Micro and Nano Processing | Photolithography - Optical Lithography
微纳加工 | 光刻-光学光刻篇 在纳米和微加工技术的背景下,光刻用于在基板表面上应用图案,以便随后将其转移到下 […]
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微纳加工 | 光刻-光学光刻篇 在纳米和微加工技术的背景下,光刻用于在基板表面上应用图案,以便随后将其转移到下 […]
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Micronanofabrication | Etching Once the resist film has been patterned by photolithography, a chemical process is used to transfer the pattern to the substrate or film below. This is called pattern transfer
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Thin Film Preparation - Epitaxy Most materials exist in an amorphous, crystalline or polycrystalline state. Their mechanical, optical, thermal and electrical properties also depend on their state
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Chemical methods can create films with excellent uniformity, coverage, and stoichiometry, but they require different gases, and in some cases, each film has a different gas.
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Thin Film Preparation - PVD Until now, the most common physical methods were evaporation and sputtering. Both are phase methods in which the source material is transferred to the substrate one by one in situ.
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Micro/Nano Fabrication Services - Quotation Micro/Nano Fabrication Nowadays, micro/nano fabrication and micro/nano measurement technologies are widely used in the information industry, industrial
Micro and Nano Processing | MEMS Devices | LIGA Electron Beam Lithography Nanoimprinting Read More »