{"id":26856,"date":"2022-06-07T16:52:17","date_gmt":"2022-06-07T08:52:17","guid":{"rendered":"https:\/\/www.accscicn.com\/?p=26856"},"modified":"2022-10-20T16:32:58","modified_gmt":"2022-10-20T08:32:58","slug":"nanofabrication_navi","status":"publish","type":"post","link":"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d0%bd%d0%b0%d0%b2%d0%b8\/","title":{"rendered":"\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u041e\u0431\u0437\u043e\u0440 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"26856\" class=\"elementor elementor-26856\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6eb5931c elementor-section-full_width elementor-section-stretched elementor-section-height-default elementor-section-height-default\" data-id=\"6eb5931c\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;,&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-357b4596\" data-id=\"357b4596\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-39b6a151 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"39b6a151\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-45fef5ce\" data-id=\"45fef5ce\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5b28fbb5 elementor-widget elementor-widget-heading\" data-id=\"5b28fbb5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h3 class=\"elementor-heading-title elementor-size-default\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 - \u041e\u0431\u0437\u043e\u0440 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a, \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438 \u0438 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/h3>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-df7f4df elementor-widget elementor-widget-text-editor\" data-id=\"df7f4df\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #000000;\">\u041d\u0430\u043d\u043e\u0444\u0430\u0431\u0440\u0438\u043a\u0430\u0446\u0438\u044f \u0434\u0435\u043b\u0438\u0442\u0441\u044f \u043d\u0430 \u0442\u0440\u0438 \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0435 \u043e\u0431\u043b\u0430\u0441\u0442\u0438: \u0442\u043e\u043d\u043a\u0430\u044f \u043f\u043b\u0435\u043d\u043a\u0430, \u0444\u043e\u0442\u043e\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f \u0438 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #000000;\">\u0422\u043e\u043d\u043a\u0438\u0435 \u043f\u043b\u0435\u043d\u043a\u0438, \u043f\u043e\u043b\u0443\u0447\u0435\u043d\u043d\u044b\u0435 \u0441 \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d\u0438\u0435\u043c \u043c\u0435\u0442\u043e\u0434\u043e\u0432 \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b, \u0442\u0430\u043a\u0438\u0445 \u043a\u0430\u043a \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b, \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u0435, \u0438\u043c\u043f\u0443\u043b\u044c\u0441\u043d\u043e\u0435 \u043b\u0430\u0437\u0435\u0440\u043d\u043e\u0435 \u0438 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b, \u0440\u0430\u0441\u0441\u043c\u0430\u0442\u0440\u0438\u0432\u0430\u044e\u0442\u0441\u044f \u0434\u043b\u044f CVD \u043d\u0438\u0437\u043a\u043e\u0433\u043e \u0434\u0430\u0432\u043b\u0435\u043d\u0438\u044f, CVD, \u0443\u0441\u0438\u043b\u0435\u043d\u043d\u043e\u0433\u043e \u043f\u043b\u0430\u0437\u043c\u043e\u0439, \u0438 \u0430\u0442\u043e\u043c\u043d\u043e-\u0441\u043b\u043e\u0435\u0432\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f (CVD).<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #000000;\">\u041b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f, \u0441\u043d\u0430\u0447\u0430\u043b\u0430 \u0440\u0430\u0441\u0441\u043c\u0430\u0442\u0440\u0438\u0432\u0430\u044e\u0442\u0441\u044f \u043f\u0440\u0438\u043d\u0446\u0438\u043f\u044b \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u043d\u043e\u0439 \u043c\u0430\u0441\u043e\u0447\u043d\u043e\u0439 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438, \u0437\u0430\u0442\u0435\u043c \u0443\u043b\u044c\u0442\u0440\u0430\u0444\u0438\u043e\u043b\u0435\u0442\u043e\u0432\u043e\u0439 (\u0423\u0424) \u043f\u0440\u043e\u0435\u043a\u0446\u0438\u043e\u043d\u043d\u043e\u0439 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438 \u0438, \u043d\u0430\u043a\u043e\u043d\u0435\u0446, \u0431\u043e\u043b\u0435\u0435 \u0441\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0438\u043d\u0442\u0435\u0433\u0440\u0430\u043b\u044c\u043d\u044b\u0445 \u0441\u0445\u0435\u043c, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a \u0433\u043b\u0443\u0431\u043e\u043a\u0438\u0439 \u0423\u0424-\u0438\u0437\u043b\u0443\u0447\u0435\u043d\u0438\u0435 193 \u043d\u043c \u0438 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u043e\u0439 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438. \u041a\u0440\u0430\u0442\u043a\u043e \u0440\u0430\u0441\u0441\u043c\u0430\u0442\u0440\u0438\u0432\u0430\u044e\u0442\u0441\u044f \u043c\u0435\u0442\u043e\u0434\u044b \u043f\u043e\u0432\u044b\u0448\u0435\u043d\u0438\u044f \u0440\u0430\u0437\u0440\u0435\u0448\u0435\u043d\u0438\u044f, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a \u0434\u0432\u043e\u0439\u043d\u043e\u0435 \u0448\u0430\u0431\u043b\u043e\u043d\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0438 \u0441\u0430\u043c\u043e\u0432\u044b\u0440\u0430\u0432\u043d\u0438\u0432\u0430\u044e\u0449\u0435\u0435\u0441\u044f \u0448\u0430\u0431\u043b\u043e\u043d\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435. \u041e\u0431\u0441\u0443\u0436\u0434\u0430\u0435\u0442\u0441\u044f \u0442\u0430\u043a\u0436\u0435 \u043d\u0435\u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f, \u0442\u0430\u043a\u0430\u044f \u043a\u0430\u043a \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u043c \u043b\u0443\u0447\u043e\u043c, \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f \u0441\u0444\u043e\u043a\u0443\u0441\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u043c \u0438\u043e\u043d\u043d\u044b\u043c \u043b\u0443\u0447\u043e\u043c \u0438 \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f \u043d\u0430\u043d\u043e\u043e\u0442\u043f\u0435\u0447\u0430\u0442\u043a\u043e\u0432.<\/span><\/p><p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"color: #000000;\">\u0422\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435, \u0442\u0435\u043c\u044b \u0432\u043a\u043b\u044e\u0447\u0430\u044e\u0442 \u043c\u0435\u0442\u043e\u0434\u044b, \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u043c\u044b\u0435 \u043f\u0440\u0438 \u043c\u043e\u043a\u0440\u043e\u043c \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u043c \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0438, \u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u043e\u043c \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0438 \u0438 \u0433\u043b\u0443\u0431\u043e\u043a\u043e\u043c \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0438 \u043a\u0440\u0435\u043c\u043d\u0438\u044f.<\/span><\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-05f10ff elementor-hidden-desktop elementor-hidden-tablet elementor-widget elementor-widget-image\" data-id=\"05f10ff\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"639\" height=\"579\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u8584\u819c\u6c89\u79ef\u6280\u672f\u603b\u7ed3.png\" class=\"attachment-full size-full wp-image-28237\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u8584\u819c\u6c89\u79ef\u6280\u672f\u603b\u7ed3.png 639w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u8584\u819c\u6c89\u79ef\u6280\u672f\u603b\u7ed3-300x272.png 300w\" sizes=\"(max-width: 639px) 100vw, 639px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e984da9 elementor-hidden-desktop elementor-hidden-tablet elementor-widget elementor-widget-image\" data-id=\"e984da9\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"431\" height=\"667\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u5fae\u7eb3\u5149\u523b\u6280\u672f\u603b\u7ed3.png\" class=\"attachment-full size-full wp-image-28238\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u5fae\u7eb3\u5149\u523b\u6280\u672f\u603b\u7ed3.png 431w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/06\/\u5fae\u7eb3\u5149\u523b\u6280\u672f\u603b\u7ed3-194x300.png 194w\" sizes=\"(max-width: 431px) 100vw, 431px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-273e13c3 elementor-hidden-mobile elementor-widget elementor-widget-text-editor\" data-id=\"273e13c3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p><span style=\"background-color: var( --e-global-color-astglobalcolor5 ); color: rgb(0, 0, 0); font-family: &quot;Roboto Condensed&quot;, sans-serif; font-style: inherit; font-weight: 700; text-transform: uppercase;\">\u041a\u0440\u0430\u0442\u043a\u043e\u0435 \u043e\u043f\u0438\u0441\u0430\u043d\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a<\/span><br><\/p>\n<div>\n<table style=\"height: 625px;\" width=\"1758\" cellspacing=\"0\" cellpadding=\"0\">\n<colgroup>\n<col style=\"width: 169.50pt;\" width=\"226\">\n<col style=\"width: 141.00pt;\" width=\"188\">\n<col style=\"width: 125.25pt;\" width=\"167\">\n<col style=\"width: 105.00pt;\" width=\"140\">\n<col style=\"width: 125.25pt;\" width=\"167\">\n<col style=\"width: 123.00pt;\" width=\"164\">\n<col style=\"width: 118.50pt;\" width=\"158\">\n<col style=\"width: 117.00pt;\" width=\"156\">\n<col style=\"width: 54.00pt;\" width=\"72\"><\/colgroup>\n<tbody>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" width=\"169\" height=\"13\">&nbsp;<\/td>\n<td style=\"margin: 5px 10px;\" width=\"141\">\u0418\u0441\u043f\u0430\u0440\u0435\u043d\u0438\u0435<\/td>\n<td style=\"margin: 5px 10px;\" width=\"125\">\u041d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u0435<\/td>\n<td style=\"margin: 5px 10px;\" width=\"105\">PLD<\/td>\n<td style=\"margin: 5px 10px;\" width=\"125\">LPCVD<\/td>\n<td style=\"margin: 5px 10px;\" width=\"123\">\u0425\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b<\/td>\n<td style=\"margin: 5px 10px;\" width=\"118\">\u041e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0430\u0442\u043e\u043c\u043d\u043e\u0433\u043e \u0441\u043b\u043e\u044f<\/td>\n<td style=\"margin: 5px 10px;\" width=\"117\">MOCVD<\/td>\n<td style=\"margin: 5px 10px;\" width=\"54\">MBE<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0422\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430 \u0441\u0443\u0431\u0441\u0442\u0440\u0430\u0442\u0430<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u042d\u043d\u0435\u0440\u0433\u0438\u044f \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041d\u0438\u0437\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u0430\u044f \u0440\u0435\u0430\u043a\u0446\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u0430\u044f \u0440\u0435\u0430\u043a\u0446\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u0430\u044f \u0440\u0435\u0430\u043a\u0446\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u0430\u044f \u0440\u0435\u0430\u043a\u0446\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u043d\u0430\u044f \u0440\u0435\u0430\u043a\u0446\u0438\u044f<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0414\u0430\u0432\u043b\u0435\u043d\u0438\u0435<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u0430\u043a\u0443\u0443\u043c \u0438\u043b\u0438 \u0440\u0435\u0430\u043a\u0446\u0438\u043e\u043d\u043d\u044b\u0439 \u0433\u0430\u0437<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435. \u0412 \u043e\u0441\u043d\u043e\u0432\u043d\u043e\u043c \u0430\u0440\u0433\u043e\u043d, \u043d\u043e \u043c\u043e\u0436\u0435\u0442 \u0442\u0430\u043a\u0436\u0435 \u0432\u043a\u043b\u044e\u0447\u0430\u0442\u044c \u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u044b\u0435 \u0433\u0430\u0437\u044b<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0431\u0448\u0438\u0440\u043d\u0430\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u0430\u043a\u0443\u0443\u043c<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0421\u0442\u0443\u043f\u0435\u043d\u0447\u0430\u0442\u043e\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0430\u044f \u043e\u0440\u0438\u0435\u043d\u0442\u0430\u0446\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0440\u0438\u0435\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0440\u0438\u0435\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u043a\u043e\u043d\u0444\u043e\u0440\u043c\u043d\u044b\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041d\u0435\u043c\u043d\u043e\u0433\u043e \u043d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0430\u044f \u043a\u043e\u043d\u0444\u043e\u0440\u043c\u043d\u043e\u0441\u0442\u044c<\/td>\n<td style=\"margin: 5px 10px;\">\u042d\u043a\u0441\u0442\u0435\u043d\u0442<\/td>\n<td style=\"margin: 5px 10px;\">\u042d\u043a\u0441\u0442\u0435\u043d\u0442<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u041f\u043b\u043e\u0442\u043d\u043e\u0441\u0442\u044c \u0434\u0435\u0444\u0435\u043a\u0442\u043e\u0432<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0447\u0435\u043d\u044c \u043d\u0438\u0437\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041d\u0438\u0437\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0447\u0435\u043d\u044c \u043d\u0438\u0437\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041d\u0438\u0437\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u0447\u0435\u043d\u044c \u043d\u0438\u0437\u043a\u0438\u0439<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0420\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u043e\u0441\u0442\u044c<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u043c\u0435\u043d\u0435\u0435 \u0431\u043b\u0430\u0433\u043e\u043f\u0440\u0438\u044f\u0442\u043d\u044b\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0421\u043a\u043e\u0440\u043e\u0441\u0442\u044c \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0411\u044b\u0441\u0442\u0440\u043e<\/td>\n<td style=\"margin: 5px 10px;\">\u0411\u044b\u0441\u0442\u0440\u043e<\/td>\n<td style=\"margin: 5px 10px;\">\u043c\u0435\u0434\u043b\u0435\u043d\u043d\u043e<\/td>\n<td style=\"margin: 5px 10px;\">\u0411\u044b\u0441\u0442\u0440\u043e<\/td>\n<td style=\"margin: 5px 10px;\">\u0411\u044b\u0441\u0442\u0440\u043e<\/td>\n<td style=\"margin: 5px 10px;\">\u0417\u0430\u043c\u0435\u0434\u043b\u0435\u043d\u0438\u0435<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043c\u044f\u0433\u0447\u0435\u043d\u0438\u0435 \u043f\u043e\u0441\u043b\u0435\u0434\u0441\u0442\u0432\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u0417\u0430\u043c\u0435\u0434\u043b\u0435\u043d\u0438\u0435<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u0427\u0430\u0441\u0442\u043e \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u043c\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b<\/td>\n<td style=\"margin: 5px 10px;\">\u0411\u043e\u043b\u044c\u0448\u0438\u043d\u0441\u0442\u0432\u043e \u043c\u0435\u0442\u0430\u043b\u043b\u043e\u0432, \u043e\u0442\u0434\u0435\u043b\u044c\u043d\u044b\u0435 \u044d\u043b\u0435\u043c\u0435\u043d\u0442\u044b \u0438 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u044b\u0435 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u0438, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a Au, Ag, Cu, Si, SiO2, MgF2 \u0438 \u0442.\u0434.<\/td>\n<td style=\"margin: 5px 10px;\">\u0422\u043e\u0442 \u0436\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b, \u0447\u0442\u043e \u0438 \u043f\u0440\u0438 \u0438\u0441\u043f\u0430\u0440\u0435\u043d\u0438\u0438, \u043f\u043b\u044e\u0441 \u0434\u043e\u043f\u043e\u043b\u043d\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0435 \u043c\u0435\u0442\u0430\u043b\u043b\u044b \u0438 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u0438, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a W, VO2 \u0438 \u0442.\u0434.<\/td>\n<td style=\"margin: 5px 10px;\">YBCO, PZT, \u0444\u0435\u0440\u0440\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u0438 \u0434\u0440\u0443\u0433\u0438\u0435 \u0441\u043b\u043e\u0436\u043d\u044b\u0435 \u0441\u043e\u0435\u0434\u0438\u043d\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">Si3N4, SiO2<\/td>\n<td style=\"margin: 5px 10px;\">Si3N4, SiO2, \u043f\u043e\u043b\u0438\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043a\u0440\u0435\u043c\u043d\u0438\u0439<\/td>\n<td style=\"margin: 5px 10px;\">Al2O3, HfO2, SiO2 \u0438 \u043d\u0435\u043a\u043e\u0442\u043e\u0440\u044b\u0435 \u043c\u0435\u0442\u0430\u043b\u043b\u044b<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043e\u0441\u0442\u0430\u0432\u043d\u044b\u0435 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0438 GaAs, InP, AlGaAs<\/td>\n<td style=\"margin: 5px 10px;\">\u0421\u043e\u0441\u0442\u0430\u0432\u043d\u044b\u0435 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0438 - GaAs, InP, AlGaAs<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"margin: 5px 10px;\" height=\"13\">\u041e\u0431\u0449\u0438\u0435 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0438 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0435 \u043f\u043b\u0435\u043d\u043a\u0438, \u0434\u0440\u0443\u0433\u0438\u0435 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f \u043e\u0431\u0449\u0435\u0433\u043e \u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u041e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0438 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0435 \u043f\u043b\u0435\u043d\u043a\u0438, \u0434\u0440\u0443\u0433\u0438\u0435 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f \u043e\u0431\u0449\u0435\u0433\u043e \u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f<\/td>\n<td style=\"margin: 5px 10px;\">\u0412 \u043d\u0430\u0441\u0442\u043e\u044f\u0449\u0435\u0435 \u0432\u0440\u0435\u043c\u044f \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u0442\u0441\u044f \u0432 \u043e\u0441\u043d\u043e\u0432\u043d\u043e\u043c \u0434\u043b\u044f \u0440\u0430\u0437\u0432\u0435\u0434\u043a\u0438<\/td>\n<td style=\"margin: 5px 10px;\">\u041c\u0430\u0441\u043a\u0438 \u0438 \u041c\u042d\u041c\u0421<\/td>\n<td style=\"margin: 5px 10px;\">\u042d\u043b\u0435\u043a\u0442\u0440\u043e\u0438\u0437\u043e\u043b\u044f\u0446\u0438\u044f, \u043f\u0430\u0441\u0441\u0438\u0432\u0430\u0446\u0438\u044f, \u043c\u0430\u0441\u043a\u0438\u0440\u043e\u0432\u043a\u0430<\/td>\n<td style=\"margin: 5px 10px;\">\u0414\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a \u0437\u0430\u0442\u0432\u043e\u0440\u0430, \u043f\u0430\u0441\u0441\u0438\u0432\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0439<\/td>\n<td style=\"margin: 5px 10px;\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043e\u043f\u0442\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432<\/td>\n<td style=\"margin: 5px 10px;\">\u042d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f \u0438 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0438 \u0432 \u043e\u0431\u043b\u0430\u0441\u0442\u0438 \u043e\u043f\u0442\u043e\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0438<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<h6>\u041a\u0440\u0430\u0442\u043a\u043e\u0435 \u043e\u043f\u0438\u0441\u0430\u043d\u0438\u0435 \u0444\u043e\u0442\u043e\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u0438<\/h6>\n<table style=\"border-collapse: collapse; width: 700px; height: 777px;\" border=\"0\" width=\"888\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt; width: 169.50pt;\" width=\"226\" height=\"18\">\u041c\u0435\u0442\u043e\u0434\u044b<\/td>\n<td style=\"width: 141.00pt;\" width=\"188\">\u0414\u043b\u0438\u043d\u0430 \u0432\u043e\u043b\u043d\u044b<\/td>\n<td style=\"width: 125.25pt;\" width=\"167\">\u0412\u0435\u0440\u043e\u044f\u0442\u043d\u043e, \u043f\u043e\u043b\u043f\u043e\u0442\u0430<\/td>\n<td style=\"width: 105.00pt;\" width=\"140\">\u0413\u043b\u0443\u0431\u0438\u043d\u0430 \u0444\u043e\u043a\u0443\u0441\u0430<\/td>\n<td style=\"width: 125.25pt;\" width=\"167\">\u041e\u0431\u0449\u0438\u0435 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041a\u043e\u043d\u0442\u0430\u043a\u0442\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>365 \u043d\u043c (Hg)<\/td>\n<td>500 \u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u0418\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f \u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0438<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041f\u0440\u043e\u0435\u043a\u0446\u0438\u043e\u043d\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>365 \u043d\u043c (Hg)<\/td>\n<td>350 \u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u041d\u0418\u041e\u041a\u0420 \u0438 \u043c\u0435\u043b\u043a\u043e\u0435 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041f\u0440\u043e\u0435\u043a\u0446\u0438\u043e\u043d\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>193 \u043d\u043c (ArF)<\/td>\n<td>75 \u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041f\u0440\u043e\u0435\u043a\u0446\u0438\u043e\u043d\u043d\u0430\u044f \u0438\u043c\u043c\u0435\u0440\u0441\u0438\u043e\u043d\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>193 \u043d\u043c (ArF)<\/td>\n<td>35 \u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041f\u0440\u043e\u0435\u043a\u0446\u0438\u043e\u043d\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f \u0441 \u043f\u043e\u0433\u0440\u0443\u0436\u0435\u043d\u0438\u0435\u043c \u0438 \u043f\u043e\u0432\u044b\u0448\u0435\u043d\u0438\u0435\u043c \u0440\u0430\u0437\u0440\u0435\u0448\u0435\u043d\u0438\u044f<\/td>\n<td>193 \u043d\u043c (ArF)<\/td>\n<td>20 \u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">EUV-\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>13,5 \u043d\u043c<\/td>\n<td>5\u043d\u043c<\/td>\n<td>&nbsp;<\/td>\n<td>\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0435 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043d\u0430\u0445\u043e\u0434\u044f\u0442\u0441\u044f \u0432 \u0441\u0442\u0430\u0434\u0438\u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0438<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041b\u0430\u0437\u0435\u0440\u043d\u0430\u044f \u0438\u043d\u0442\u0435\u0440\u0444\u0435\u0440\u0435\u043d\u0446\u0438\u043e\u043d\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>325 \u043d\u043c (HeCd), 266 \u043d\u043c (YAG), 248 \u043d\u043c (KrF), 193 \u043d\u043c (ArF) \u0438 \u0442.\u0434.<\/td>\n<td>100e500 \u043d\u043c<\/td>\n<td>\u0411\u0435\u0441\u043a\u043e\u043d\u0435\u0447\u043d\u043e\u0441\u0442\u044c<\/td>\n<td>\u041f\u0435\u0440\u0438\u043e\u0434\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a \u0440\u0435\u0448\u0435\u0442\u043a\u0438<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">EBL<\/td>\n<td>0,01 \u043d\u043c (\u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0439 \u043b\u0443\u0447)<\/td>\n<td>5\u043d\u043c<\/td>\n<td>\u0411\u043e\u043b\u044c\u0448\u043e\u0439<\/td>\n<td>\u041b\u0430\u0431\u043e\u0440\u0430\u0442\u043e\u0440\u0438\u044f \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u0439 \u0438 \u0440\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043e\u043a \u0438 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u0448\u0430\u0431\u043b\u043e\u043d\u043e\u0432 \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0445 \u0441\u0438\u0441\u0442\u0435\u043c<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">FIB-\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td>\n<td>\u0418\u043e\u043d\u044b \u0433\u0430\u043b\u043b\u0438\u044f<\/td>\n<td>10 \u043d\u043c<\/td>\n<td>\u0411\u043e\u043b\u044c\u0448\u043e\u0439<\/td>\n<td>\u0420\u0435\u043c\u043e\u043d\u0442 \u043c\u0430\u0441\u043e\u043a, \u0440\u0435\u043c\u043e\u043d\u0442 \u0441\u043a\u043e\u043b\u043e\u0432, \u041d\u0418\u041e\u041a\u0420<\/td>\n<\/tr>\n<tr style=\"height: 13.50pt;\">\n<td style=\"height: 13.50pt;\" height=\"18\">\u041d\u0418\u041b<\/td>\n<td>\u041d\/\u0414<\/td>\n<td>\u041d\/\u0414<\/td>\n<td>\u041d\/\u0414<\/td>\n<td>\u041d\u0418\u041e\u041a\u0420 \u0441 \u043f\u043e\u0442\u0435\u043d\u0446\u0438\u0430\u043b\u043e\u043c \u043a\u043e\u043c\u043c\u0435\u0440\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u043e\u0432\u0430\u043d\u0438\u044f<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<ul>\n<\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-293eb72 elementor-widget elementor-widget-text-editor\" data-id=\"293eb72\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u041f\u0440\u0438\u0432\u0435\u0434\u0435\u043d\u043d\u044b\u0435 \u0437\u0434\u0435\u0441\u044c \u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f Half-pitch \u044f\u0432\u043b\u044f\u044e\u0442\u0441\u044f \u0444\u0430\u043a\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u043c\u0438 \u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f\u043c\u0438 \u0434\u043b\u044f \u044d\u0442\u0438\u0445 \u0441\u0438\u0441\u0442\u0435\u043c, \u0430 \u043d\u0435 \u0438\u0445 \u0442\u0435\u043e\u0440\u0435\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u043c\u0438 \u043f\u0440\u0435\u0434\u0435\u043b\u0430\u043c\u0438.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fd486e7 elementor-widget elementor-widget-text-editor\" data-id=\"fd486e7\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><span style=\"font-weight: bold;\">\u0420\u0430\u0441\u0448\u0438\u0440\u0435\u043d\u043d\u043e\u0435 \u0447\u0442\u0435\u043d\u0438\u0435:<\/span><\/p><ul style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><li style=\"font-size: 16px;\"><a style=\"font-size: 1rem;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d0%bd%d0%b0%d0%bd%d0%be%d0%b8%d0%bc%d0%bf%d1%80%d0%b8%d0%bd%d1%82\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u0424\u043e\u0442\u043e\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f - \u041d\u0430\u043d\u043e\u0438\u043c\u043f\u0440\u0438\u043d\u0442\u043d\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d0%b2%d0%be%d0%bb%d0%be%d0%ba%d0%bd%d0%be_%d0%bb%d0%b8%d1%82%d0%be%d0%b3%d1%80%d0%b0%d1%84%d0%b8%d1%8f\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f - \u0444\u043e\u043a\u0443\u0441 \u043d\u0430 \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u044b\u0445 \u0424\u0418\u0411\u0430\u0445<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d1%8d%d0%bb%d0%b5%d0%ba%d1%82%d1%80%d0%be%d0%bd%d0%bd%d0%be-%d0%bb%d1%83%d1%87%d0%b5%d0%b2%d0%b0%d1%8f_%d0%bb\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u041b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f - \u042d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0_%d1%82%d1%80%d0%b0%d0%b2%d0%bb%d0%b5%d0%bd%d0%b8%d0%b5\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u0424\u043e\u0442\u043e\u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f - \u041e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u043b\u0438\u0442\u043e\u0433\u0440\u0430\u0444\u0438\u044f\u00a0\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0_%d1%82%d1%80%d0%b0%d0%b2%d0%bb%d0%b5%d0%bd%d0%b8%d0%b5\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d1%8d%d0%bf%d0%b8%d1%82%d0%b0%d0%ba%d1%81%d0%b8%d1%8f\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u043f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0430 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a - \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f\u00a0\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-size: 1rem; font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f_%d0%bf%d0%b2%d0%b4\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u041f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0430 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a - PVD\u00a0<\/a><\/li><li style=\"font-size: 16px;\"><a style=\"font-style: inherit; font-weight: inherit;\" href=\"https:\/\/www.accscicn.com\/ru\/%d1%80%d0%b5%d1%88%d0%b5%d0%bd%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/anofabrication_cvd\/\" target=\"_blank\" rel=\"noopener\">\u041c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 | \u043f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0430 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a - C<\/a><span style=\"font-style: inherit; font-weight: inherit; background-color: var( --e-global-color-astglobalcolor5 );\">\u0412\u0414<\/span><\/li><\/ul>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9054b9f elementor-widget elementor-widget-text-editor\" data-id=\"9054b9f\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>\u041c\u044b \u043f\u0440\u0435\u0434\u043b\u0430\u0433\u0430\u0435\u043c \u0431\u044b\u0441\u0442\u0440\u044b\u0439<span style=\"color: #0e2143;\"><b><a style=\"color: #0e2143;\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/\" target=\"_blank\" rel=\"noopener\">\u0423\u0441\u043b\u0443\u0433\u0438 \u043f\u043e \u043f\u0440\u043e\u0435\u043a\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044e \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432 \u041c\u042d\u041c\u0421 \/ \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440<\/a>, <\/b><\/span>\u041d\u0435 \u0441\u0442\u0435\u0441\u043d\u044f\u0439\u0442\u0435\u0441\u044c \u043e\u0441\u0442\u0430\u0432\u0438\u0442\u044c \u0441\u043e\u043e\u0431\u0449\u0435\u043d\u0438\u0435 \u0441 \u0432\u0430\u0448\u0438\u043c \u0437\u0430\u043f\u0440\u043e\u0441\u043e\u043c.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f6b4f13 elementor-widget elementor-widget-wpforms\" data-id=\"f6b4f13\" data-element_type=\"widget\" data-widget_type=\"wpforms.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div class=\"wpforms-container wpforms-container-full\" id=\"wpforms-26998\"><form id=\"wpforms-form-26998\" class=\"wpforms-validate wpforms-form wpforms-ajax-form\" data-formid=\"26998\" method=\"post\" enctype=\"multipart\/form-data\" action=\"\/ru\/wp-json\/wp\/v2\/posts\/26856\" data-token=\"284c9fcdfc4a215e526dee0cddf8d957\" data-trp-original-action=\"\/ru\/wp-json\/wp\/v2\/posts\/26856\"><noscript class=\"wpforms-error-noscript\">\u0414\u043b\u044f \u0437\u0430\u043f\u043e\u043b\u043d\u0435\u043d\u0438\u044f \u0434\u0430\u043d\u043d\u043e\u0439 \u0444\u043e\u0440\u043c\u044b \u0432\u043a\u043b\u044e\u0447\u0438\u0442\u0435 JavaScript \u0432 \u0431\u0440\u0430\u0443\u0437\u0435\u0440\u0435.<\/noscript><div class=\"wpforms-field-container\"><div id=\"wpforms-26998-field_4-container\" class=\"wpforms-field wpforms-field-email\" data-field-id=\"4\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_4\">\u7535\u90ae <span class=\"wpforms-required-label\">*<\/span><\/label><div class=\"wpforms-field-row wpforms-field-large\"><div class=\"wpforms-field-row-block wpforms-one-half wpforms-first\"><input type=\"email\" id=\"wpforms-26998-field_4\" class=\"wpforms-field-required wpforms-field-email-primary\" name=\"wpforms[fields][4][primary]\" required><label for=\"wpforms-26998-field_4\" class=\"wpforms-field-sublabel after\">\u042d\u043b. \u043f\u043e\u0447\u0442\u0430<\/label><\/div><div class=\"wpforms-field-row-block wpforms-one-half\"><input type=\"email\" id=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-email-secondary wpforms-field-required\" data-rule-confirm=\"#wpforms-26998-field_4\" name=\"wpforms[fields][4][secondary]\" required><label for=\"wpforms-26998-field_4-secondary\" class=\"wpforms-field-sublabel after\">\u041f\u043e\u0434\u0442\u0432\u0435\u0440\u0434\u0438\u0442\u0435 \u044d\u043b. \u043f\u043e\u0447\u0442\u0443<\/label><\/div><\/div><\/div><div id=\"wpforms-26998-field_2-container\" class=\"wpforms-field wpforms-field-textarea\" data-field-id=\"2\"><label class=\"wpforms-field-label\" for=\"wpforms-26998-field_2\">\u0422\u0440\u0435\u0431\u043e\u0432\u0430\u043d\u0438\u044f \u043a \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435<\/label><textarea id=\"wpforms-26998-field_2\" class=\"wpforms-field-small\" name=\"wpforms[fields][2]\" ><\/textarea><\/div><\/div><div class=\"wpforms-submit-container\"><input type=\"hidden\" name=\"wpforms[id]\" value=\"26998\"><input type=\"hidden\" name=\"wpforms[author]\" value=\"1\"><button type=\"submit\" name=\"wpforms[submit]\" id=\"wpforms-submit-26998\" class=\"wpforms-submit\" data-alt-text=\"\u53d1\u9001\u4e2d\u2026\" data-submit-text=\"\u63d0\u4ea4\" aria-live=\"assertive\" value=\"wpforms-submit\">\u041e\u0442\u043f\u0440\u0430\u0432\u0438\u0442\u044c<\/button><img decoding=\"async\" src=\"https:\/\/www.accscicn.com\/wp-content\/plugins\/wpforms\/assets\/images\/submit-spin.svg\" class=\"wpforms-submit-spinner\" style=\"display: none;\" width=\"26\" height=\"26\" alt=\"\u0417\u0430\u0433\u0440\u0443\u0437\u043a\u0430\"><\/div><input type=\"hidden\" name=\"trp-form-language\" value=\"ru\"\/><\/form><\/div>  <!-- .wpforms-container -->\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-50df0742\" data-id=\"50df0742\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6bb2f358 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"6bb2f358\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.21.0 - 20-05-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span 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category-nanofabrication tag-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bf%d1%80%d0%be%d0%b4%d1%83%d0%ba%d1%82\/2pp-%d0%b4%d0%b2%d1%83%d1%85%d1%84%d0%be%d1%82%d0%be%d0%bd%d0%bd%d0%b0%d1%8f-%d0%bf%d0%be%d0%bb%d0%b8%d0%bc%d0%b5%d1%80%d0%b8%d0%b7%d0%b0%d1%86%d0%b8%d1%8f\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"259\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png\" class=\"attachment-medium size-medium wp-image-29772\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-300x259.png 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217-14x12.png 14w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2024\/05\/\u5fae\u900f\u955c\u9635\u5217.png 434w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ru\/%d0%bf%d1%80%d0%be%d0%b4%d1%83%d0%ba%d1%82\/2pp-%d0%b4%d0%b2%d1%83%d1%85%d1%84%d0%be%d1%82%d0%be%d0%bd%d0%bd%d0%b0%d1%8f-%d0%bf%d0%be%d0%bb%d0%b8%d0%bc%d0%b5%d1%80%d0%b8%d0%b7%d0%b0%d1%86%d0%b8%d1%8f\/\" >\n\t\t\t\t\u0412\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 3D-\u043f\u0435\u0447\u0430\u0442\u0438 \u0441 \u0434\u0432\u0443\u0445\u0444\u043e\u0442\u043e\u043d\u043d\u043e\u0439 \u043f\u043e\u043b\u0438\u043c\u0435\u0440\u0438\u0437\u0430\u0446\u0438\u0435\u0439\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u9ad8\u7cbe\u5ea6\u53cc\u5149\u5b50\u4e09\u7ef4\u6fc0\u5149\u76f4\u5199\u7cfb\u7edf* \u53cc\u5149\u5b50\u805a<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bf%d1%80%d0%be%d0%b4%d1%83%d0%ba%d1%82\/2pp-%d0%b4%d0%b2%d1%83%d1%85%d1%84%d0%be%d1%82%d0%be%d0%bd%d0%bd%d0%b0%d1%8f-%d0%bf%d0%be%d0%bb%d0%b8%d0%bc%d0%b5%d1%80%d0%b8%d0%b7%d0%b0%d1%86%d0%b8%d1%8f\/\" aria-label=\"\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435 \u043e \u0412\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 3D-\u043f\u0435\u0447\u0430\u0442\u0438 \u0441 \u0434\u0432\u0443\u0445\u0444\u043e\u0442\u043e\u043d\u043d\u043e\u0439 \u043f\u043e\u043b\u0438\u043c\u0435\u0440\u0438\u0437\u0430\u0446\u0438\u0435\u0439\" tabindex=\"-1\" >\n\t\t\t\u0427\u0438\u0442\u0430\u0442\u044c \u0434\u0430\u043b\u0435\u0435 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28732 page type-page status-publish has-post-thumbnail hentry category-nanofabrication\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bc%d0%b0%d1%81%d1%81%d0%b8%d0%b2%d1%8b-%d0%bc%d0%b8%d0%ba%d1%80%d0%be%d0%bb%d0%b8%d0%bd%d0%b7\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"203\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg\" class=\"attachment-medium size-medium wp-image-28741\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-300x203.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217-768x520.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/\u5fae\u900f\u955c\u9635\u5217.jpg 1018w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bc%d0%b0%d1%81%d1%81%d0%b8%d0%b2%d1%8b-%d0%bc%d0%b8%d0%ba%d1%80%d0%be%d0%bb%d0%b8%d0%bd%d0%b7\/\" >\n\t\t\t\t\u041c\u0430\u0441\u0441\u0438\u0432\u044b \u043c\u0438\u043a\u0440\u043e\u043b\u0438\u043d\u0437 \u0434\u043b\u044f \u043c\u0438\u043a\u0440\u043e- \u0438 \u043d\u0430\u043d\u043e\u043e\u043f\u0442\u0438\u043a\u0438\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u5fae\u900f\u955c\u9635\u5217(Microlens Arra<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bc%d0%b0%d1%81%d1%81%d0%b8%d0%b2%d1%8b-%d0%bc%d0%b8%d0%ba%d1%80%d0%be%d0%bb%d0%b8%d0%bd%d0%b7\/\" aria-label=\"\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435 \u043e \u041c\u0430\u0441\u0441\u0438\u0432\u044b \u043c\u0438\u043a\u0440\u043e\u043b\u0438\u043d\u0437 \u0434\u043b\u044f \u043c\u0438\u043a\u0440\u043e\u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0440\u043e\u0432\" tabindex=\"-1\" >\n\t\t\t\u0427\u0438\u0442\u0430\u0442\u044c \u0434\u0430\u043b\u0435\u0435 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<article class=\"elementor-post elementor-grid-item post-28462 page type-page status-publish has-post-thumbnail hentry category-nanofabrication tag-nanoimprint-lithography\">\n\t\t\t\t<a class=\"elementor-post__thumbnail__link\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d0%b8%d0%bc%d0%bf%d1%80%d0%b8%d0%bd%d1%82%d0%bd%d0%b0%d1%8f-%d0%bb%d0%b8%d1%82%d0%be%d0%b3%d1%80%d0%b0%d1%84%d0%b8%d1%8f\/\" tabindex=\"-1\" >\n\t\t\t<div class=\"elementor-post__thumbnail\"><img loading=\"lazy\" decoding=\"async\" width=\"300\" height=\"225\" src=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg\" class=\"attachment-medium size-medium wp-image-28516\" alt=\"\" srcset=\"https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-300x225.jpg 300w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid-768x576.jpg 768w, https:\/\/www.accscicn.com\/wp-content\/uploads\/2022\/10\/2D-hexagonal-grid.jpg 1024w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/div>\n\t\t<\/a>\n\t\t\t\t<div class=\"elementor-post__text\">\n\t\t\t\t<h3 class=\"elementor-post__title\">\n\t\t\t<a href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d0%b8%d0%bc%d0%bf%d1%80%d0%b8%d0%bd%d1%82%d0%bd%d0%b0%d1%8f-%d0%bb%d0%b8%d1%82%d0%be%d0%b3%d1%80%d0%b0%d1%84%d0%b8%d1%8f\/\" >\n\t\t\t\t\u041d\u0430\u043d\u043e\u0438\u043c\u043f\u0440\u0438\u043d\u0442\u0438\u043d\u0433 (NIL) \u0421\u0443\u0431\u043f\u043e\u0434\u0440\u044f\u0434\u043d\u044b\u0435 \u0440\u0430\u0431\u043e\u0442\u044b\t\t\t<\/a>\n\t\t<\/h3>\n\t\t\t\t<div class=\"elementor-post__excerpt\">\n\t\t\t<p>\u7eb3\u7c73\u538b\u5370\u6280\u672f\uff08NIL\uff09 \u7eb3\u7c73\u538b\u5370\u6280\u672f\uff08N<\/p>\n\t\t<\/div>\n\t\t\n\t\t<a class=\"elementor-post__read-more\" href=\"https:\/\/www.accscicn.com\/ru\/%d0%bd%d0%b0%d0%bd%d0%be%d1%84%d0%b0%d0%b1%d1%80%d0%b8%d0%ba%d0%b0%d1%86%d0%b8%d1%8f\/%d0%bd%d0%b0%d0%bd%d0%be%d0%b8%d0%bc%d0%bf%d1%80%d0%b8%d0%bd%d1%82%d0%bd%d0%b0%d1%8f-%d0%bb%d0%b8%d1%82%d0%be%d0%b3%d1%80%d0%b0%d1%84%d0%b8%d1%8f\/\" aria-label=\"\u041f\u043e\u0434\u0440\u043e\u0431\u043d\u0435\u0435 \u043e \u041d\u0430\u043d\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430\u4e28 \u041d\u0430\u043d\u043e\u0438\u043c\u043f\u0440\u0438\u043d\u0442\u0438\u043d\u0433 (NIL) \u0413\u0435\u043d\u0435\u0440\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438\" tabindex=\"-1\" >\n\t\t\t\u0427\u0438\u0442\u0430\u0442\u044c \u0434\u0430\u043b\u0435\u0435 \"\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\t\t\t<\/article>\n\t\t\t\t<\/div>\n\t\t\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7eb3\u52a0\u5de5 | \u8584\u819c\u6c89\u79ef\u3001\u5149\u523b\u3001\u523b\u8680\u603b\u89c8  [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center 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