RF MEMS微纳加工制造

networks
Services - Quotes

Micro and Nano Processing

如今,随着移动终端的发展,利用MEMS技术制作的射频器件更具易集成和灵活性,适合现代射频微波领域对低损耗、小体积、低成本器件的要求。为此,我们上线微纳加工打样验证服务,以求帮助客户最快实现产品验证。

Microfluidic chips
Services - Evaluation Consulting

Drawing optimization and process determination

In order to best achieve this, we will first evaluate your drawings, provide suggestions for drawing modifications, and recommend the appropriate process and equipment for processing. In addition, our company promises to destroy the records of your drawing files in the local computer after the delivery is completed to achieve absolute protection of customer privacy.

Detection and characterization 1x1
Services - Delivery Guarantee

Structural testing characterization report

In order to guarantee the quality of the delivery, we provide a quality report on the finished product (usually an optical inspection report). But at the same time, we additionally provide measurements of surface geometric parameters and mechanical characteristics of the finished product. This covers tests on the three-dimensional dimensions of the components, contours, film thickness, surface roughness, tensile, transmission characteristics, durability, etc.

Micro and nano structures

rfMEMS

结构单元

电感

结构单元

移相器

结构单元

匹配网络

结构单元

可变电容

结构单元

谐振器

结构单元

天线

结构单元

开关

结构单元

滤波器

Our Capabilities

Electron beam lithography (EBL)UV lithographyProximity/contact lithography, stepper lithography, etc.

Processes

Two-Photon Polymerization 3D Printing (TPP)

Focused ion beam etching, deep reactive ion etching, inductively coupled plasma etching, ion beam sputtering etching, etc.

Nano-thermal embossing, UV-curable embossing, micro-contact printing (soft etching)

Processes

Coating

Magnetron sputteringAtomic layer deposition.Ion beam sputtering, ,Plasma chemical vapor deposition, etc.

Test characterization

Detection means

Optical microscopy (Microscopy)

Detection means

Profilometer (Profilometer)

Detection means

Sheet Resistance Measurement

Detection means

Hall measurement )

Applications

Micro and Nano Applications

卫星通信

Micro and Nano Applications

物联网

Micro and Nano Applications

导航终端

Micro and Nano Applications

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