RF MEMS微纳加工制造
Micro and Nano Processing
如今，随着移动终端的发展，利用MEMS技术制作的射频器件更具易集成和灵活性，适合现代射频微波领域对低损耗、小体积、低成本器件的要求。为此，我们上线微纳加工打样验证服务，以求帮助客户最快实现产品验证。
Drawing optimization and process determination
In order to best achieve this, we will first evaluate your drawings, provide suggestions for drawing modifications, and recommend the appropriate process and equipment for processing. In addition, our company promises to destroy the records of your drawing files in the local computer after the delivery is completed to achieve absolute protection of customer privacy.
Structural testing characterization report
In order to guarantee the quality of the delivery, we provide a quality report on the finished product (usually an optical inspection report). But at the same time, we additionally provide measurements of surface geometric parameters and mechanical characteristics of the finished product. This covers tests on the three-dimensional dimensions of the components, contours, film thickness, surface roughness, tensile, transmission characteristics, durability, etc.
Micro and nano structures
结构单元
电感
结构单元
移相器
结构单元
匹配网络
结构单元
可变电容
结构单元
谐振器
结构单元
天线
结构单元
开关
结构单元
滤波器
Our Capabilities
Processes
Lithography (Photolithography)
Electron beam lithography (EBL)UV lithographyProximity/contact lithography, stepper lithography, etc.
Processes
Two-Photon Polymerization 3D Printing (TPP)
Processes
Etching (Etching)
Focused ion beam etching, deep reactive ion etching, inductively coupled plasma etching, ion beam sputtering etching, etc.
Processes
Nanoimprinting(NIL)
Nano-thermal embossing, UV-curable embossing, micro-contact printing (soft etching)
Processes
Coating
Magnetron sputteringAtomic layer deposition.Ion beam sputtering, ,Plasma chemical vapor deposition, etc.
Processes
Electroforming (LIGA)
Test characterization
Detection means
Optical microscopy (Microscopy)
Detection means
Profilometer (Profilometer)
Detection means
Sheet Resistance Measurement
Detection means
Hall measurement )
Applications
Micro and Nano Applications
卫星通信
Micro and Nano Applications
物联网
Micro and Nano Applications
导航终端
Micro and Nano Applications