \uc774\ubc29\uc131 \uac74\uc2dd \uc2dd\uac01\uc740 SF6 \ud654\ud559 \uc2dd\uac01\uc561\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc218\ud589\ub429\ub2c8\ub2e4. \ucd08\uace0\uc885\ud6a1\ube44 \uac74\uc2dd \uc2dd\uac01 \uacf5\uc815\uc5d0 \ub300\ud55c \ud6c4\uc18d \uc5f0\uad6c\ub97c \ud1b5\ud574 DRIE(DeepReactiveIonEtch) \uae30\ubc95\uc774 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uae30\ubc95\uc740 SF6\/Ar\uacfc CHF3\/Ar \ud654\ud559 \uc2dd\uac01\uc561\uc744 \ubc88\uac08\uc544 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774 \uac00\uc2a4 \ud63c\ud569\ubb3c\uc740 \ub178\ucd9c\ub41c \ubaa8\ub4e0 \ud45c\uba74\uc5d0 \ud14c\ud504\ub860 \ud3f4\ub9ac\uba38\uc758 \uc99d\ucc29\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4. SF6\/Ar \uacf5\uc815\uc740 \uc774\uc628 \ucda9\uaca9\uc73c\ub85c \uc778\ud574 \uc218\ud3c9 \ud45c\uba74\uc5d0\uc11c \ud3f4\ub9ac\uba38\ub97c \ube60\ub974\uac8c \uc81c\uac70\ud558\uace0 \ub178\ucd9c\ub41c \uc2e4\ub9ac\ucf58 \ud45c\uba74\uc744 \uc5d0\uce6d\ud569\ub2c8\ub2e4. \uc774 \ucf54\ud3f4\ub9ac\uba38 \ucc98\ub9ac \uacf5\uc815\uc740 \uce21\ubcbd\uc5d0 \uc5d0\uce6d\uc744 \ubc29\uc9c0\ud558\uace0 \uc774\ubc29\uc131\uc774 \ub192\uc740 \ud504\ub85c\ud30c\uc77c \ubd84\ud3ec\ub97c \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\uc804\uc790\ube54 \ub9ac\uc18c\uadf8\ub798\ud53c\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc2e4\ub9ac\ucf58 \uae30\ud310\uc5d0\uc11c 10nm \ubbf8\ub9cc\uc758 PMMA \uc120\ud3ed\uc744 \uac00\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubbf8\uad6d \uc0cc\ub514\uc544 \uad6d\ub9bd\uc5f0\uad6c\uc18c\ub294 \ud45c\uba74 \ubbf8\uc138 \uae30\uacc4 \ubc18\uc0ac \uc7a5\uce58\uc640 \uc9d1\uad11\ud615 \ud0dc\uc591 \uc804\uc9c0\ub97c \ube44\ub86f\ud55c \ub9ce\uc740 \uad11\ud559 \uc7a5\uce58\ub97c \uc2e4\ub9ac\ucf58\uc73c\ub85c \uac00\uacf5\ud588\uc2b5\ub2c8\ub2e4.\u00a0<\/p><p>\u00a0<\/p><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><strong>\uac08\ub968 \ube44\uc18c<\/strong><\/p><\/section><\/section><p>\uac08\ub968 \ube44\uc18c(GaAs)\ub294 \ub2e4\uc591\ud55c \uc804\uc790 \ubc0f \uad11\uc804\uc790 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ud45c\uc900 \ubc18\ub3c4\uccb4 \uc18c\uc7ac\uc785\ub2c8\ub2e4. GaAs\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58\ubcf4\ub2e4 \ub192\uc740 \uc791\ub3d9 \uc8fc\ud30c\uc218, \uc804\uc790 \uc774\ub3d9\ub3c4 \ubc0f \ubc1c\uad11 \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud2b9\uc131\uc744 \uae30\ubc18\uc73c\ub85c \ud0dc\uc591 \uc804\uc9c0, \uac80\ucd9c\uae30, \uc591\uc790 \uc6b0\ubb3c \ub808\uc774\uc800 \ub4f1 \ub2e4\uc591\ud55c \uad11\uc804\uc790 \uc18c\uc790\uac00 \uc81c\uc791\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uac08\ub968 \ube44\uc18c\ud654\ubb3c\uc740 2~5\u03bcm\uc758 \uc804\uccb4 \ud30c\uc7a5 \ub300\uc5ed\uc5d0\uc11c \ud22c\uba85\ud558\uace0 \uad74\uc808\ub960\uc774 \ub192\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uc18c\uc7ac\uc5d0 \ube44\ud574 GaAs\uc758 \ub2e8\uc810\uc740 \ud65c\uc131 \uace0\uc720 \uc0b0\ud654\ubb3c\uc774 \uc5c6\ub2e4\ub294 \uac83\uc785\ub2c8\ub2e4. \uace0\uc18d \ubc0f \uace0\uc804\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744\uc704\ud55c GaAs \uc7a5\uce58\uc758 \ucc98\ub9ac \uae30\uc220\uc758 \uae09\uc18d\ud55c \ubc1c\uc804\uc73c\ub85c \uc778\ud574\uc774 \uc7ac\ub8cc\uc758 \ucc98\ub9ac\uc5d0 \ub300\ud55c \uc138\ubd80 \uc0ac\ud56d\uc740 \ubaa8\ub450\uc5d0\uac8c \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\uc77c\ubc18\uc801\uc73c\ub85c GaAs \uc7ac\ub8cc\uc758 \uc804\ud558 \uc218\uc1a1\uc740 \uc804\ub825 \uc190\uc2e4 \uce35 \uc5c6\uc774\ub3c4 \ucda9\ubd84\ud558\ubbc0\ub85c \uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c \uc0ac\uc6a9\uc5d0 \ub9e4\uc6b0 \uc801\ud569\ud569\ub2c8\ub2e4. PMMA\uc5d0\uc11c \uc5bb\uc740 \uac1c\ubcc4 \ub808\uc9c0\uc2a4\ud2b8 \ud2b8\ub80c\uce58 \ub77c\uc778 \ud3ed\uc740 20nm \ubbf8\ub9cc\uc778 \uac83\uc73c\ub85c \uc785\uc99d\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p><p>\uacfc\uc0b0\ud654\uc218\uc18c(H2O2) \ubc0f \ube0c\ub86c\uacfc \uac19\uc740 \ud560\ub85c\uac90\ud654 \ubb3c\uc9c8\uc744 \ud3ec\ud568\ud55c \uc5ec\ub7ec \uc0b0\ud654\uc81c\ub97c \uc0ac\uc6a9\ud558\uc5ec GaAs \uc7ac\ub8cc\uc758 \uc2b5\uc2dd \uc5d0\uce6d\uc744 \uc218\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, (111) \uba74\uc744 \ub530\ub77c \uc774\ubc29\uc131 \uc5d0\uce6d\uc740 H2PO4:H2O2:H2O(3:1:50) \uc5d0\uce6d\uc561\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc218\ud589\ub429\ub2c8\ub2e4. \uad8c\uc7a5 \uc5d0\uce6d \ube44\uc728\uc740 \uad6c\uc5f0\uc0b0:H2O2:H2O\uc758 5g:2mL:5mL\uc785\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, GaAs\uc640 AlGaAs \uc0ac\uc774\uc758 \uc120\ud0dd\uc131\uc740 (10~1000):1\uc774\uace0 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc5d0 \ub300\ud55c \ud76c\uc0dd \ubcf4\ud638 \uc5d0\uce6d\uc740 (3:1:50)\uc785\ub2c8\ub2e4.<\/p><p>\ub2e4\ub978 \uc5f0\uad6c\uc790\ub4e4\uc740 GaAs-Al \uc5d0\uce6d \ud53d\uc11c\ub97c \uc0ac\uc6a9\ud558\uc5ec GaAs\uc5d0 \ub300\ud55c \uc120\ud0dd\uc801 \uc774\ubc29\uc131 \uc5d0\uce6d \uacf5\uc815\uc744 \ucd5c\uc801\ud654\ud588\uc2b5\ub2c8\ub2e4. \uc720\ub3c4 \uacb0\ud569 \ud50c\ub77c\uc988\ub9c8(ICP) \uc2dc\uc2a4\ud15c\uc740 AlGaAs\ubcf4\ub2e4 GaAs\uc5d0 \ub300\ud574 200\ubc30 \ub354 \uc120\ud0dd\uc801\uc778 BCl3:SF6:N2:He \ud654\ud559 \ud63c\ud569\ubb3c\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \uc774\ubc29\uc131\uc774 \ub9e4\uc6b0 \ub192\uc740 GaAs \uc7ac\ub8cc\uc5d0 \ub300\ud574 \uc6b0\uc218\ud55c \uce21\ubcbd \ud328\uc2dc\ubca0\uc774\uc158\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/p><p>\ubbf8\uad6d \uc0cc\ub514\uc544 \uad6d\ub9bd \uc5f0\uad6c\uc18c\uc5d0\uc11c\ub294 \uc6e8\uc774\ube0c\uce69 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ud558\uae30 \uc704\ud574 GaAs \uc7ac\ub8cc\uc5d0 \uace0\ub3c4\uc758 \uc774\ubc29\uc131 \ud53c\ucc98 \ubd84\ud3ec\ub97c \ub2ec\uc131\ud558\uae30 \uc704\ud574 \ud654\ud559\uc801 \uc774\uc628 \ube54 \uac74\uc2dd \uc2dd\uac01(\ud654\ud559\uc801 \uc774\uc628 \ube54 \uc2dd\uac01, CAIBE) \uacf5\uc815\uc744 \uac1c\ubc1c\ud588\uc2b5\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \uc544\ub974\uace4 \uc774\uc628 \ub808\uc774\uc800 \ube54\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc2dc\ub8cc \ud45c\uba74\uc758 \uc8fc\ubcc0 \ubc18\uc751\uc131 \uac00\uc2a4\uc758 \uc2e4\uc81c \uc591\uacfc \uc720\uc18d\uc744 \uc81c\uc5b4\ud569\ub2c8\ub2e4. \uc774 \uacbd\uc6b0 \uc8fc\ubcc0 \ubc18\uc751\uc131 \uac00\uc2a4\ub294 \uc5fc\uc18c(Cl2)\uc640 \uc0bc\uc5fc\ud654\ubd95\uc18c(BCl3)\uc758 \ud63c\ud569\ubb3c\uc785\ub2c8\ub2e4. \uce21\ubcbd \ud328\uc2dc\ubca0\uc774\uc158\uacfc \ud2b8\ub80c\uce58 \uae4a\uc774\ub97c \ucd5c\ub300\ud654\ud558\uae30 \uc704\ud574 \uc5d0\uce6d \uc870\uac74\uc774 \ucd5c\uc801\ud654\ub429\ub2c8\ub2e4.<\/p><section style=\"display: inline-block; vertical-align: middle; width: auto; flex: 0 0 0%; align-self: center; height: auto;\"><section style=\"text-align: center;\"><section style=\"display: inline-block; width: 33px; height: 33px; vertical-align: top; overflow: hidden; background-color: #0e2143;\"><section style=\"color: #ffffff; font-size: 18px; line-height: 2; letter-spacing: 0px;\"><\/section><\/section><\/section><\/section><section style=\"display: inline-block; vertical-align: middle; width: auto; align-self: center; flex: 100 100 0%;\"><section style=\"color: #051c2c; padding-right: 10px; padding-left: 10px;\"><p><strong>\uc6a9\uc735 \uc2e4\ub9ac\uce74<\/strong><\/p><\/section><\/section><p>\ud4e8\uc988\ub4dc \ucffc\uce20\ub294 \ube44\uc815\uc9c8 \uc2e4\ub9ac\uce74(SiO2)\ub97c \ud568\uc720\ud55c \uc720\ub9ac\uc785\ub2c8\ub2e4. \ud569\uc131 \uacf5\uc815\uc758 \uc21c\ub3c4\uac00 \ub192\uae30 \ub54c\ubb38\uc5d0 \uc6a9\uc735 \uc11d\uc601\uc758 \uad11\ud559\uc801 \ubc0f \uc5f4\uc801 \ud2b9\uc131\uc740 \ub2e4\ub978 \uc720\ud615\uc758 \uc720\ub9ac\ubcf4\ub2e4 \uc6b0\uc218\ud569\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uc5f4\ud33d\ucc3d \uacc4\uc218\uac00 \ub9e4\uc6b0 \ub0ae\uae30 \ub54c\ubb38\uc5d0(20~320\u00b0C \uc628\ub3c4 \ubc94\uc704\uc5d0\uc11c \uc57d 5.5 x 10-7cm\/(cm-K)) \uadf9\ud55c \ubc0f\/\ub610\ub294 \ub2e4\uc591\ud55c \uc628\ub3c4\uc758 \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\ub294 \uc790\uc678\uc120\ubd80\ud130 \uc911\uc801\uc678\uc120 \uc2a4\ud399\ud2b8\ub7fc \uc601\uc5ed\uae4c\uc9c0 \ub192\uc740 \ud22c\uacfc\uc728\uacfc \ub0ae\uc740 \uad74\uc808\ub960(\ud504\ub808\ub12c \ubc18\uc0ac \uc190\uc2e4\uc774 \ub0ae\uc74c)\uc744 \uac00\uc9c0\uace0 \uc788\uc5b4 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc774\uc0c1\uc801\uc778 \uc18c\uc7ac\uc785\ub2c8\ub2e4. \uc774 \uc18c\uc7ac\ub294 \ub2e4\uc591\ud55c \ubbf8\uc138 \uc720\uccb4 \uc7a5\uce58 \ubc0f \uad11\ub300\uc5ed \uad11\ud559 \ubd80\ud488\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\ucd5c\uc2e0 \ucd08\uccad\uc815 \uc7a5\ube44\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc774 \uc18c\uc7ac\ub97c \ucc98\ub9ac\ud558\uae30 \uc704\ud574 \uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc18c\uc7ac\ub97c \uc704\ud55c \ub2e4\uc591\ud55c \uae30\uc220\uc774 \ud2b9\ubcc4\ud788 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774\uc804 \uc5f0\uad6c\uc5d0\uc11c\ub294 \ubbf8\uc138 \uc720\uccb4 \uc18c\uc790\uc758 \uc2b5\uc2dd \uc5d0\uce6d \ubc0f \uc6e8\uc774\ud37c \ub0a9\ub55c\uc5d0 \ubd88\uc0b0(HF)\uc744 \uc0ac\uc6a9\ud558\ub294 \ub370 \uc911\uc810\uc744 \ub450\uc5c8\uc2b5\ub2c8\ub2e4. \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ube44\uacb0\uc815\uc9c8 \uc7ac\ub8cc\uc774\ubbc0\ub85c \uc2b5\uc2dd \ud654\ud559 \uc5d0\uce6d \uacf5\uc815 \uc911\uc5d0 \ub4f1\ubc29\uc131 \ud504\ub85c\ud30c\uc77c \ubd84\ud3ec\uac00 \uad00\ucc30\ub429\ub2c8\ub2e4. \ud3ec\ud1a0\ub9ac\uc18c\uadf8\ub798\ud53c\uc640 \ubd88\uc0b0 \ubc84\ud37c\ub97c \uc0ac\uc6a9\ud558\uba74 \uc6a9\uc735 \uc11d\uc601\uc5d0 \uac70\uc758 \uc774\uc0c1\uc801\uc778 \ubc18\uc6d0\ud1b5\ud615 \ubaa8\uc591\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c \ub0a9\ub55c \uae30\uc220(\uc57d 1000\u00b0C\uc758 \uc628\ub3c4)\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc6d0\ud1b5\ud615 \ubbf8\uc138 \uc720\uccb4 \ucc44\ub110\uc744 \uc81c\uc791\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p><p>\ucd5c\uadfc \ub098\ub178 \uae30\uc220\ub85c \uc81c\uc791\ub41c \uad11\ud559 \uc18c\uc790\ub294 \ud504\ub808\ub12c \ub80c\uc988 \ub610\ub294 \uc774\uc6d0 \uad11\ud559, \uad6c\ubc30 \uad74\uc808\ub960 \ub80c\uc988 \ubc0f \ub2e8\ud30c\uc7a5 \uc778\uacf5 \uad6c\ubc30 \uad74\uc808\ub960 \ub80c\uc988\uc640 \uac19\uc740 \uae30\ud0c0 \ud68c\uc808 \uc694\uc18c\uc758 \uae30\ub2a5\uc744 \uac00\ub2a5\ud558\uac8c \ud558\ub294 \uad6c\ubc30 \ub610\ub294 \uac01\uc9c4 \ud504\ub85c\ud30c\uc77c \ubd84\ud3ec\ub97c \uac00\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubbf8\uad6d \uc0cc\ub514\uc544 \uad6d\ub9bd\uc5f0\uad6c\uc18c\uc758 \uc5f0\uad6c\uc6d0\ub4e4\uc740 \uc5ec\ub7ec \uc8fc\uae30\uc758 \uc804\uc790 \ube54 \ub9ac\uc18c\uadf8\ub798\ud53c\uc640 \ubc18\uc751\uc131 \uc774\uc628 \uc5d0\uce6d(RIE)\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc5ec\ub7ec \ub2e8\uacc4\uc758 \ud504\ub85c\ud30c\uc77c \ubd84\ud3ec\ub97c \uac00\uc9c4 \uc735\ud569 \uc2e4\ub9ac\uce74 \ubc14\uc774\ub108\ub9ac \ub80c\uc988\ub97c \uc81c\uc791\ud588\uc2b5\ub2c8\ub2e4. \uc5f0\uad6c\uc9c4\uc740 \ub2c8\ucf08(Ni) \ub9c8\uc2a4\ud06c(\ud06c\ub86c(Cr) \ub610\ub294 \ud2f0\ud0c0\ub284(Ti) \ubd80\ucc29\uce35 \ud3ec\ud568)\uc640 \ucd5c\uc801\uc758 \uc5d0\uce6d \ube44\uc728\uc778 \ud2b8\ub9ac\ud074\ub85c\ub85c\uba54\ud0c4(CHF3) 40sccm(\ud45c\uc900 \uc720\ub7c9)\uacfc \uc0b0\uc18c 3sccm\uc758 \uc870\ud569\uc744 \uc0ac\uc6a9\ud588\uc73c\uba70, 40mTorr\uc758 \uc555\ub825\uc744 \uc801\uc6a9\ud558\uace0 200W RF \uc804\ub825\uc758 396V \ubca0\uc774\uc2a4 \ubc14\uc774\uc5b4\uc2a4\ub97c \uc801\uc6a9\ud558\uc5ec \ub2e4\uc74c\uacfc \uac19\uc740 \ub9e4\uc6b0 \ub192\uc740 \uc774\ubc29\uc131 \ud504\ub85c\ud30c\uc77c \ubd84\ud3ec\ub97c \uc0dd\uc131\ud588\uc2b5\ub2c8\ub2e4.<\/p><p>\uc6a9\uc735 \uc2e4\ub9ac\uce74 \uc7ac\ub8cc\uc758 \ud488\uc9c8\uc740 \ub514\ubc14\uc774\uc2a4\uc758 \ucd5c\uc885 \ud488\uc9c8\uc5d0 \uc911\uc694\ud55c \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \ud488\uc9c8\uc774 \ub0ae\uc740 \uc6a9\uc735 \uc2e4\ub9ac\uce74\ub294 \ubc18\uc751\uc131 \uc774\uc628 \uc5d0\uce6d \uacf5\uc815 \ud6c4 \ubcf4\uc774\ub4dc\uac00 \ubc1c\uc0dd\ud558\uac70\ub098 \ud45c\uba74\uc774 \uac70\uce60\uac70\ub098 \uace0\ub974\uc9c0 \uc54a\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ucd5c\uc801\uc758 \uc774\ubc29\uc131\uacfc \ud45c\uba74 \ud3c9\ud65c\ub3c4\ub97c \uc704\ud55c \uace0\ud488\uc9c8 \uae30\ud310\uc758 \uc120\ud0dd\uc740 \uad11\ud559 \ubd80\ud488\uc758 \uac00\uc7a5 \uae30\ubcf8\uc801\uc778 \uc694\uac74\uc785\ub2c8\ub2e4.<\/p><p>\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2007227d elementor-widget elementor-widget-text-editor\" data-id=\"2007227d\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\ube60\ub978<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/\" target=\"_blank\" rel=\"noopener\"><b>MEMS \ub514\ubc14\uc774\uc2a4\/\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad6c\uc870 \uacf5\uc815 \uc124\uacc4 \uc11c\ube44\uc2a4<\/b><\/a>\uc5d0 \ub313\uae00\uc744 \ub0a8\uaca8 \uc8fc\uc138\uc694.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-749e771 elementor-widget elementor-widget-wpforms\" data-id=\"749e771\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ko\/wp-json\/wp\/v2\/posts\/27270\" data-token=\"7e582035fd86caed9ae82e901a11abab\" data-trp-original-action=\"\/ko\/wp-json\/wp\/v2\/posts\/27270\"><noscript class=\"wpforms-error-noscript\">\uc774 \uc591\uc2dd\uc744 \uc791\uc131\ud558\ub824\uba74 \ube0c\ub77c\uc6b0\uc800\uc5d0\uc11c JavaScript\ub97c \ud65c\uc131\ud654\ud558\uc2ed\uc2dc\uc624.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\uc774\uba54\uc77c \ud655\uc778<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \ucc98\ub9ac \uc694\uad6c \uc0ac\ud56d<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\uc81c\ucd9c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\ub85c\ub529 \uc911\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ko\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2c18f588\" data-id=\"2c18f588\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-62885605 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"62885605\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-256c592 elementor-widget elementor-widget-heading\" data-id=\"256c592\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc81c\ud488<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-79ba4248 elementor-grid-1 elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-widget elementor-widget-posts\" data-id=\"79ba4248\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-posts.min.css\">\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-29698 page type-page status-publish has-post-thumbnail hentry category-product category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img fetchpriority=\"high\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" >\n\t\t\t\t\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%a0%9c%ed%92%88\/2%ed%8e%98%ec%9d%b4%ec%a7%80-%eb%91%90-%ea%b4%91%ec%9e%90-%ec%a4%91%ed%95%a9\/\" aria-label=\"\uace0\uc815\ubc00 2\uad11\uc790 \uc911\ud569 3D \ud504\ub9b0\ud305 \uc2dc\uc2a4\ud15c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uad11\ud559\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a7%88%ec%9d%b4%ed%81%ac%eb%a1%9c%eb%a0%8c%ec%a6%88-%ec%96%b4%eb%a0%88%ec%9d%b4\/\" aria-label=\"\ub9c8\uc774\ud06c\ub860 \uc635\ud2f1\uc2a4 \u4e28 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774(OEM)\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" >\n\t\t\t\t\ub098\ub178\uc784\ud504\ub9b0\ud305(NIL) \ud558\ub3c4\uae09\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%82%98%eb%85%b8-%ec%9e%84%ed%94%84%eb%a6%b0%ed%8a%b8-%eb%a6%ac%ec%86%8c%ea%b7%b8%eb%9e%98%ed%94%bc\/\" aria-label=\"\ub098\ub178 \ud504\ub85c\uc138\uc2f1 \u4e28 \ub098\ub178 \uc784\ud504\ub9b0\ud305(NIL) \uc138\ub300 \ud504\ub85c\uc138\uc2f1\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3998bd83 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"3998bd83\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e691b6d elementor-widget elementor-widget-heading\" data-id=\"5e691b6d\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\uad00\ub828 \uc77d\uae30<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-611eb341 elementor-grid-1 elementor-posts--thumbnail-none elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-widget elementor-widget-posts\" data-id=\"611eb341\" data-element_type=\"widget\" data-settings=\"{&quot;classic_columns&quot;:&quot;1&quot;,&quot;classic_columns_tablet&quot;:&quot;2&quot;,&quot;classic_columns_mobile&quot;:&quot;1&quot;,&quot;classic_row_gap&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:35,&quot;sizes&quot;:[]},&quot;classic_row_gap_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;classic_row_gap_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-posts-container elementor-posts elementor-posts--skin-classic elementor-grid\">\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26897 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u52a0\u5de5\u7b80\u4ecb\uff08\u4e00\uff09 \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/mems_fabrication_01\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(I)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26906 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_02\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ubc0f \ub098\ub178 \uacf5\uc815 | MEMS \ubbf8\uc138 \uacf5\uc815(II)\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | MEMS\u7cbe\u7ec6\u52a0\u5de5(\u4e8c) \u5fae<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/%eb%a9%a4%ec%8a%a4_%ed%8c%a8%eb%b8%8c%eb%a6%ac%ec%bc%80%ec%9d%b4%ec%85%98_02\/\" aria-label=\"\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30 | MEMS \ubbf8\uc138 \uacf5\uc815(II)\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-26888 post type-post status-publish format-standard hentry category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/wet_cleaning\/\" >\n\t\t\t\t\ub9c8\uc774\ud06c\ub85c \ub098\ub178 \uacf5\uc815 | \uc2b5\uc2dd \uc138\uc815 \uc18c\uac1c\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u7eb3\u52a0\u5de5 | \u6e7f\u6cd5\u6e05\u6d17\u5904\u7406\u4ecb\u7ecd IC\u5236\u7a0b<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ko\/%ec%86%94%eb%a3%a8%ec%85%98\/%eb%82%98%eb%85%b8-%ec%a0%9c%ec%a1%b0\/wet_cleaning\/\" aria-label=\"\ub098\ub178 \uc81c\uc870 | \uc2b5\uc2dd \uc138\uc815 \uc18c\uac1c\uc5d0 \ub300\ud574 \uc790\uc138\ud788 \uc54c\uc544\ubcf4\uae30\" tabindex=\"-1\" >\n\t\t\t\ub354 \uc77d\uae30\"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3848d2b8 elementor-widget elementor-widget-heading\" data-id=\"3848d2b8\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<p class=\"elementor-heading-title elementor-size-default\"><a href=\"https:\/\/www.accscicn.com\/ko\/%ec%9d%b8%ec%82%ac%ec%9d%b4%ed%8a%b8\/\">\ub354 \ub9ce\uc740 \uad00\ub828 \uc815\ubcf4...<\/a><\/p>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u5149\u7535\u5668\u4ef6\u5e38\u7528\u57fa\u677f\/\u886c\u5e95 \u7845 [&hellip;]<\/p>","protected":false},"author":1,"featured_media":27332,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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